JP2020506297A - キャリア箔付き極薄銅箔 - Google Patents
キャリア箔付き極薄銅箔 Download PDFInfo
- Publication number
- JP2020506297A JP2020506297A JP2019559247A JP2019559247A JP2020506297A JP 2020506297 A JP2020506297 A JP 2020506297A JP 2019559247 A JP2019559247 A JP 2019559247A JP 2019559247 A JP2019559247 A JP 2019559247A JP 2020506297 A JP2020506297 A JP 2020506297A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- copper foil
- ultra
- foil
- plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 269
- 239000011889 copper foil Substances 0.000 title claims abstract description 247
- 239000011888 foil Substances 0.000 title claims abstract description 198
- 238000007747 plating Methods 0.000 claims abstract description 236
- 229910052751 metal Inorganic materials 0.000 claims abstract description 164
- 239000002184 metal Substances 0.000 claims abstract description 164
- 230000003746 surface roughness Effects 0.000 claims description 69
- 238000009792 diffusion process Methods 0.000 claims description 65
- 239000004065 semiconductor Substances 0.000 claims description 58
- 230000002265 prevention Effects 0.000 claims description 41
- 230000003647 oxidation Effects 0.000 claims description 28
- 238000007254 oxidation reaction Methods 0.000 claims description 28
- 229910052782 aluminium Inorganic materials 0.000 claims description 24
- 229910052759 nickel Inorganic materials 0.000 claims description 19
- 238000009713 electroplating Methods 0.000 claims description 15
- 238000004544 sputter deposition Methods 0.000 claims description 15
- 229910052742 iron Inorganic materials 0.000 claims description 13
- 229910052698 phosphorus Inorganic materials 0.000 claims description 11
- 150000002739 metals Chemical class 0.000 claims description 10
- 229910052750 molybdenum Inorganic materials 0.000 claims description 10
- 229910052721 tungsten Inorganic materials 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 53
- 230000015572 biosynthetic process Effects 0.000 description 52
- 239000010949 copper Substances 0.000 description 42
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 38
- 239000000853 adhesive Substances 0.000 description 31
- 230000001070 adhesive effect Effects 0.000 description 31
- 230000000052 comparative effect Effects 0.000 description 22
- 229910052802 copper Inorganic materials 0.000 description 22
- 229910000881 Cu alloy Inorganic materials 0.000 description 21
- 229910017767 Cu—Al Inorganic materials 0.000 description 21
- 239000000758 substrate Substances 0.000 description 21
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 19
- 229910045601 alloy Inorganic materials 0.000 description 16
- 239000000956 alloy Substances 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 16
- 238000005530 etching Methods 0.000 description 15
- 239000000203 mixture Substances 0.000 description 15
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 14
- 239000003963 antioxidant agent Substances 0.000 description 13
- 230000003078 antioxidant effect Effects 0.000 description 13
- 230000000694 effects Effects 0.000 description 12
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 12
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 9
- 229910003271 Ni-Fe Inorganic materials 0.000 description 9
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 9
- 239000001509 sodium citrate Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 7
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 6
- 229910018104 Ni-P Inorganic materials 0.000 description 6
- 229910018536 Ni—P Inorganic materials 0.000 description 6
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 6
- KBNUQQRKODIBRW-UHFFFAOYSA-N [Cu].[W].[Co] Chemical compound [Cu].[W].[Co] KBNUQQRKODIBRW-UHFFFAOYSA-N 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 6
- 229910052697 platinum Inorganic materials 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 239000000543 intermediate Substances 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 3
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 3
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 3
- 239000005751 Copper oxide Substances 0.000 description 3
- 229910017318 Mo—Ni Inorganic materials 0.000 description 3
- 229910018487 Ni—Cr Inorganic materials 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 3
- QMGGOFYRKWPMHE-UHFFFAOYSA-N [Co].[Cu].[Cr] Chemical compound [Co].[Cu].[Cr] QMGGOFYRKWPMHE-UHFFFAOYSA-N 0.000 description 3
- QZYDAIMOJUSSFT-UHFFFAOYSA-N [Co].[Ni].[Mo] Chemical compound [Co].[Ni].[Mo] QZYDAIMOJUSSFT-UHFFFAOYSA-N 0.000 description 3
- YCOASTWZYJGKEK-UHFFFAOYSA-N [Co].[Ni].[W] Chemical compound [Co].[Ni].[W] YCOASTWZYJGKEK-UHFFFAOYSA-N 0.000 description 3
- WAIPAZQMEIHHTJ-UHFFFAOYSA-N [Cr].[Co] Chemical compound [Cr].[Co] WAIPAZQMEIHHTJ-UHFFFAOYSA-N 0.000 description 3
