JP2022126795A - 密封型ロボット駆動部 - Google Patents
密封型ロボット駆動部 Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
- H02K5/128—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas using air-gap sleeves or air-gap discs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/12—Stationary parts of the magnetic circuit
- H02K1/14—Stator cores with salient poles
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/12—Stationary parts of the magnetic circuit
- H02K1/14—Stator cores with salient poles
- H02K1/141—Stator cores with salient poles consisting of C-shaped cores
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/12—Stationary parts of the magnetic circuit
- H02K1/14—Stator cores with salient poles
- H02K1/146—Stator cores with salient poles consisting of a generally annular yoke with salient poles
- H02K1/148—Sectional cores
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/22—Rotating parts of the magnetic circuit
- H02K1/24—Rotor cores with salient poles ; Variable reluctance rotors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/22—Rotating parts of the magnetic circuit
- H02K1/24—Rotor cores with salient poles ; Variable reluctance rotors
- H02K1/246—Variable reluctance rotors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
- H02K11/215—Magnetic effect devices, e.g. Hall-effect or magneto-resistive elements
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K19/00—Synchronous motors or generators
- H02K19/02—Synchronous motors
- H02K19/10—Synchronous motors for multi-phase current
- H02K19/103—Motors having windings on the stator and a variable reluctance soft-iron rotor without windings
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/03—Machines characterised by aspects of the air-gap between rotor and stator
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
- Motor Or Generator Frames (AREA)
- Permanent Magnet Type Synchronous Machine (AREA)
- Synchronous Machinery (AREA)
Abstract
Description
本出願は、2013年11月13日に出願された米国仮特許出願第61/903,813号の利益を主張する通常出願であって、その開示内容の全ては、参照により本明細書に組み込まれる。
例示的な実施形態は、概してロボット駆動部、特に、密封型ロボット駆動部に関する。
Claims (28)
- ハウジングと、
前記ハウジングに取り付けられる駆動部と、
前記駆動部に接続される少なくとも1つの搬送アームと
を備える搬送装置であって、前記駆動部が、
隔離環境内に配置される透磁性材料の積層された突極を有する少なくとも1つの積層ロータであって、前記隔離環境から隔離される少なくとも1つの積層ロータと、
前記隔離環境外に配置されるそれぞれのコイルユニットを備えた複数の突極を有する少なくとも1つのステータであって、前記少なくとも1つのステータの前記突極が、前記少なくとも1つの積層ロータの前記積層された突極とともに、少なくとも1つのステータと少なくとも1つのロータとの間でそれぞれの閉磁束回路を形成する、少なくとも1つのステータと、
少なくとも1つのシール部であって、前記少なくとも1つのシール部が、前記少なくとも1つのステータの前記突極に対して配置され、前記少なくとも1つのシール部および前記少なくとも1つのステータの前記突極が、互いの組み合わせで前記隔離環境を隔離する、少なくとも1つのシール部と
を含む搬送装置。 - 前記少なくとも1つの積層ロータが駆動部材インターフェースを含み、
前記駆動部がさらに、駆動伝達部材を含み、
前記駆動伝達部材は、前記積層された突極とインターフェース接続し、前記積層された突極を前記駆動伝達部材に固定するように、前記駆動部材インターフェースで、前記少なくとも1つの積層ロータとインターフェース接続する請求項1記載の搬送装置。 - 前記積層された突極が、前記駆動伝達部材に固定され、前記駆動伝達部材に対して軸方向に配列される請求項2記載の搬送装置。
- 前記積層された突極が、前記駆動伝達部材に固定され、前記駆動伝達部材に対して径方向に配列される請求項2記載の搬送装置。
- 前記少なくとも1つの積層ロータが、前記少なくとも1つの積層ロータを前記隔離環境から隔離するように構成される遮蔽体に埋め込まれる請求項1記載の搬送装置。
- 前記少なくとも1つのシール部が、前記少なくとも1つのステータと一体である請求項1記載の搬送装置。
- 前記少なくとも1つのシール部が、前記少なくとも1つのステータに取り付けられる膜を備える請求項1記載の搬送装置。
- 前記少なくとも1つのシール部が、前記少なくとも1つのステータに寄り掛かる請求項1記載の搬送装置。
