KR20230105680A - 열전도 게이지 - Google Patents

열전도 게이지 Download PDF

Info

Publication number
KR20230105680A
KR20230105680A KR1020237019113A KR20237019113A KR20230105680A KR 20230105680 A KR20230105680 A KR 20230105680A KR 1020237019113 A KR1020237019113 A KR 1020237019113A KR 20237019113 A KR20237019113 A KR 20237019113A KR 20230105680 A KR20230105680 A KR 20230105680A
Authority
KR
South Korea
Prior art keywords
temperature
sensor
chamber
heater
chamber wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020237019113A
Other languages
English (en)
Korean (ko)
Inventor
제라르도 에이. 브루커
티모시 씨. 스위니
Original Assignee
엠케이에스 인스트루먼츠 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엠케이에스 인스트루먼츠 인코포레이티드 filed Critical 엠케이에스 인스트루먼츠 인코포레이티드
Publication of KR20230105680A publication Critical patent/KR20230105680A/ko
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/002—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by thermal means, e.g. hypsometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/14—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured using thermocouples

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Drying Of Solid Materials (AREA)
KR1020237019113A 2020-11-16 2021-11-03 열전도 게이지 Pending KR20230105680A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063114287P 2020-11-16 2020-11-16
US63/114,287 2020-11-16
PCT/US2021/072211 WO2022104316A1 (en) 2020-11-16 2021-11-03 Thermal conductivity gauge

Publications (1)

Publication Number Publication Date
KR20230105680A true KR20230105680A (ko) 2023-07-11

Family

ID=78806755

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237019113A Pending KR20230105680A (ko) 2020-11-16 2021-11-03 열전도 게이지

Country Status (7)

Country Link
US (1) US11808643B2 (enExample)
EP (1) EP4244590A1 (enExample)
JP (1) JP2023550350A (enExample)
KR (1) KR20230105680A (enExample)
CN (1) CN116547510A (enExample)
TW (1) TWI911324B (enExample)
WO (1) WO2022104316A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2601179A (en) * 2020-11-23 2022-05-25 Edwards Ltd Thermal conductivity vacuum gauge assembly
US12123794B2 (en) * 2022-10-11 2024-10-22 Mks Instruments, Inc. Pirani gauge with model of power dissipation
WO2025087805A1 (de) * 2023-10-26 2025-05-01 Ph-Instruments GmbH Druckmessvorrichtung
DE102023131656B9 (de) * 2023-11-14 2026-03-26 Vacom Vakuum Komponenten & Messtechnik Gmbh Verfahren zum Betreiben eines Pirani-Drucksensors und Anordnung zum Betreiben des Pirani-Drucksensors
DE102024108521B4 (de) * 2024-03-26 2026-01-08 Vacom Vakuum Komponenten & Messtechnik Gmbh Verfahren zum Betreiben eines Pirani-Drucksensors und Vorrichtung