- MTHLBYMFGWSRME-UHFFFAOYSA-N [Cr].[Co].[Mo] Chemical compound [Cr].[Co].[Mo] MTHLBYMFGWSRME-UHFFFAOYSA-N 0.000 description 3
- VDGMIGHRDCJLMN-UHFFFAOYSA-N [Cu].[Co].[Ni] Chemical compound [Cu].[Co].[Ni] VDGMIGHRDCJLMN-UHFFFAOYSA-N 0.000 description 3
- OBLMUVZPDITTKB-UHFFFAOYSA-N [Fe].[Co].[Cu] Chemical compound [Fe].[Co].[Cu] OBLMUVZPDITTKB-UHFFFAOYSA-N 0.000 description 3
- ZMXPKUWNBXIACW-UHFFFAOYSA-N [Fe].[Co].[Mo] Chemical compound [Fe].[Co].[Mo] ZMXPKUWNBXIACW-UHFFFAOYSA-N 0.000 description 3
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 3
- WBWJXRJARNTNBL-UHFFFAOYSA-N [Fe].[Cr].[Co] Chemical compound [Fe].[Cr].[Co] WBWJXRJARNTNBL-UHFFFAOYSA-N 0.000 description 3
- OWUGOENUEKACGV-UHFFFAOYSA-N [Fe].[Ni].[W] Chemical compound [Fe].[Ni].[W] OWUGOENUEKACGV-UHFFFAOYSA-N 0.000 description 3
- HMXCSHJQBPUTDP-UHFFFAOYSA-N [Mo].[Cu].[Ni] Chemical compound [Mo].[Cu].[Ni] HMXCSHJQBPUTDP-UHFFFAOYSA-N 0.000 description 3
- LCSNMIIKJKUSFF-UHFFFAOYSA-N [Ni].[Mo].[W] Chemical compound [Ni].[Mo].[W] LCSNMIIKJKUSFF-UHFFFAOYSA-N 0.000 description 3
- SYCBLWWKDXQZRR-UHFFFAOYSA-N [Ni].[W].[Cr] Chemical compound [Ni].[W].[Cr] SYCBLWWKDXQZRR-UHFFFAOYSA-N 0.000 description 3
- VBQLSRQNZPOITQ-UHFFFAOYSA-N [P].[Cr].[Co] Chemical compound [P].[Cr].[Co] VBQLSRQNZPOITQ-UHFFFAOYSA-N 0.000 description 3
- UKBBLYOZLMOPNK-UHFFFAOYSA-N [P].[Cr].[Ni] Chemical compound [P].[Cr].[Ni] UKBBLYOZLMOPNK-UHFFFAOYSA-N 0.000 description 3
- NKRHXEKCTWWDLS-UHFFFAOYSA-N [W].[Cr].[Co] Chemical compound [W].[Cr].[Co] NKRHXEKCTWWDLS-UHFFFAOYSA-N 0.000 description 3
- LTOKVQLDQRXAHK-UHFFFAOYSA-N [W].[Ni].[Cu] Chemical compound [W].[Ni].[Cu] LTOKVQLDQRXAHK-UHFFFAOYSA-N 0.000 description 3
- 229910002056 binary alloy Inorganic materials 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 3
- SZMZREIADCOWQA-UHFFFAOYSA-N chromium cobalt nickel Chemical compound [Cr].[Co].[Ni] SZMZREIADCOWQA-UHFFFAOYSA-N 0.000 description 3
- XRBURMNBUVEAKD-UHFFFAOYSA-N chromium copper nickel Chemical compound [Cr].[Ni].[Cu] XRBURMNBUVEAKD-UHFFFAOYSA-N 0.000 description 3
- BIJOYKCOMBZXAE-UHFFFAOYSA-N chromium iron nickel Chemical compound [Cr].[Fe].[Ni] BIJOYKCOMBZXAE-UHFFFAOYSA-N 0.000 description 3
- OGSYQYXYGXIQFH-UHFFFAOYSA-N chromium molybdenum nickel Chemical compound [Cr].[Ni].[Mo] OGSYQYXYGXIQFH-UHFFFAOYSA-N 0.000 description 3
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 3
