CN201471092U - High-precision Z-axis objective table of picosecond laser machining equipment - Google Patents

High-precision Z-axis objective table of picosecond laser machining equipment Download PDF

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Publication number
CN201471092U
CN201471092U CN 200920234817 CN200920234817U CN201471092U CN 201471092 U CN201471092 U CN 201471092U CN 200920234817 CN200920234817 CN 200920234817 CN 200920234817 U CN200920234817 U CN 200920234817U CN 201471092 U CN201471092 U CN 201471092U
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CN
China
Prior art keywords
board
panel
plate
fixed
precision
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN 200920234817
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Chinese (zh)
Inventor
赵裕兴
徐礼江
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUZHOU DELPHI LASER CO Ltd
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SUZHOU DELPHI LASER CO Ltd
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Priority to CN 200920234817 priority Critical patent/CN201471092U/en
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Publication of CN201471092U publication Critical patent/CN201471092U/en
Anticipated expiration legal-status Critical
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Abstract

The utility model relates to a high-precision Z-axis objective table of picosecond laser machining equipment. A Z fixed plate is fixed on a Z platform bottom plate, a vertical guide rail is installed on the Z fixed plate, and a lifting board which can make up-and-down motion along the guide rail is installed on the guide rail. A piezoelectric ceramic motor used for controlling the up-and-down motion of the lifting board is installed on the Z platform bottom plate. A vertical front lateral plate is fixed at the front side face of the lifting board, a vertical rear lateral plate is fixed at the rear side face of the lifting board, and the front lateral plate and the rear lateral plate are symmetrically arranged in parallel. A sensor is arranged on the Z fixed plate, and a sensor induction piece is arranged on the inner side face of the front lateral plate or the inner side face of the rear lateral plate. A reading head is arranged on the Z fixed plate, and a grating bar is stuck on the inner side face of the front lateral plate or the inner side face of the rear lateral plate. Jigs are placed on the front lateral plate and the rear lateral plate. In the utility model, the piezoelectric ceramic motor with high resolution ratio is adopted to control the actions of starting, stopping and lifting a Z axis, the grating bar ensures the precision of the lifting positioning of the Z axis, and a counterweight mechanism solves the problem that the dynamic thrust and the static retention capacity of the ceramic motor are insufficient.

Description

The high-precision Z-axis loading platform of picosecond laser process equipment
Technical field
The utility model relates to the picosecond laser finish machining equipment, relates in particular to the high-precision Z-axis loading platform of picosecond laser process equipment.
Background technology
At present, Z axle article carrying platform is generally rotatablely moved by motor and drives ball screw and carry out rectilinear motion in the laser retrofit equipment, drives article carrying platform by the rectilinear motion of ball screw again and realizes vertical lift.Z axle article carrying platform requires platform can accurately locate at any time in certain stroke range, thereby satisfies the motion and the processing technology requirement of machine; Its repetitive positioning accuracy is generally at ± 3~5um, and this precision far can not satisfy the lifting required precision of picosecond laser retrofit equipment.
Summary of the invention
The purpose of this utility model is to overcome the deficiency that prior art exists, and a kind of high-precision Z-axis loading platform of picosecond laser process equipment is provided, and can satisfy the lifting required precision of picosecond laser retrofit equipment well.
The purpose of this utility model is achieved through the following technical solutions:
The high-precision Z-axis loading platform of picosecond laser process equipment, characteristics are: fixing Z fixed head on the Z platform floor, the guide rail of erectting is installed on the described Z fixed head, one lifter plate that can move up and down along guide rail is installed on described guide rail, be used to control the piezoelectric ceramic motor that lifter plate moves up and down and be installed in the Z platform floor, described piezoelectric ceramic motor drives lifter plate and moves up and down along guide rail, fix a front side board of erectting at the leading flank of described lifter plate, fix a back side panel of erectting at the trailing flank of described lifter plate, front side board is parallel being symmetrical arranged with back side panel; Also on described Z fixed head, sensor is set, correspondingly, the sensor sensing sheet is set on the medial surface of front side board or back side panel; On described Z fixed head, read head is set, correspondingly, on the medial surface of front side board or back side panel, posts the grating chi; On described front side board and back side panel, place the tool plate, at described tool plate upper edge horizontally set one horizontal locating piece, longitudinally a vertical locating piece is set.
