JP2018526821A5 - - Google Patents
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- Publication number
- JP2018526821A5 JP2018526821A5 JP2018506188A JP2018506188A JP2018526821A5 JP 2018526821 A5 JP2018526821 A5 JP 2018526821A5 JP 2018506188 A JP2018506188 A JP 2018506188A JP 2018506188 A JP2018506188 A JP 2018506188A JP 2018526821 A5 JP2018526821 A5 JP 2018526821A5
- Authority
- JP
- Japan
- Prior art keywords
- gate
- source
- sensing
- drain
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 229910052751 metal Inorganic materials 0.000 claims 43
- 239000002184 metal Substances 0.000 claims 43
- 239000000758 substrate Substances 0.000 claims 27
- 238000000034 method Methods 0.000 claims 26
- 229910021332 silicide Inorganic materials 0.000 claims 25
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 10
- 230000000903 blocking effect Effects 0.000 claims 10
- 239000000463 material Substances 0.000 claims 10
- 125000006850 spacer group Chemical group 0.000 claims 10
- 239000003989 dielectric material Substances 0.000 claims 9
- 230000004888 barrier function Effects 0.000 claims 8
- 239000002019 doping agent Substances 0.000 claims 8
- 239000004065 semiconductor Substances 0.000 claims 6
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 5
- 229920005591 polysilicon Polymers 0.000 claims 5
- 239000000377 silicon dioxide Substances 0.000 claims 5
- 235000012239 silicon dioxide Nutrition 0.000 claims 5
- 229910052715 tantalum Inorganic materials 0.000 claims 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims 2
- 230000003213 activating effect Effects 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- 239000010949 copper Substances 0.000 claims 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 239000000908 ammonium hydroxide Substances 0.000 claims 1
- 239000007864 aqueous solution Substances 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- 239000003870 refractory metal Substances 0.000 claims 1
- 239000004071 soot Substances 0.000 claims 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 238000001039 wet etching Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/819,401 | 2015-08-05 | ||
| US14/819,401 US9431253B1 (en) | 2015-08-05 | 2015-08-05 | Fabrication flow based on metal gate process for making low cost flash memory |
| PCT/US2016/045895 WO2017024274A1 (en) | 2015-08-05 | 2016-08-05 | Low cost flash memory fabrication flow based on metal gate process |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018526821A JP2018526821A (ja) | 2018-09-13 |
| JP2018526821A5 true JP2018526821A5 (enExample) | 2019-09-12 |
| JP7021821B2 JP7021821B2 (ja) | 2022-02-17 |
Family
ID=56739928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018506188A Active JP7021821B2 (ja) | 2015-08-05 | 2016-08-05 | 金属ゲートプロセスに基づく低コストのフラッシュメモリ製造フロー |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US9431253B1 (enExample) |
| JP (1) | JP7021821B2 (enExample) |
| CN (1) | CN107924921B (enExample) |
| WO (1) | WO2017024274A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102568562B1 (ko) * | 2017-01-24 | 2023-08-18 | 삼성전자주식회사 | 반도체 장치 |
| US10868027B2 (en) * | 2018-07-13 | 2020-12-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Structure and method for preventing silicide contamination during the manufacture of micro-processors with embedded flash memory |
| EP3742476B1 (en) * | 2019-05-20 | 2024-11-06 | Infineon Technologies AG | Method of implanting an implant species into a substrate at different depths |
| CN113130516A (zh) * | 2020-01-15 | 2021-07-16 | 联华电子股份有限公司 | 半导体影像感测元件及其制作方法 |
| US20250351346A1 (en) * | 2024-05-10 | 2025-11-13 | Stmicroelectronics International N.V. | Non-volatile memory cell with single poly floating gate and contact control gate |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5518942A (en) * | 1995-02-22 | 1996-05-21 | Alliance Semiconductor Corporation | Method of making flash EPROM cell having improved erase characteristics by using a tilt angle implant |
| KR0179175B1 (ko) * | 1995-10-05 | 1999-03-20 | 문정환 | 반도체 메모리 장치 및 제조방법 |
| EP1005079B1 (en) * | 1998-11-26 | 2012-12-26 | STMicroelectronics Srl | Process for integrating in a same chip a non-volatile memory and a high-performance logic circuitry |
| JP2000164736A (ja) * | 1998-11-30 | 2000-06-16 | Toshiba Corp | 不揮発性半導体メモリ及びその製造方法 |
| US6628544B2 (en) * | 1999-09-30 | 2003-09-30 | Infineon Technologies Ag | Flash memory cell and method to achieve multiple bits per cell |
| JP3479010B2 (ja) * | 1999-11-04 | 2003-12-15 | Ｎｅｃエレクトロニクス株式会社 | 不揮発性半導体記憶装置の製造方法 |
| JP3829088B2 (ja) * | 2001-03-29 | 2006-10-04 | 株式会社東芝 | 半導体記憶装置 |
| US6914820B1 (en) * | 2002-05-06 | 2005-07-05 | Multi Level Memory Technology | Erasing storage nodes in a bi-directional nonvolatile memory cell |
| US6642111B1 (en) * | 2002-07-09 | 2003-11-04 | Powerchip Semiconductor Corp. | Memory device structure and method of fabricating the same |
| JP4829015B2 (ja) * | 2006-06-20 | 2011-11-30 | 株式会社東芝 | 不揮発性半導体記憶装置 |
| JP2008205379A (ja) * | 2007-02-22 | 2008-09-04 | Toshiba Corp | 不揮発性半導体メモリ及びその製造方法 |
| JP2009016688A (ja) * | 2007-07-06 | 2009-01-22 | Sharp Corp | 半導体装置の製造方法 |
| JP5167721B2 (ja) * | 2007-08-10 | 2013-03-21 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
| US7745295B2 (en) * | 2007-11-26 | 2010-06-29 | Micron Technology, Inc. | Methods of forming memory cells |
| US20100163952A1 (en) * | 2008-12-31 | 2010-07-01 | Chia-Hong Jan | Flash Cell with Integrated High-K Dielectric and Metal-Based Control Gate |
| KR102006586B1 (ko) * | 2010-08-06 | 2019-08-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
| CN101941696B (zh) * | 2010-09-15 | 2012-07-04 | 复旦大学 | 一种适用于石墨烯基场效应管制造的纳米光刻方法 |
| US20120223381A1 (en) * | 2011-03-03 | 2012-09-06 | Lu Hau-Yan | Non-volatile memory structure and method for manufacturing the same |
| JP2013197533A (ja) * | 2012-03-22 | 2013-09-30 | Toshiba Corp | 記憶装置及びその製造方法 |
| US8930866B2 (en) * | 2013-03-11 | 2015-01-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of converting between non-volatile memory technologies and system for implementing the method |
| US9236453B2 (en) * | 2013-09-27 | 2016-01-12 | Ememory Technology Inc. | Nonvolatile memory structure and fabrication method thereof |
-
2015
- 2015-08-05 US US14/819,401 patent/US9431253B1/en active Active
-
2016
- 2016-07-29 US US15/223,109 patent/US10211303B2/en active Active
- 2016-08-05 CN CN201680045464.1A patent/CN107924921B/zh active Active
- 2016-08-05 JP JP2018506188A patent/JP7021821B2/ja active Active
- 2016-08-05 WO PCT/US2016/045895 patent/WO2017024274A1/en not_active Ceased
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