- 229910000423 chromium oxide Inorganic materials 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- RYTYSMSQNNBZDP-UHFFFAOYSA-N cobalt copper Chemical compound [Co].[Cu] RYTYSMSQNNBZDP-UHFFFAOYSA-N 0.000 description 3
- FQMNUIZEFUVPNU-UHFFFAOYSA-N cobalt iron Chemical compound [Fe].[Co].[Co] FQMNUIZEFUVPNU-UHFFFAOYSA-N 0.000 description 3
- DIUDTORAKXIZFQ-UHFFFAOYSA-N cobalt iron tungsten Chemical compound [Fe][Co][W] DIUDTORAKXIZFQ-UHFFFAOYSA-N 0.000 description 3
- WHDPTDWLEKQKKX-UHFFFAOYSA-N cobalt molybdenum Chemical compound [Co].[Co].[Mo] WHDPTDWLEKQKKX-UHFFFAOYSA-N 0.000 description 3
- 229910000428 cobalt oxide Inorganic materials 0.000 description 3
- JPNWDVUTVSTKMV-UHFFFAOYSA-N cobalt tungsten Chemical compound [Co].[W] JPNWDVUTVSTKMV-UHFFFAOYSA-N 0.000 description 3
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 3
- 239000010952 cobalt-chrome Substances 0.000 description 3
- GOECOOJIPSGIIV-UHFFFAOYSA-N copper iron nickel Chemical compound [Fe].[Ni].[Cu] GOECOOJIPSGIIV-UHFFFAOYSA-N 0.000 description 3
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 description 3
- 229910000431 copper oxide Inorganic materials 0.000 description 3
- 238000007772 electroless plating Methods 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- VAWNDNOTGRTLLU-UHFFFAOYSA-N iron molybdenum nickel Chemical compound [Fe].[Ni].[Mo] VAWNDNOTGRTLLU-UHFFFAOYSA-N 0.000 description 3
- UGKDIUIOSMUOAW-UHFFFAOYSA-N iron nickel Chemical compound [Fe].[Ni] UGKDIUIOSMUOAW-UHFFFAOYSA-N 0.000 description 3
- LHLROOPJPUYVKD-UHFFFAOYSA-N iron phosphanylidynenickel Chemical compound [Fe].[Ni]#P LHLROOPJPUYVKD-UHFFFAOYSA-N 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- DDTIGTPWGISMKL-UHFFFAOYSA-N molybdenum nickel Chemical compound [Ni].[Mo] DDTIGTPWGISMKL-UHFFFAOYSA-N 0.000 description 3
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 3
- 229910000480 nickel oxide Inorganic materials 0.000 description 3
- MOWMLACGTDMJRV-UHFFFAOYSA-N nickel tungsten Chemical compound [Ni].[W] MOWMLACGTDMJRV-UHFFFAOYSA-N 0.000 description 3
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 3
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 3
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 229910001392 phosphorus oxide Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 229910002058 ternary alloy Inorganic materials 0.000 description 3
