JP5580129B2 - Solid state laser processing equipment - Google Patents

Description

  The present invention relates to a solid-state laser processing apparatus that changes the core diameter of a process fiber through which laser light is transmitted in accordance with a workpiece.

  In a laser processing machine for sheet metal processing, a carbon dioxide laser oscillator (oscillation wavelength 10.6 μm) is used as a laser light source, laser light is transmitted to a processing point through a plurality of transmission mirrors, and a high energy density is obtained by a condenser lens. In general, the laser beam is focused and processed while ejecting an assist gas coaxially to remove a melt. On the other hand, as a laser light source, a YAG laser oscillator (oscillation wavelength 1 μm band) has been used as a representative of a solid-state laser oscillator as an alternative to a carbon dioxide laser oscillator.

  Recently, however, fiber laser oscillators (oscillation wavelength 1 μm band) based on communication technology are superior in optical quality to YAG laser oscillators and have extremely high oscillation efficiency. Or welding, etc.).

  FIG. 12 shows an example of a fiber laser processing apparatus using the fiber laser oscillator 51 as a laser light source. For example, Patent Document 1 is a known document of a similar fiber laser processing apparatus.

  The fiber laser oscillator 51 installed adjacent to the laser processing machine 75 includes a light engine 52 that generates laser light. The laser light generated by the light engine 52 is transmitted to the beam shutter 71 by the feeding fiber 54, and is transmitted to the laser processing machine 75 by the process fiber 56 connected to the beam shutter 71.

  The process fiber 56 is mounted along X-axis and Y-axis cable ducts (not shown) disposed in the laser processing machine 75. As shown in FIG. 13, the laser light emitted from the exit end face of the process fiber 56 is converted into a substantially parallel light beam by the collimator lens 68 in the collimator unit 69, and is lowered downward in the Z-axis direction (vertical direction) by the bend mirror 65. Reflected. Thereafter, the laser light is incident on a condensing lens 67 provided in the processing head 66, is condensed at a high energy density, and is irradiated onto the workpiece W. The collimator unit 69 is attached to a Y-axis carriage 63 provided on a gate-shaped X-axis carriage 64 that moves on the processing table 61 in the X-axis direction so as to be movable in the Y-axis direction.

  The laser beam generated from the fiber laser oscillator 51 has a higher beam quality than the laser beam emitted from the carbon dioxide laser oscillator (abbreviated as “CO2 laser”). High energy density can be obtained. For example, as shown in FIG. 14, the minimum focused diameters d of a 4 kW CO 2 laser and a 2 kW fiber laser are 0.27 mm and 0.12 mm, respectively, and the energy density at this time is 2. 5 times higher. Therefore, the thin plate material can be cut at a high speed because of the small condensing diameter and the good absorptivity of the oscillation wavelength band of 1 μm for the metal.

JP 2009-226473 A

  However, as shown in FIG. 15, for example, when a plate W having a thickness of 6 mm or more is cut using the laser beam generated from the fiber laser oscillator 51, the laser beam LB having the minimum focused diameter is irradiated. The cutting kerf width b formed on the workpiece W is narrower than that in the case of the CO2 laser. Thereby, it becomes difficult to discharge the molten metal generated at the time of cutting to the outside of the kerf, and it becomes impossible to cut or to cut.

  The present invention has been made in view of the above problems, and its purpose is to easily carry out from high-speed processing to thin plate processing without changing the focal length of the condensing lens and the beam diameter of the laser beam. A solid-state laser processing apparatus is provided.

  The first feature of the present invention is a solid-state laser oscillator that generates laser light, a feeding fiber that transmits laser light generated by the solid-state laser oscillator, and a beam mode through which the laser light transmitted by the feeding fiber passes. A solid-state laser processing apparatus comprising: a conversion unit; and a laser processing unit that condenses laser light that has passed through the beam mode conversion unit and irradiates the workpiece. The beam mode conversion unit has a core diameter of the feeding fiber. And having one or more process fibers having different core diameters and a selection unit for selecting whether or not to transmit the laser light to the one or more process fibers.

  According to the first feature of the present invention, the core diameter of the fiber through which the laser beam is transmitted can be changed immediately before the laser processing unit, depending on the item selected by the selection unit. Thereby, the minimum condensing diameter of the laser beam condensed by the laser processing unit can be controlled. Therefore, the minimum focusing diameter of the laser beam can be changed without changing the focal length of the focusing lens and the beam diameter of the laser beam used when focusing the laser beam in the laser processing unit. To thick plate processing can be carried out easily.

