CN116547510A - 导热仪 - Google Patents

导热仪 Download PDF

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Publication number
CN116547510A
CN116547510A CN202180076545.9A CN202180076545A CN116547510A CN 116547510 A CN116547510 A CN 116547510A CN 202180076545 A CN202180076545 A CN 202180076545A CN 116547510 A CN116547510 A CN 116547510A
Authority
CN
China
Prior art keywords
temperature
sensor
chamber
heater
chamber wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180076545.9A
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English (en)
Chinese (zh)
Inventor
G·A·布鲁克
T·C·斯文尼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of CN116547510A publication Critical patent/CN116547510A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/002—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by thermal means, e.g. hypsometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/14—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured using thermocouples

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Drying Of Solid Materials (AREA)
CN202180076545.9A 2020-11-16 2021-11-03 导热仪 Pending CN116547510A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063114287P 2020-11-16 2020-11-16
US63/114,287 2020-11-16
PCT/US2021/072211 WO2022104316A1 (en) 2020-11-16 2021-11-03 Thermal conductivity gauge

Publications (1)

Publication Number Publication Date
CN116547510A true CN116547510A (zh) 2023-08-04

Family

ID=78806755

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180076545.9A Pending CN116547510A (zh) 2020-11-16 2021-11-03 导热仪

Country Status (7)

Country Link
US (1) US11808643B2 (enExample)
EP (1) EP4244590A1 (enExample)
JP (1) JP2023550350A (enExample)
KR (1) KR20230105680A (enExample)
CN (1) CN116547510A (enExample)
TW (1) TWI911324B (enExample)
WO (1) WO2022104316A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2601179A (en) * 2020-11-23 2022-05-25 Edwards Ltd Thermal conductivity vacuum gauge assembly
US12123794B2 (en) * 2022-10-11 2024-10-22 Mks Instruments, Inc. Pirani gauge with model of power dissipation
WO2025087805A1 (de) * 2023-10-26 2025-05-01 Ph-Instruments GmbH Druckmessvorrichtung
DE102023131656B9 (de) * 2023-11-14 2026-03-26 Vacom Vakuum Komponenten & Messtechnik Gmbh Verfahren zum Betreiben eines Pirani-Drucksensors und Anordnung zum Betreiben des Pirani-Drucksensors
DE102024108521B4 (de) * 2024-03-26 2026-01-08 Vacom Vakuum Komponenten & Messtechnik Gmbh Verfahren zum Betreiben eines Pirani-Drucksensors und Vorrichtung

Citations (10)

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Publication number Priority date Publication date Assignee Title
JPH05281073A (ja) * 1992-04-03 1993-10-29 Ulvac Japan Ltd ピラニ真空計
JPH0666662A (ja) * 1992-04-27 1994-03-11 Ulvac Japan Ltd ピラニ真空計
JP2010151622A (ja) * 2008-12-25 2010-07-08 Canon Anelva Corp 熱伝導型真空計及びそれを備えた真空容器を有する真空処理装置
JP2010210498A (ja) * 2009-03-11 2010-09-24 Honda Motor Co Ltd 車両用圧力センサ
US20140026640A1 (en) * 2012-07-30 2014-01-30 Heinz Plöchinger Fluid property sensor with heat loss compensation and operating method thereof
JP2014126503A (ja) * 2012-12-27 2014-07-07 Azbil Corp 静電容量型圧力センサ
CA3007375A1 (en) * 2017-06-15 2018-12-15 Kevin Kornelsen Calibration-less micro-fabricated vacuum gauge devices and method for measuring pressure
JP2019007906A (ja) * 2017-06-28 2019-01-17 アズビル株式会社 静電容量型圧力センサ
JP2019100758A (ja) * 2017-11-29 2019-06-24 アズビル株式会社 真空室異常検出装置および隔膜真空計並びに真空室異常検出方法
TW201947200A (zh) * 2018-05-09 2019-12-16 美商Ｍｋｓ儀器股份有限公司 用於部分壓力偵測的方法及設備

Family Cites Families (16)