- VSAISIQCTGDGPU-UHFFFAOYSA-N tetraphosphorus hexaoxide Chemical compound O1P(O2)OP3OP1OP2O3 VSAISIQCTGDGPU-UHFFFAOYSA-N 0.000 description 3
- 229910001930 tungsten oxide Inorganic materials 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- 230000003064 anti-oxidating effect Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- -1 strength Chemical compound 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/04—Wires; Strips; Foils
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/42—Electroplating: Baths therefor from solutions of light metals
- C25D3/44—Aluminium
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
- C25D7/0614—Strips or foils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
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Abstract
Description
図1は本発明の第1実施例に係るキャリア箔付き極薄銅箔の断面模式図であり、図2は本発明の第1実施例に係るキャリア箔付き極薄銅箔の断面をFIB(Focused Ion Beam)で撮影したイメージであり、図3はAl層が形成されない場合のマット面とシャイニー面の表面イメージである。
1.キャリア箔の準備
キャリア箔の表面粗さは1.5μm、厚さは18μmの電解銅箔を使った。
2.拡散防止層の形成
下記の条件でNi−Pメッキによる拡散防止層を形成した。
Ni濃度:15g/L、P濃度:8g/L
pH4.0
温度:30℃
電流密度:1.5A/dm2
メッキ時間:2秒
前記条件で形成した拡散防止層の付着量は金属(Ni)付着量301ug/dm2であった。
3.剥離層の形成
下記の条件でMo−Ni−Feメッキによる剥離層を形成した。
Mo濃度:20g/L、Ni濃度:6.5g/L、Fe濃度:3g/L、クエン酸ナトリウム:150g/L
pH10.2(アンモニア水30ml/L添加)
温度:30℃
電流密度:10A/dm2
メッキ時間:7秒
前記条件で形成した剥離層の付着量は1.07mg/dm2、剥離層の組成はMo60.55重量%、Ni29.8重量%、Fe5.99重量%であった。
4.酸化防止層の形成
下記の条件でNi−Pメッキによる酸化防止層を形成した。
Ni濃度:15g/L、P濃度8g/L、
pH4.0
温度:30℃
電流密度:0.5A/dm2
メッキ時間:2秒
前記条件で形成した酸化防止層の付着量は金属(Ni)付着量30ug/dm2であった。
5.第1極薄銅箔の形成
下記の条件で第1極薄銅箔を形成した。
CuSO4−5H2O:300g/L、H2SO4:150g/L
温度:30℃
電流密度:20A/dm2
メッキ時間:25秒
前記条件で形成した第1極薄銅箔の厚さは2μmであった。
6.Al層の形成
ワイヤー接合層であるAlの厚さは0.5μmに形成され、表面粗さは前記キャリア箔の粗さと同じである1.5μmを有するように形成した。
7.第2極薄銅箔の形成
下記の条件で第2極薄銅箔を形成した。
CuSO4−5H2O:300g/L、H2SO4:150g/L
温度:30℃
電流密度:20A/dm2
メッキ時間:5秒
前記条件で形成した第2極薄銅箔の厚さは0.5μmであった。
Al層を下記のように変更したことを除いては実施例1と同じ条件で実施した。
6.Al層の形成
ワイヤー接合層であるAlの厚さは1.0μmに形成され、表面粗さはキャリア箔の粗さと同じである1.5μmを有するように形成した。
キャリア箔およびAl層を下記のように変更したことを除いては実施例1と同じ条件で実施した。
1.キャリア箔の準備
キャリアの表面粗さは3.0μm、厚さは18μmの電解銅箔を使った。
6.Al層の形成
ワイヤー接合層であるAl厚さは0.5μmに形成し、表面粗さはキャリア箔の粗さと同じである3.0μmを有するように形成した。
剥離層を下記のように変更したことを除いては実施例1と同じ条件で実施した。
4.剥離層の形成
下記の条件でMo−Ni−Feメッキによる剥離層を形成した。
Mo濃度:20g/L、Ni濃度:6.5g/L、Fe濃度:3g/L、クエン酸ナトリウム:150g/L
pH10.2(アンモニア水30ml/L添加)
温度:30℃
電流密度:18A/dm2
メッキ時間:7秒
前記条件で形成した剥離層の付着量は1.89mg/dm2、剥離層の組成はMo51.99重量%、Ni38.8重量%、Fe5.55重量%であった。
剥離層を下記のように変更したことを除いては実施例1と同じ条件で実施した。
4.剥離層の形成
下記の条件でMo−Ni−Feメッキによる剥離層を形成した。
Mo濃度:20g/L、Ni濃度:6.5g/L、Fe濃度:3g/L、クエン酸ナトリウム:150g/L
pH10.2(アンモニア水30ml/L添加)
