JP2019033141A - 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 - Google Patents
炭化珪素半導体装置および炭化珪素半導体装置の製造方法 Download PDFInfo
- Publication number
- JP2019033141A JP2019033141A JP2017152024A JP2017152024A JP2019033141A JP 2019033141 A JP2019033141 A JP 2019033141A JP 2017152024 A JP2017152024 A JP 2017152024A JP 2017152024 A JP2017152024 A JP 2017152024A JP 2019033141 A JP2019033141 A JP 2019033141A
- Authority
- JP
- Japan
- Prior art keywords
- region
- silicon carbide
- type
- carbide semiconductor
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 206
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 204
- 239000004065 semiconductor Substances 0.000 title claims abstract description 154
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 59
- 230000001771 impaired effect Effects 0.000 claims abstract description 5
- 239000012535 impurity Substances 0.000 claims description 39
- 238000005468 ion implantation Methods 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 17
- 239000013078 crystal Substances 0.000 claims description 15
- 230000007547 defect Effects 0.000 claims description 12
- 238000005520 cutting process Methods 0.000 claims description 10
- 230000015556 catabolic process Effects 0.000 abstract description 7
- 239000010410 layer Substances 0.000 description 82
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 239000011229 interlayer Substances 0.000 description 11
- 238000000206 photolithography Methods 0.000 description 11
- 229910052782 aluminium Inorganic materials 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000002019 doping agent Substances 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 239000002344 surface layer Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 238000011179 visual inspection Methods 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910018503 SF6 Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 238000001994 activation Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7827—Vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
- H01L29/0661—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body specially adapted for altering the breakdown voltage by removing semiconductor material at, or in the neighbourhood of, a reverse biased junction, e.g. by bevelling, moat etching, depletion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7811—Vertical DMOS transistors, i.e. VDMOS transistors with an edge termination structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0638—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layer, e.g. with channel stopper
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
- Dicing (AREA)
Abstract
【解決手段】炭化珪素半導体装置は、第1導電型の半導体基板1に設けられた、主電流が流れる活性領域211と、活性領域211の外側に配置され、耐圧構造が形成された終端領域210と、終端領域210の外側に配置され、個別化する際に形成される切断面と接している、結晶性が損なわれているダメージ領域22と、を備える。
【選択図】図2
Description
本発明にかかる半導体装置は、ワイドバンドギャップ半導体を用いて構成される。実施の形態においては、ワイドバンドギャップ半導体として例えば炭化珪素(SiC)を用いて作製された炭化珪素半導体装置について、MOSFETを例に説明する。図1は、実施の形態にかかる炭化珪素半導体装置の活性領域の構造を示す断面図である。また、図2は、実施の形態にかかる炭化珪素半導体装置のエッジ終端領域および無効領域の構造を示す断面図である。
次に、実施の形態にかかる炭化珪素半導体装置の製造方法について説明する。図5〜図14は、実施の形態にかかる炭化珪素半導体装置の製造途中の状態を模式的に示す断面図である。
2 n型炭化珪素エピタキシャル層
2a 第1n型炭化珪素エピタキシャル層
2b 第2n型炭化珪素エピタキシャル層
3 p型炭化珪素エピタキシャル層
