JP2018518544A - エンジニアードポリマー系電子材料 - Google Patents
エンジニアードポリマー系電子材料 Download PDFInfo
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- JP2018518544A JP2018518544A JP2017551199A JP2017551199A JP2018518544A JP 2018518544 A JP2018518544 A JP 2018518544A JP 2017551199 A JP2017551199 A JP 2017551199A JP 2017551199 A JP2017551199 A JP 2017551199A JP 2018518544 A JP2018518544 A JP 2018518544A
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- 229920000642 polymer Polymers 0.000 title claims abstract description 38
- 239000012776 electronic material Substances 0.000 title claims description 4
- 239000000203 mixture Substances 0.000 claims abstract description 234
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 152
- 229910021389 graphene Inorganic materials 0.000 claims abstract description 122
- 239000000945 filler Substances 0.000 claims abstract description 99
- 238000000034 method Methods 0.000 claims abstract description 64
- 239000000463 material Substances 0.000 claims abstract description 39
- 239000002245 particle Substances 0.000 claims abstract description 35
- 230000008569 process Effects 0.000 claims abstract description 31
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910052751 metal Inorganic materials 0.000 claims abstract description 19
- 239000002184 metal Substances 0.000 claims abstract description 19
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 17
- 239000010439 graphite Substances 0.000 claims abstract description 17
- 229910052709 silver Inorganic materials 0.000 claims abstract description 17
- 239000004332 silver Substances 0.000 claims abstract description 17
- 229910052582 BN Inorganic materials 0.000 claims abstract description 15
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims abstract description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 13
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims abstract description 12
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 12
- 239000010432 diamond Substances 0.000 claims abstract description 12
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229920000049 Carbon (fiber) Polymers 0.000 claims abstract description 11
- 239000004917 carbon fiber Substances 0.000 claims abstract description 11
- 239000002121 nanofiber Substances 0.000 claims abstract description 11
- 239000011787 zinc oxide Substances 0.000 claims abstract description 11
- 229910021393 carbon nanotube Inorganic materials 0.000 claims abstract description 10
- 239000002041 carbon nanotube Substances 0.000 claims abstract description 10
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract 5
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract 2
- 229910000679 solder Inorganic materials 0.000 claims description 94
- 239000003822 epoxy resin Substances 0.000 claims description 25
- 229920000647 polyepoxide Polymers 0.000 claims description 25
- 239000003054 catalyst Substances 0.000 claims description 21
- 239000007788 liquid Substances 0.000 claims description 19
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 18
- 239000003795 chemical substances by application Substances 0.000 claims description 17
- 229910045601 alloy Inorganic materials 0.000 claims description 16
- 239000000956 alloy Substances 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 239000000853 adhesive Substances 0.000 claims description 15
- 230000001070 adhesive effect Effects 0.000 claims description 15
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 14
- 239000007787 solid Substances 0.000 claims description 13
- 238000009835 boiling Methods 0.000 claims description 11
- 239000003960 organic solvent Substances 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 239000012190 activator Substances 0.000 claims description 10
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 9
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical class P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 9
- 239000002318 adhesion promoter Substances 0.000 claims description 9
- 150000008064 anhydrides Chemical class 0.000 claims description 9
- 150000004982 aromatic amines Chemical class 0.000 claims description 9
- 230000001588 bifunctional effect Effects 0.000 claims description 9
- 239000001569 carbon dioxide Substances 0.000 claims description 9
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 9
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 claims description 9
- 239000003607 modifier Substances 0.000 claims description 9
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- 230000002829 reductive effect Effects 0.000 claims description 4
- 238000005476 soldering Methods 0.000 claims description 4
- 239000000654 additive Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 125000000962 organic group Chemical group 0.000 claims description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 125000003277 amino group Chemical group 0.000 claims description 2
- 238000005266 casting Methods 0.000 claims description 2
- 238000007606 doctor blade method Methods 0.000 claims description 2
- 238000004100 electronic packaging Methods 0.000 claims description 2
- 125000003700 epoxy group Chemical group 0.000 claims description 2
- 125000004185 ester group Chemical group 0.000 claims description 2
- 125000001905 inorganic group Chemical group 0.000 claims description 2
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- 239000013543 active substance Substances 0.000 claims 2
- 206010034962 Photopsia Diseases 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 230000009969 flowable effect Effects 0.000 claims 1