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TW457367B (en) * 2000-09-01 2001-10-01 Winbond Electronics Corp Protection tube structure of vacuum pressure gauge
US6973834B1 (en) 2004-10-18 2005-12-13 A.T.C.T. Advanced Thermal Chips Technologies Ltd. Method and apparatus for measuring pressure of a fluid medium and applications thereof
US7207224B2 (en) 2005-06-10 2007-04-24 Brooks Automation, Inc. Wide-range combination vacuum gauge
US7331237B2 (en) 2006-02-01 2008-02-19 Brooks Automation, Inc. Technique for improving Pirani gauge temperature compensation over its full pressure range
JP4995617B2 (ja) * 2006-08-21 2012-08-08 光照 木村 熱伝導型センサとこれを用いた熱伝導型計測装置
US7613586B2 (en) 2007-01-16 2009-11-03 Honeywell International Inc. Thermal vacuum gauge
JP4962908B2 (ja) * 2007-03-23 2012-06-27 住友電気工業株式会社 真空ゲージを備える屋外設置器具
US8171801B2 (en) 2008-12-19 2012-05-08 Institut National D'optique Micro-thermistor gas pressure sensor
US8893554B2 (en) 2012-11-20 2014-11-25 Hamilton Sundstrand Corporation System and method for passively compensating pressure sensors
JP6261463B2 (ja) 2014-06-27 2018-01-17 東京エレクトロン株式会社 圧力測定装置および圧力測定方法
CN205620073U (zh) * 2016-05-20 2016-10-05 合肥鑫晟光电科技有限公司 一种压力监测设备
WO2018194925A1 (en) 2017-04-21 2018-10-25 Mks Instruments, Inc. End point detection for lyophilization
US10845263B2 (en) 2018-04-17 2020-11-24 Mks Instruments, Inc. Thermal conductivity gauge
EP3690417A1 (en) 2019-02-01 2020-08-05 Sens4 A/S Apparatus for heat-loss vacuum measurement with improved temperature compensation and extended measurement range
US11428596B2 (en) * 2020-09-16 2022-08-30 Wisenstech Ltd. Vacuum gauge with an extended dynamic measurement range
JP7674147B2 (ja) * 2021-05-17 2025-05-09 アズビル株式会社 隔膜真空計

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05281073A (ja) * 1992-04-03 1993-10-29 Ulvac Japan Ltd ピラニ真空計
JPH0666662A (ja) * 1992-04-27 1994-03-11 Ulvac Japan Ltd ピラニ真空計
JP2010151622A (ja) * 2008-12-25 2010-07-08 Canon Anelva Corp 熱伝導型真空計及びそれを備えた真空容器を有する真空処理装置
JP2010210498A (ja) * 2009-03-11 2010-09-24 Honda Motor Co Ltd 車両用圧力センサ
US20140026640A1 (en) * 2012-07-30 2014-01-30 Heinz Plöchinger Fluid property sensor with heat loss compensation and operating method thereof
JP2014126503A (ja) * 2012-12-27 2014-07-07 Azbil Corp 静電容量型圧力センサ
CA3007375A1 (en) * 2017-06-15 2018-12-15 Kevin Kornelsen Calibration-less micro-fabricated vacuum gauge devices and method for measuring pressure
JP2019007906A (ja) * 2017-06-28 2019-01-17 アズビル株式会社 静電容量型圧力センサ
JP2019100758A (ja) * 2017-11-29 2019-06-24 アズビル株式会社 真空室異常検出装置および隔膜真空計並びに真空室異常検出方法
TW201947200A (zh) * 2018-05-09 2019-12-16 美商Ｍｋｓ儀器股份有限公司 用於部分壓力偵測的方法及設備

Also Published As

Publication number Publication date
US20220155172A1 (en) 2022-05-19
EP4244590A1 (en) 2023-09-20
JP2023550350A (ja) 2023-12-01
TW202235836A (zh) 2022-09-16
WO2022104316A1 (en) 2022-05-19
TWI911324B (zh) 2026-01-11
US11808643B2 (en) 2023-11-07
KR20230105680A (ko) 2023-07-11

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Legal Events

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PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information

Country or region after: U.S.A.

Address after: Massachusetts, USA

Applicant after: MKS Co.,Ltd.

Address before: Massachusetts, USA

Applicant before: MKS Instruments, Inc.

Country or region before: U.S.A.

CB02 Change of applicant information