温度:30℃
電流密度:3A/dm2
メッキ時間:7秒
前記条件で形成した剥離層の付着量は0.31mg/dm2、剥離層の組成はMo23.42重量%、Ni69.81重量%、Fe2.55重量%であった。
剥離層およびAl層を下記のように変更したことを除いては実施例1と同じ条件で実施した。
3.剥離層の形成
剥離層の付着量を0.89mg/dm2に形成した。
6.Al層の形成
Al層の厚さを0.05μmに形成し、表面粗さは1.5μmを有するように形成した。
実施例1〜3の場合、Al層の上下の銅層との剥離強度およびAl層とキャリア箔の剥離強度は非常に良好であったし、実施例4の場合、極薄銅箔とキャリアの剥離強度は付着量が高いためキャリア間の剥離強度が低下する問題が発生した。
実施例1、2および4の場合、Al層の表面粗さが低くてエッチングレートが優秀であるため回路形成時にファインパターンを得ることができたが、実施例3の場合、Al層の表面粗さが高いため実施例1、2よりエッチングレートが低下したし、回路形成時に所望のファインパターンを得ることができなかった。
実施例1〜4の場合、前記キャリア箔付き極薄銅箔を利用して半導体substrateを製作し、半導体チップと直径25〜70μmのワイヤー(金、アルミニウムなど)を利用して電気的に連結した時、Al層とワイヤー間のボンディング接着性も優秀であった。
図7は本発明の第2実施例に係るキャリア箔付き極薄銅箔の断面模式図であり、図8は本発明の第2実施例に係るキャリア箔付き極薄銅箔の断面をFIB(Focused Ion Beam)で撮影したイメージであり、図9はAl層が形成されない場合のマット面とシャイニー面の表面イメージであり、図10は本発明の第2実施例に係るキャリア箔付き極薄銅箔のマット面とシャイニー面の表面イメージである。
1.キャリア箔準備
キャリア箔の表面粗さは1.5μm、厚さは18μmの電解銅箔を使った。
2.拡散防止層の形成
下記の条件でNi−Pメッキによる拡散防止層を形成した。
Ni濃度:15g/L、P濃度8g/L
pH4.0
温度:30℃
電流密度:1.5A/dm2
メッキ時間:2秒
前記条件で形成した拡散防止層の付着量は金属(Ni)付着量301ug/dm2であった。
3.剥離層の形成
下記の条件でMo−Ni−Feメッキによる剥離層を形成した。
Mo濃度:20g/L、Ni濃度:6.5g/L、Fe濃度:3g/L、クエン酸ナトリウム:150g/L
pH10.2(アンモニア水30ml/L添加)
温度:30℃
電流密度:10A/dm2
メッキ時間:7秒
前記条件で形成した剥離層の付着量は1.07mg/dm2、剥離層の組成はMo60.55重量%、Ni29.8重量%、Fe5.99重量%であった。
4.酸化防止層の形成
下記の条件でNi−Pメッキによる酸化防止層を形成した。
Ni濃度:15g/L、P濃度8g/L
pH4.0
温度:30℃
電流密度:0.5A/dm2
メッキ時間:2秒
前記条件で形成した酸化防止層の付着量は金属(Ni)付着量30ug/dm2であった。
5.第1極薄銅箔の形成
下記の条件で第1極薄銅箔を形成した。
CuSO4−5H2O:300g/L、H2SO4:150g/L
温度:30℃
電流密度:20A/dm2
メッキ時間:25秒
前記条件で形成した第1極薄銅箔の厚さは2μmであった。
6.Cu−Al接着力向上層の形成
第1極薄銅箔とAl層間の接着力を向上させる層であって、Cuの厚さは0.03μmに形成した。
7.Cu拡散防止層の形成
銅層(Cu Layer)とAl層の熱処理後に合金形成を防止するAl2O3層を0.005μmでAl層の上下に形成した。
8.Al層の形成
ワイヤー接合層であるAlの厚さは0.5μmに形成され、表面粗さは前記キャリア箔の粗さと同じである1.5μmを有するように形成した。
9.第2極薄銅箔の形成
下記の条件で第2極薄銅箔を形成した。
CuSO4−5H2O:300g/L、H2SO4:150g/L
温度:30℃
電流密度:20A/dm2
メッキ時間:5秒
前記条件で形成した第2極薄銅箔の厚さは0.5μmであった。
Al層を下記のように変更したことを除いては実施例1と同じ条件で実施した。
8.Al層の形成
ワイヤー接合層であるAlの厚さは1.0μmに形成され、表面粗さはキャリア箔の粗さと同じである1.5μmを有するように形成した。
キャリア箔およびAl層を下記のように変更したことを除いては実施例1と同じ条件で実施した。
1.キャリア箔の準備
キャリアの表面粗さは3.0μm、厚さは18μmの電解銅箔を使った。
8.Al層の形成
ワイヤー接合層であるAl厚さは0.5μmに形成し、表面粗さはキャリア箔の粗さと同じである3.0μmを有するように形成した。
剥離層、Cu−Al接着力向上層およびCu拡散防止層を下記のように変更したことを除いては実施例1と同じ条件で実施した。
3.剥離層の形成
下記の条件でMo−Ni−Feメッキによる剥離層を形成した。
Mo濃度:20g/L、Ni濃度:6.5g/L、Fe濃度:3g/L、クエン酸ナトリウム:150g/L
pH10.2(アンモニア水30ml/L添加)
温度:30℃
電流密度:18A/dm2
メッキ時間:7秒
前記条件で形成した剥離層の付着量は1.89mg/dm2、剥離層の組成はMo51.99重量%、Ni38.8重量%、Fe5.55重量%であった。
6.Cu−Al接着力向上層の形成
第1極薄銅箔とAl層間の接着力を向上させる層であって、Cuの厚さは0.01μmに形成した。
7.Cu拡散防止層の形成