- 239000002071 nanotube Substances 0.000 claims 1
- 229910000065 phosphene Inorganic materials 0.000 claims 1
- 239000012779 reinforcing material Substances 0.000 claims 1
- 150000003839 salts Chemical class 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 25
- 238000012360 testing method Methods 0.000 description 19
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- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 8
- 238000005452 bending Methods 0.000 description 7
- 239000010410 layer Substances 0.000 description 6
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- 239000011541 reaction mixture Substances 0.000 description 5
- 238000002791 soaking Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 125000000524 functional group Chemical group 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
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- 239000012467 final product Substances 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- 239000008240 homogeneous mixture Substances 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 239000002105 nanoparticle Substances 0.000 description 3
- 230000002787 reinforcement Effects 0.000 description 3
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- 229920001169 thermoplastic Polymers 0.000 description 3
- 239000004416 thermosoftening plastic Substances 0.000 description 3
- 229910052723 transition metal Inorganic materials 0.000 description 3
- 150000003624 transition metals Chemical class 0.000 description 3
- PLIKAWJENQZMHA-UHFFFAOYSA-N 4-aminophenol Chemical compound NC1=CC=C(O)C=C1 PLIKAWJENQZMHA-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- 238000005119 centrifugation Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000002082 metal nanoparticle Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229910001848 post-transition metal Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Chemical compound [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000000930 thermomechanical effect Effects 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- OUPZKGBUJRBPGC-UHFFFAOYSA-N 1,3,5-tris(oxiran-2-ylmethyl)-1,3,5-triazinane-2,4,6-trione Chemical compound O=C1N(CC2OC2)C(=O)N(CC2OC2)C(=O)N1CC1CO1 OUPZKGBUJRBPGC-UHFFFAOYSA-N 0.000 description 1
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- GZMAAYIALGURDQ-UHFFFAOYSA-N 2-(2-hexoxyethoxy)ethanol Chemical compound CCCCCCOCCOCCO GZMAAYIALGURDQ-UHFFFAOYSA-N 0.000 description 1
- DPBYCORQBMMFJZ-UHFFFAOYSA-N 20-episilicine Natural products O=C1CC2C(CC)CN(C)CC2CC2=C1NC1=CC=CC=C21 DPBYCORQBMMFJZ-UHFFFAOYSA-N 0.000 description 1
