JP2018528454A5 - - Google Patents
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- Publication number
- JP2018528454A5 JP2018528454A5 JP2017568351A JP2017568351A JP2018528454A5 JP 2018528454 A5 JP2018528454 A5 JP 2018528454A5 JP 2017568351 A JP2017568351 A JP 2017568351A JP 2017568351 A JP2017568351 A JP 2017568351A JP 2018528454 A5 JP2018528454 A5 JP 2018528454A5
- Authority
- JP
- Japan
- Prior art keywords
- particles
- substrate
- layer
- metal
- functional layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000000034 method Methods 0.000 claims 21
- 239000010410 layer Substances 0.000 claims 9
- 239000002245 particle Substances 0.000 claims 9
- 239000000758 substrate Substances 0.000 claims 9
- 229910052751 metal Inorganic materials 0.000 claims 7
- 239000002184 metal Substances 0.000 claims 7
- 239000002346 layers by function Substances 0.000 claims 6
- 238000005245 sintering Methods 0.000 claims 5
- 239000002082 metal nanoparticle Substances 0.000 claims 3
- 238000005406 washing Methods 0.000 claims 3
- 229920000139 polyethylene terephthalate Polymers 0.000 claims 2
- 239000005020 polyethylene terephthalate Substances 0.000 claims 2
- 239000002904 solvent Substances 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 238000000137 annealing Methods 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 229920006289 polycarbonate film Polymers 0.000 claims 1
- 239000011112 polyethylene naphthalate Substances 0.000 claims 1
- -1 polyethylene terephthalate Polymers 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 238000002604 ultrasonography Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562188553P | 2015-07-03 | 2015-07-03 | |
| US62/188,553 | 2015-07-03 | ||
| PCT/CA2016/050769 WO2017004704A1 (en) | 2015-07-03 | 2016-06-30 | Self-aligning metal patterning based on photonic sintering of metal nanoparticles |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2018528454A JP2018528454A (ja) | 2018-09-27 |
| JP2018528454A5 true JP2018528454A5 (https=) | 2019-08-08 |
Family
ID=57684612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017568351A Ceased JP2018528454A (ja) | 2015-07-03 | 2016-06-30 | 金属ナノ粒子の光焼結に基づく自己整合金属パターニング |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US11185918B2 (https=) |
| EP (1) | EP3317724B1 (https=) |
| JP (1) | JP2018528454A (https=) |
| KR (1) | KR20180029052A (https=) |
| CN (1) | CN107850834A (https=) |
| CA (1) | CA2990283C (https=) |
| TW (1) | TWI719032B (https=) |
| WO (1) | WO2017004704A1 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102169064B1 (ko) * | 2019-03-18 | 2020-10-22 | 서울시립대학교 산학협력단 | 빛-유도 광열 대류를 통한 콜로이드성 금속 나노입자 조립체 제조방법 |
| KR102421599B1 (ko) * | 2020-10-06 | 2022-07-15 | 재단법인대구경북과학기술원 | 광원을 통해 유도되는 연소반응 공정방법 |
| CN112578605A (zh) * | 2020-11-23 | 2021-03-30 | 义乌清越光电科技有限公司 | 一种电子纸封装结构、封装方法及电子器件 |
| KR102709694B1 (ko) * | 2021-09-14 | 2024-09-26 | 한국화학연구원 | 동박 적층판용 적층체, 이의 제조방법 및 미세 패턴 형성방법 |
