JP2020111794A - 軟磁性部材の製造方法 - Google Patents
軟磁性部材の製造方法 Download PDFInfo
- Publication number
- JP2020111794A JP2020111794A JP2019003661A JP2019003661A JP2020111794A JP 2020111794 A JP2020111794 A JP 2020111794A JP 2019003661 A JP2019003661 A JP 2019003661A JP 2019003661 A JP2019003661 A JP 2019003661A JP 2020111794 A JP2020111794 A JP 2020111794A
- Authority
- JP
- Japan
- Prior art keywords
- soft magnetic
- magnetic alloy
- atmosphere
- base material
- magnetic member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 229910001004 magnetic alloy Inorganic materials 0.000 claims abstract description 42
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000001301 oxygen Substances 0.000 claims abstract description 28
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 28
- 239000012298 atmosphere Substances 0.000 claims abstract description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000011248 coating agent Substances 0.000 claims abstract description 16
- 238000000576 coating method Methods 0.000 claims abstract description 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 23
- 238000010438 heat treatment Methods 0.000 claims description 21
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 239000011261 inert gas Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 abstract description 22
- 239000007789 gas Substances 0.000 abstract description 3
- 229910003145 α-Fe2O3 Inorganic materials 0.000 abstract 1
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 28
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 26
- 229910000859 α-Fe Inorganic materials 0.000 description 20
- 229910045601 alloy Inorganic materials 0.000 description 18
- 239000000956 alloy Substances 0.000 description 18
- 238000002441 X-ray diffraction Methods 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000013078 crystal Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 230000005415 magnetization Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 238000010791 quenching Methods 0.000 description 3
- 230000000171 quenching effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002159 nanocrystal Substances 0.000 description 2
- 229910001172 neodymium magnet Inorganic materials 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
- H01F41/026—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets protecting methods against environmental influences, e.g. oxygen, by surface treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
- B22D11/06—Continuous casting of metals, i.e. casting in indefinite lengths into moulds with travelling walls, e.g. with rolls, plates, belts, caterpillars
- B22D11/0611—Continuous casting of metals, i.e. casting in indefinite lengths into moulds with travelling walls, e.g. with rolls, plates, belts, caterpillars formed by a single casting wheel, e.g. for casting amorphous metal strips or wires
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G49/00—Compounds of iron
- C01G49/02—Oxides; Hydroxides
- C01G49/06—Ferric oxide [Fe2O3]
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/76—Adjusting the composition of the atmosphere
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D8/00—Modifying the physical properties by deformation combined with, or followed by, heat treatment
- C21D8/12—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of articles with special electromagnetic properties
