JP7089144B2 - 側壁誘電体を備えるフィールド緩和酸化物に自己整合されるドリフト領域注入 - Google Patents

側壁誘電体を備えるフィールド緩和酸化物に自己整合されるドリフト領域注入 Download PDF

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JP7089144B2
JP7089144B2 JP2018538593A JP2018538593A JP7089144B2 JP 7089144 B2 JP7089144 B2 JP 7089144B2 JP 2018538593 A JP2018538593 A JP 2018538593A JP 2018538593 A JP2018538593 A JP 2018538593A JP 7089144 B2 JP7089144 B2 JP 7089144B2
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drift region
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JP2019503085A5 (enExample
JP2019503085A (ja
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リッツマン エドワーズ ヘンリー
フー ビンホワ
ロバート トッド ジェームズ
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テキサス インスツルメンツ インコーポレイテッド
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JP2018538593A 2016-01-21 2017-01-23 側壁誘電体を備えるフィールド緩和酸化物に自己整合されるドリフト領域注入 Active JP7089144B2 (ja)

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