JP2019503085A5 - - Google Patents

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Publication number
JP2019503085A5
JP2019503085A5 JP2018538593A JP2018538593A JP2019503085A5 JP 2019503085 A5 JP2019503085 A5 JP 2019503085A5 JP 2018538593 A JP2018538593 A JP 2018538593A JP 2018538593 A JP2018538593 A JP 2018538593A JP 2019503085 A5 JP2019503085 A5 JP 2019503085A5
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JP
Japan
Prior art keywords
field
oxide
integrated circuit
region
drift region
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Application number
JP2018538593A
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English (en)
Japanese (ja)
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JP7089144B2 (ja
JP2019503085A (ja
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Priority claimed from US15/003,776 external-priority patent/US9583612B1/en
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Publication of JP2019503085A publication Critical patent/JP2019503085A/ja
Publication of JP2019503085A5 publication Critical patent/JP2019503085A5/ja
Priority to JP2021201393A priority Critical patent/JP7429090B2/ja
Application granted granted Critical
Publication of JP7089144B2 publication Critical patent/JP7089144B2/ja
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JP2018538593A 2016-01-21 2017-01-23 側壁誘電体を備えるフィールド緩和酸化物に自己整合されるドリフト領域注入 Active JP7089144B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021201393A JP7429090B2 (ja) 2016-01-21 2021-12-13 側壁誘電体を備えるフィールド緩和酸化物に自己整合されるドリフト領域注入

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/003,776 US9583612B1 (en) 2016-01-21 2016-01-21 Drift region implant self-aligned to field relief oxide with sidewall dielectric
US15/003,776 2016-01-21
PCT/US2017/014581 WO2017127813A1 (en) 2016-01-21 2017-01-23 Drift region implant self-aligned to field relief oxide with sidewall dielectric

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2021201393A Division JP7429090B2 (ja) 2016-01-21 2021-12-13 側壁誘電体を備えるフィールド緩和酸化物に自己整合されるドリフト領域注入

Publications (3)

Publication Number Publication Date
JP2019503085A JP2019503085A (ja) 2019-01-31
JP2019503085A5 true JP2019503085A5 (enExample) 2020-02-27
JP7089144B2 JP7089144B2 (ja) 2022-06-22

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ID=58056574

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2018538593A Active JP7089144B2 (ja) 2016-01-21 2017-01-23 側壁誘電体を備えるフィールド緩和酸化物に自己整合されるドリフト領域注入
JP2021201393A Active JP7429090B2 (ja) 2016-01-21 2021-12-13 側壁誘電体を備えるフィールド緩和酸化物に自己整合されるドリフト領域注入

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2021201393A Active JP7429090B2 (ja) 2016-01-21 2021-12-13 側壁誘電体を備えるフィールド緩和酸化物に自己整合されるドリフト領域注入

Country Status (5)

Country Link
US (4) US9583612B1 (enExample)
EP (1) EP3430647A4 (enExample)
JP (2) JP7089144B2 (enExample)
CN (1) CN108475678B (enExample)
WO (1) WO2017127813A1 (enExample)

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