| WO2023043140A1 (ko) * | 2021-09-14 | 2023-03-23 | 한국화학연구원 | 동박 적층판용 적층체, 이의 제조방법 및 미세 패턴 형성방법 |
| WO2023091324A1 (en) * | 2021-11-22 | 2023-05-25 | Corning Incorporated | Pulsed-laser sintering of ink-based electronics |
| KR102892843B1 (ko) * | 2023-12-07 | 2025-12-02 | 위아코퍼레이션 주식회사 | 반도체 마이크로 소자 패키징 방법 |
Family Cites Families (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2019046C (en) | 1989-06-16 | 1998-05-12 | Satoshi Okazaki | Method of printing fine patterns |
| JPH07273009A (ja) | 1994-03-31 | 1995-10-20 | Toppan Printing Co Ltd | 厚膜パターンの製造方法 |
| JP3246189B2 (ja) * | 1994-06-28 | 2002-01-15 | 株式会社日立製作所 | 半導体表示装置 |
| US5602047A (en) | 1996-06-13 | 1997-02-11 | Industrial Technology Research Institute | Process for polysilicon thin film transistors using backside irradiation and plasma doping |
| KR100229676B1 (ko) | 1996-08-30 | 1999-11-15 | 구자홍 | 셀프얼라인 박막트랜지스터 제조방법 |
| CN1404627A (zh) * | 2000-10-10 | 2003-03-19 | 纽约市哥伦比亚大学托管会 | 处理薄金属层的方法与设备 |
| US6972261B2 (en) | 2002-06-27 | 2005-12-06 | Xerox Corporation | Method for fabricating fine features by jet-printing and surface treatment |
| JP4482631B2 (ja) | 2004-02-20 | 2010-06-16 | 株式会社Em研究機構 | 発酵技術を応用した洗浄剤及びその製造方法 |
| US7309225B2 (en) | 2004-08-13 | 2007-12-18 | Molecular Imprints, Inc. | Moat system for an imprint lithography template |
| US7408187B2 (en) * | 2004-11-19 | 2008-08-05 | Massachusetts Institute Of Technology | Low-voltage organic transistors on flexible substrates using high-gate dielectric insulators by room temperature process |
| US20090020215A1 (en) | 2005-04-15 | 2009-01-22 | Hood Thomas G | Optical Coatings With Narrow Conductive Lines |
| JP2007129007A (ja) * | 2005-11-02 | 2007-05-24 | Hitachi Ltd | 有機半導体膜を有する半導体装置の製造方法 |
| GB0523437D0 (en) * | 2005-11-17 | 2005-12-28 | Imp College Innovations Ltd | A method of patterning a thin film |
| KR100718152B1 (ko) | 2006-02-11 | 2007-05-14 | 삼성전자주식회사 | 유기발광다이오드 및 그 제조방법 |
| US7749396B2 (en) | 2006-03-24 | 2010-07-06 | Palo Alto Research Center Incorporated | Method of manufacturing fine features for thin film transistors |
| US7745101B2 (en) | 2006-06-02 | 2010-06-29 | Eastman Kodak Company | Nanoparticle patterning process |
| US7491646B2 (en) * | 2006-07-20 | 2009-02-17 | Xerox Corporation | Electrically conductive feature fabrication process |
| TWI308800B (en) * | 2006-10-26 | 2009-04-11 | Ind Tech Res Inst | Method for making thin film transistor and structure of the same |
| EP1933393A1 (en) | 2006-12-13 | 2008-06-18 | Samsung SDI Co., Ltd. | Method of manufacturing a substrate for an electronic device |
| US7615483B2 (en) | 2006-12-22 | 2009-11-10 | Palo Alto Research Center Incorporated | Printed metal mask for UV, e-beam, ion-beam and X-ray patterning |
| US8404160B2 (en) | 2007-05-18 | 2013-03-26 | Applied Nanotech Holdings, Inc. | Metallic ink |
| US7722422B2 (en) * | 2007-05-21 | 2010-05-25 | Global Oled Technology Llc | Device and method for improved power distribution for a transparent electrode |