- 前記少なくとも1つのステータが、前記少なくとも1つのシール部を構造的に支持する請求項1記載の搬送装置。
- 前記少なくとも1つのシール部が、前記少なくとも1つのステータの形状に適合する請求項1記載の搬送装置。
- 前記少なくとも1つのステータが、ステータコア、上部プレートおよび底部プレートを含み、
前記上部プレートおよび前記底部プレートが突極を形成し、前記ステータコアに接続され、また前記ステータコアにより離間され、前記少なくとも1つの積層ロータと相互作用するように構成され、
前記少なくとも1つのシール部が、前記上部プレートと前記底部プレートとの間にあり、前記少なくとも1つの搬送アームが動作する隔離環境から前記ステータコアを隔離するように構成される請求項1記載の搬送装置。 - 前記駆動部がさらに、前記隔離環境内に配置され、前記ステータのそれぞれの突極と位置合わせされる、複数のステータ突極延伸部を含み、前記少なくとも1つのシール部が、前記ステータの各突極とそれぞれのステータ突極延伸部との間に配置される請求項1記載の搬送装置。
- 前記駆動部がさらに、前記隔離環境内に配置される内面と前記隔離環境の反対側を向く外面とを有するシール支持部材を含み、前記少なくとも1つのシール部が、前記外面上または前記外面に隣接して配置され、前記シール支持部材が、前記少なくとも1つのシール部を構造的に支持するように構成される請求項12記載の搬送装置。
- 前記シール支持部材が、前記ステータ突極延伸部を収容するように構成される請求項13記載の搬送装置。
- ハウジングと、
前記ハウジングに取り付けられる駆動部と、
前記駆動部に接続される少なくとも1つの搬送アームと
を備える搬送装置であって、前記駆動部が、
隔離環境内に配置される透磁性材料の積層されるロータ突極を有する少なくとも1つの真空適合積層ロータであって、交互に積み重ねられる強磁性の層および非導電性の層の積層体のセットを含む少なくとも1つの真空適合積層ロータと、
前記隔離環境外に配置されるそれぞれのコイルユニットを備える複数のステータ突極を有する少なくとも1つのステータと、
前記ステータ突極と組み合わせて前記隔離環境を隔離するように構成される少なくとも1つのシール部と
を含み、
前記積層されるロータ突極はそれぞれ、前記ステータ突極と相互作用すると、前記少なくとも1つの真空適合積層ロータと前記少なくとも1つのステータとの間で閉磁束回路を形成する搬送装置。 - 前記駆動部が、少なくとも1つの駆動シャフトと、前記少なくとも1つの真空適合積層ロータを前記少なくとも1つの駆動シャフトに取り付け、交互に積み重ねられた積層体を一緒にクランプするように構成される保持部材とを含む請求項15記載の搬送装置。
- 前記交互に積み重ねられた積層体が一緒に接着される請求項16記載の搬送装置。
- 前記少なくとも1つのシール部が、前記少なくとも1つのステータと一体である請求項15記載の搬送装置。
- 前記少なくとも1つのシール部が、前記少なくとも1つのステータに取り付けられる膜を備える請求項15記載の搬送装置。
- 前記少なくとも1つのシール部が、前記少なくとも1つのステータに寄り掛かる請求項15記載の搬送装置。
- 前記少なくとも1つのステータが、前記少なくとも1つのシール部を構造的に支持する請求項15記載の搬送装置。
- 前記少なくとも1つのシール部が、前記少なくとも1つのステータの形状に適合する請求項15記載の搬送装置。
- 前記少なくとも1つのステータが、ステータコア、上部プレートおよび底部プレートを含み、
前記上部プレートおよび前記底部プレートがステータ突極を形成し、前記ステータコアに接続され、また前記ステータコアにより離間され、前記少なくとも1つの真空適合積層ロータと相互作用するように構成され、
前記少なくとも1つのシール部が、前記上部プレートと前記底部プレートとの間にあり、前記少なくとも1つの搬送アームが動作する隔離環境から前記ステータコアを隔離するように構成される請求項15記載の搬送装置。 - 前記駆動部がさらに、前記隔離環境内に配置され、それぞれのステータ突極と位置合わせされる、複数のステータ突極延伸部を含み、前記少なくとも1つのシール部が、各ステータ突極とそれぞれのステータ突極延伸部との間に配置される請求項15記載の搬送装置。
- 前記駆動部がさらに、前記隔離環境内に配置される内面と前記隔離環境の反対側を向く外面とを有するシール支持部材を含み、前記少なくとも1つのシール部が、前記外面上または前記外面に隣接して配置され、前記シール支持部材が、前記少なくとも1つのシール部を構造的に支持するように構成される請求項24記載の搬送装置。
- 前記シール支持部材が、前記ステータ突極延伸部を収容するように構成される請求項25記載の搬送装置。
- 前記少なくとも1つのシール部が、前記少なくとも1つのステータの構造と一体である請求項15記載の搬送装置。
- 前記少なくとも1つのシール部が、前記少なくとも1つのステータの構造により支持される請求項15記載の搬送装置。
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Application Number | Priority Date | Filing Date | Title |
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US201361903813P | 2013-11-13 | 2013-11-13 | |
US61/903,813 | 2013-11-13 | ||
US14/540,072 | 2014-11-13 | ||
US14/540,072 US9948155B2 (en) | 2013-11-13 | 2014-11-13 | Sealed robot drive |
JP2020019826A JP7546362B2 (ja) | 2013-11-13 | 2020-02-07 | 密封型ロボット駆動部 |
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JP2016531047A Active JP6708546B2 (ja) | 2013-11-13 | 2014-11-13 | 密封型ロボット駆動部 |
JP2020019826A Active JP7546362B2 (ja) | 2013-11-13 | 2020-02-07 | 密封型ロボット駆動部 |
JP2022100691A Pending JP2022126795A (ja) | 2013-11-13 | 2022-06-22 | 密封型ロボット駆動部 |
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JP (3) | JP6708546B2 (ja) |
KR (3) | KR102224756B1 (ja) |
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