4 第1p+型ベース領域
4a 下部第1p+型ベース領域
4b 上部第1p+型ベース領域
5 第2p+型ベース領域
6 n型高濃度領域
6a 下部n型高濃度領域
6b 上部n型高濃度領域
7 n+型ソース領域
8 p++型コンタクト領域
9 ゲート絶縁膜
10 ゲート電極
11 層間絶縁膜
13 ソース電極
14 裏面電極
15 ソース電極パッド
16 めっき膜
17 はんだ
18 トレンチ
20 JTE領域
20a 第1JTE領域
20b 第2JTE領域
21 n+型半導体領域
22 ダメージ領域
31 n型炭化珪素基板
32 n-型ドリフト層
33 p+型ガードリング領域
34 ショットキー電極
35 下部電極
100 炭化珪素半導体素子
110 炭化珪素半導体ウェハ
200 個体化切断面
201 無効領域
210 エッジ終端領域
211 活性領域
212 ゲートパッド領域
220 表面側の歪
221 裏面側の歪
222 切断面側の歪
240 熱応力により拡大化した切断面の歪
Claims (7)
- 第1導電型の半導体基板に設けられた、主電流が流れる活性領域と、
前記活性領域の外側に配置され、耐圧構造が形成された終端領域と、
前記終端領域の外側に配置され、個別化する際に形成される切断面と接し、結晶性が損なわれているダメージ領域と、
を備えることを特徴とする炭化珪素半導体装置。 - 前記ダメージ領域は、結晶欠陥が形成された領域であることを特徴とする請求項1に記載の炭化珪素半導体装置。
- 前記ダメージ領域は、前記活性領域に設けられた半導体領域よりも不純物濃度が高い領域であることを特徴とする請求項2に記載の炭化珪素半導体装置。
- 前記ダメージ領域は、不純物濃度が1×1019/cm3以上1×1020/cm3以下であることを特徴とする請求項3に記載の炭化珪素半導体装置。
- 前記ダメージ領域は、前記半導体基板と反対側の表面側の領域で前記結晶欠陥の密度が、最も高いことを特徴とする請求項1〜4のいずれか一つに記載の炭化珪素半導体装置。
- 第1導電型の半導体基板に設けられた、主電流が流れる活性領域と、前記活性領域の外側に配置され、耐圧構造が形成された終端領域と、を備えた炭化珪素半導体装置の製造方法であって、
前記半導体基板上に炭化珪素半導体素子を形成する第1工程と、
前記終端領域の外側に、結晶性が損なわれているダメージ領域を形成する第2工程と、
前記ダメージ領域を切削することで、前記炭化珪素半導体素子を前記半導体基板から切り出す第3工程と、
を含むことを特徴とする炭化珪素半導体装置の製造方法。 - 前記第2工程では、前記ダメージ領域をイオン注入またはレーザーを照射することにより形成することを特徴とする請求項6に記載の炭化珪素半導体装置の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017152024A JP6953876B2 (ja) | 2017-08-04 | 2017-08-04 | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 |
US16/022,606 US10658465B2 (en) | 2017-08-04 | 2018-06-28 | Silicon carbide semiconductor device and method of manufacturing a silicon carbide semiconductor device |
CN201810709043.5A CN109390384B (zh) | 2017-08-04 | 2018-07-02 | 碳化硅半导体装置及碳化硅半导体装置的制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017152024A JP6953876B2 (ja) | 2017-08-04 | 2017-08-04 | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019033141A true JP2019033141A (ja) | 2019-02-28 |
JP6953876B2 JP6953876B2 (ja) | 2021-10-27 |
Family
ID=65230226
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017152024A Active JP6953876B2 (ja) | 2017-08-04 | 2017-08-04 | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10658465B2 (ja) |
JP (1) | JP6953876B2 (ja) |
CN (1) | CN109390384B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021068741A (ja) * | 2019-10-18 | 2021-04-30 | 富士電機株式会社 | 半導体装置 |
JP2021089982A (ja) * | 2019-12-04 | 2021-06-10 | 株式会社デンソー | 半導体装置の製造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005074485A (ja) * | 2003-09-01 | 2005-03-24 | Toshiba Corp | レーザ加工装置、加工マスク、レーザ加工方法、半導体装置の製造方法及び半導体装置 |
JP2015019014A (ja) * | 2013-07-12 | 2015-01-29 | 住友電気工業株式会社 | 半導体装置およびその製造方法 |
JP2015032789A (ja) * | 2013-08-06 | 2015-02-16 | 住友電気工業株式会社 | 炭化珪素半導体基板およびその製造方法、ならびに炭化珪素半導体装置の製造方法 |
JP2015220334A (ja) * | 2014-05-16 | 2015-12-07 | ローム株式会社 | 半導体装置 |
WO2017046868A1 (ja) * | 2015-09-15 | 2017-03-23 | 株式会社日立製作所 | 半導体装置およびその製造方法、電力変換装置、3相モータシステム、自動車並びに鉄道車両 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001189288A (ja) * | 1999-12-20 | 2001-07-10 | Ind Technol Res Inst | イオン注入利用の基板ダイシング法 |
JP2009123914A (ja) | 2007-11-15 | 2009-06-04 | Fuji Electric Device Technology Co Ltd | 逆耐圧を有するスイッチング用半導体装置 |
US7842583B2 (en) * | 2007-12-27 | 2010-11-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device |
JP6264211B2 (ja) | 2014-07-10 | 2018-01-24 | 住友電気工業株式会社 | 半導体装置の製造方法および半導体装置 |
