JP2021169083A5 - - Google Patents
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- JP2021169083A5 JP2021169083A5 JP2021111069A JP2021111069A JP2021169083A5 JP 2021169083 A5 JP2021169083 A5 JP 2021169083A5 JP 2021111069 A JP2021111069 A JP 2021111069A JP 2021111069 A JP2021111069 A JP 2021111069A JP 2021169083 A5 JP2021169083 A5 JP 2021169083A5
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- Prior art keywords
- tank
- mixing tank
- chemical composition
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- continuous
- Prior art date
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- 239000000203 mixture Substances 0.000 claims description 232
- 238000002156 mixing Methods 0.000 claims description 207
- 239000000463 material Substances 0.000 claims description 137
- 239000000126 substance Substances 0.000 claims description 136
- 238000000034 method Methods 0.000 claims description 122
- 239000012530 fluid Substances 0.000 claims description 54
- 239000004615 ingredient Substances 0.000 claims description 46
- 238000001914 filtration Methods 0.000 claims description 42
- 238000004806 packaging method and process Methods 0.000 claims description 41
- 239000002245 particle Substances 0.000 claims description 36
- 238000004891 communication Methods 0.000 claims description 25
- 238000012546 transfer Methods 0.000 claims description 18
- 230000003068 static effect Effects 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000005498 polishing Methods 0.000 description 58
- 238000004519 manufacturing process Methods 0.000 description 38
- 239000002253 acid Substances 0.000 description 35
- 238000010924 continuous production Methods 0.000 description 32
- 239000000047 product Substances 0.000 description 29
- 239000000109 continuous material Substances 0.000 description 23
- 239000002002 slurry Substances 0.000 description 23
- 238000010923 batch production Methods 0.000 description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 20
- 238000003908 quality control method Methods 0.000 description 19
- 150000003839 salts Chemical class 0.000 description 13
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical group [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 239000003085 diluting agent Substances 0.000 description 11
- 238000005259 measurement Methods 0.000 description 11
- 239000002994 raw material Substances 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 9
- 239000006185 dispersion Substances 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 8
- 239000002585 base Substances 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 6
- 150000007513 acids Chemical class 0.000 description 6
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 6
- 239000008367 deionised water Substances 0.000 description 6
- 229910021641 deionized water Inorganic materials 0.000 description 6
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 6
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- -1 potassium ferricyanide Chemical compound 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 239000008119 colloidal silica Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- VDZOOKBUILJEDG-UHFFFAOYSA-M tetrabutylammonium hydroxide Chemical compound [OH-].CCCC[N+](CCCC)(CCCC)CCCC VDZOOKBUILJEDG-UHFFFAOYSA-M 0.000 description 4
- PAWQVTBBRAZDMG-UHFFFAOYSA-N 2-(3-bromo-2-fluorophenyl)acetic acid Chemical compound OC(=O)CC1=CC=CC(Br)=C1F PAWQVTBBRAZDMG-UHFFFAOYSA-N 0.000 description 3
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 3
- 238000013019 agitation Methods 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000000908 ammonium hydroxide Substances 0.000 description 3
- VBIXEXWLHSRNKB-UHFFFAOYSA-N ammonium oxalate Chemical compound [NH4+].[NH4+].[O-]C(=O)C([O-])=O VBIXEXWLHSRNKB-UHFFFAOYSA-N 0.000 description 3
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 3