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D8/00—Modifying the physical properties by deformation combined with, or followed by, heat treatment
- C21D8/12—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of articles with special electromagnetic properties
- C21D8/1244—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of articles with special electromagnetic properties the heat treatment(s) being of interest
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/02—Making non-ferrous alloys by melting
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/11—Making amorphous alloys
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/002—Ferrous alloys, e.g. steel alloys containing In, Mg, or other elements not provided for in one single group C22C38/001 - C22C38/60
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/08—Ferrous alloys, e.g. steel alloys containing nickel
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C45/00—Amorphous alloys
- C22C45/008—Amorphous alloys with Fe, Co or Ni as the major constituent
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/10—Oxidising
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/10—Oxidising
- C23C8/16—Oxidising using oxygen-containing compounds, e.g. water, carbon dioxide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/10—Oxidising
- C23C8/16—Oxidising using oxygen-containing compounds, e.g. water, carbon dioxide
- C23C8/18—Oxidising of ferrous surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
- H01F1/147—Alloys characterised by their composition
- H01F1/153—Amorphous metallic alloys, e.g. glassy metals
- H01F1/15383—Applying coatings thereon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/34—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials non-metallic substances, e.g. ferrites
- H01F1/342—Oxides
- H01F1/344—Ferrites, e.g. having a cubic spinel structure (X2+O)(Y23+O3), e.g. magnetite Fe3O4
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/02—Details of the magnetic circuit characterised by the magnetic material
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
- C01P2002/72—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D2201/00—Treatment for obtaining particular effects
- C21D2201/03—Amorphous or microcrystalline structure
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Dispersion Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Environmental & Geological Engineering (AREA)
- Soft Magnetic Materials (AREA)
Abstract
Description
(1)軟磁性合金基材の作製
Fe84B12Ni3の組成となるように原材料(Fe、B及びNi)を秤量し、アーク溶解にて溶解して混合した。均質に混合するため、反転させながら溶解を4回繰り返した。混合後、鋳造により合金の鋳塊を作製した。
作製した軟磁性合金薄帯を処理炉内に置いた。炉内を5Paまで排気した後、水蒸気と窒素の混合ガスで置換し、炉内の酸素濃度を酸素濃度計(日本ガイシ製SH−2D)で測定した。酸素濃度が0.01%になるまで排気と置換を繰り返した。炉内の全圧は大気圧とした。次いで、炉内を大気圧に保ちながら水蒸気と窒素の混合ガスを流し、軟磁性合金薄帯を300℃で120分間加熱した。加熱中の酸素濃度は0.01%、露点は24.1℃で、いずれもほぼ一定であった。加熱中の窒素、水蒸気、及び酸素の分圧はそれぞれ表1に示す通りであった。なお、水蒸気分圧はJIS Z 8806に従って求めた値である。
得られた試料のXRDパターンを図1に示す。軟磁性合金薄帯由来のα−Feのピークと軟磁性合金薄帯上に形成された被膜由来のα−Fe2O3のピークが見られた。α−Fe2O3以外の相の酸化鉄のピークは見られなかった。このことから、高い電気抵抗率を有するα−Fe2O3単相からなる被膜の形成が確認された。
酸素濃度計が0.1%を示すまで処理炉の排気と置換を繰り返したことと、軟磁性合金薄帯を300℃で180分間加熱したこと以外は実施例1と同様にして、試料を作製した。なお、加熱中の酸素濃度は0.1%、露点は24.1℃で、いずれもほぼ一定であった。加熱中の窒素、水蒸気、及び酸素の分圧はそれぞれ表1に示す通りであった。作製した試料のXRDパターンから、α−Fe2O3単相からなる被膜が形成されたことを確認した。
酸素濃度計が1%を示すまで処理炉の排気と置換を繰り返したことと、軟磁性合金薄帯を400℃で10分間加熱したこと以外は実施例1と同様にして、試料を作製した。なお、加熱中の酸素濃度は1%、露点は24.1℃でいずれもほぼ一定であった。加熱中の窒素、水蒸気、及び酸素の分圧はそれぞれ表1に示す通りであった。作製した試料のXRDパターンから、α−Fe2O3単相からなる被膜が形成されたことを確認した。