Further, the high-precision Z-axis loading platform of above-mentioned picosecond laser process equipment, wherein, on described Z platform floor and the two ends, the left and right sides that are positioned at the front side board inboard certain pulley mechanism is set respectively, accordingly, on described Z platform floor and the two ends, the left and right sides that are positioned at the back side panel inboard certain pulley mechanism also is set respectively; Between the fixed pulley mechanism of the fixed pulley mechanism of front side board right-hand member and back side panel right-hand member, lay right balancing weight, the right-hand member of front side board connects a steel wire rope, steel wire rope draws in right balancing weight through the fixed pulley mechanism of front side board right-hand member, the right-hand member of back side panel also connects a steel wire rope, and steel wire rope draws in right balancing weight through the fixed pulley mechanism of back side panel right-hand member; Correspondingly, between the fixed pulley mechanism of the fixed pulley mechanism of front side board left end and back side panel left end, lay left balancing weight, the left end of front side board connects a steel wire rope, steel wire rope draws in left balancing weight through the fixed pulley mechanism of front side board left end, the left end of back side panel also connects a steel wire rope, and steel wire rope draws in left balancing weight through the fixed pulley mechanism of back side panel left end.
Further, the high-precision Z-axis loading platform of above-mentioned picosecond laser process equipment wherein, is provided with the planarity adjustment screw hole on described tool plate and with the position of front side board and back side panel locking.
Further, the high-precision Z-axis loading platform of above-mentioned picosecond laser process equipment, wherein, the top of described Z fixed head is provided with the backstop bolt.
Again further, the high-precision Z-axis loading platform of above-mentioned picosecond laser process equipment, wherein, the L-shaped structure of described Z fixed head, comprise a horizontal plane and a vertical plane, the horizontal plane of Z fixed head is fixedlyed connected with the Z platform floor, and the guide rail of erectting is installed on the vertical plane of Z fixed head.
Again further, the high-precision Z-axis loading platform of above-mentioned picosecond laser process equipment, wherein, described piezoelectric ceramic motor is fixed on the Z platform floor by motor mounting plate, the L-shaped structure of described motor mounting plate, comprise a horizontal plane and a vertical plane, the horizontal plane of motor mounting plate is fixedlyed connected with the Z platform floor, on the vertical plane of motor mounting plate piezoelectric ceramic motor is installed.
Substantive distinguishing features and obvious improvement that technical solutions of the utility model are outstanding are mainly reflected in:
The utility model modern design, adopt resolution ratio high piezoelectric ceramic motor control Z axle start and stop and lifting action, adopt the grating chi to guarantee its lifting positioning accuracy, solve piezoelectric ceramic motor dynamic thrust and the hypodynamic problem of static maintenance with two set of weights mechanisms, its lifting positioning accuracy can reach ± 1um.Low cost of manufacture, function brilliance are the new design of a practicality.
Description of drawings
Below in conjunction with accompanying drawing technical solutions of the utility model are described further:
Fig. 1 a: the schematic diagram that elevating mechanism is installed on the Z platform floor;
Fig. 1 b: the perspective view of Fig. 1 a;
Fig. 2 a: the schematic diagram that side plate is installed on the basis of Fig. 1 a;
Fig. 2 b: the perspective view of Fig. 2 a;
Fig. 3 a: the schematic diagram that balance weight mechanism is installed on the basis of Fig. 2 a;
Fig. 3 b: the perspective view of Fig. 3 a;
Fig. 4 a: the schematic diagram of assembling fixture plate on the basis of Fig. 3 a;
Fig. 4 b: the perspective view of Fig. 4 a.
