JP2019153667A - 加工装置 - Google Patents
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- JP2019153667A JP2019153667A JP2018037255A JP2018037255A JP2019153667A JP 2019153667 A JP2019153667 A JP 2019153667A JP 2018037255 A JP2018037255 A JP 2018037255A JP 2018037255 A JP2018037255 A JP 2018037255A JP 2019153667 A JP2019153667 A JP 2019153667A
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Abstract
Description
14 :チャックテーブル
70 :切削手段(加工手段)
73 :撮像手段
75 :タッチパネル
83 :加工溝
84 :入力欄
87 :入力カーソル
90 :制御手段
91 :カーソル検知部
92 :撮像制御部
93 :表示制御部
94 :チェック部
W :被加工物
Claims (3)
- 被加工物を保持するチャックテーブルと、該チャックテーブルに保持された被加工物に加工溝を形成する加工手段と、加工すべき領域を検出する撮像手段と、該撮像手段で撮像された画像を表示すると共にチェック条件のパラメータを入力するタッチパネルと、を備える加工装置であって、
該加工溝を形成している途中に、該加工手段の加工動作を中断して該加工溝を該撮像手段で撮像して該加工溝のチェックを実施し、
パラメータを調整して最適化を実施する際、操作者が該タッチパネルに表示された入力欄へパラメータを入力し該入力欄から入力カーソルを移動させると、該入力欄のパラメータで該加工溝のチェックを実行する制御手段を備える加工装置。 - パラメータが光量を含むことを特徴とする請求項1に記載の加工装置。
- パラメータが撮像位置を含むことを特徴とする請求項1又は請求項2に記載の加工装置。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018037255A JP7017949B2 (ja) | 2018-03-02 | 2018-03-02 | 加工装置 |
MYPI2019000917A MY194176A (en) | 2018-03-02 | 2019-02-20 | Control method for processing apparatus |
TW108106528A TWI786272B (zh) | 2018-03-02 | 2019-02-26 | 加工裝置的控制方法及半導體加工系統 |
SG10201901727S SG10201901727SA (en) | 2018-03-02 | 2019-02-27 | Control method for processing apparatus |
KR1020190023428A KR102655559B1 (ko) | 2018-03-02 | 2019-02-27 | 가공 장치의 제어 방법 |
US16/287,560 US10816952B2 (en) | 2018-03-02 | 2019-02-27 | Control method for processing apparatus |
CN201910148239.6A CN110223936B (zh) | 2018-03-02 | 2019-02-28 | 加工装置的控制方法 |
DE102019202712.1A DE102019202712A1 (de) | 2018-03-02 | 2019-02-28 | Steuerungsverfahren für eine Bearbeitungsvorrichtung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018037255A JP7017949B2 (ja) | 2018-03-02 | 2018-03-02 | 加工装置 |
Publications (2)
Publication Number | Publication Date |
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JP2019153667A true JP2019153667A (ja) | 2019-09-12 |
JP7017949B2 JP7017949B2 (ja) | 2022-02-09 |
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JP2018037255A Active JP7017949B2 (ja) | 2018-03-02 | 2018-03-02 | 加工装置 |
Country Status (8)
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US (1) | US10816952B2 (ja) |
JP (1) | JP7017949B2 (ja) |
KR (1) | KR102655559B1 (ja) |
CN (1) | CN110223936B (ja) |
DE (1) | DE102019202712A1 (ja) |
MY (1) | MY194176A (ja) |
SG (1) | SG10201901727SA (ja) |
TW (1) | TWI786272B (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101193655B1 (ko) * | 2010-04-16 | 2012-10-22 | 현대제철 주식회사 | 고강도 및 고연성을 갖는 고망간 규소 함유 강판 및 그 제조방법 |
KR101797319B1 (ko) * | 2015-12-23 | 2017-11-14 | 주식회사 포스코 | 용접성 및 연신율이 우수한 파이프용 열연강판 및 그 제조방법 |
DE102018126059A1 (de) * | 2018-10-19 | 2020-04-23 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Verfahren zum visualisieren von prozessinformationen bei der fertigung von blechbauteilen |
JP6651275B1 (ja) * | 2019-08-01 | 2020-02-19 | 株式会社ディスコ | 加工装置 |
JP7300938B2 (ja) * | 2019-09-02 | 2023-06-30 | 株式会社ディスコ | カーフの認識方法 |
JP7330636B2 (ja) * | 2020-01-27 | 2023-08-22 | 株式会社ディスコ | 加工装置における照明器の明るさの調整方法 |
JP7370265B2 (ja) * | 2020-01-30 | 2023-10-27 | 株式会社ディスコ | 加工方法及び加工装置 |
US11516406B2 (en) * | 2020-10-28 | 2022-11-29 | Baker Hughes Oilfield Operations Llc | Adaptive borescope inspection |
US11969854B2 (en) | 2021-03-05 | 2024-04-30 | Applied Materials, Inc. | Control of processing parameters during substrate polishing using expected future parameter changes |
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DE102019202712A1 (de) | 2019-09-05 |
TWI786272B (zh) | 2022-12-11 |
US20190271962A1 (en) | 2019-09-05 |
CN110223936B (zh) | 2024-02-02 |
KR102655559B1 (ko) | 2024-04-05 |
KR20190104907A (ko) | 2019-09-11 |
JP7017949B2 (ja) | 2022-02-09 |
TW201939594A (zh) | 2019-10-01 |
US10816952B2 (en) | 2020-10-27 |
CN110223936A (zh) | 2019-09-10 |
SG10201901727SA (en) | 2019-10-30 |
MY194176A (en) | 2022-11-17 |
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