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 3
- 235000011130 ammonium sulphate Nutrition 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 150000001735 carboxylic acids Chemical class 0.000 description 3
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 3
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 239000012467 final product Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 150000007522 mineralic acids Chemical class 0.000 description 3
- 150000007524 organic acids Chemical class 0.000 description 3
- 229910000027 potassium carbonate Inorganic materials 0.000 description 3
- 239000001103 potassium chloride Substances 0.000 description 3
- 235000011164 potassium chloride Nutrition 0.000 description 3
- 239000001508 potassium citrate Substances 0.000 description 3
- 229960002635 potassium citrate Drugs 0.000 description 3
- QEEAPRPFLLJWCF-UHFFFAOYSA-K potassium citrate (anhydrous) Chemical compound [K+].[K+].[K+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O QEEAPRPFLLJWCF-UHFFFAOYSA-K 0.000 description 3
- 235000011082 potassium citrates Nutrition 0.000 description 3
- 239000004323 potassium nitrate Substances 0.000 description 3
- 235000010333 potassium nitrate Nutrition 0.000 description 3
- OTYBMLCTZGSZBG-UHFFFAOYSA-L potassium sulfate Chemical compound [K+].[K+].[O-]S([O-])(=O)=O OTYBMLCTZGSZBG-UHFFFAOYSA-L 0.000 description 3
- 229910052939 potassium sulfate Inorganic materials 0.000 description 3
- 235000011151 potassium sulphates Nutrition 0.000 description 3
- 150000003856 quaternary ammonium compounds Chemical class 0.000 description 3
- 230000003134 recirculating effect Effects 0.000 description 3
- YWYZEGXAUVWDED-UHFFFAOYSA-N triammonium citrate Chemical compound [NH4+].[NH4+].[NH4+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O YWYZEGXAUVWDED-UHFFFAOYSA-N 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 2
- 238000001246 colloidal dispersion Methods 0.000 description 2
- 238000005112 continuous flow technique Methods 0.000 description 2
- 238000011437 continuous method Methods 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- 238000004128 high performance liquid chromatography Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 description 2
- 239000011268 mixed slurry Substances 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 235000005985 organic acids Nutrition 0.000 description 2
- KMUONIBRACKNSN-UHFFFAOYSA-N potassium dichromate Chemical compound [K+].[K+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O KMUONIBRACKNSN-UHFFFAOYSA-N 0.000 description 2
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 2
- ZKQDCIXGCQPQNV-UHFFFAOYSA-N Calcium hypochlorite Chemical compound [Ca+2].Cl[O-].Cl[O-] ZKQDCIXGCQPQNV-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 239000005708 Sodium hypochlorite Substances 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- QUEDYRXQWSDKKG-UHFFFAOYSA-M [O-2].[O-2].[V+5].[OH-] Chemical compound [O-2].[O-2].[V+5].[OH-] QUEDYRXQWSDKKG-UHFFFAOYSA-M 0.000 description 1
- 235000011054 acetic acid Nutrition 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 1
- 239000002280 amphoteric surfactant Substances 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 150000003851 azoles Chemical class 0.000 description 1
- 150000001565 benzotriazoles Chemical class 0.000 description 1
- 239000003139 biocide Substances 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 150000007942 carboxylates Chemical class 0.000 description 1
- 239000003093 cationic surfactant Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 235000015165 citric acid Nutrition 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012847 fine chemical Substances 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- QWPPOHNGKGFGJK-UHFFFAOYSA-N hypochlorous acid Chemical compound ClO QWPPOHNGKGFGJK-UHFFFAOYSA-N 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000002354 inductively-coupled plasma atomic emission spectroscopy Methods 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 description 1
- MVFCKEFYUDZOCX-UHFFFAOYSA-N iron(2+);dinitrate Chemical compound [Fe+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MVFCKEFYUDZOCX-UHFFFAOYSA-N 0.000 description 1
- 238000004895 liquid chromatography mass spectrometry Methods 0.000 description 1
- YZQBYALVHAANGI-UHFFFAOYSA-N magnesium;dihypochlorite Chemical compound [Mg+2].Cl[O-].Cl[O-] YZQBYALVHAANGI-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 150000007530 organic bases Chemical class 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 239000003002 pH adjusting agent Substances 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 150000004965 peroxy acids Chemical class 0.000 description 1
- 235000021317 phosphate Nutrition 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229960003975 potassium Drugs 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 235000011181 potassium carbonates Nutrition 0.000 description 1
- SATVIFGJTRRDQU-UHFFFAOYSA-N potassium hypochlorite Chemical compound [K+].Cl[O-] SATVIFGJTRRDQU-UHFFFAOYSA-N 0.000 description 1
- JLKDVMWYMMLWTI-UHFFFAOYSA-M potassium iodate Chemical compound [K+].[O-]I(=O)=O JLKDVMWYMMLWTI-UHFFFAOYSA-M 0.000 description 1
- 239000001230 potassium iodate Substances 0.000 description 1
- 235000006666 potassium iodate Nutrition 0.000 description 1
- 229940093930 potassium iodate Drugs 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229910001961 silver nitrate Inorganic materials 0.000 description 1
- SUKJFIGYRHOWBL-UHFFFAOYSA-N sodium hypochlorite Chemical compound [Na+].Cl[O-] SUKJFIGYRHOWBL-UHFFFAOYSA-N 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023174768A JP2024009903A (ja) | 2016-03-11 | 2023-10-06 | 高度な流体処理方法およびシステム |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662306795P | 2016-03-11 | 2016-03-11 | |
| US62/306,795 | 2016-03-11 | ||
| JP2018548093A JP7306608B2 (ja) | 2016-03-11 | 2017-02-14 | 高度な流体処理方法およびシステム |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018548093A Division JP7306608B2 (ja) | 2016-03-11 | 2017-02-14 | 高度な流体処理方法およびシステム |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023174768A Division JP2024009903A (ja) | 2016-03-11 | 2023-10-06 | 高度な流体処理方法およびシステム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021169083A JP2021169083A (ja) | 2021-10-28 |
| JP2021169083A5 true JP2021169083A5 (https=) | 2023-03-09 |
| JP7440183B2 JP7440183B2 (ja) | 2024-02-28 |
Family
ID=58428042
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018548093A Active JP7306608B2 (ja) | 2016-03-11 | 2017-02-14 | 高度な流体処理方法およびシステム |
| JP2021111069A Active JP7440183B2 (ja) | 2016-03-11 | 2021-07-02 | 高度な流体処理方法およびシステム |
| JP2023174768A Pending JP2024009903A (ja) | 2016-03-11 | 2023-10-06 | 高度な流体処理方法およびシステム |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018548093A Active JP7306608B2 (ja) | 2016-03-11 | 2017-02-14 | 高度な流体処理方法およびシステム |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023174768A Pending JP2024009903A (ja) | 2016-03-11 | 2023-10-06 | 高度な流体処理方法およびシステム |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US10159949B2 (https=) |
| EP (2) | EP3248673B1 (https=) |
| JP (3) | JP7306608B2 (https=) |
| KR (4) | KR20170106233A (https=) |
| CN (1) | CN107198975B (https=) |
| IL (1) | IL261595A (https=) |
| SG (1) | SG11201807521WA (https=) |
| TW (5) | TWI880844B (https=) |
| WO (1) | WO2017155669A1 (https=) |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7306608B2 (ja) * | 2016-03-11 | 2023-07-11 | フジフイルム エレクトロニック マテリアルズ ユー．エス．エー．， インコーポレイテッド | 高度な流体処理方法およびシステム |
| AU2018332076B2 (en) | 2017-09-18 | 2024-10-17 | Ferring International Center S.A. | Manufacturing of pharmaceutical compositions |
| CN110694544B (zh) * | 2017-09-19 | 2021-08-17 | 中国计量大学 | 基于变速率学习的直落式物料配料装置控制器 |
| IL283235B2 (en) * | 2018-11-20 | 2026-03-01 | Fujifilm Electronic Mat Usa Inc | Solvent purification systems and methods |
| CN109433037A (zh) * | 2018-12-27 | 2019-03-08 | 扬州宏远电子股份有限公司 | 一种电极箔生产用腐蚀液自动配液装置 |
| AU2020277416B2 (en) * | 2019-05-23 | 2025-06-26 | Nxstage Medical, Inc. | Medicament preparation devices, methods, and systems |
| IT201900010236A1 (it) * | 2019-06-27 | 2020-12-27 | Ats S R L | Processo di preparazione e confezionamento di un prodotto cosmetico e impianto implementante lo stesso |
| JP7133518B2 (ja) * | 2019-06-30 | 2022-09-08 | 株式会社西村ケミテック | 研磨液供給装置 |
| US11701628B2 (en) * | 2019-07-12 | 2023-07-18 | EnviroTech Water Treatment L.L.C. | Direct chemical injection systems and methods |
| WO2021108739A1 (en) * | 2019-11-27 | 2021-06-03 | Diversified Fluid Solutions, Llc | On-demand in-line-blending and supply of chemicals |
| US11559774B2 (en) | 2019-12-30 | 2023-01-24 | Marathon Petroleum Company Lp | Methods and systems for operating a pump at an efficiency point |
| US11607654B2 (en) | 2019-12-30 | 2023-03-21 | Marathon Petroleum Company Lp | Methods and systems for in-line mixing of hydrocarbon liquids |
| CA3104319C (en) | 2019-12-30 | 2023-01-24 | Marathon Petroleum Company Lp | Methods and systems for spillback control of in-line mixing of hydrocarbon liquids |
| CA3103416C (en) | 2019-12-30 | 2022-01-25 | Marathon Petroleum Company Lp | Methods and systems for inline mixing of hydrocarbon liquids |
| JP2023511119A (ja) * | 2020-01-16 | 2023-03-16 | フジフイルム エレクトロニック マテリアルズ ユー．エス．エー．， インコーポレイテッド | 溶媒を精製するためのシステムおよび方法 |
| CN111546214B (zh) * | 2020-04-23 | 2022-04-22 | 福建晶安光电有限公司 | 一种半导体晶圆加工中浆料的动态替换控制方法及系统 |
| CN111390747B (zh) * | 2020-04-23 | 2022-07-19 | 福建晶安光电有限公司 | 一种半导体晶圆加工中浆料的定量抽换装置 |
| CN111895272A (zh) * | 2020-07-24 | 2020-11-06 | 南通华林科纳半导体设备有限公司 | 抛光液dsp供应系统 |
| US20220080373A1 (en) * | 2020-09-14 | 2022-03-17 | Changxin Memory Technologies, Inc. | Monitoring feedback system and monitoring feedback method |
| CN112808083A (zh) * | 2020-12-24 | 2021-05-18 | 无锡华弘祥智能装备有限公司 | 一种纳米金属氧化物的均质搅拌回收系统 |
| KR102485933B1 (ko) * | 2021-01-27 | 2023-01-11 | (주) 테크윈 | 분체이송시스템과 분체이송방법 |
| US11578836B2 (en) | 2021-03-16 | 2023-02-14 | Marathon Petroleum Company Lp | Scalable greenhouse gas capture systems and methods |
| US12012883B2 (en) | 2021-03-16 | 2024-06-18 | Marathon Petroleum Company Lp | Systems and methods for backhaul transportation of liquefied gas and CO2 using liquefied gas carriers |
| US11578638B2 (en) | 2021-03-16 | 2023-02-14 | Marathon Petroleum Company Lp | Scalable greenhouse gas capture systems and methods |
| US11655940B2 (en) | 2021-03-16 | 2023-05-23 | Marathon Petroleum Company Lp | Systems and methods for transporting fuel and carbon dioxide in a dual fluid vessel |
| JP7492989B2 (ja) * | 2021-08-24 | 2024-05-30 | 旭化成株式会社 | 混合装置 |
| US11447877B1 (en) | 2021-08-26 | 2022-09-20 | Marathon Petroleum Company Lp | Assemblies and methods for monitoring cathodic protection of structures |
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2017
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- 2017-02-14 US US15/432,099 patent/US10159949B2/en active Active
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- 2017-02-20 TW TW113133616A patent/TWI880844B/zh active
- 2017-02-20 TW TW108126599A patent/TWI686466B/zh active
- 2017-02-20 TW TW106105581A patent/TWI673353B/zh active
- 2017-02-20 TW TW109101773A patent/TWI852982B/zh active
- 2017-02-20 TW TW109117190A patent/TWI857063B/zh active
- 2017-02-27 EP EP17158131.7A patent/EP3248673B1/en active Active
- 2017-02-27 EP EP21166220.0A patent/EP3888779A1/en active Pending
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- 2023-12-22 KR KR1020230189659A patent/KR102874821B1/ko active Active
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