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05281073A (ja) 1992-04-03 1993-10-29 Ulvac Japan Ltd ピラニ真空計
JP3188752B2 (ja) * 1992-04-27 2001-07-16 日本真空技術株式会社 ピラニ真空計
TW457367B (en) * 2000-09-01 2001-10-01 Winbond Electronics Corp Protection tube structure of vacuum pressure gauge
US6973834B1 (en) 2004-10-18 2005-12-13 A.T.C.T. Advanced Thermal Chips Technologies Ltd. Method and apparatus for measuring pressure of a fluid medium and applications thereof
US7207224B2 (en) 2005-06-10 2007-04-24 Brooks Automation, Inc. Wide-range combination vacuum gauge
US7331237B2 (en) 2006-02-01 2008-02-19 Brooks Automation, Inc. Technique for improving Pirani gauge temperature compensation over its full pressure range
JP4995617B2 (ja) * 2006-08-21 2012-08-08 光照 木村 熱伝導型センサとこれを用いた熱伝導型計測装置
US7613586B2 (en) 2007-01-16 2009-11-03 Honeywell International Inc. Thermal vacuum gauge
JP4962908B2 (ja) * 2007-03-23 2012-06-27 住友電気工業株式会社 真空ゲージを備える屋外設置器具
US8171801B2 (en) 2008-12-19 2012-05-08 Institut National D'optique Micro-thermistor gas pressure sensor
JP2010151622A (ja) * 2008-12-25 2010-07-08 Canon Anelva Corp 熱伝導型真空計及びそれを備えた真空容器を有する真空処理装置
JP5264572B2 (ja) * 2009-03-11 2013-08-14 本田技研工業株式会社 車両用圧力センサ
DE102013012434A1 (de) * 2012-07-30 2014-01-30 Heinz Plöchinger Sensoren zur Erfassung von Fluid-Eigenschaften mit Wärmeverlustausgleich und dessen Betriebsweise
US8893554B2 (en) 2012-11-20 2014-11-25 Hamilton Sundstrand Corporation System and method for passively compensating pressure sensors
JP2014126503A (ja) * 2012-12-27 2014-07-07 Azbil Corp 静電容量型圧力センサ
JP6261463B2 (ja) 2014-06-27 2018-01-17 東京エレクトロン株式会社 圧力測定装置および圧力測定方法
CN205620073U (zh) * 2016-05-20 2016-10-05 合肥鑫晟光电科技有限公司 一种压力监测设备
WO2018194925A1 (en) 2017-04-21 2018-10-25 Mks Instruments, Inc. End point detection for lyophilization
US10753816B2 (en) 2017-06-15 2020-08-25 Kevin Kornelsen Calibration-less micro-fabricated vacuum gauge devices and method for measuring pressure
JP6843708B2 (ja) * 2017-06-28 2021-03-17 アズビル株式会社 静電容量型圧力センサ
JP6937673B2 (ja) * 2017-11-29 2021-09-22 アズビル株式会社 真空室異常検出装置および隔膜真空計並びに真空室異常検出方法
US10845263B2 (en) 2018-04-17 2020-11-24 Mks Instruments, Inc. Thermal conductivity gauge
US10914717B2 (en) * 2018-05-09 2021-02-09 Mks Instruments, Inc. Method and apparatus for partial pressure detection
EP3690417A1 (en) 2019-02-01 2020-08-05 Sens4 A/S Apparatus for heat-loss vacuum measurement with improved temperature compensation and extended measurement range
US11428596B2 (en) * 2020-09-16 2022-08-30 Wisenstech Ltd. Vacuum gauge with an extended dynamic measurement range
JP7674147B2 (ja) * 2021-05-17 2025-05-09 アズビル株式会社 隔膜真空計

Also Published As

Publication number Publication date
US20220155172A1 (en) 2022-05-19
EP4244590A1 (en) 2023-09-20
JP2023550350A (ja) 2023-12-01
TW202235836A (zh) 2022-09-16
CN116547510A (zh) 2023-08-04
WO2022104316A1 (en) 2022-05-19
TWI911324B (zh) 2026-01-11
US11808643B2 (en) 2023-11-07

Similar Documents

Publication Publication Date Title
US11808643B2 (en) Thermal conductivity pressure gauge with heated chamber wall
JP5524055B2 (ja) 測定セル構造を較正する方法、および作動させる方法
DK202400047U3 (da) Måler til varmeledningsevne
US5792938A (en) Humidity sensor with differential thermal detection and method of sensing
KR20230132805A (ko) 로드락 게이지
CN114964349B (zh) 一种腔室压力测量装置、测量方法及半导体制造设备
Wenzel et al. The Micro Pirani™: A solid‐state vacuum gauge with wide range
US12123794B2 (en) Pirani gauge with model of power dissipation
JP2001099692A (ja) 液面検出用変換器および液面検出器
Plöchinger Thermal conductivity measurement with “free floating” molecule detector
CN120958315A (zh) 带有膜片和组合加热及测温导体路径的传感器元件
Kangi Temperature controlled transfer standard package for high accuracy pressure transducers with improved temperature stability
KR20040102631A (ko) 진공 측정기

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

R18 Changes to party contact information recorded

Free format text: ST27 STATUS EVENT CODE: A-3-3-R10-R18-OTH-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000