JP2019508883A5 - - Google Patents
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- Publication number
- JP2019508883A5 JP2019508883A5 JP2018536291A JP2018536291A JP2019508883A5 JP 2019508883 A5 JP2019508883 A5 JP 2019508883A5 JP 2018536291 A JP2018536291 A JP 2018536291A JP 2018536291 A JP2018536291 A JP 2018536291A JP 2019508883 A5 JP2019508883 A5 JP 2019508883A5
- Authority
- JP
- Japan
- Prior art keywords
- metal oxide
- layer
- fluorine
- semiconductor layer
- depositing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000010410 layer Substances 0.000 claims 40
- 229910044991 metal oxide Inorganic materials 0.000 claims 28
- 150000004706 metal oxides Chemical class 0.000 claims 28
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 21
- 238000000034 method Methods 0.000 claims 17
- 239000004065 semiconductor Substances 0.000 claims 16
- 229910052731 fluorine Inorganic materials 0.000 claims 13
- 239000011737 fluorine Substances 0.000 claims 13
- 238000000151 deposition Methods 0.000 claims 10
- 239000007789 gas Substances 0.000 claims 7
- 238000000137 annealing Methods 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 238000005530 etching Methods 0.000 claims 3
- 239000011229 interlayer Substances 0.000 claims 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021117139A JP7260599B2 (ja) | 2016-01-14 | 2021-07-15 | フッ素処理によるｉｇｚｏパッシベーションの酸素空孔 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662278955P | 2016-01-14 | 2016-01-14 | |
| US62/278,955 | 2016-01-14 | ||
| US15/359,325 | 2016-11-22 | ||
| US15/359,325 US10134878B2 (en) | 2016-01-14 | 2016-11-22 | Oxygen vacancy of IGZO passivation by fluorine treatment |
| PCT/US2017/012872 WO2017123552A1 (en) | 2016-01-14 | 2017-01-10 | Oxygen vacancy of igzo passivation by fluorine treatment |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021117139A Division JP7260599B2 (ja) | 2016-01-14 | 2021-07-15 | フッ素処理によるｉｇｚｏパッシベーションの酸素空孔 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019508883A JP2019508883A (ja) | 2019-03-28 |
| JP2019508883A5 true JP2019508883A5 (enExample) | 2020-02-27 |
| JP6916186B2 JP6916186B2 (ja) | 2021-08-11 |
Family
ID=59311423
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018536291A Active JP6916186B2 (ja) | 2016-01-14 | 2017-01-10 | フッ素処理によるｉｇｚｏパッシベーションの酸素空孔 |
| JP2021117139A Active JP7260599B2 (ja) | 2016-01-14 | 2021-07-15 | フッ素処理によるｉｇｚｏパッシベーションの酸素空孔 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021117139A Active JP7260599B2 (ja) | 2016-01-14 | 2021-07-15 | フッ素処理によるｉｇｚｏパッシベーションの酸素空孔 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10134878B2 (enExample) |
| JP (2) | JP6916186B2 (enExample) |
| KR (1) | KR102706325B1 (enExample) |
| CN (1) | CN108475620B (enExample) |
| WO (1) | WO2017123552A1 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10224432B2 (en) * | 2017-03-10 | 2019-03-05 | Applied Materials, Inc. | Surface treatment process performed on devices for TFT applications |
| CN108281509B (zh) * | 2018-01-30 | 2020-03-17 | 电子科技大学 | 氧化物半导体基光电探测器及提高其性能的方法 |
| JP7153499B2 (ja) * | 2018-08-08 | 2022-10-14 | 東京エレクトロン株式会社 | 酸素含有被処理体の処理方法及び処理装置 |
| KR102760140B1 (ko) | 2019-02-11 | 2025-01-24 | 삼성디스플레이 주식회사 | 표시 장치 |
| KR102885296B1 (ko) | 2019-08-30 | 2025-11-12 | 삼성디스플레이 주식회사 | 표시 장치 |
| GB201913533D0 (en) | 2019-09-19 | 2019-11-06 | Univ Southampton | Optical thin films and fabrication thereof |
| US11430898B2 (en) | 2020-03-13 | 2022-08-30 | Applied Materials, Inc. | Oxygen vacancy of amorphous indium gallium zinc oxide passivation by silicon ion treatment |
| KR102752707B1 (ko) | 2020-05-29 | 2025-01-13 | 삼성디스플레이 주식회사 | 표시 장치 및 그 제조 방법 |
| TWI750902B (zh) * | 2020-11-18 | 2021-12-21 | 友達光電股份有限公司 | 薄膜電晶體及其形成方法 |