銅層(Cu Layer)とAl層の熱処理後に合金形成を防止するAl2O3層を0.015μmでAl層の上下に形成した。
剥離層を下記のように変更したことを除いては実施例1と同じ条件で実施した。
3.剥離層の形成
下記の条件でMo−Ni−Feメッキによる剥離層を形成した。
Mo濃度:20g/L、Ni濃度:6.5g/L、Fe濃度:3g/L、クエン酸ナトリウム:150g/L
pH10.2(アンモニア水30ml/L添加)
温度:30℃
電流密度:3A/dm2
メッキ時間:7秒
前記条件で形成した剥離層の付着量は0.31mg/dm2、剥離層の組成はMo23.42重量%、Ni69.81重量%、Fe2.55重量%であった。
剥離層、Cu−Al接着力向上層およびAl層を下記のように変更したことを除いては実施例1と同じ条件で実施した。
3.剥離層の形成
剥離層の付着量を0.89mg/dm2に形成した。
6.Cu−Al接着力向上層の形成
Cu−Al接着力向上層の接着力は8程度に製作した。
8.Al層の形成
Al層の厚さを0.4μmに形成し、表面粗さは1.5μmを有するように形成した。
実施例1の場合、Al層の上下の銅層との剥離強度は非常に良好であったし、特にCCL化をさせた後、Al層と極薄銅箔層の接着力が優秀であった。実施例2および3の場合、Al層とキャリアの剥離強度は非常に良好であったし、実施例4の場合、極薄銅箔とキャリアの剥離強度は付着量が高いため極薄銅箔とキャリア間の剥離強度が低下する問題が発生した。
実施例1、2および4の場合、Al層の表面粗さが低くてエッチングレートが優秀であるため回路形成時にファインパターンを得ることができたが、実施例3の場合、Al層の表面粗さが高いため実施例1、2よりエッチングレートが低下したし、回路形成時に所望のファインパターンを得ることができなかった。
実施例1〜4の場合、前記キャリア箔付き極薄銅箔を利用して半導体substrateを製作し、半導体チップと直径25〜70μmのワイヤー(金、アルミニウムなど)を利用して電気的に連結した時、Al層とワイヤー間のボンディング接着性も優秀であった。
図12は本発明の第3実施例に係るキャリア箔付き極薄銅箔の断面模式図であり、図13は本発明の第3実施例に係るキャリア箔付き極薄銅箔の断面をFIB(Focused Ion Beam)で撮影したイメージであり、図14はAl層が形成されない場合のマット面とシャイニー面の表面イメージであり、図15は本発明の第3実施例に係るキャリア箔付き極薄銅箔のマット面とシャイニー面の表面イメージである。
1.キャリア箔準備
キャリア箔の表面粗さは1.5μm、厚さは18μmの電解銅箔を使った。
2.拡散防止層の形成
下記の条件でNi−Pメッキによる拡散防止層を形成した。
Ni濃度:15g/L、P濃度8g/L
pH4.0
温度:30℃
電流密度:1.5A/dm2
メッキ時間:2秒
前記条件で形成した拡散防止層の付着量は金属(Ni)付着量301ug/dm2であった。
3.剥離層の形成
下記の条件でMo−Ni−Feメッキによる剥離層を形成した。
Mo濃度:20g/L、Ni濃度:6.5g/L、Fe濃度:3g/L、クエン酸ナトリウム:150g/L
pH10.2(アンモニア水30ml/L添加)
温度:30℃
電流密度:10A/dm2
メッキ時間:7秒
前記条件で形成した剥離層の付着量は1.07mg/dm2、剥離層の組成はMo60.55重量%、Ni29.8重量%、Fe5.99重量%であった。
4.酸化防止層の形成
下記の条件でNi−Pメッキによる酸化防止層を形成した。
Ni濃度:15g/L、P濃度8g/L
pH4.0
温度:30℃
電流密度:0.5A/dm2
メッキ時間:2秒
前記条件で形成した酸化防止層の付着量は金属(Ni)付着量30ug/dm2であった。
5.第1極薄銅箔の形成
下記の条件で第1極薄銅箔を形成した。
CuSO4−5H2O:300g/L、H2SO4:150g/L
温度:30℃
電流密度:20A/dm2
メッキ時間:25秒
前記条件で形成した第1極薄銅箔の厚さは2μmであった。
6.Cu−Al接着力向上層の形成
第1極薄銅箔とAl層間の接着力を向上させる層であって、Cuの厚さは0.03μmに形成した。
7.Al層の形成
ワイヤー接合層であるAlの厚さは0.5μmに形成され、表面粗さは前記キャリア箔の粗さと同じである1.5μmを有するように形成した。
8.第2極薄銅箔の形成
下記の条件で第2極薄銅箔を形成した。
CuSO4−5H2O:300g/L、H2SO4:150g/L
温度:30℃
電流密度:20A/dm2
メッキ時間:5秒
前記条件で形成した第2極薄銅箔の厚さは0.5μmであった。
Al層を下記のように変更したことを除いては実施例1と同じ条件で実施した。
7.Al層の形成
ワイヤー接合層であるAlの厚さは1.0μmに形成され、表面粗さはキャリア箔の粗さと同じである1.5μmを有するように形成した。
キャリア箔およびAl層を下記のように変更したことを除いては実施例1と同じ条件で実施した。
1.キャリア箔の準備
キャリアの表面粗さは3.0μm、厚さは18μmの電解銅箔を使った。
7.Al層の形成
ワイヤー接合層であるAl厚さは0.5μmに形成し、表面粗さはキャリア箔の粗さと同じである3.0μmを有するように形成した。
剥離層およびCu−Al接着力向上層を下記のように変更したことを除いては実施例1と同じ条件で実施した。
3.剥離層の形成
下記の条件でMo−Ni−Feメッキによる剥離層を形成した。
Mo濃度:20g/L、Ni濃度:6.5g/L、Fe濃度:3g/L、クエン酸ナトリウム:150g/L