| KR100882023B1 (ko) | 2007-05-25 | 2009-02-05 | 한국생산기술연구원 | 표면에너지 제어를 이용한 패터닝 방법 |
| US20090181172A1 (en) | 2007-10-15 | 2009-07-16 | Nanoink, Inc. | Lithography of nanoparticle based inks |
| JP4867904B2 (ja) | 2007-12-10 | 2012-02-01 | セイコーエプソン株式会社 | 導体パターン形成用インク、導体パターン、導体パターンの形成方法および配線基板 |
| CN102017071B (zh) * | 2008-02-28 | 2013-12-18 | 3M创新有限公司 | 图案化基底上的导体的方法 |
| WO2010034815A1 (en) * | 2008-09-25 | 2010-04-01 | Imec | Method for forming self-aligned electrodes |
| US8647979B2 (en) * | 2009-03-27 | 2014-02-11 | Applied Nanotech Holdings, Inc. | Buffer layer to enhance photo and/or laser sintering |
| KR100984256B1 (ko) | 2009-08-17 | 2010-09-30 | (주) 파루 | 자기 정렬 그라비어인쇄를 이용한 중첩정밀도 제어 방법 |
| KR101295888B1 (ko) | 2010-05-10 | 2013-08-12 | 한국전자통신연구원 | 저항형 메모리 장치 및 그 제조 방법 |
| US8465905B2 (en) | 2011-04-04 | 2013-06-18 | Eastman Kodak Company | Printing conductive lines |
| JP2013065633A (ja) | 2011-09-15 | 2013-04-11 | Ricoh Co Ltd | 電気機械変換膜の製造方法、電気機械変換素子の製造方法、該製造方法により製造した電気機械変換素子、液滴吐出ヘッド及び液滴吐出装置 |
| KR20130045225A (ko) * | 2011-10-25 | 2013-05-03 | 헤레우스 프레셔스 메탈즈 노스 아메리카 콘쇼호켄 엘엘씨 | 금속 나노입자를 함유한 전도성 페이스트 |
| US9096759B2 (en) | 2011-12-21 | 2015-08-04 | E I Du Pont De Nemours And Company | Printing form and process for preparing the printing form with curable composition having solvent-free epoxy resin |
| TW201335969A (zh) | 2012-02-17 | 2013-09-01 | Nat Univ Tsing Hua | 微縮奈微米線寬之方法 |
| EP2917948A1 (en) | 2012-11-08 | 2015-09-16 | Merck Patent GmbH | Method for producing organic electronic devices with bank structures, bank structures and electronic devices produced therewith |
| KR102026165B1 (ko) * | 2013-04-26 | 2019-09-27 | 쇼와 덴코 가부시키가이샤 | 도전 패턴의 제조방법 및 도전 패턴 형성 기판 |
| US9310685B2 (en) * | 2013-05-13 | 2016-04-12 | Nokia Technologies Oy | Method and apparatus for the formation of conductive films on a substrate |
| JP2015111563A (ja) | 2013-11-06 | 2015-06-18 | Dowaエレクトロニクス株式会社 | 銅粒子分散液およびそれを用いた導電膜の製造方法 |
| CN104750311B (zh) | 2015-03-16 | 2018-02-13 | 深圳市宇顺电子股份有限公司 | 金属网格导电膜的制作方法、金属网格导电膜及触控面板 |
| EP3514822B1 (en) * | 2016-09-16 | 2023-04-26 | Toray Industries, Inc. | Method for manufacturing field effect transistor and method for manufacturing wireless communication device |
-
2016
- 2016-06-30 US US15/740,589 patent/US11185918B2/en active Active
- 2016-06-30 WO PCT/CA2016/050769 patent/WO2017004704A1/en not_active Ceased
- 2016-06-30 CN CN201680039569.6A patent/CN107850834A/zh active Pending
- 2016-06-30 JP JP2017568351A patent/JP2018528454A/ja not_active Ceased
- 2016-06-30 EP EP16820595.3A patent/EP3317724B1/en active Active
- 2016-06-30 KR KR1020187003057A patent/KR20180029052A/ko not_active Withdrawn
- 2016-06-30 CA CA2990283A patent/CA2990283C/en active Active
- 2016-07-01 TW TW105120938A patent/TWI719032B/zh not_active IP Right Cessation
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