処理炉の排気及び置換を行わずに大気(空気)雰囲気で軟磁性合金薄帯を450℃で180分間加熱したこと以外は実施例1と同様にして、試料を作製した。なお、加熱中の酸素濃度は18%、露点は14℃でいずれもほぼ一定であった。加熱中の窒素、水蒸気、及び酸素の分圧はそれぞれ表1に示す通りであった。作製した試料のXRDパターンを図2に示す。軟磁性合金薄帯由来のα−Feのピークと軟磁性合金薄帯上に形成された酸化膜由来のα−Fe2O3に加え、FeOのピークも見られた。このことから、電気抵抗率の低いFeO相を含む被膜が形成されたことが確認された。
処理炉を排気した後酸素で置換したことと、酸素を流しながら軟磁性合金薄帯を450℃で180分間加熱したこと以外は実施例1と同様にして、試料を作製した。なお、加熱中の窒素、水蒸気、及び酸素の分圧はそれぞれ表1に示す通りであった。作製した試料のXRDパターンから、電気抵抗率の低いFeO相を含む被膜が形成されたことが確認された。
Claims (3)
- 水蒸気及び不活性ガスを含む雰囲気中で軟磁性合金基材を加熱して、前記軟磁性合金基材上に被膜を形成することを含み、
前記雰囲気の酸素分圧が0〜1.5kPaの範囲内である、軟磁性部材の製造方法。 - 前記不活性ガスが窒素である、請求項1に記載の軟磁性部材の製造方法。
- 前記雰囲気の露点が20〜25℃である、請求項1又は2に記載の軟磁性部材の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019003661A JP7260304B2 (ja) | 2019-01-11 | 2019-01-11 | 軟磁性部材の製造方法 |
US16/689,643 US11313022B2 (en) | 2019-01-11 | 2019-11-20 | Method for manufacturing soft magnetic member |
CN202010012394.8A CN111435630B (zh) | 2019-01-11 | 2020-01-07 | 软磁性材料的制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019003661A JP7260304B2 (ja) | 2019-01-11 | 2019-01-11 | 軟磁性部材の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020111794A true JP2020111794A (ja) | 2020-07-27 |
JP7260304B2 JP7260304B2 (ja) | 2023-04-18 |
Family
ID=71516036
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019003661A Active JP7260304B2 (ja) | 2019-01-11 | 2019-01-11 | 軟磁性部材の製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US11313022B2 (ja) |
JP (1) | JP7260304B2 (ja) |
CN (1) | CN111435630B (ja) |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005154791A (ja) * | 2003-11-20 | 2005-06-16 | Denso Corp | 軟磁性粉末材料の製造方法 |
JP2006049625A (ja) * | 2004-08-05 | 2006-02-16 | Denso Corp | 軟磁性材の製造方法 |
JP2006108475A (ja) * | 2004-10-07 | 2006-04-20 | Denso Corp | 軟磁性材の製造方法 |
WO2009041639A1 (ja) * | 2007-09-27 | 2009-04-02 | Hitachi Metals, Ltd. | 表面改質された希土類系焼結磁石の製造方法および表面改質された希土類系焼結磁石 |
KR20090057752A (ko) * | 2007-12-03 | 2009-06-08 | 주식회사 에이엠오 | 비정질 연자성 분말에 대한 산화층의 형성 방법 및 그방법에 의해 제조된 비정질 연자성 분말을 포함하는 전자파흡수체 |
JP2012084803A (ja) * | 2010-10-14 | 2012-04-26 | Kobe Steel Ltd | 圧粉磁心の製造方法およびこの製造方法によって得られる圧粉磁心 |
JP2012204486A (ja) * | 2011-03-24 | 2012-10-22 | Hitachi Metals Ltd | 表面改質されたR−Fe−B系焼結磁石およびその製造方法 |
JP2014063792A (ja) * | 2012-09-20 | 2014-04-10 | Hitachi Metals Ltd | 表面改質されたR−Fe−B系焼結磁石の製造方法 |
JP2018012868A (ja) * | 2016-07-21 | 2018-01-25 | 株式会社神戸製鋼所 | ばね用鋼線 |
WO2019003578A1 (ja) * | 2017-06-30 | 2019-01-03 | ソニー株式会社 | 磁気記録媒体 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58193303A (ja) | 1982-05-07 | 1983-11-11 | Sumitomo Electric Ind Ltd | 軟鉄系焼結部品の製造法 |
US5439534A (en) * | 1991-03-04 | 1995-08-08 | Mitsui Petrochemical Industries, Ltd. | Method of manufacturing and applying heat treatment to a magnetic core |
JP2995991B2 (ja) | 1991-03-04 | 1999-12-27 | 日本ケミコン株式会社 | 磁心の製造方法 |
JP3861288B2 (ja) * | 2002-10-25 | 2006-12-20 | 株式会社デンソー | 軟磁性材料の製造方法 |
JP2005310975A (ja) | 2004-04-20 | 2005-11-04 | Toyota Motor Corp | 焼結ネオジム磁石および製造方法、回転電機 |
JP4560077B2 (ja) | 2007-11-12 | 2010-10-13 | トヨタ自動車株式会社 | 磁心用粉末および磁心用粉末の製造方法 |
JP5327075B2 (ja) | 2010-01-20 | 2013-10-30 | 日立金属株式会社 | 軟磁性合金薄帯及びその製造方法、並びに軟磁性合金薄帯を有する磁性部品 |
EP2590188A4 (en) * | 2010-06-30 | 2017-04-12 | Hitachi Metals, Ltd. | Method of producing surface-modified rare earth sintered magnet |
CN103050267B (zh) * | 2012-12-31 | 2016-01-20 | 厦门钨业股份有限公司 | 一种基于细粉热处理的烧结Nd-Fe-B系磁铁制作方法 |