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- MQJKPEGWNLWLTK-UHFFFAOYSA-N Dapsone Chemical compound C1=CC(N)=CC=C1S(=O)(=O)C1=CC=C(N)C=C1 MQJKPEGWNLWLTK-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229920000997 Graphane Polymers 0.000 description 1
- 208000025599 Heat Stress disease Diseases 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- NEIHULKJZQTQKJ-UHFFFAOYSA-N [Cu].[Ag] Chemical compound [Cu].[Ag] NEIHULKJZQTQKJ-UHFFFAOYSA-N 0.000 description 1
- 229920006397 acrylic thermoplastic Polymers 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- ROUIDRHELGULJS-UHFFFAOYSA-N bis(selanylidene)tungsten Chemical compound [Se]=[W]=[Se] ROUIDRHELGULJS-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 1
- ZZTCPWRAHWXWCH-UHFFFAOYSA-N diphenylmethanediamine Chemical compound C=1C=CC=CC=1C(N)(N)C1=CC=CC=C1 ZZTCPWRAHWXWCH-UHFFFAOYSA-N 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- -1 for example Chemical compound 0.000 description 1
- 238000007306 functionalization reaction Methods 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- PQTCMBYFWMFIGM-UHFFFAOYSA-N gold silver Chemical compound [Ag].[Au] PQTCMBYFWMFIGM-UHFFFAOYSA-N 0.000 description 1
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 150000002738 metalloids Chemical class 0.000 description 1
- 238000007431 microscopic evaluation Methods 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 150000002924 oxiranes Chemical class 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 235000011837 pasties Nutrition 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 238000011417 postcuring Methods 0.000 description 1
- 239000012286 potassium permanganate Substances 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 230000003678 scratch resistant effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000004317 sodium nitrate Substances 0.000 description 1
- 235000010344 sodium nitrate Nutrition 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000005050 thermomechanical fatigue Methods 0.000 description 1
- 239000012815 thermoplastic material Substances 0.000 description 1
- QFYLHFKHVJDVMT-UHFFFAOYSA-N triphenylene-2,3,6,7,10,11-hexaimine Chemical group N=C1C(=N)C=C2C3=CC(=N)C(=N)C=C3C3=CC(=N)C(=N)C=C3C2=C1 QFYLHFKHVJDVMT-UHFFFAOYSA-N 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L63/00—Compositions of epoxy resins; Compositions of derivatives of epoxy resins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/36—Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest
- B23K35/3612—Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest with organic compounds as principal constituents
- B23K35/3613—Polymers, e.g. resins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
- B23K1/0016—Brazing of electronic components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
- B23K1/203—Fluxing, i.e. applying flux onto surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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Abstract
Description
そこでは、前記有機媒体は、ポリマーを含み、
前記フィラーは、グラフェン、官能化グラフェン、酸化グラフェン、多面体オリゴマーシルセスキオサン、黒鉛、2D材料、酸化アルミニウム、酸化亜鉛、窒化アルミニウム、窒化ホウ素、銀、ナノ繊維、カーボン繊維、ダイアモンド、カーボンナノチューブ、二酸化シリコン、及び金属被覆粒子のうちの一以上を含み、
前記組成物は、前記組成物の全重量の0.001重量%から40重量%の前記フィラーを含む。
少なくとも280℃の沸点を有する30重量%から40重量%の有機溶媒、
5重量%から10重量%の種々の官能性のエポキシ樹脂、
好ましくは高分子量である、15重量%から30重量%の固体二官能性エポキシ樹脂、
ジカルボン酸を含む3重量%から10重量%の活性剤、
置換芳香族アミンを含む2重量%から8重量%の触媒、
ホスフェン系塩を含む1重量%から5重量%の触媒、
1重量%から5重量%の液状無水物型硬化剤、
0.1重量%から4重量%の液体型応力調整剤、及び
0.1重量%から3重量%の接着促進剤を含む。
少なくとも280℃の沸点を有する30重量%から40重量%の有機溶媒、及び/又は、
5重量%から10重量%の種々の官能性のエポキシ樹脂、及び/又は、
好ましくは高分子量である、15重量%から30重量%の固体二官能性エポキシ樹脂、及び/又は、
ジカルボン酸を含む3重量%から10重量%の活性剤、及び/又は、
置換芳香族アミンを含む2重量%から8重量%の触媒、及び/又は、
ホスフェン系塩を含む1重量%から5重量%の触媒、及び/又は、
1重量%から5重量%の液状無水物型硬化剤、及び/又は、
0.1重量%から4重量%の液体型応力調整剤、及び/又は、
0.1重量%から3重量%の接着促進剤を含む。
少なくとも280℃の沸点を有する約39重量%の有機溶媒、
約8重量%の種々の官能性のエポキシ樹脂、
好ましくは高分子量である、約29重量%の固体二官能性エポキシ樹脂、
ジカルボン酸を含む約9重量%の活性剤、
置換芳香族アミンを含む約3重量%の触媒、
ホスフェン系塩を含む約4重量%の触媒、
約2重量%の液状無水物型硬化剤、
約4重量%の液体型応力調整剤、及び
約2重量%の接着促進剤を含む。
本明細書に記載の半田ペーストを、接合される2以上のワークピース間に供給すること、及び
半田ペーストを加熱して半田ジョイントを形成することを含む方法を提供する。
ポリマーを含む有機媒体を供給すること、及び
前記有機媒体にフィラーを分散することを含み、
前記フィラーが、グラフェン、2D材料、官能化グラフェン、酸化グラフェン、多面体オリゴマーシルセスキオサン、黒鉛、酸化アルミニウム、酸化亜鉛、窒化アルミニウム、窒化ホウ素、銀、ナノ繊維、カーボン繊維、ダイアモンド、カーボンナノチューブ、二酸化シリコン、及び金属被覆粒子のうち一以上を含み、
前記組成物が、前記組成物の全重量の0.001重量%から40重量%の前記フィラーを含む方法を提供する。
前記フィラーが、グラフェン、2D材料、官能化グラフェン、酸化グラフェン、多面体オリゴマーシルセスキオサン、黒鉛、酸化アルミニウム、酸化亜鉛、窒化アルミニウム、窒化ホウ素、銀、ナノ繊維、カーボン繊維、ダイアモンド、カーボンナノチューブ、二酸化シリコン、及び金属被覆粒子のうち一以上を含み、
前記組成物が、前記組成物の全重量の0.001重量%から40重量%のフィラーを含む組成物を提供する。
前記有機媒体が、ポリマーを含み、
前記フィラーが、グラフェン、官能化グラフェン、酸化グラフェン、多面体オリゴマーシルセスキオサン、黒鉛、2D材料、酸化アルミニウム、酸化亜鉛、窒化アルミニウム、窒化ホウ素、銀、ナノ繊維、カーボン繊維、ダイアモンド、カーボンナノチューブ、二酸化シリコン、及び金属被覆粒子のうち一以上を含み、
前記組成物が、ポリマー前記組成物の全重量の0.001重量%から40重量%のフィラーを含む組成物を提供する。
前記フィラーが、グラフェン、官能化グラフェン、酸化グラフェン、多面体オリゴマーシルセスキオサン、黒鉛、2D材料、酸化アルミニウム、酸化亜鉛、窒化アルミニウム、窒化ホウ素、銀、ナノ繊維、カーボン繊維、ダイアモンド、カーボンナノチューブ、二酸化シリコン、及び金属被覆粒子の一以上を含むフィラーの使用を提供する。
前記フィラーが、グラフェン、官能化グラフェン、酸化グラフェン、多面体オリゴマーシルセスキオサン、黒鉛、2D材料、酸化アルミニウム、酸化亜鉛、窒化アルミニウム、窒化ホウ素、銀、ナノ繊維、カーボン繊維、ダイアモンド、カーボンナノチューブ、二酸化シリコン、及び金属被覆粒子の一以上を含むフィラーの使用を提供する。CTEを制御することで、組成物の熱疲労寿命が高められうる。
改良ハマーズ法を使用して、天然フレーク状黒鉛から酸化黒鉛を調製した。市販の黒鉛粉末及び10gの硝酸ナトリウムを、500mLの98%濃度の硫酸に撹拌下で添加し、次に氷バッチに保持した。15分後、10gの黒鉛粉末(300メッシュ)をゆっくり添加し、10分間撹拌して均質な混合物を得た。反応混合物全体を氷バッチ内で撹拌しながら、67gの過マンガン酸カリウムを非常にゆっくり慎重に添加した。〜30分の全反応後に、反応混合物全体を〜40℃に維持されたホットプレートセットに移動させた。次に、反応混合物の色が赤みを帯びるまで、〜2.5時間撹拌した。その後、室温において、〜30分間冷却させた。その後、撹拌下で500mLの脱イオン水を非常にゆっくり添加した。10分〜15分撹拌した後、1Lの脱イオン温水と、その後に100mlの30体積%の過酸化水素を反応混合物に添加し、〜5分間撹拌した。最終生成物を4,000rpmで8分間行われる遠心分離により分離し、次に同じ遠心分離条件で脱イオン水により徹底的かつ綿密に洗浄した。未反応化学物質や副産物が全て除去されるように、かつpHが〜7に近づくように、この工程をほぼ〜20回繰り返した。次に、アセトンで3回〜4回洗浄し、65℃に設定したオーブンに保持して完全に乾燥させた。次に、酸化黒鉛粉末を固体の形態で得て、さらなる使用に備えた。
a)高沸点の有機溶媒:39重量%
b)種々の官能性のエポキシ樹脂:8重量%
c)高分子量かつ二官能性の固体エポキシ樹脂:29%
d)活性剤としてのジカルボン酸:9重量%
e)触媒としての置換芳香族アミン:3重量%
f)触媒としてのホスフェン系塩:4重量%
g)液状無水物型硬化剤/触媒:2重量%
h)液体型応力調整剤:4重量%
i)接着促進剤:2重量%
組成物を半田粒子と混合して半田ペーストを形成した。また、上記の組成物を使用し、しかしフィラーは使用せずに半田ペーストを調製した(比較例)。半田ペーストを使用し、SMT方法を使用して、印刷回路基板に半田ジョイントを形成した。
装置:
・エスペック熱サイクルチャンバー(空気−空気)TSA−101S
・アジレント34980Aデータロガー
試験条件:
・IPC9701−A規格にしたがった試験
・−40℃(10分)から+125℃(10分)を1,000サイクル
故障定義付け:
・IPC9701−Aによる:公称抵抗値の20%上昇(最大で5回までの連続読み取り走査において)
故障分析:
・240サイクル、500サイクル、750サイクル、及び1,000サイクル後の断面、顕微鏡分析
以下の手順を用いて衝撃曲げ試験を行った。
試験条件:
・試験装置をデータロガーに接続
・固定基板たわみを1.2ミリメートルとして使用
・最初の故障が発生するまで試験
・衝撃を与える部品箇所:部品の角
・衝撃を与えるピンの形状:円形(直径10ミリメートル)
試験装置:
・表面仕上げ:EniG
・50×50ミリメートル、0.8ミリメートル厚さ
・部品:BGA84
故障定義付け
・電気抵抗の200Ω上昇
以下の手順を用いて落下衝撃耐性試験を行った。
装置:
・ランスモントHC18衝撃テスター
・ランスモントTP4
・アナテックイベント検出器
試験条件:
・JEDEC規格JESD22−B111「ハンドヘルド電子製品の部品の基板レベル落下試験方法」に従う
・使用条件Bを使用(1,500Gs、0.5msecパルス、半正弦曲線)
Claims (45)
- 電子組み立てプロセスに使用される組成物であって、
有機媒体に分散されたフィラーを含み、
前記有機媒体が、ポリマーを含み、
前記フィラーが、グラフェン、官能化グラフェン、酸化グラフェン、多面体オリゴマーシルセスキオサン、黒鉛、2D材料、酸化アルミニウム、酸化亜鉛、窒化アルミニウム、窒化ホウ素、銀、ナノ繊維、カーボン繊維、ダイアモンド、カーボンナノチューブ、二酸化シリコン、及び金属被覆粒子のうち一以上を含み、
前記組成物が、前記組成物の全重量の0.001重量%から40重量%の前記フィラーを含むことを特徴とする組成物。 - 前記組成物の前記全重量の0.01重量%から10重量%の前記フィラー、好ましくは、前記組成物の前記全重量の0.02重量%から5重量%の前記フィラー、より好ましくは、前記組成物の前記全重量の0.03重量%から4重量%の前記フィラー、さらにより好ましくは、前記組成物の前記全重量の0.04重量%から1重量%の前記フィラー、さらにより好ましくは、前記組成物の前記全重量の0.04重量%から0.8重量%の前記フィラーを含む請求項1に記載の組成物。
- 前記組成物の前記全重量の0.05重量%から0.4重量%の前記フィラーを含む請求項1に記載の組成物。
- 前記組成物が、硬化性組成物であり、及び/又は、前記ポリマーが硬化性ポリマーである請求項1から3のいずれかに記載の組成物。
- 前記フィラーが、グラフェン、酸化グラフェン、官能化グラフェン、及び多面体オリゴマーシルセスキオサンのうち一以上を含む請求項1から4のいずれかに記載の組成物。
- 前記フィラーが、
多面体オリゴマーシルセスキオサン、及び
グラフェン及び官能化グラフェンのうち一以上を含む請求項1から5のいずれかに記載の組成物。 - 前記フィラーが、官能化グラフェンを含み、前記官能化グラフェンが、酸化グラフェンを含む請求項1から6のいずれかに記載の組成物。
- 前記フィラーが、官能化グラフェンを含み、前記官能化グラフェンが、有機及び/又は無機基により、好ましくは、アミン基、シラン基及び/又はチタネート基、エポキシ基、エステル基、及び多面体オリゴマーシルセスキオサンのうち一以上により官能化されている請求項1から7のいずれかに記載の組成物。
- 前記フィラーが、官能化グラフェンを含み、前記官能化グラフェンが、多面体オリゴマーシルセスキオサンにより官能化されたグラフェンを含む請求項1から8のいずれかに記載の組成物。
- 前記ポリマーが、エポキシ樹脂を含み、好ましくは、前記エポキシ樹脂が、種々の官能性のエポキシ樹脂、及び/又は、高分子量の固体二官能性エポキシ樹脂を含む請求項1から9のいずれかに記載の組成物。
- 前記フィラーが、酸化グラフェンを含み、
前記組成物が、0.1重量%から4重量%の前記酸化グラフェンを含む請求項1から5のいずれかに記載の組成物。 - 前記有機媒体が、
少なくとも280℃の沸点を有する30重量%から40重量%の有機溶媒、
5重量%から10重量%の種々の官能性のエポキシ樹脂、
好ましくは高分子量である、15重量%から30重量%の固体二官能性エポキシ樹脂、
ジカルボン酸を含む3重量%から10重量%の活性剤、
置換芳香族アミンを含む2重量%から8重量%の触媒、
ホスフェン系塩を含む1重量%から5重量%の触媒、
1重量%から5重量%の液状無水物型硬化剤、
0.1重量%から4重量%の液体型応力調整剤、及び
0.1重量%から3重量%の接着促進剤を含む請求項11に記載の組成物。 - 前記有機媒体が、一以上の有機溶媒をさらに含む請求項1から12のいずれかに記載の組成物。
- 前記有機溶媒が、少なくとも280℃の沸点を有する請求項13に記載のポリマー組成物。
- 前記有機媒体が、活性剤をさらに含み、好ましくは、前記活性剤が、ジカルボン酸を含む請求項1から14のいずれかに記載の組成物。
- 前記有機媒体が、触媒をさらに含み、好ましくは、前記触媒が、置換芳香族アミン及び/又はホスフェン系塩を含む請求項1から15のいずれかに記載の組成物。
- 前記有機媒体が、硬化剤をさらに含み、好ましくは、前記硬化剤が、液状無水物型硬化剤を含む請求項1から16のいずれかに記載の組成物。
- 前記有機媒体が、応力調整剤、好ましくは、液体型応力調整剤をさらに含む請求項1から17のいずれかに記載の組成物。
- 前記有機媒体が、接着促進剤をさらに含む請求項1から18のいずれかに記載の組成物。
- 前記有機媒体が、
少なくとも280℃の沸点を有する30重量%から40重量%の有機溶媒、及び/又は
5重量%から10重量%の種々の官能性のエポキシ樹脂、及び/又は
高分子量である15重量%から30重量%の固体二官能性エポキシ樹脂、及び/又は
ジカルボン酸を含む3重量%から10重量%の活性剤、及び/又は
置換芳香族アミンを含む2重量%から8重量%の触媒、及び/又は
ホスフェン系塩を含む1重量%から5重量%の触媒、及び/又は
1重量%から5重量%の液状無水物型硬化剤、及び/又は
0.1重量%から4重量%の液体型応力調整剤、及び/又は
0.1重量%から3重量%の接着促進剤を含む請求項1から19のいずれかに記載の組成物。 - 前記有機媒体が、
少なくとも280℃の沸点を有する約39重量%の有機溶媒、
約8重量%の種々の官能性のエポキシ樹脂、
高分子量である約29重量%の固体二官能性エポキシ樹脂、
ジカルボン酸を含む約9重量%の活性剤、
置換芳香族アミンを含む約3重量%の触媒、
ホスフェン系塩を含む約4重量%の触媒、
約2重量%の液状無水物型硬化剤、
約4重量%の液体型応力調整剤、及び
約2重量%の接着促進剤を含む請求項1から20のいずれかに記載の組成物。 - 前記組成物が、膜転写(film transfer)、ピン転写、部品の浸漬、ディスペンシング、吐出、印刷、噴霧、キャスティング、及びドクターブレード法のうち一以上を使用して、デバイスに塗布されうる請求項1から21のいずれかに記載の組成物。
- 前記組成物が、毛管作用添加剤(capillary additives)を使用して、高温で流動可能である請求項1から22のいずれかに記載の組成物。
- 硬化した前記組成物のつば高さ(collar height)が、浸漬高さ及び/又は浸漬時間を変化させることにより、最大100%まで変化させうる請求項1から23のいずれかに記載の組成物。
- 前記フィラーが、グラフェン、酸化グラフェン、黒鉛フレーク、グラフェンプレートレット、還元された酸化グラフェン、又はこれらのうち2つ以上の組合せを含む請求項1から24のいずれかに記載の組成物。
- 前記組成物が、着色顔料を含む請求項1から25のいずれかに記載の組成物。
- 膜(film)の形態である請求項1から26のいずれかに記載の組成物。
- 請求項1から27のいずれかに記載の組成物を含むことを特徴とするアンダーフィル。
- 前記アンダーフィルが、一以上の工程で塗布可能であり、好ましくは、前記一以上の工程が、浸漬及び/又はディスペンシングを含む請求項28に記載のアンダーフィル。
- 請求項1から27のいずれかに記載の組成物を含むことを特徴とする半田フラックス。
- 請求項1から27のいずれかに記載の組成物を含むことを特徴とする片側又は両側補強材料。
- 半田合金、及び
請求項1から27のいずれかに記載の組成物を含むことを特徴とする電子材料。 - 導電性粒子、及び
請求項1から27のいずれかに記載の組成物を含むことを特徴とする導電性接着剤。 - 非導電性粒子、及び
請求項1から27のいずれかに記載の組成物を含むことを特徴とする非導電性接着剤。 - 半田粒子、及び
請求項1から27のいずれかに記載の組成物を含むことを特徴とする半田ペースト。 - 一度硬化させた請求項1から27のいずれかに記載の組成物。
- 硬化ポリマー組成物で少なくとも部分的に封入された半田ジョイントであって、前記ポリマー組成物が、請求項1から27のいずれかに記載のポリマー組成物であることを特徴とする半田ジョイント。
- 半田ジョイントを形成する方法であって、
接合される2以上のワークピースの間に請求項35に記載の半田ペーストを供給すること、及び
前記半田ペーストを加熱して半田ジョイントを形成することを含むことを特徴とする方法。 - 接合される2以上の前記ワークピースの間に前記半田ペーストを供給する工程は、前記ワークピースの少なくとも1つに前記半田ペーストを塗布することを含み、
前記ペーストが、膜の形態であり、
前記半田ペーストの加熱が、ホットスタンピングを含む請求項38に記載の方法。 - 請求項1から27のいずれかに記載の組成物を製造する方法であって、
ポリマーを含む有機媒体を供給すること、及び
前記有機媒体にフィラーを分散することを含み、
前記フィラーが、グラフェン、酸化グラフェン、2D材料、官能化グラフェン、酸化グラフェン、多面体オリゴマーシルセスキオサン、黒鉛、酸化アルミニウム、酸化亜鉛、窒化アルミニウム、窒化ホウ素、銀、ナノ繊維、カーボン繊維、ダイアモンド、カーボンナノチューブ、二酸化シリコン、及び金属被覆粒子のうち一以上を含み、
前記組成物が、前記組成物の全重量の0.001重量%から40重量%の前記フィラーを含むことを特徴とする方法。 - 電子組み立て方法、ダイ取り付け方法、リフロー半田付け方法、回路基板製造方法、及び太陽電池製造方法から選択される方法における請求項1から27のいずれかに記載の組成物の使用。
- 電子パッケージング、フリップチップ、LED組み立て、及び気密封止における請求項1から27のいずれかに記載の組成物の使用。
- 12Pa・sから20Pa・sの粘度を有し、改良された機械的強度、改良された熱疲労耐性、及び改良されたバリア性のうち一以上を有する組成物を提供するためのフィラーの使用であって、
前記フィラーが、グラフェン、酸化グラフェン、官能化グラフェン、多面体オリゴマーシルセスキオサン、黒鉛、2D材料、酸化アルミニウム、酸化亜鉛、窒化アルミニウム、窒化ホウ素、銀、ナノ繊維、カーボン繊維、ダイアモンド、カーボンナノチューブ、二酸化シリコン、及び金属被覆粒子のうち一以上を含むことを特徴とするフィラーの使用。 - 印刷、ピン転写、ノーフロー接着剤組成物などの電子組み立て用途における請求項1から27のいずれかに記載の組成物の使用であって、
前記組成物が、20Pa・s超の粘度を有することを特徴とする組成物の使用。 - 硬化性組成物の熱膨張係数(CTE)を制御するためのフィラーの使用であって、
前記フィラーが、グラフェン、酸化グラフェン、官能化グラフェン、多面体オリゴマーシルセスキオサン、黒鉛、2D材料、酸化アルミニウム、酸化亜鉛、窒化アルミニウム、窒化ホウ素、銀、ナノ繊維、カーボン繊維、ダイアモンド、カーボンナノチューブ、二酸化シリコン、及び金属被覆粒子のうち一以上を含むことを特徴とするフィラーの使用。
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