  In the first feature of the present invention, the beam mode conversion unit includes two or more process fibers having different core diameters, and the selection unit is configured to select that the process fiber transmits laser light. In this case, one process fiber that transmits laser light may be selected. Thereby, according to the process fiber selected by the selection part, the core diameter of the process fiber in which a laser beam is transmitted just before a laser processing unit can be changed. Therefore, the minimum condensing diameter can be changed in more detail.

  The second feature of the present invention is that a solid-state laser oscillator that generates laser light, a feeding fiber that transmits the laser light generated by the solid-state laser oscillator, and a beam mode through which the laser light transmitted by the feeding fiber passes. A solid-state laser processing apparatus comprising: a conversion unit; and a laser processing unit that condenses laser light that has passed through the beam mode conversion unit and irradiates the workpiece. The beam mode conversion unit has different core diameters. And having two or more process fibers and a selection unit for selecting one process fiber for transmitting laser light from the two or more process fibers.

  According to the 2nd characteristic of this invention, the core diameter of the process fiber in which a laser beam is transmitted can be changed according to the process fiber selected by the selection part. Therefore, the minimum condensing diameter can be changed without changing the focal length of the condensing lens used when condensing the laser beam in the laser processing unit or the beam diameter of the laser beam. To thick plate processing can be carried out easily.

  In the first and second aspects of the present invention, the beam mode conversion unit is disposed in the front stage of the process fiber, and is disposed in the rear stage of the process fiber, and a focusing lens for condensing the laser light on the incident end face of the process fiber. And a collimating lens that converts the laser light emitted from the emission end face of the process fiber into parallel light, respectively. By arranging a focusing lens and a collimating lens before and after each process fiber, the process fiber can efficiently transmit laser light.

  In the first and second aspects of the present invention, the focusing lens, the process fiber, and the collimating lens may form a set, and the selection unit may select any one of the focusing lens, the process fiber, and the collimating lens. This eliminates the need to adjust the optical system before and after the process fiber.

  In the first and second aspects of the present invention, the beam mode conversion unit includes a cylindrical member having a converging lens, a process fiber, and a collimating lens fixed therein, and a rotatable member that supports the cylindrical member. A plate member may be further provided. In this case, the selection part should just select the cylindrical member which a laser beam injects by rotating a board member. By fixing the focusing lens, the process fiber, and the collimating lens inside the cylindrical member in a previously aligned state, the process fiber can be easily selected simply by rotating the plate member.

  In the first and second aspects of the present invention, the solid-state laser processing apparatus may further include a beam shutter disposed between the feeding fiber and the beam mode conversion unit for blocking laser light. Thereby, it is not necessary to provide a beam shutter on the solid laser oscillator side, and laser light can be transmitted by the feeding fiber.

  According to the solid-state laser processing apparatus of the present invention, it is possible to easily carry out from high-speed processing of a thin plate to thick plate processing without changing the focal length of the condenser lens and the beam diameter of the laser beam.

1 is a perspective view showing an overall configuration of a fiber laser processing apparatus according to a first embodiment of the present invention. It is the schematic which shows the structural example of the beam shutter 13 and the beam mode conversion unit 14 of FIG. It is a graph which shows the result of having measured the cross-sectional shape of the laser beam LB near the minimum condensing diameter d. It is a graph which shows the relationship between the core diameter of a fiber, and the beam quality constant BPP. It is a schematic diagram which shows that the beam quality constant BPP of the same laser beam changes according to the core diameter of the fiber transmitted just before. It is a graph which shows the cross-sectional shape of the minimum condensing diameter d vicinity of the fiber laser and CO2 laser in Table 2. FIG. It is a graph which shows the cross-sectional shape of the focus vicinity of the laser beam which consists of an optical parameter shown in Table 3. It is a schematic diagram which shows the structure of the beam mode conversion unit in connection with 2nd Embodiment. It is a schematic diagram which shows the structure of the fiber laser processing apparatus in connection with a 1st comparative example. It is a graph which shows the cross-sectional shape of the focus vicinity which produced | generated and measured the laser beam which consists of an optical parameter shown in Table 5. FIG. 6 is a schematic diagram for explaining optical parameters of laser light emitted from a process fiber 33. FIG. It is a schematic diagram showing an example of an optical axis moving type fiber laser processing apparatus using the fiber laser oscillator 51 as a laser light source. 6 is a schematic view showing a state in which laser light LB emitted from a process fiber 56 is converted into parallel light by a collimator lens 68 and is collected by a condenser lens 67. FIG. It is a graph which shows the simulation result which compared cross-sectional shape G of the condensing point vicinity of the fiber laser in FIG. 13, and the cross-sectional shape of CO2 laser. It is a schematic diagram for demonstrating the subject which this invention tends to solve.

  Embodiments of the present invention will be described below with reference to the drawings. In the description of the drawings, the same parts are denoted by the same reference numerals.

(First embodiment)
First, the overall configuration of a fiber laser processing apparatus (an example of a solid-state laser processing apparatus) according to the first embodiment of the present invention will be described with reference to FIG. The fiber laser processing apparatus according to the first embodiment of the present invention transmits a fiber laser oscillator 11 as an example of a solid-state laser oscillator that generates laser light LB, and the laser light LB generated by the fiber laser oscillator 11. The feeding fiber 12, the beam mode conversion unit 14 through which the laser beam transmitted by the feeding fiber 12 passes, and the laser beam LB that has passed through the beam mode conversion unit 14 are condensed to the workpiece (work) W. And a laser processing unit 15 for irradiation. In the first embodiment, the laser light transmitted by the feeding fiber 12 enters the beam shutter 13 before entering the beam mode conversion unit 14. The laser light LB that has passed through the beam shutter 13 is incident on the beam mode conversion unit 14.

  The laser beam generated by the fiber laser oscillator 11 is transmitted to the vicinity of the laser processing unit 15 through a feeding fiber 12 having a core diameter of 50 μm. The feeding fiber 12 is attached along X-axis and Y-axis cable ducts (not shown) arranged in the laser processing unit 15. The laser processing unit 15 includes a processing table 21 on which a workpiece W is placed, a portal X-axis carriage 22 that moves in the X-axis direction on the processing table 21, and a vertical X-axis on the X-axis carriage 22. And a Y-axis carriage 23 that moves in the Y-axis direction.

  The Y-axis carriage 23 includes a first bend mirror 24 that reflects the laser beam LB that has passed through the beam mode conversion unit 14 substantially horizontally in the X-axis direction, and the laser beam LB that is reflected by the first bend mirror 24. A second bend mirror 25 that reflects the laser beam downward in the Z-axis direction perpendicular to the X-axis and the Y-axis, a condensing lens 27 that condenses the laser beam LB reflected by the second bend mirror 25, and a processing head 26 is fixed. The first bend mirror 24, the second bend mirror 25, the condenser lens 27, and the processing head 26 move together with the Y-axis carriage 23.

  The fiber laser processing apparatus focuses the X-axis carriage 22 and the Y-axis carriage 23 while irradiating the workpiece W with laser light LB having the smallest condensing diameter (minimum condensing diameter) that is condensed by the condensing lens 27. The workpiece W is cut by moving the workpiece.

  Compared with the conventional fiber laser processing apparatus shown in FIG. 12, the fiber laser processing apparatus shown in FIG. 1 has the beam shutter 13 disposed on the laser processing unit 15 side and the laser generated by the fiber laser oscillator 11 thereby. The difference is that the light LB is transmitted to the vicinity of the laser processing unit 15 by one feeding fiber 12.

  As shown in FIG. 2, the laser light LB transmitted by the feeding fiber 12 is emitted from the emission end face of the feeding fiber 12 with a predetermined beam divergence angle and is incident on the beam shutter 13. The beam shutter 13 includes a collimating lens 31 that converts the laser light LB emitted from the feeding fiber 12 into substantially parallel light, a movable mirror 32, and a laser light end that absorbs the laser light LB reflected by the mirror 32. And a member 39. By switching the position of the movable mirror 32 as shown in FIG. 2, the beam shutter 13 can switch whether or not to output the laser beam LB that is parallel light.

  The laser beam LB output from the beam shutter 13 is incident on the beam mode conversion unit 14. The beam mode conversion unit 14 selects one or more process fibers having a core diameter different from the core diameter (50 μm) of the feeding fiber 12 and a selection unit that selects whether or not the laser light LB is transmitted to the one or more process fibers. And have. In the first embodiment, two or more process fibers 33a and 33b having different core diameters are provided as one or more process fibers. Of course, three or more process fibers may be used. When the selection unit selects to transmit the laser light LB to the process fibers 33a and 33b, one process fiber 33a that transmits the laser light LB from the two process fibers 33a and 33b. , 33b. The core diameters of the two process fibers 33a and 33b are 100 μm and 200 μm, respectively, and are different from the core diameter of the feeding fiber 12 of 50 μm.

  Specifically, the beam mode conversion unit 14 is arranged in front of the process fibers 33a and 33b, and condensing lenses 35a and 35b for condensing the laser light LB on the incident end faces of the process fibers 33a and 33b, and the process fibers 33a, 33b, Collimating lenses 36a and 36b that are arranged at the rear stage of 33b and convert the laser light LB emitted from the emission end faces of the process fibers 33a and 33b into parallel light, respectively. The focusing lenses 35a and 35b, the process fibers 33a and 33b, and the collimating lenses 36a and 36b form a set. One of the sets including the process fiber 33b and the collimating lens 36b is selected.

  More specifically, the beam mode conversion unit 14 includes optical tubes (cylindrical members) 34a and 34b in which a pair of focusing lenses 35a and 35b, process fibers 33a and 33b, and collimating lenses 36a and 36b are fixed. And a rotatable plate member 37 that supports the optical cylinders 34a and 34b. Three openings are formed in the plate member 37, and the two optical cylinders 34a and 34b are connected to the openings. Then, the motor 38 as an example of the selection unit rotates the plate member 37 so that any one of the focusing lenses 35a and 35b, the process fibers 33a and 33b, and the collimating lenses 36a and 36b is placed on the optical axis of the laser beam LB. Place one pair.

  FIG. 2 shows a state where the focusing lens 35b, the process fiber 33b, and the collimating lens 36b are arranged on the optical axis of the laser beam LB. That is, a state is shown in which a set including the focusing lens 35b, the process fiber 33b, and the collimating lens 36b is selected. From this state, by rotating the plate member 37 using the motor 38, the other focusing lens 35a, the other process fiber 33a, and the other collimating lens 36a can be arranged on the optical axis of the laser beam LB. is there. It is also possible to select an aperture where no focusing lens, process fiber and collimating lens are arranged. In this case, the laser beam LB is not transmitted to any of the process fibers 33a and 33b. In this way, the motor 38 selects whether or not to transmit the laser light LB to the process fibers 33a and 33b, and further selects to transmit the laser light LB to the process fibers 33a and 33b. It is possible to select whether to transmit the laser beam LB to the process fibers 33a and 33b.

  As shown in FIG. 2, the laser beam LB output from the beam shutter 13 is condensed on the incident end face of the process fiber 33b by the focusing lens 35b and is incident on the process fiber 33b. It is transmitted by the process fiber 33b and is emitted from the exit end face of the process fiber 33b with a predetermined beam divergence angle. Thereafter, the light is converted into parallel light again by the collimator lens 36 b and output from the beam mode conversion unit 14. When an aperture in which the focusing lens, the process fiber, and the collimating lens are not selected is selected, the laser beam LB output from the beam shutter 13 passes through the beam mode conversion unit 14 and is output as it is.

  As shown in FIG. 1, the laser beam LB output from the beam mode conversion unit 14 is reflected by the bend mirror 24 and the like, condensed by the condenser lens 27, and irradiated onto the workpiece W.

  The focusing lenses 35a and 35b, the process fibers 33a and 33b, the collimating lenses 36a and 36b, the bend mirror 24, and the collecting lens 27 have optical axes adjusted in advance, and the plate member 37 is rotated to rotate the optical cylinder 34a, It is not necessary to adjust the optical axis each time after selecting 34b. Thereby, the efficiency of processing improves.

Here, the optical parameters of the laser light emitted from the process fiber 33 will be described with reference to FIG. The laser beam LB emitted from the process fiber 33 with the divergence angle θ is converted into parallel light having a beam diameter D by the collimator lens 36, condensed by the condenser lens 27, and becomes the minimum condensed diameter d at the focal length f. . When the laser beam wavelength λ and the laser beam spread angle α after the focal length f are the minimum condensing diameter d, Rayleigh length Zr, and beam quality constant BPP (Beam Parameter Products), the following equation (1) to It is represented by the formula (3). However, _{w 0} is the minimum condensing ^radius, is M 2 = BPP × π / λ .

d = 2w ₀ = 1.27 × f × M ² × λ / D (1)
Zr = πd ² / 4M ² λ (2)
BPP = w ₀ × α (mm · mrad) (3)

Table 1 summarizes the optical parameters calculated for the laser light LB emitted from the process fibers 33a and 33b having different core diameters and the laser light not transmitted by the process fibers 33a and 33b. Optical parameters of laser light when a 2 kW fiber laser is transmitted through process fibers 33a and 33b having a core diameter of 100 μm or 200 μm are shown. Further, the laser light that is not transmitted by the process fibers 33a and 33b indicates the optical parameters of the laser light when transmitted by the feeding fiber 12 having a core diameter of 50 μm at the preceding stage. As optical parameters, wavelength λ (μm), beam quality constant BPP (mm · mrad), magnification M ² , focal length f (mm) of the condenser lens 27, beam diameter D (mm), minimum condensing diameter d ( mm), Rayleigh length Zr (mm), and power density I (W / cm ² ). For the fiber core diameters 50 μm, 100 μm, and 200 μm, the wavelength λ and the focal length f are the same. As the core diameter of the fiber transmitted immediately before increases, the beam quality constant BPP, the magnification M ² , the minimum condensing diameter d, and the Rayleigh length Zr increase, and the power density I decreases.

When the core diameter of the fiber is 50 μm, the minimum condensing diameter d = 0.06 mm and the power density I = 1.37 × 10 ⁸ W / cm ² . Since the minimum condensing diameter d is small, it is suitable for ultrafine processing. Further, since the power density exceeds 10 ⁸ , it is effective for sublimation cutting and ablation processing exceeding the range of normal melt cutting processing.

When the core diameter of the fiber is 100 μm, the minimum condensing diameter d = 0.12 mm and the power density I = 1.76 × 10 ⁷ W / cm ² , and processing conditions effective for high-speed cutting of a thin plate can be obtained.

Finally, when the fiber core diameter is 200 μm, the minimum condensing diameter d = 0.257 mm and the power density I = 3.85 × 10 ⁶ W / cm ² . Since the minimum condensing diameter d is large, processing conditions effective for thick plate processing can be obtained.

  As described above, when the motor 38 as an example of the selection unit rotates the plate member 37, three types of beam quality constants suitable for processing from a thin plate (t = 1 mm or less) to a thick plate (t = 20 mm) are provided. BPP can generate different laser beams. As described above, the focal length f of the condenser lens 27 is constant for the three conditions shown in Table 1. For this reason, it does not deviate from the focal lengths 127 mm, 190.5 mm, and 254 mm of the standard condenser lens 27 depending on the processing conditions such as the thickness of the workpiece, and no complicated work for changing the focal length f is required. Thus, the processing efficiency is improved.

  FIG. 3 shows the result of measuring the cross-sectional shape in the vicinity of the minimum focused diameter d of the three types of laser beams LB shown in Table 1. The vertical axis represents the relative position from the focal position, and the horizontal axis represents the relative position from the optical axis. It can be seen that the minimum condensing diameter d increases as the fiber core diameter increases in the same manner as the calculation results shown in Table 1.

  FIG. 4 is a graph showing the relationship between the core diameter of the process fiber 33 and the beam quality constant BPP. The beam quality constant BPP can be approximated by a quadratic function with the core diameter as a variable. Therefore, the beam quality constant BPP can be obtained from the core diameter of the process fiber 33.

  As shown in FIG. 5, for example, when the beam quality constant BPP = 2 of the laser light emitted from the feeding fiber 12 having a core diameter of 50 μm, the same laser light is transmitted through the process fiber 33 having a core diameter of 100 μm and emitted. Then, the beam quality constant BPP changes to 3.12. Thus, the beam quality constant BPP is determined according to the core diameter of the fiber transmitted immediately before.

  Table 2 is a table comparing optical parameters in the case of a core diameter of 200 μm and optical parameters of a 4 kW CO 2 laser in Table 1. Both focal lengths f are 150 mm. In the case of a fiber laser, the beam quality constant BPP, the minimum condensing diameter d, and the Rayleigh length Zr are almost the same as those of a CO 2 laser suitable for thick plate processing, even though the focal length f of the condensing lens 27 is 150 mm. It is. Further, as shown in FIG. 6, the cross-sectional shape of the laser beam LB near the minimum condensing diameter d is also approximated. As described above, the fiber laser processing apparatus can process from a thin plate to a thick plate using the focal length f of the same condenser lens 27 by changing the core diameter of the fiber.