The implication of each Reference numeral sees the following form among the figure:
Reference numeral Implication Reference numeral Implication Reference numeral Implication
??1 The Z platform floor ??2 The Z fixed head ??3 Guide rail
??4 Lifter plate ??5 The backstop bolt ??6 Motor mounting plate
??7 Piezoelectric ceramic motor ??8 Front side board ??9 Back side panel
??10 Sensor ??11 The sensor sensing sheet ??12 The grating chi
??13 Fixed pulley mechanism ??14 Steel wire rope ??15 Right balancing weight
??16 The tool plate ??17 Horizontal locating piece ??18 Vertical locating piece
Reference numeral Implication Reference numeral Implication Reference numeral Implication
??19 The planarity adjustment screw hole
The specific embodiment
The high-precision Z-axis loading platform of picosecond laser process equipment, as Fig. 1 a, Fig. 1 b, Z platform floor 1 is basic components, fixing Z fixed head 2 on Z platform floor 1, Z fixed head 2 L-shaped structures, comprise a horizontal plane and a vertical plane, the horizontal plane of Z fixed head 2 is fixedlyed connected with Z platform floor 1, the guide rail of erectting 3 is installed on the vertical plane of Z fixed head 2, one lifter plate 4 that can move up and down along guide rail 3 is installed on guide rail 3, be used to control the piezoelectric ceramic motor 7 that lifter plate 4 moves up and down and be fixed on Z platform floor 1 by motor mounting plate 6, motor mounting plate 6 L-shaped structures, comprise a horizontal plane and a vertical plane, the horizontal plane of motor mounting plate 6 is fixedlyed connected with Z platform floor 1, and piezoelectric ceramic motor 7 is installed on the vertical plane of motor mounting plate 6, on lifter plate 4, post potsherd, after piezoelectric ceramic motor 7 energisings, the finger wriggling of piezoelectric ceramic motor 7 is stirred lifter plate 4 by potsherd and is made rectilinear motion up and down, promptly drives lifter plate 4 by piezoelectric ceramic motor 7 and moves up and down along guide rail 3; Be provided with backstop bolt 5 at the top of Z fixed head 2, the mechanical position limitation that moves up and down as lifter plate 4.Z platform floor 1 has four counter sinks to be used for fixing whole Z platform, and the whole Z platform of dismounting all need not dismantle other any part, and is convenient for installation and maintenance.
As Fig. 2 a, Fig. 2 b, fix a front side board 8 of erectting at the leading flank of lifter plate 4, fix a back side panel 9 of erectting at the trailing flank of lifter plate 4, front side board 8 is parallel being symmetrical arranged with back side panel 9; Sensor 10 also is set on Z fixed head 2, correspondingly, on the medial surface of front side board 8 or back side panel 9, sensor sensing sheet 11 is set; The combination utilization of sensor 10 and sensor sensing sheet 11 is used for the electric spacing of lifting high-low limit.On Z fixed head 2, read head is set, correspondingly, on the medial surface of front side board 8 or back side panel 9, posts grating chi 12; Accurately measure lifting position and feed back the control system that its lifting position information is given platform with grating chi 12, make it cooperate control to reach location accurately with piezoelectric ceramic motor.
As Fig. 3 a, Fig. 3 b, on Z platform floor 1 and the two ends, the left and right sides that are positioned at front side board 8 inboards certain pulley mechanism is set respectively, accordingly, on Z platform floor 1 and the two ends, the left and right sides that are positioned at back side panel 9 inboards certain pulley mechanism also is set respectively; Between the fixed pulley mechanism of the fixed pulley mechanism of front side board 8 right-hand members and back side panel 9 right-hand members, lay right balancing weight 15, the right-hand member of front side board 8 connects a steel wire rope 14, steel wire rope 14 draws in right balancing weight 15 through the fixed pulley mechanism 13 of front side board right-hand member, the right-hand member of back side panel 9 also connects a steel wire rope, and steel wire rope draws in right balancing weight 15 through the fixed pulley mechanism of back side panel 9 right-hand members; Correspondingly, between the fixed pulley mechanism of the fixed pulley mechanism of front side board 8 left ends and back side panel 9 left ends, lay left balancing weight, the left end of front side board 8 connects a steel wire rope, steel wire rope draws in left balancing weight through the fixed pulley mechanism of front side board 8 left ends, the left end of back side panel 9 also connects a steel wire rope, and steel wire rope draws in left balancing weight through the fixed pulley mechanism of back side panel 9 left ends.The weight of two balancing weights is used for the gross weight that balance lifting mechanism comprises biside plate, lifter plate, tool plate and workpiece to be processed, guarantee that with this piezoelectric ceramic motor is unlikely to overload, thereby solved piezoelectric ceramic motor dynamic thrust and the little problem of static confining force well.
As Fig. 4 a, Fig. 4 b, on front side board 8 and back side panel 9, place tool plate 16, tool plate 16 is used to carry workpiece to be processed, at tool plate 16 upper edge horizontally sets one horizontal locating piece 17, longitudinally a vertical locating piece 18 is set, horizontal locating piece 17 and vertical locating piece 18 mutual vertical fixing are used for the horizontal and vertical location of workpiece to be processed on tool plate 16; All there is a planarity adjustment screw hole on each locating hole next door of tool plate 16 and biside plate locking, the flatness that is used to regulate tool plate 16, and this is simple in structure, regulates easy to operate practicality.
During concrete the application, equipment energising back piezoelectric ceramic motor 7 is looked for grating initial point (the objective table automatic lifting resets to the grating origin position) automatically, because piezoelectric ceramic motor is to control by the AB5 servo-driver, on the software control guidance panel, import the distance that needs rising or descend by the equipment operator, after the AB5 driver obtains the host computer instruction, driving piezoelectric ceramic motor finger generation wriggling is stirred the potsherd on the lifter plate 4, moves upward or downward thereby drive elevating mechanism.
Adopt the start and stop and the lifting of accurate piezoelectric ceramic motor control Z axle article carrying platform, guarantee the direction and the stability of its lifting, guarantee the positioning accuracy of its lifting with the grating chi with the intersection spherical guide.Grating chi and piezoelectric ceramic motor cooperate control, have very high positioning accuracy, and the per step resolution ratio of piezoelectric ceramic motor is higher than 20nm.Utilization fixed pulley principle adopts the weight of balance weight mechanism balance lifting mechanism own, guarantees that with this piezoelectric ceramic motor is unlikely to overload, thereby has solved piezoelectric ceramic motor dynamic thrust and the little problem of static confining force well.The flatness of threaded adjusting platform, simple in structure, easy to operate practicality.The Z platform is an overall structure, and its base plate has installing hole, and the whole Z platform of dismounting need not be dismantled other any part, and installation and maintenance is convenient.
In sum, the utility model design is unique, compactness simple for structure adopts resolution ratio high accurate piezoelectric ceramic motor control Z axle start and stop and lifting action, guarantees its lifting positioning accuracy by the grating chi, the precision height, cost is low, and is ease in use, and economic benefit and social effect are remarkable, be rated as have novelty, the good technology of creativeness, practicality, market application foreground is wide.
What need understand is: above-mentioned explanation is not to be to restriction of the present utility model, and in the utility model design scope, the interpolation of being carried out, conversion, replacement etc. also should belong to protection domain of the present utility model.

Claims (6)

1. the high-precision Z-axis loading platform of picosecond laser process equipment, it is characterized in that: go up fixedly Z fixed head (2) at Z platform floor (1), go up the guide rail (3) that setting is installed at described Z fixed head (2), at described guide rail (3) lifter plate (4) that can move up and down along guide rail (3) go up to be installed, be used to control the piezoelectric ceramic motor (7) that lifter plate (4) moves up and down and be installed in Z platform floor (1), described piezoelectric ceramic motor (7) drives lifter plate (4) and moves up and down along guide rail (3), fix a front side board (8) of erectting at the leading flank of described lifter plate (4), fix a back side panel (9) of erectting at the trailing flank of described lifter plate (4), front side board (8) is parallel being symmetrical arranged with back side panel (9); Sensor (10) also is set on described Z fixed head (2), correspondingly, on the medial surface of front side board (8) or back side panel (9), sensor sensing sheet (11) is set; On described Z fixed head (2), read head is set, correspondingly, on the medial surface of front side board (8) or back side panel (9), posts grating chi (12); Go up at described front side board (8) and back side panel (9) and to place tool plate (16), at described tool plate (16) upper edge horizontally set one horizontal locating piece (17), longitudinally a vertical locating piece (18) is set.
2. the high-precision Z-axis loading platform of picosecond laser process equipment according to claim 1, it is characterized in that: go up and be positioned at the inboard two ends, the left and right sides of front side board (8) at described Z platform floor (1) certain pulley mechanism is set respectively, accordingly, go up and be positioned at the inboard two ends, the left and right sides of back side panel (9) at described Z platform floor (1) certain pulley mechanism also is set respectively; Between the fixed pulley mechanism of the fixed pulley mechanism of front side board (8) right-hand member and back side panel (9) right-hand member, lay right balancing weight (15), the right-hand member of front side board (8) connects a steel wire rope (14), steel wire rope (14) draws in right balancing weight (15) through the fixed pulley mechanism (13) of front side board right-hand member, the right-hand member of back side panel (9) also connects a steel wire rope, and steel wire rope draws in right balancing weight (15) through the fixed pulley mechanism of back side panel (9) right-hand member; Correspondingly, between the fixed pulley mechanism of the fixed pulley mechanism of front side board (8) left end and back side panel (9) left end, lay left balancing weight, the left end of front side board (8) connects a steel wire rope, steel wire rope draws in left balancing weight through the fixed pulley mechanism of front side board (8) left end, the left end of back side panel (9) also connects a steel wire rope, and steel wire rope draws in left balancing weight through the fixed pulley mechanism of back side panel (9) left end.
3. the high-precision Z-axis loading platform of picosecond laser process equipment according to claim 1 is characterized in that: go up and be provided with planarity adjustment screw hole (19) with position that front side board (8) and back side panel (9) lock at described tool plate (16).
4. the high-precision Z-axis loading platform of picosecond laser process equipment according to claim 1 is characterized in that: the top of described Z fixed head (2) is provided with backstop bolt (5).
5. the high-precision Z-axis loading platform of picosecond laser process equipment according to claim 1, it is characterized in that: the L-shaped structure of described Z fixed head (2), comprise a horizontal plane and a vertical plane, the horizontal plane of Z fixed head (2) is fixedlyed connected with Z platform floor (1), and the guide rail of erectting (3) is installed on the vertical plane of Z fixed head (2).
6. the high-precision Z-axis loading platform of picosecond laser process equipment according to claim 1, it is characterized in that: described piezoelectric ceramic motor (7) is fixed on the Z platform floor (1) by motor mounting plate (6), the L-shaped structure of described motor mounting plate (6), comprise a horizontal plane and a vertical plane, the horizontal plane of motor mounting plate (6) is fixedlyed connected with Z platform floor (1), and piezoelectric ceramic motor (7) is installed on the vertical plane of motor mounting plate (6).