JP6392501B2 (ja) | 2013-05-10 | 2018-09-19 | 新日鐵住金ステンレス株式会社 | 絶縁性に優れた熱膨張係数の小さいステンレス製太陽電池用基板およびその製造方法 |
CN104008844B (zh) * | 2014-01-20 | 2017-05-10 | 横店集团东磁股份有限公司 | 一种软磁合金材料的制备加工方法 |
-
2019
- 2019-01-11 JP JP2019003661A patent/JP7260304B2/ja active Active
- 2019-11-20 US US16/689,643 patent/US11313022B2/en active Active
-
2020
- 2020-01-07 CN CN202010012394.8A patent/CN111435630B/zh not_active Expired - Fee Related
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005154791A (ja) * | 2003-11-20 | 2005-06-16 | Denso Corp | 軟磁性粉末材料の製造方法 |
JP2006049625A (ja) * | 2004-08-05 | 2006-02-16 | Denso Corp | 軟磁性材の製造方法 |
JP2006108475A (ja) * | 2004-10-07 | 2006-04-20 | Denso Corp | 軟磁性材の製造方法 |
WO2009041639A1 (ja) * | 2007-09-27 | 2009-04-02 | Hitachi Metals, Ltd. | 表面改質された希土類系焼結磁石の製造方法および表面改質された希土類系焼結磁石 |
KR20090057752A (ko) * | 2007-12-03 | 2009-06-08 | 주식회사 에이엠오 | 비정질 연자성 분말에 대한 산화층의 형성 방법 및 그방법에 의해 제조된 비정질 연자성 분말을 포함하는 전자파흡수체 |
JP2012084803A (ja) * | 2010-10-14 | 2012-04-26 | Kobe Steel Ltd | 圧粉磁心の製造方法およびこの製造方法によって得られる圧粉磁心 |
JP2012204486A (ja) * | 2011-03-24 | 2012-10-22 | Hitachi Metals Ltd | 表面改質されたR−Fe−B系焼結磁石およびその製造方法 |
JP2014063792A (ja) * | 2012-09-20 | 2014-04-10 | Hitachi Metals Ltd | 表面改質されたR−Fe−B系焼結磁石の製造方法 |
JP2018012868A (ja) * | 2016-07-21 | 2018-01-25 | 株式会社神戸製鋼所 | ばね用鋼線 |
WO2019003578A1 (ja) * | 2017-06-30 | 2019-01-03 | ソニー株式会社 | 磁気記録媒体 |
Also Published As
Publication number | Publication date |
---|---|
US11313022B2 (en) | 2022-04-26 |
JP7260304B2 (ja) | 2023-04-18 |
US20200224302A1 (en) | 2020-07-16 |
CN111435630B (zh) | 2022-07-29 |
CN111435630A (zh) | 2020-07-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5182601B2 (ja) | 非晶質合金薄帯、ナノ結晶軟磁性合金ならびにナノ結晶軟磁性合金からなる磁心 | |
JP5455041B2 (ja) | 軟磁性薄帯、その製造方法、磁性部品、およびアモルファス薄帯 | |
JP2008231463A (ja) | Fe基軟磁性合金、アモルファス合金薄帯、および磁性部品 | |
WO2009096382A1 (ja) | アモルファス軟磁性合金、アモルファス軟磁性合金薄帯、アモルファス軟磁性合金粉末およびそれを用いた磁心並びに磁性部品 | |
JP2008231462A (ja) | 磁性合金、アモルファス合金薄帯、および磁性部品 | |
JP6405261B2 (ja) | 磁気記録用軟磁性合金及びスパッタリングターゲット材並びに磁気記録媒体 | |
CN104233121B (zh) | 一种Fe基非晶纳米晶软磁材料及其制备方法 | |
JP2014156639A (ja) | 垂直磁気記録媒体における軟磁性膜層用CoFe系合金およびスパッタリングターゲット材 | |
JP2008231534A5 (ja) | ||
JP5916983B2 (ja) | 合金組成物、Fe基ナノ結晶合金及びその製造方法、並びに磁性部品 | |
JP4623400B2 (ja) | 軟磁性合金薄帯ならびにそれを用いた磁心及び装置 | |
JP2006045660A (ja) | Fe基非晶質合金薄帯および磁心体 | |
JP2010150602A (ja) | Fe基軟磁性薄帯およびそれを用いた高周波磁芯 | |
CN109880985B (zh) | 软磁材料的制造方法 | |
CN110556224B (zh) | 软磁材料及其制造方法 | |
JP5645108B2 (ja) | 非晶質合金薄帯および非晶質合金薄帯を有する磁性部品 | |
JP7260304B2 (ja) | 軟磁性部材の製造方法 | |
CN113628823B (zh) | 高耐蚀性的铁基纳米晶软磁合金及制备方法 | |
JP2006291234A (ja) | 微結晶合金薄帯 | |
JPH06220592A (ja) | 低鉄損・高磁束密度非晶質合金 | |
JP2020146714A (ja) | アモルファス系軟磁性材料の製造方法 | |
JP2021193201A (ja) | 超軟磁性Fe系非晶質合金 | |
CN113278897B (zh) | 一种铁基纳米晶软磁合金及其制备方法 | |
EP4083238A1 (en) | Alloy | |
JP2000144347A (ja) | Fe基軟磁性合金及びその磁歪の調整方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20211011 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220808 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220823 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220930 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20221115 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20221223 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230314 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230406 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 7260304 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |