JP2018516215A - Gas permeable window and manufacturing method thereof - Google Patents

Abstract

A gas permeable glass window suitable for use in liquid interface addition manufacturing has an optically clear glass article that is thicker than about 0.5 millimeters and that defines a first surface and a second surface. A plurality of gas flow paths are disposed through the article from the first surface to the second surface. The gas flow path occupies less than about 1.0% of the surface area of the article, and the article is about 10 barrers (about 75 × 10 ⁻¹⁸ m ⁴ / (N · s)) and about 2000 barrers (about 15002 × 10 8). It is configured to have a gas permeability between ⁻¹⁸ m ⁴ / (N · s)).

Description

Cross-reference of related applications

  This application claims the benefit of priority of US Provisional Patent Application No. 62 / 139,238, filed March 27, 2015, under 35 USC 119, the contents of which are relied upon and generally referenced Is incorporated herein by reference.

  The present invention relates to a gas permeable window and a method for manufacturing the same.

  In general, polymeric materials have low transparency to light having wavelengths in the ultraviolet region of the spectrum. Furthermore, polymeric materials typically have lower stiffness values than other light transmissive materials. Furthermore, if the polymer material is processed to be permeable to certain gases, the permeability and stiffness attributes of the polymer material can be reduced.

  Accordingly, it is desirable to produce an article that is highly rigid and transparent to ultraviolet light while allowing gas to pass through.

According to one embodiment, a gas permeable glass window suitable for use in liquid interface addition manufacturing includes an optically clear glass article that is thicker than about 0.5 millimeters. The glass article defines a first surface and a second surface. A plurality of gas flow paths are disposed through the article from the first surface to the second surface. The gas flow path occupies less than about 1.0% of the surface area of the article, and the article is about 10 barrers (about 75 × 10 ⁻¹⁸ m ⁴ / (N · s)) and about 2000 barrers (about 15002 × 10 8). It is configured to have a gas permeability between ⁻¹⁸ m ⁴ / (N · s)).

  According to another embodiment, a method of forming a gas permeable glass window comprises providing an optically transparent glass article having a first surface and a second surface, and a pulsed laser beam. The process of focusing on the focal line of the laser beam viewed along the propagation direction, and the focal line of the laser beam are repeated in the optically transparent glass article at an angle of incidence on the first surface of the glass article. Forming a plurality of gas flow paths in the article. The focal line of the laser beam causes induced absorption in the article, and each induced absorption is a gas flow path along the focal line of the laser beam from the first surface to the second surface in the article. Form. The number and diameter of the gas flow paths are determined based on the desired gas permeability of the article.

  According to other embodiments, the gas permeable window includes an optically transparent article that defines a first surface and a second surface. A plurality of gas flow paths extend from the first surface to the second surface. The gas flow path is disposed at an angle between about 0 ° and about 15 ° with respect to an axis orthogonal to the first and second surfaces. The angle of the channel increases as the distance from the center point increases.

  Additional features and advantages will be set forth in the following detailed description, and in part will be readily apparent to those skilled in the art from the description, or in addition to the accompanying drawings. It will be understood by implementing the embodiments described herein, including the description, and the claims.

  It is understood that both the foregoing general description and the following detailed description are exemplary only and are intended to provide an overview or framework for understanding the nature and characteristics of the claims. Should be. The accompanying drawings are included for further understanding and are incorporated in and constitute a part of this specification. The drawings illustrate one or more embodiments and, together with the detailed description, serve to explain the principles and operations of the various embodiments.

1 is a perspective view of a gas permeable window according to one embodiment. FIG. It is sectional drawing emphasized along the II line of FIG. 1 by one Embodiment. It is sectional drawing emphasized along the II line of FIG. 1 by other embodiment. It is sectional drawing emphasized along the II line of FIG. 1 by further embodiment. 1 is a schematic diagram showing an optical assembly for laser drilling. FIG. It is a figure which shows the alternative process of locating the focal line of a laser beam with respect to articles | goods. It is a figure which shows the laser drilling method of the window by other embodiment. FIG. 6 illustrates the use of a window according to one embodiment. FIG. 6 is a diagram showing an emphasized window according to an alternative embodiment.

  Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers will be used throughout the drawings to refer to the same or like parts.

  For the purposes of this description, "upper", "lower", "right", "left", "rear", "front", "vertical", "horizontal", and their derivatives The term shall refer to the gas permeable window 10 in the orientation of FIG. 1 unless stated otherwise. However, it should be understood that the gas permeable window 10 may assume a variety of alternative orientations unless explicitly stated otherwise. It is further understood that the specific devices and processes illustrated in the accompanying drawings and described in the following specification are merely exemplary embodiments of the inventive concepts defined in the appended claims. Should. Thus, unless expressly stated otherwise, the specific dimensions and other physical characteristics relating to the embodiments disclosed herein are not to be considered limiting.

  With reference now to FIGS. 1-2C, one embodiment of a gas permeable window 10 is shown. The window 10 may be suitable for use in a liquid interface addition manufacturing apparatus as well as an application example in which equalization of gas is desired. The window 10 includes an optically transparent article 14 that defines a first surface 18 and a second surface 22. A plurality of gas flow paths 26 extend through the optically transparent article 14. The gas flow path 26 extends from the first surface 18 to the second surface 22 to facilitate fluid and optical communication between the spaces on different sides of the window 10. Although each gas flow path 26 is illustrated as completely penetrating through the article 14, it will be understood that some gas flow paths 26 may not penetrate completely through the article 14. Should. Article 14 ranges from about 0.1 millimeters to about 15.0 millimeters, or ranges from about 0.5 millimeters to about 10.0 millimeters, or ranges from about 1 millimeter to about 3.2 millimeters. Or a thickness t that may range from about 0.1 millimeters to about 0.7 millimeters, or as thick as about 30 micrometers. The article 14 is made of a material that may include at least one of glass, laminated glass, glass composite, sapphire, glass-sapphire laminate, and other substantially transparent materials. In embodiments where the article 14 is glass, for example, high performance glass such as Eagle X6® from Corning®, or inexpensive glass such as soda lime glass may be utilized. Further, in embodiments where the article 14 includes glass, the glass article 14 may have at least one ion exchange region present due to the addition of alkali, alkaline earth, and / or transition metals. Further, when the article 14 includes glass, the article 14 may be heat strengthened. In embodiments where the optically transparent article 14 comprises glass, the article 14, and thus the window 10, ranges between about 100 nanometers and about 1,200 nanometers, or about 250 nanometers and about 1 , May be optically transparent to light having a wavelength in the range between 100 nanometers.

  In the illustrated embodiment, the gas flow paths 26 are evenly spaced in a grid pattern across the first and second surfaces 18, 22 of the article 14, but additionally or alternatively , May be arranged in other configurations or manners. For example, the gas flow paths 26 may be spaced across the article 14 randomly, irregularly, or in other manners or arrangements that are not readily visible to the human eye. The density, or number per unit area, of the gas channels 26 ranges between about 10 and about 40,000 per square millimeter, or about 50 and 1 square per square millimeter. It may range between about 20,000 per millimeter, or between about 100 per square millimeter and about 400 per square millimeter. Further, some portions of the article 14 may have a higher or lower density of gas flow paths 26 than other portions. For example, the density of the gas flow path may vary according to the style or randomly, and may further include a region without a gas region (eg, the middle or edge of the article 14). The distance d between each gas channel 26 depends on the orientation of the gas channel 26, between about 1 micrometer and about 400 micrometers, in particular between about 5 micrometers and about 250 micrometers, more particularly It may range between about 50 micrometers and about 100 micrometers.

  The diameter of the gas channel 26 ranges from about 0.1 micrometers to about 250 micrometers, or from about 0.2 micrometers to about 100 micrometers, or from about 0.25 micrometers to about 50 micrometers. It may be in the range of meters. It should be understood that the diameter of the gas flow path 26 may vary from flow path to flow path or may vary as a function of gas flow path location within the article 14. The diameter of the gas channel 26 and the thickness t of the optically transparent article 14 may be set based on the desired aspect ratio of the gas channel 26. The aspect ratio is measured as the length of the gas channel 26 with respect to the diameter of the gas channel 26 (for example, the thickness t of the article 14). The aspect ratio of the gas channel 26 may range from about 20: 1 to about 50,000: 1, or may range from about 10: 1 to about 12,000: 1, or About 50: 1 to about 500: 1. In some embodiments, each gas channel 26 has the same or substantially similar aspect ratio across the article 14, but in other embodiments, the aspect ratio of the gas channel 26 is ( It may be different (for example, by increasing or decreasing the diameter of the individual gas channels 26). For example, in some embodiments, the aspect ratio of the gas flow path 26 may be randomly assigned, while in other embodiments, the aspect ratio is greater in the manner or individual gas flow on the article 14. Based on the position of the path 26, it may vary for each flow path or may be different. In some embodiments, the narrow gas channel 26 may minimize the optical distortion of light transmitted through the optically transparent article 14, so that the aspect ratio of the gas channel 26 may be high. desirable. Further, the high aspect ratio of the gas flow path 26 may reduce any artifacts in the image generated from the light sent through the article 14. Furthermore, a small portion of the surface area of the article 14 occupied by the gas flow path 26 may also affect the light transmittance of the gas permeable window 10. A small portion of the surface area of the article 14 occupied by the gas flow path 26 is less than about 2.0%, particularly less than about 1.0%, more particularly less than about 0.1%, In embodiments, it may be about 0.01%.

By forming a gas flow path 26 that penetrates the optically transparent article 14, a fluid such as a gas (e.g., air or pressurized gas) can flow from one side of the gas permeable window 10 to the other side. Allows to penetrate. Depending on the desired transmittance of the gas permeable window 10, the diameter and number of the gas flow paths 26 and / or the distance d between the gas flow paths 26 may be changed. The gas permeability of the article 14 is about 0.1 barrer (about 0.8 × 10 ⁻¹⁸ m ⁴ / (N · s)) and about 3000 barrer (about 22503 × 10 ⁻¹⁸ m ⁴ / (N · s)). ) Or between about 10 barrers (about 75 × 10 ⁻¹⁸ m ⁴ / (N · s)) and about 2000 barrs (about 15002 × 10 ⁻¹⁸ m ⁴ / (N · s)) Range, or even between about 100 barrers (about 750 × 10 ⁻¹⁸ m ⁴ / (N · s) and about 500 barrers (about 3751 × 10 ⁻¹⁸ m ⁴ / (N · s)) In other ways, quantified as the leakage rate of the system, the window 10 is higher than about 5 PSI (about 34.5 kPa) per hour, higher than about 10 PSI per hour (about 69.0 kPa), or about 20 PSI per hour ( May have a transmittance higher than about 137.9 kPa) . Under about 1 atmosphere (about 1013 hPa), the article 10, less than about 200 micrometers, in particular, less than about 100 microns, more particularly, less than about 50 microns, should turn.

  In the embodiment shown in FIG. 2A, the gas flow path 26 extends in a direction orthogonal to each of the first and second surfaces 18, 22 and penetrates the optically transparent article 14. The gas flow path is generally cylindrical, but may have various shapes including an ellipse, a triangle, a square, or a polygon with more sides. Further, it should be understood that the gas flow path 26 may vary in shape across the window 10. Although the gas flow path 26 is illustrated as having a substantially uniform size, the gas flow path 26 has a different diameter between the first and second surfaces 18, 22, and gradually becomes thinner. The article 14 may be penetrated.

  Referring now to the embodiment shown in FIG. 2B, the gas flow path 26 of the gas permeable window 10 differs in the angle α relative to the Z axis perpendicular to the first and second surfaces 18,22. The angle by which the gas channel 26 is offset from the orthogonal axis is in the range between about 0 ° and about 20 °, in the range between about 0.1 ° and about 15 °, or about 0.1 °. It may be in the range between about 10 °. In the illustrated embodiment, the angle at which the gas channel 26 tilts increases as the distance from the central region or point of the article 14 increases. In other embodiments, the angle at which the gas channel 26 tilts may vary or form a pattern regardless of the position on the article 14. Inclining the gas flow path 26 facilitates the flow of gas through the article 14 and / or artifacts of light transmitted through the article 14 from a point light source located on one side of the gas permeable window 10. May be performed to minimize the occurrence of.

  Referring now to FIG. 2C, in some embodiments, the optically transparent article 14 may include a number of optically transparent sheets 40. A plurality of optically transparent sheets 40 may be assembled and joined to form the optically transparent article 14. Each sheet 40 defines a plurality of holes 44. When the sheet 40 is assembled, the holes 44 may be substantially aligned to form the gas flow path 26. Embodiments in which the article 14 is thus composed of multiple sheets 40 are advantageous in that it provides a high aspect ratio gas flow path 26 while allowing processing of smaller components. As described with respect to the embodiment shown in FIG. 2B, the gas flow path 26 may be formed by drilling through the plurality of sheets 40 at an angle α with respect to the orthogonal Z axis. Should be understood.

  Referring now to FIGS. 3A-C, according to one embodiment, an ultrashort pulse laser may be used to form the gas flow path 26 through the article 14 of the window 10. Details of the optical configuration that enables the formation of the gas flow path 26 are described below and in US Provisional Patent Application No. 61 / 752,489, filed Jan. 15, 2013, the contents of which are Which is hereby incorporated by reference in its entirety as if fully disclosed herein. In addition, US patent application Ser. No. 14 / 530,410, filed Oct. 31, 2014, is also incorporated herein by reference in its entirety as if fully disclosed herein. The essence of the short pulse laser concept is that an axicon lens is used in the optical lens assembly, a region of the high aspect ratio gas channel 26 is used with a very short (picosecond or femtosecond duration) Bessel beam. Is to form. In other words, the axicon lens focuses the laser beam into a high intensity region having a high aspect ratio in a substantially cylindrical shape within the body of the article 14. Due to the high intensity of the focused laser beam, a non-linear interaction occurs between the electromagnetic field of the laser and the material of the article 14, and laser energy is transmitted to the article 14 to cause defects in the gas flow path 26. Causes formation. However, in the region of the article 14 where the laser energy is not high (eg, the first surface 18 of the article, the volume of the article 14 around the central convergence line), the material is transparent to the laser light and It is important to recognize that there is no energy transfer to the material. Within the context of this disclosure, a material is substantially transparent to the wavelength of the laser light when the absorption is less than about 10%, preferably less than about 1% per millimeter of material depth. As a result, the article 14 does not change in the region where the intensity of the laser light is less than the nonlinear threshold.

  By using an ultrashort pulse laser, one or more high energy pulses, or one or more bursts of high energy pulses, are used to make fine (eg, diameter) in an optically transparent article 14. Can form gas flow paths 26 (in the range of about 0.1 micrometers and about 0.5 micrometers, or in the range of about 0.1 micrometers and about 2.0 micrometers). The gas flow path 26 is a region of the substance of the article 14 modified by laser light. The laser induced modification destroys the material structure of the article 14. Structural disruption includes compression, melting, material removal, rearrangement, and bond breakage. The gas flow path 26 extends to the inside of the article 14 and has a cross-sectional shape that matches the (substantially circular) cross-sectional shape of the laser light. In embodiments where the gas channel 26 has different shapes, the gas channel 26 may be formed by multiple pulses while moving the article 14 and / or the laser. The average diameter of the created gas channel 26 ranges from about 0.1 micrometer to about 50 micrometers, or from about 1 micrometer to about 20 micrometers, or from about 2 micrometers to about 10 micrometers. It may be in the range of meters, or in the range of about 0.1 micrometers to about 5 micrometers. In the embodiments disclosed herein, the area of the material that is destroyed or modified (eg, compressed, melted, or otherwise altered) surrounding the gas flow path 26 is about 50 micrometers. It is preferred to have a diameter of less than, especially less than about 10 micrometers.

  Individual gas channels 26 may be formed at a rate of several hundred kilohertz (eg, hundreds of thousands per second). Thus, as the laser light source and article 14 move relative to each other, the gas flow paths 26 can be arranged in any desired manner adjacent to each other. The spatial separation and size of the gas channel 26 may be selected based at least in part on the desired transmittance of the window 10.

  Returning to FIGS. 3A and 3B, the laser drilling method of the article 14 includes focusing the pulsed laser beam 50 onto the focal line 54 of the laser beam viewed along the direction of propagation of the beam. The focal line 54 of the laser beam is typically given by a specific function in which the field profile decays laterally (ie, in the propagation direction) more slowly than a Gaussian function, eg, Bessel beam, Airy beam. , Weber beams, and Matthew beams (ie, non-diffracted rays). A laser (not shown) emits a pulsed laser beam 50 on the light incident side 58 of the optical assembly 62, and the pulsed laser beam 50 is incident on the optical assembly 62. The optical assembly 62 directs the incident laser beam to the focal line 54 of the laser beam on the exit side over a predetermined expansion range (focal line length L) along the beam direction. The article 14 to be processed is positioned in the beam path after the optical assembly 62 and at least partially overlaps the focal line 54 of the laser beam 50.

  As shown in FIG. 3A, the article 14 is aligned substantially perpendicular to the longitudinal axis of the ray, and therefore after the same focal line 54 formed by the optical assembly 62 (the substrate is perpendicular to the drawing plane). When viewed along the ray direction, the article 14 is such that the focal line 54 seen in the ray direction begins before the first surface 18 of the article 14 and ends after the second surface 22 of the article 14. In other words, it is placed against the focal line 54 so as to extend through the article 14. In the region where the focal line 54 of the laser beam overlaps the article 14, that is, in the region of the article 14 occupied by the focal line 54 (in the case of an appropriate laser intensity along the focal line 54 of the laser beam) The focal line 54 thus forms a section 66 aligned with the longitudinal direction of the light rays, along which induced nonlinear absorption occurs in the article 14. Induced non-linear absorption forms a gas flow path 26 along the section 66 in the article. The formation of the defect line extends not only locally but also over the entire length of the induced and absorbed section 66. Although illustrated as extending through the article 14, the focal line 54 extends only partially into the article 14, thereby extending between the first and second surfaces 18, 22. It should be noted that a gas channel 26 that is not intended may be formed. The average diameter or range of the induced-absorbed section (or the section within the substance of the article 14 in which the gas channel 26 is formed) is denoted by the reference symbol D. The average range D substantially matches the average diameter of the focal line 54 of the laser beam, that is, the average spot diameter. Because local heating and expansion of the article 14 create tension due to the expansion of the heated material, microcracks may form, and the tension may be the surface on which the pulsed laser beam 50 contacts the article 14 (e.g., the first It should be noted that at the first or second surface 18, 22) it is highest.

  As shown in FIG. 3B, the angle at which the focal line 54 of the laser beam is formed in the article 14 when the axis orthogonal to the first and second surfaces of the article 14 and the pulse laser beam 50 are inclined. Changes. The gas flow path 26 may be formed at an angle through the article along the section 66 by changing the angle at which the focal line 54 of the light ray contacts the article 14. The focal line 54 of the laser beam is incident on the article 14 at an angle in the range of about 0 ° to about 20 °, or in the range of about 0.5 ° to about 15 °, or in the range of about 1 ° to about 10 °. , May be incident.

  In an alternative embodiment, the gas flow path 26 may be formed in the article 14 by laser percussion drilling. Percussion drilling is performed using a laser with the appropriate wavelength and intensity, and the size of the laser spot determines the final hole size. The wavelengths that may be used may range between about 100 nanometers and about 1070 nanometers, or between about 150 nanometers and about 400 nanometers. In an exemplary embodiment, the laser may utilize an ultraviolet laser beam having a wavelength of about 355 nanometers. During drilling, the laser is in the range of about 1 micrometer to about 20 micrometers, or about 3 micrometers to about 10 micrometers, on the surface of the article 14 (eg, the first or second surface 18, 22). Focus on a Gaussian spot with a diameter in the range of meters. The laser light is repeatedly pulsed and hits the same position on the article 14. The laser pulse duration may be in the range between about 1 nanosecond and about 100 nanoseconds, or in the range between about 10 nanoseconds and about 25 nanoseconds. The laser may have a performance of between about 50,000 pulses per second to about 150,000 pulses per second, and more particularly about 100,000 pulses per second. A portion of the material is removed from the article 14 with each pulse, and the gas flow path 26 begins to form. As the gas flow path 26 is formed in the article 14, the gas flow path 26 confines the laser beam and forms an elongated hole through the article 14. The laser light is emitted in pulses until the gas flow path 26 is at the desired depth within the article 14 (eg, completely penetrates the article 14), and then the laser is turned off. Next, the laser beam and the article 14 are moved relative to each other, and the process is repeated to form the next gas flow path 26. Percussion drilling may allow the gas channel 26 to become progressively thinner. For example, in one embodiment where laser light for percussion drilling is incident on the first surface 18 of the article 14, the gas flow path 26 has an opening at the first surface 18 of about 15 to about 25 micrometers. And the opening on the second surface 22 of the article 14 may have a diameter of about 5 micrometers to about 10 micrometers.

  Regardless of the laser drilling method employed, it may be desirable to increase the diameter of the gas channel 26 or repair any microcracks present in the gas channel 26 after the gas channel 26 is formed. Absent. In one embodiment, it may be desirable to employ a chemical etching process to widen the gas flow path 26 and repair any microcracks or mechanically weak areas formed during laser drilling. Etching solution 70 (FIG. 3C) may include hydrofluoric acid, nitric acid, hydrochloric acid, potassium hydroxide, sodium hydroxide, and / or combinations thereof. In one exemplary embodiment, the etchant includes about 5% hydrofluoric acid and about 10% nitric acid, with the balance being water. Typically, the treatment is performed by immersing the article 14 in a solution of the etchant 70. By controlling the acid concentration, solution temperature, and exposure time, the total amount of material removed from the article 14 can be adjusted. Further, the etching may be performed while rocking the article 14 or in the presence of ultrasound to increase fluid exchange in the damaged area and shorten the total etching time.

  As shown in FIG. 3C, an embodiment of article 14 using multiple optically transparent sheets 40 arranged in a stack may have a gas flow path 26 formed by rapid processing. . In the first step, a plurality of sheets 40 are stacked on top of each other to form a laminate 74 positioned under the laser, and then drilled with a laser by one of the laser drilling methods outlined above. Thus, a plurality of holes penetrating the sheet 40 are formed. During lamination, the sheet 40 may be marked with additional holes or reference so that the laminate 74 can be reassembled later. For example, the one or more openings may be configured to receive retaining pins that are located at the edge of the sheet 40 and may be used during assembly and reassembly of the laminate 74. Such retaining pins will allow the sheet 40 in the laminate 74 to be quickly and easily aligned. Each sheet 40 may have a thickness of about 0.1 millimeters and about 2.0 millimeters. In the embodiment of laser drilling using the focal line 54 of the laser beam, the focal line 54 may extend through the entire laminated sheet 40 or only a part of the sheet 40. For example, the focal line 54 may be located in the stack 74, be pulsed, and then move down through the stack 74. Although FIG. 3C is illustrated as using ultrashort pulsed light, it should be understood that similar results may be obtained using laser percussion drilling.

  When the first step is completed, a second step of separating the sheets 40 from each other is performed, and the sheet 40 is etched with the etching solution 70 as described above. Etching the sheet 40 separately ensures that the etchant 70 completely enters the holes 44 so that the gas flow path 26 is evenly repaired and enlarged. Finally, after etching, the sheet 40 is cleaned and assembled to form the article 14. In embodiments where the article 14 is comprised of multiple sheets 40, the article 14 may be held together by holding pins or other suitable joining and alignment techniques. By aligning the sheet 40, the holes 44 are substantially aligned, thereby forming the gas flow path 26. By using this technique, the distance through which the etching solution 70 passes is shortened, so that appropriate etching with a high aspect ratio can be reliably performed in the article 14. Furthermore, simultaneous laser drilling of multiple sheets 40 may provide manufacturing advantages in terms of increased throughput.

  It should be understood that laser drilling of the gas flow path 26 to the article 14 may be performed before or after the article is subjected to an ion exchange process. An exemplary ion exchange treatment includes adding an alkali, alkaline earth, and / or transition metal to the article 14.

  Here, referring to FIG. 4A, the gas permeable window 10 may be suitable for use in the liquid interface addition manufacturing apparatus 100. In such embodiments, the gas permeable window 10 may include glass, laminated glass, and / or glass composite. In the illustrated embodiment, the apparatus 100 includes a housing 104 that holds a liquid polymer bath 108. The apparatus 100 has a mechanical stepper 112 that may be moved into and out of the bath 108. Mechanical stepper 112 includes a shaped surface 116 on which polymer portion 120 may grow. The gas permeable window 10 is located along the bottom of the housing 104 and allows the ultraviolet light 124 from the light source 128 to be reflected by the mirror 132 and incident on the bath 108. In some embodiments, the gas permeable window 10 may be held in place by a mechanical fastener. In certain embodiments, the gas permeable window 10 has a length of two sides from about 10.16 centimeters (4 inches) and 17.78 centimeters (7 inches), respectively, to about 22.86 centimeters. (9 inches) and 40.64 centimeters (16 inches).

  The light source 128 may be a projector coupled to the controller and memory and configured to project an image of the section of polymer portion 120 to be produced with ultraviolet light 124. When a portion of the polymer portion 120 is formed on the build surface 116, the mechanical stepper 112 advances upward and moves the polymer portion 120 away from the gas permeable window 10 so that the fluid in the bath 108 is , Allowing flow between the polymer portion 120 and the gas permeable window 10. The light source 128 then causes the bath 108 to polymerize on the polymer portion 120 such that a different image of the polymer portion 120 is projected, thereby forming the next portion of the polymer portion 120. In order to prevent the polymer portion 120 from forming directly on the gas permeable window 10, the gas flow path 26 passes into the vessel 108 through which a gas (eg, oxygen) that inhibits polymerization passes. Thereby creating a “dead zone” in which polymerization of the vessel 108 does not occur. A gas that prevents polymerization is supplied by a gas source 136. The gas source 136 may provide gas at a pressure of about 0.1 atmosphere (about 101 hPa) to about 10 atmospheres (about 10132 hPa). By determining the desired growth rate of the polymer portion 120, the thickness of the dead zone, and thus the required amount of gas that prevents introduced polymerization, may be determined. Varying the diameter and number of gas flow paths 26 disposed through the gas permeable window 10 may satisfy the required permeability and allow the portion 120 to grow properly.

  As shown in FIG. 4B and as described above, the gas flow path 26 may be disposed at an angle that penetrates the article 14 of the gas permeable window 10. With such an angle, the ultraviolet light 124 passing through the window 10 is not attenuated by the glass article 14, so that the transmittance can be increased. Further, by aligning the gas flow path 26 along the axis of the reflected ultraviolet light beam 124, the ultraviolet light 124 passes through the oblique gas flow path 126 without contacting the article 14. The scattering of ultraviolet light 124 is reduced. This is because the UV light 124 is a mechanism that forms and grows the polymer portion 120, so that distortion of the light may result in optical artifacts in the polymer portion 120. There are advantages.

  In other embodiments, the gas permeable window 10 may be used in aviation applications where it may be desirable to minimize the pressure differential across the gas permeable window 10. For example, the gas permeable window 10 may form one glass plate of an aircraft double glass window. In such embodiments, the gas trapped between the glass plates is equal to the air space of the aircraft cabin area so that the window does not break or otherwise crack due to pressure differences. It would be desirable to be able to become pressure.

  It will be apparent to those skilled in the art that various modifications and variations can be made without departing from the spirit or scope of the claims.

  Hereinafter, preferable embodiments of the present invention will be described in terms of items.

Embodiment 1
In the gas permeable glass window,
An optically clear glass article having a thickness greater than about 0.1 millimeter and defining the first surface and the second surface;
A plurality of gas flow paths disposed through the article from the first surface to the second surface;
Including
The gas flow path occupies less than about 1.0% of the surface area of the article and the article is about 10 barrers (about 75 × 10 ⁻¹⁸ m ⁴ / (N · s)) and about 2000 barrers (about It is configured to have a gas permeability between 15002 × 10 ⁻¹⁸ m ⁴ / (N · s).
Gas permeable glass window.

Embodiment 2
Embodiment 1. The embodiment 1 wherein the gas permeability is between about 100 barrers (about 750 × 10 ⁻¹⁸ m ⁴ / (N · s)) and about 500 barrs (about 3751 m ⁴ / (N · s)). Gas permeable window.

Embodiment 3
The gas permeable window according to embodiment 2, wherein the gas flow path occupies less than about 0.05% of the surface area of the article.

Embodiment 4
The glass article includes a plurality of laminated glass sheets, each glass sheet having a plurality of holes extending therethrough,
Furthermore, the glass sheet is a gas permeable window according to the first embodiment, in which the holes are substantially aligned and laminated so as to form a gas flow path.

Embodiment 5
The gas permeable window according to embodiment 1, wherein the gas flow paths are randomly distributed throughout the article and are spaced apart from each other between about 5 micrometers and about 400 micrometers.

Embodiment 6
6. The gas permeable window according to embodiment 5, wherein the gas flow path has an aspect ratio between about 10: 1 and about 12,000: 1.

Embodiment 7
The gas flow path has a diameter between about 0.25 micrometers and about 50.0 micrometers, and the gas permeability of the article is about 500 barrers (about 3751 × 10 ⁻¹⁸ m ⁴ / ( N.s)) The gas permeable window according to embodiment 1, wherein

Embodiment 8
An embodiment wherein the gas flow path is disposed through the article at an angle between about 0 ° and about 15 ° relative to an axis orthogonal to the first and second surfaces. The gas permeable window according to 7.

Embodiment 9
The gas permeable window according to embodiment 8, wherein the angle of the flow path increases as the distance from the center point increases.

Embodiment 10
In the method of forming a gas permeable glass window,
Providing an optically clear glass article having a first surface and a second surface;
Focusing the pulsed laser beam on the focal line of the laser beam viewed along the propagation direction of the beam;
A plurality of gas flow paths are formed in the article by repeatedly directing the focal line of the laser beam into the optically transparent glass article at an angle of incidence on the first surface of the glass article. The focal line of the laser beam causes induced absorption to occur in the article, and each of the induced absorptions in the article from the first surface to the second surface, Forming a gas flow path along the focal line of the laser beam;
Have
The method wherein the number and diameter of the gas flow paths are determined based on the desired gas permeability of the article.

Embodiment 11
Embodiment 11. The method of embodiment 10 wherein the pulse duration is less than about 15 picoseconds.

Embodiment 12
Providing an etchant to expand the gas flow path;
Embodiment 12. The method of embodiment 11 further comprising:

Embodiment 13
The gas flow path is disposed through the article at an angle between about 0 ° and about 15 °, and the angle of the flow path increases as the distance from the center point increases. Thus, the method of embodiment 10 wherein the angle of incidence on the surface of the article is varied.

Embodiment 14
The method of embodiment 10, wherein the gas flow path has an aspect ratio between about 10: 1 and about 12,000: 1.

Embodiment 15
The gas permeability of the article is between about 100 barrers (about 750 × 10 ⁻¹⁸ m ⁴ / (N · s)) and about 500 barrers (about 3751 × 10 ⁻¹⁸ m ⁴ / (N · s)). The method of embodiment 14, wherein

Embodiment 16
In the gas permeable window,
An optically transparent article defining a first surface and a second surface;
A plurality of gas flow paths extending from the first surface to the second surface;
Including
The gas flow path is disposed at an angle between about 0 ° and about 15 ° with respect to an axis orthogonal to the first and second surfaces, and the angle of the flow path is a center point As the distance from increases,
Gas permeable window.

Embodiment 17
17. The embodiment of embodiment 16, wherein the gas flow path has an aspect ratio between about 10: 1 and about 12,000: 1 and occupies less than about 0.01% of the surface area of the article. Gas permeable window.

Embodiment 18
The optically transparent article includes a plurality of laminated transparent sheets, each sheet having a plurality of holes extending therethrough,
Furthermore, the said transparent sheet | seat is a gas-permeable window of Embodiment 17 in which the said hole is substantially aligned and laminated | stacked so that a gas flow path may be formed.

Embodiment 19
Embodiment 19. The gas permeable window of embodiment 18, wherein the article has a gas permeability greater than about 100 barrers (about 750 × 10 ⁻¹⁸ m ⁴ / (N · s)).

Embodiment 20.
Embodiment 20. The gas permeable window according to embodiment 19, wherein the optically transparent article comprises glass having at least one ion exchange region.

DESCRIPTION OF SYMBOLS 10 Gas-permeable window 14 Article 18 1st surface 22 2nd surface 26 Gas flow path 40 Sheet 44 Hole 100 Device 104 Case 108 Tank 112 Mechanical stepper 116 Modeling surface 120 Polymer part

Claims (11)

In the gas permeable glass window,
An optically clear glass article having a thickness greater than about 0.1 millimeter and defining the first surface and the second surface;
A plurality of gas flow paths disposed through the article from the first surface to the second surface;
Including
The gas flow path occupies less than about 1.0% of the surface area of the article and the article is about 10 barrers (about 75 × 10 ⁻¹⁸ m ⁴ / (N · s)) and about 2000 barrers (about It is configured to have a gas permeability between 15002 × 10 ⁻¹⁸ m ⁴ / (N · s).
Gas permeable window. In the gas permeable window,
An optically transparent article defining a first surface and a second surface;
A plurality of gas flow paths extending from the first surface to the second surface;
Including
The gas flow path is disposed at an angle between about 0 ° and about 15 ° with respect to an axis orthogonal to the first and second surfaces, and the angle of the flow path is a center point As the distance from increases,
Gas permeable window. The gas permeable window according to claim 1, wherein the gas permeability is higher than about 100 barrers (about 750 × 10 ⁻¹⁸ m ⁴ / (N · s)).   The gas permeable window according to claim 1 or 2, wherein the gas flow path occupies less than about 0.05% of the surface area of the article. The glass article includes a plurality of laminated glass sheets, each glass sheet having a plurality of holes extending therethrough,
Furthermore, the said glass sheet is a gas-permeable window of Claim 1 or 2 by which the said hole is substantially aligned and laminated | stacked so that a gas flow path might be formed.   The gas permeable window of claim 1, wherein the gas flow paths are randomly distributed throughout the article and spaced from each other between about 5 micrometers and about 400 micrometers.   7. The gas permeable window of claim 2 or 6, wherein the gas flow path has an aspect ratio between about 10: 1 and about 12,000: 1. The gas flow path has a diameter between about 0.25 micrometers and about 50.0 micrometers, and the gas permeability of the article is about 500 barrers (about 3751 × 10 ⁻¹⁸ m ⁴ / ( The gas permeable window according to claim 1, which is less than N · s)).   The gas flow path is disposed through the article at an angle between about 0 ° and about 15 ° relative to an axis orthogonal to the first and second surfaces. The gas permeable window according to claim 8.   The gas permeable window according to claim 1, 2 or 8, wherein the angle of the flow path increases as the distance from the center point increases. In the method of forming a gas permeable glass window,
Providing an optically clear glass article having a first surface and a second surface;
Focusing the pulsed laser beam on the focal line of the laser beam viewed along the propagation direction of the beam;
By repeatedly directing the focal line of the laser beam into the optically transparent glass article at an angle of incidence on the first surface of the glass article, the plurality of gas flow paths are formed in the article. The focal line of the laser beam generates induced absorption in the article, and each of the induced absorptions in the article from the first surface to the second surface, Forming a gas flow path along the focal line of the laser beam;
Have
The method wherein the number and diameter of the gas flow paths are determined based on the desired gas permeability of the article.

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