CN 200920234817 2009-08-07 2009-08-07 High-precision Z-axis objective table of picosecond laser machining equipment Expired - Lifetime CN201471092U (en)

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US10421683B2 (en) 2013-01-15 2019-09-24 Corning Laser Technologies GmbH Method and device for the laser-based machining of sheet-like substrates
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US10526234B2 (en) 2014-07-14 2020-01-07 Corning Incorporated Interface block; system for and method of cutting a substrate being transparent within a range of wavelengths using such interface block
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US10626040B2 (en) 2017-06-15 2020-04-21 Corning Incorporated Articles capable of individual singulation
US10688599B2 (en) 2017-02-09 2020-06-23 Corning Incorporated Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines
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US11062986B2 (en) 2020-01-22 2021-07-13 Corning Incorporated Articles having vias with geometry attributes and methods for fabricating the same

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CN102990223A (en) * 2011-09-15 2013-03-27 株式会社迪思科 Laser processing apparatus
US9850159B2 (en) 2012-11-20 2017-12-26 Corning Incorporated High speed laser processing of transparent materials
US10421683B2 (en) 2013-01-15 2019-09-24 Corning Laser Technologies GmbH Method and device for the laser-based machining of sheet-like substrates
US11028003B2 (en) 2013-01-15 2021-06-08 Corning Laser Technologies GmbH Method and device for laser-based machining of flat substrates
US10280108B2 (en) 2013-03-21 2019-05-07 Corning Laser Technologies GmbH Device and method for cutting out contours from planar substrates by means of laser
US10597321B2 (en) 2013-12-17 2020-03-24 Corning Incorporated Edge chamfering methods
US9850160B2 (en) 2013-12-17 2017-12-26 Corning Incorporated Laser cutting of display glass compositions
US9815730B2 (en) 2013-12-17 2017-11-14 Corning Incorporated Processing 3D shaped transparent brittle substrate
US10144093B2 (en) 2013-12-17 2018-12-04 Corning Incorporated Method for rapid laser drilling of holes in glass and products made therefrom
US10173916B2 (en) 2013-12-17 2019-01-08 Corning Incorporated Edge chamfering by mechanically processing laser cut glass
US10179748B2 (en) 2013-12-17 2019-01-15 Corning Incorporated Laser processing of sapphire substrate and related applications
US10183885B2 (en) 2013-12-17 2019-01-22 Corning Incorporated Laser cut composite glass article and method of cutting
US10233112B2 (en) 2013-12-17 2019-03-19 Corning Incorporated Laser processing of slots and holes
US10611668B2 (en) 2013-12-17 2020-04-07 Corning Incorporated Laser cut composite glass article and method of cutting
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US10293436B2 (en) 2013-12-17 2019-05-21 Corning Incorporated Method for rapid laser drilling of holes in glass and products made therefrom
US9701563B2 (en) 2013-12-17 2017-07-11 Corning Incorporated Laser cut composite glass article and method of cutting
US9676167B2 (en) 2013-12-17 2017-06-13 Corning Incorporated Laser processing of sapphire substrate and related applications
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US10611667B2 (en) 2014-07-14 2020-04-07 Corning Incorporated Method and system for forming perforations
US10526234B2 (en) 2014-07-14 2020-01-07 Corning Incorporated Interface block; system for and method of cutting a substrate being transparent within a range of wavelengths using such interface block
US10335902B2 (en) 2014-07-14 2019-07-02 Corning Incorporated Method and system for arresting crack propagation
US11014845B2 (en) 2014-12-04 2021-05-25 Corning Incorporated Method of laser cutting glass using non-diffracting laser beams
US10047001B2 (en) 2014-12-04 2018-08-14 Corning Incorporated Glass cutting systems and methods using non-diffracting laser beams
US10252931B2 (en) 2015-01-12 2019-04-09 Corning Incorporated Laser cutting of thermally tempered substrates
US10525657B2 (en) 2015-03-27 2020-01-07 Corning Incorporated Gas permeable window and method of fabricating the same
US10377658B2 (en) 2016-07-29 2019-08-13 Corning Incorporated Apparatuses and methods for laser processing
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US10752534B2 (en) 2016-11-01 2020-08-25 Corning Incorporated Apparatuses and methods for laser processing laminate workpiece stacks
US10688599B2 (en) 2017-02-09 2020-06-23 Corning Incorporated Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines
US10626040B2 (en) 2017-06-15 2020-04-21 Corning Incorporated Articles capable of individual singulation
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C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20100519

Effective date of abandoning: 20090807