WO2016068921A1 (en) * | 2014-10-30 | 2016-05-06 | Hewlett-Packard Development Company, L.P. | Fluid ejection device |
JP6244431B2 (ja) | 2016-10-31 | 2017-12-06 | 三星ダイヤモンド工業株式会社 | スクライブ装置 |
-
2017
- 2017-08-04 JP JP2017152024A patent/JP6953876B2/ja active Active
-
2018
- 2018-06-28 US US16/022,606 patent/US10658465B2/en active Active
- 2018-07-02 CN CN201810709043.5A patent/CN109390384B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005074485A (ja) * | 2003-09-01 | 2005-03-24 | Toshiba Corp | レーザ加工装置、加工マスク、レーザ加工方法、半導体装置の製造方法及び半導体装置 |
JP2015019014A (ja) * | 2013-07-12 | 2015-01-29 | 住友電気工業株式会社 | 半導体装置およびその製造方法 |
JP2015032789A (ja) * | 2013-08-06 | 2015-02-16 | 住友電気工業株式会社 | 炭化珪素半導体基板およびその製造方法、ならびに炭化珪素半導体装置の製造方法 |
JP2015220334A (ja) * | 2014-05-16 | 2015-12-07 | ローム株式会社 | 半導体装置 |
WO2017046868A1 (ja) * | 2015-09-15 | 2017-03-23 | 株式会社日立製作所 | 半導体装置およびその製造方法、電力変換装置、3相モータシステム、自動車並びに鉄道車両 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021068741A (ja) * | 2019-10-18 | 2021-04-30 | 富士電機株式会社 | 半導体装置 |
JP7516736B2 (ja) | 2019-10-18 | 2024-07-17 | 富士電機株式会社 | 半導体装置 |
JP2021089982A (ja) * | 2019-12-04 | 2021-06-10 | 株式会社デンソー | 半導体装置の製造方法 |
JP7294097B2 (ja) | 2019-12-04 | 2023-06-20 | 株式会社デンソー | 半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN109390384A (zh) | 2019-02-26 |
CN109390384B (zh) | 2023-11-21 |
US10658465B2 (en) | 2020-05-19 |
US20190043957A1 (en) | 2019-02-07 |
JP6953876B2 (ja) | 2021-10-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6759563B2 (ja) | 半導体装置および半導体装置の製造方法 | |
JP6766889B2 (ja) | 半導体装置および半導体装置の製造方法 | |
US9793392B2 (en) | Semiconductor device | |
JP2019208074A (ja) | 半導体装置 | |
JP6911486B2 (ja) | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 | |
WO2020110514A1 (ja) | 超接合炭化珪素半導体装置および超接合炭化珪素半導体装置の製造方法 | |
JP6848382B2 (ja) | 半導体装置および半導体装置の製造方法 | |
JP2009130266A (ja) | 半導体基板および半導体装置、半導体装置の製造方法 | |
JP6863464B2 (ja) | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 | |
JP6802454B2 (ja) | 半導体装置およびその製造方法 | |
JP2019004078A (ja) | 半導体装置および半導体装置の製造方法 | |
JP2019003969A (ja) | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 | |
JP5735077B2 (ja) | 半導体装置の製造方法 | |
JP2018022854A (ja) | 半導体装置および半導体装置の製造方法 | |
JP2017079225A (ja) | 半導体装置および半導体装置の製造方法 | |
WO2018117061A1 (ja) | 半導体装置および半導体装置の製造方法 | |
JP2017092355A (ja) | 半導体装置および半導体装置の製造方法 | |
JP2019047045A (ja) | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 | |
CN108574000B (zh) | 半导体装置和半导体装置的制造方法 | |
JP6946824B2 (ja) | 半導体装置および半導体装置の製造方法 | |
JP6953876B2 (ja) | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 | |
JP2020087954A (ja) | 半導体装置およびその製造方法 | |
JP2022060802A (ja) | 炭化珪素半導体装置 | |
JP2022038594A (ja) | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 | |
JP7310184B2 (ja) | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200714 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210415 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210420 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210604 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210831 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210913 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6953876 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |