TWI911324B - 導熱壓力計及導熱壓力測量方法 - Google Patents

導熱壓力計及導熱壓力測量方法

Info

Publication number
TWI911324B
TWI911324B TW110141843A TW110141843A TWI911324B TW I911324 B TWI911324 B TW I911324B TW 110141843 A TW110141843 A TW 110141843A TW 110141843 A TW110141843 A TW 110141843A TW I911324 B TWI911324 B TW I911324B
Authority
TW
Taiwan
Prior art keywords
temperature
sensor
chamber wall
chamber
heater
Prior art date
Application number
TW110141843A
Other languages
English (en)
Chinese (zh)
Other versions
TW202235836A (zh
Inventor
傑爾多 布魯克
提姆西 史維尼
Original Assignee
美商Ｍｋｓ儀器股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商Ｍｋｓ儀器股份有限公司 filed Critical 美商Ｍｋｓ儀器股份有限公司
Publication of TW202235836A publication Critical patent/TW202235836A/zh
Application granted granted Critical
Publication of TWI911324B publication Critical patent/TWI911324B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/002—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by thermal means, e.g. hypsometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/14—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured using thermocouples

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Drying Of Solid Materials (AREA)
TW110141843A 2020-11-16 2021-11-10 導熱壓力計及導熱壓力測量方法 TWI911324B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202063114287P 2020-11-16 2020-11-16
US63/114,287 2020-11-16

Publications (2)

Publication Number Publication Date
TW202235836A TW202235836A (zh) 2022-09-16
TWI911324B true TWI911324B (zh) 2026-01-11

Family

ID=78806755

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110141843A TWI911324B (zh) 2020-11-16 2021-11-10 導熱壓力計及導熱壓力測量方法

Country Status (7)

Country Link
US (1) US11808643B2 (enExample)
EP (1) EP4244590A1 (enExample)
JP (1) JP2023550350A (enExample)
KR (1) KR20230105680A (enExample)
CN (1) CN116547510A (enExample)
TW (1) TWI911324B (enExample)
WO (1) WO2022104316A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2601179A (en) * 2020-11-23 2022-05-25 Edwards Ltd Thermal conductivity vacuum gauge assembly
US12123794B2 (en) * 2022-10-11 2024-10-22 Mks Instruments, Inc. Pirani gauge with model of power dissipation
WO2025087805A1 (de) * 2023-10-26 2025-05-01 Ph-Instruments GmbH Druckmessvorrichtung
DE102023131656B9 (de) * 2023-11-14 2026-03-26 Vacom Vakuum Komponenten & Messtechnik Gmbh Verfahren zum Betreiben eines Pirani-Drucksensors und Anordnung zum Betreiben des Pirani-Drucksensors
DE102024108521B4 (de) * 2024-03-26 2026-01-08 Vacom Vakuum Komponenten & Messtechnik Gmbh Verfahren zum Betreiben eines Pirani-Drucksensors und Vorrichtung

Citations (4)

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JPH05281073A (ja) * 1992-04-03 1993-10-29 Ulvac Japan Ltd ピラニ真空計
TW457367B (en) * 2000-09-01 2001-10-01 Winbond Electronics Corp Protection tube structure of vacuum pressure gauge
US20140026640A1 (en) * 2012-07-30 2014-01-30 Heinz Plöchinger Fluid property sensor with heat loss compensation and operating method thereof
CN205620073U (zh) * 2016-05-20 2016-10-05 合肥鑫晟光电科技有限公司 一种压力监测设备

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JP3188752B2 (ja) * 1992-04-27 2001-07-16 日本真空技術株式会社 ピラニ真空計
US6973834B1 (en) 2004-10-18 2005-12-13 A.T.C.T. Advanced Thermal Chips Technologies Ltd. Method and apparatus for measuring pressure of a fluid medium and applications thereof
US7207224B2 (en) 2005-06-10 2007-04-24 Brooks Automation, Inc. Wide-range combination vacuum gauge
US7331237B2 (en) 2006-02-01 2008-02-19 Brooks Automation, Inc. Technique for improving Pirani gauge temperature compensation over its full pressure range
JP4995617B2 (ja) * 2006-08-21 2012-08-08 光照 木村 熱伝導型センサとこれを用いた熱伝導型計測装置
US7613586B2 (en) 2007-01-16 2009-11-03 Honeywell International Inc. Thermal vacuum gauge
JP4962908B2 (ja) * 2007-03-23 2012-06-27 住友電気工業株式会社 真空ゲージを備える屋外設置器具
US8171801B2 (en) 2008-12-19 2012-05-08 Institut National D'optique Micro-thermistor gas pressure sensor
JP2010151622A (ja) * 2008-12-25 2010-07-08 Canon Anelva Corp 熱伝導型真空計及びそれを備えた真空容器を有する真空処理装置
JP5264572B2 (ja) * 2009-03-11 2013-08-14 本田技研工業株式会社 車両用圧力センサ
US8893554B2 (en) 2012-11-20 2014-11-25 Hamilton Sundstrand Corporation System and method for passively compensating pressure sensors
JP2014126503A (ja) * 2012-12-27 2014-07-07 Azbil Corp 静電容量型圧力センサ
JP6261463B2 (ja) 2014-06-27 2018-01-17 東京エレクトロン株式会社 圧力測定装置および圧力測定方法
WO2018194925A1 (en) 2017-04-21 2018-10-25 Mks Instruments, Inc. End point detection for lyophilization
US10753816B2 (en) 2017-06-15 2020-08-25 Kevin Kornelsen Calibration-less micro-fabricated vacuum gauge devices and method for measuring pressure
JP6843708B2 (ja) * 2017-06-28 2021-03-17 アズビル株式会社 静電容量型圧力センサ
JP6937673B2 (ja) * 2017-11-29 2021-09-22 アズビル株式会社 真空室異常検出装置および隔膜真空計並びに真空室異常検出方法
US10845263B2 (en) 2018-04-17 2020-11-24 Mks Instruments, Inc. Thermal conductivity gauge
US10914717B2 (en) * 2018-05-09 2021-02-09 Mks Instruments, Inc. Method and apparatus for partial pressure detection
EP3690417A1 (en) 2019-02-01 2020-08-05 Sens4 A/S Apparatus for heat-loss vacuum measurement with improved temperature compensation and extended measurement range
US11428596B2 (en) * 2020-09-16 2022-08-30 Wisenstech Ltd. Vacuum gauge with an extended dynamic measurement range
JP7674147B2 (ja) * 2021-05-17 2025-05-09 アズビル株式会社 隔膜真空計

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05281073A (ja) * 1992-04-03 1993-10-29 Ulvac Japan Ltd ピラニ真空計
TW457367B (en) * 2000-09-01 2001-10-01 Winbond Electronics Corp Protection tube structure of vacuum pressure gauge
US20140026640A1 (en) * 2012-07-30 2014-01-30 Heinz Plöchinger Fluid property sensor with heat loss compensation and operating method thereof
CN205620073U (zh) * 2016-05-20 2016-10-05 合肥鑫晟光电科技有限公司 一种压力监测设备

Also Published As

Publication number Publication date
US20220155172A1 (en) 2022-05-19
EP4244590A1 (en) 2023-09-20
JP2023550350A (ja) 2023-12-01
TW202235836A (zh) 2022-09-16
CN116547510A (zh) 2023-08-04
WO2022104316A1 (en) 2022-05-19
US11808643B2 (en) 2023-11-07
KR20230105680A (ko) 2023-07-11

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