| CN113764282B (zh) * | 2021-09-03 | 2023-09-05 | 深圳市华星光电半导体显示技术有限公司 | 一种背沟道蚀刻型的薄膜电晶体及其制作方法 |
| CN114093889A (zh) * | 2021-11-02 | 2022-02-25 | Tcl华星光电技术有限公司 | 阵列基板及制备方法和显示面板 |
| CN114203556B (zh) * | 2021-12-08 | 2023-05-23 | 中山大学 | 一种用于调控氧化镓半导体表层电导的方法及半导体晶圆 |
| CN115188827B (zh) * | 2021-12-09 | 2025-05-30 | 友达光电股份有限公司 | 半导体装置及其制造方法 |
| CN114551608A (zh) * | 2022-03-09 | 2022-05-27 | 浙江理工大学 | 一种等离子处理氧化镓基日盲紫外探测器及其制备方法 |
| WO2024167931A1 (en) * | 2023-02-10 | 2024-08-15 | Lam Research Corporation | Control of flatband voltage in deposition of halogenated dielectric oxide |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5650655A (en) | 1994-04-28 | 1997-07-22 | Micron Technology, Inc. | Integrated circuitry having electrical interconnects |
| US5874745A (en) | 1997-08-05 | 1999-02-23 | International Business Machines Corporation | Thin film transistor with carbonaceous gate dielectric |
| US6379574B1 (en) * | 1999-05-03 | 2002-04-30 | Applied Materials, Inc. | Integrated post-etch treatment for a dielectric etch process |
| TWI435376B (zh) | 2006-09-26 | 2014-04-21 | Applied Materials Inc | 用於缺陷鈍化之高ｋ閘極堆疊的氟電漿處理 |
| WO2009117438A2 (en) * | 2008-03-20 | 2009-09-24 | Applied Materials, Inc. | Process to make metal oxide thin film transistor array with etch stopping layer |
| US8642380B2 (en) * | 2010-07-02 | 2014-02-04 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
| WO2012024114A2 (en) | 2010-08-20 | 2012-02-23 | Applied Materials, Inc. | Methods for forming a hydrogen free silicon containing dielectric film |
| US9312342B2 (en) * | 2010-12-16 | 2016-04-12 | The Regents Of The University Of California | Generation of highly N-type, defect passivated transition metal oxides using plasma fluorine insertion |
| JP6004308B2 (ja) | 2011-08-12 | 2016-10-05 | Ｎｌｔテクノロジー株式会社 | 薄膜デバイス |
| TWI522490B (zh) | 2012-05-10 | 2016-02-21 | 應用材料股份有限公司 | 利用微波電漿化學氣相沈積在基板上沈積膜的方法 |
| US8735305B2 (en) | 2012-05-24 | 2014-05-27 | Intermolecular, Inc. | Methods of forming fluorinated hafnium oxide gate dielectrics by atomic layer deposition |
| US20140091379A1 (en) * | 2012-10-01 | 2014-04-03 | Applied Materials, Inc. | Fluorocarbon coating having low refractive index |
| JP2016510171A (ja) | 2013-03-01 | 2016-04-04 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 金属酸化物ｔｆｔの安定性向上 |
| US20140273342A1 (en) * | 2013-03-13 | 2014-09-18 | Applied Materials, Inc. | Vth control method of multiple active layer metal oxide semiconductor tft |
| US20150140836A1 (en) * | 2013-11-18 | 2015-05-21 | Intermolecular, Inc. | Methods to Control SiO2 Etching During Fluorine Doping of Si/SiO2 Interface |
| US9871097B2 (en) * | 2014-06-20 | 2018-01-16 | Joled Inc. | Thin film transistor, method for manufacturing thin film transistor, and organic EL display device |
| WO2015198604A1 (ja) * | 2014-06-26 | 2015-12-30 | 株式会社Ｊｏｌｅｄ | 薄膜トランジスタ及び有機ｅｌ表示装置 |
| US20160155849A1 (en) * | 2014-12-02 | 2016-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing semiconductor device, module, and electronic device |
| KR20160137843A (ko) * | 2015-05-22 | 2016-12-01 | 엘지디스플레이 주식회사 | 고신뢰성 금속 산화물 반도체 물질을 포함하는 박막 트랜지스터 기판 |
| CN105572990B (zh) * | 2015-12-21 | 2019-07-12 | 武汉华星光电技术有限公司 | 阵列基板及其制造方法、液晶显示面板 |
-
2016
- 2016-11-22 US US15/359,325 patent/US10134878B2/en active Active
-
2017
- 2017-01-10 JP JP2018536291A patent/JP6916186B2/ja active Active
- 2017-01-10 CN CN201780006372.7A patent/CN108475620B/zh active Active
- 2017-01-10 KR KR1020187023363A patent/KR102706325B1/ko active Active
- 2017-01-10 WO PCT/US2017/012872 patent/WO2017123552A1/en not_active Ceased
-
2021
- 2021-07-15 JP JP2021117139A patent/JP7260599B2/ja active Active
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