pH10.2(アンモニア水30ml/L添加)
温度:30℃
電流密度:18A/dm2
メッキ時間:7秒
前記条件で形成した剥離層の付着量は1.89mg/dm2、剥離層の組成はMo51.99重量%、Ni38.8重量%、Fe5.55重量%であった。
6.Cu−Al接着力向上層形成
第1極薄銅箔とAl層間の接着力を向上させる層であって、Cuの厚さは0.1μmに形成した。
剥離層を下記のように変更したことを除いては実施例1と同じ条件で実施した。
3.剥離層の形成
下記の条件でMo−Ni−Feメッキによる剥離層を形成した。
Mo濃度:20g/L、Ni濃度:6.5g/L、Fe濃度:3g/L、クエン酸ナトリウム:150g/L
pH10.2(アンモニア水30ml/L添加)
温度:30℃
電流密度:3A/dm2
メッキ時間:7秒
前記条件で形成した剥離層の付着量は0.31mg/dm2、剥離層の組成はMo23.42重量%、Ni69.81重量%、Fe2.55重量%であった。
剥離層、Cu−Al接着力向上層およびAl層を下記のように変更したことを除いては実施例1と同じ条件で実施した。
3.剥離層の形成
剥離層の付着量を0.89mg/dm2に形成した。
6.Cu−Al接着力向上層形成
Cu−Al接着力向上層の接着力は8程度に製作した。
7.Al層の形成
Al層の厚さを0.4μmに形成し、表面粗さは1.5μmを有するように形成した。
実施例1の場合、Al層の上下の銅層との剥離強度は非常に良好であったし、特にCCL化をさせた後、Al層と極薄銅箔層の接着力が優秀であった。実施例2および3の場合、Al層とキャリアの剥離強度は非常に良好であったし、実施例4の場合、極薄銅箔とキャリアの剥離強度は付着量が高いため極薄銅箔とキャリア間の剥離強度が低下する問題が発生した。
実施例1、2および4の場合、Al層の表面粗さが低くてエッチングレートが優秀であるため回路形成時にファインパターンを得ることができたが、実施例3の場合、Al層の表面粗さが高いため実施例1、2よりエッチングレートが低下したし、回路形成時に所望のファインパターンを得ることができなかった。
実施例1〜4の場合、前記キャリア箔付き極薄銅箔を利用して半導体substrateを製作し、半導体チップと直径25〜70μmのワイヤー(金、アルミニウムなど)を利用して電気的に連結した時、Al層とワイヤー間のボンディング接着性も優秀であった。
Claims (11)
- キャリア箔、剥離層、第1極薄銅箔、Al層および第2極薄銅箔からなるキャリア箔付き極薄銅箔において、
前記剥離層は、
剥離性を有する第1金属(A1)、前記第1金属(A1)のメッキを容易にする第2金属(B1)および第3金属(C1)を含むことを特徴とする、キャリア箔付き極薄銅箔。 - 前記Al層の厚さ(t1)と半導体チップのボンディング用パッドの厚さ(t2)は
約0.0005≦t1/t2≦約3.0の式を満足する、請求項1に記載のキャリア箔付き極薄銅箔。 - 前記Al層の厚さ(t1)と半導体チップのボンディング用ワイヤーの厚さ(t3)は、
約0.0005≦t1/t3≦約3.0の式を満足する、請求項1に記載のキャリア箔付き極薄銅箔。 - 前記キャリア箔のマット面またはシャイニー面の表面粗さは約2.0um以下であり、
前記Al層は、
電解メッキまたはスパッタリング(sputtering)を通じて形成され、表面粗さは約2.0um以下である、請求項1に記載のキャリア箔付き極薄銅箔。 - 前記Al層は、電解メッキまたはスパッタリング(sputtering)を通じて形成され、
前記キャリア箔のマット面またはシャイニー面の表面粗さ(r1)と前記Al層の表面粗さ(r2)は、
r2/r1≦約3.0の式を満足する、請求項1に記載のキャリア箔付き極薄銅箔。 - 前記第1金属(A1)は、MoまたはWであり、
前記第2金属(B1)および前記第3金属(C1)は、Fe、CoおよびNiからなる群から選択される2個の互いに異なる金属であることを特徴とする、請求項1に記載のキャリア箔付き極薄銅箔。 - 前記剥離層は、
前記第1金属(A1)の含有量(a1)が約30〜約89重量%、前記第2金属(B1)の含有量(b1)が約10〜約60重量%および前記第3金属(C1)の含有量(c1)が約1〜約20重量%である、請求項1に記載のキャリア箔付き極薄銅箔。 - 前記剥離層の付着量の合計が約50〜約10000μg/dm2であることを特徴とする、請求項1に記載のキャリア箔付き極薄銅箔。
- 前記第1金属(A1)、前記第2金属(B1)および前記第3金属(C1)のうち少なくとも一つは有機金属であることを特徴とする、請求項1に記載のキャリア箔付き極薄銅箔。
- 前記第1極薄銅箔および前記第2極薄銅箔のうち少なくとも一つは、
電解メッキまたはスパッタリング(sputtering)を通じて形成されることを特徴とする、請求項1に記載のキャリア箔付き極薄銅箔。 - キャリア箔、拡散防止層、剥離層、酸化防止層、第1極薄銅箔、Al層および第2極薄銅箔からなるキャリア箔付き極薄銅箔において、
前記剥離層は、
剥離性を有する第1金属(A1)、前記第1金属のメッキを容易にする第2金属(B1)および第3金属(C1)を含み、
前記拡散防止層および前記酸化防止層は、
Ni、Co、Fe、Cr、Mo、W、AlおよびPからなる群から選択された一つ以上の元素を含む、キャリア箔付き極薄銅箔。
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