(Experimental example)
Using a laser beam having the optical parameters shown in Table 3, a cutting test was performed on mild steel having a plate thickness t = 12 mm, 16 mm, and 19 mm. FIG. 7 shows a cross-sectional shape in the vicinity of the focal point measured by generating laser light having the optical parameters shown in Table 3.

  The first processing condition is that the core diameter of the process fiber is 100 μm, the focal length f1 of the collimating lens 36 is 140 mm, the focal length f2 of the condensing lens 27 is 200 mm, and the minimum condensing diameter d = 0.156 mm. This is an advantageous condition.

  The second processing condition is that the core diameter of the process fiber is 100 μm, the focal length f1 of the collimating lens 36 is 100 mm, the focal length f2 of the condensing lens 27 is 200 mm, and the minimum condensing diameter d = 0.203 mm. As shown in the equation (1), when the beam diameter D of the laser light incident on the condensing lens 27 is decreased, the minimum condensing diameter d is increased. Compared to the first processing condition, the second processing condition is that the core diameter of the process fiber is 100 μm, and the collimating lens 36 having a short focal length f1 is used to reduce the beam diameter D, thereby minimizing the light collection. The diameter d was increased to make the conditions advantageous for thick plate processing.

  The third processing condition is that the core diameter of the process fiber is 200 μm, the focal length f1 of the collimating lens 36 is 140 mm, the focal length f2 of the condensing lens 27 is 150 mm, and the minimum condensing diameter d = 0.236 mm. In the third processing condition, the minimum condensing diameter d is large and the Rayleigh length Zr is short as compared to the first and second processing conditions.

  Table 4 shows the cutting results corresponding to the first to third processing conditions shown in Table 3. Under the third processing condition, stable processing and good cut surfaces, that is, cut surface roughness, were reduced for all three types of mild steel having a plate thickness. On the other hand, in the case of the second processing condition, the cutting became unstable although the minimum focused diameter d was larger than that of the first processing condition. From this result, it is understood that not only the minimum condensing diameter d is large but also the Rayleigh length Zr needs to be adjusted for stable processing of the thick plate.

  When the ratio of the Rayleigh length Zr to the minimum condensing diameter d is taken as a parameter and compared in the first to third processing conditions, the first processing condition (Zr / d = 13) and the second processing condition (Zr / d = 18) and the third processing condition (Zr / d = 7). Under the second processing condition, since Zr / d is too large, a parallel cutting kerf width that is long in the plate thickness direction is formed, and the molten metal cannot be efficiently discharged, so that the cutting becomes unstable. On the other hand, in the third processing condition, Zr / d is the smallest, a sufficiently large cut kerf width is formed on the upper surface and the lower surface of the workpiece W, and the molten metal is efficiently discharged. It can be processed stably.

  In the present application, the invention has been disclosed by focusing attention on the minimum condensing diameter d so that it can be processed without troublesome setup from a thin plate to a thick plate. It is necessary to pay attention to the relationship with the Rayleigh length Zr.

  From this experimental example, in order to process appropriately and stably from a thin plate to a thick plate, the focal length f of the condensing lens 27 is adjusted or incident on the condensing lens 27 using fibers having the same core diameter. FIG. 1 and FIG. 2 show that the minimum condensing diameter d is changed by adjusting the core diameter of the process fiber rather than changing the minimum condensing diameter d by adjusting the beam diameter D of the laser beam to be shown. It can be seen that the fiber laser processing apparatus is effective.

  As described above, according to the first embodiment of the present invention, the following operational effects can be obtained.

  The core diameter of the fiber to which the laser beam LB is transmitted can be changed immediately before the laser processing unit 15 according to the selection of whether or not to transmit the laser beam to the process fibers 33a and 33b. Thereby, the minimum condensing diameter d of the laser beam LB condensed by the laser processing unit 15 can be controlled. Therefore, the minimum condensing diameter d of the laser light LB is changed without changing the focal length f of the condensing lens 27 and the beam diameter D of the laser light LB used when condensing the laser light LB in the laser processing unit 15. Since it can be changed, it is possible to easily carry out from high-speed cutting of a thin plate (t = 1 mm or less) to cutting of a thick plate (t = 20 mm).

  The beam mode conversion unit 14 includes two process fibers 33a and 33b having different core diameters, and the selection unit (motor 38) selects that the process fibers 33a and 33b transmit the laser beam LB. In this case, one process fiber 33a, 33b for transmitting the laser beam LB is selected. Thereby, the core diameter of the process fibers 33a and 33b to which the laser beam LB is transmitted immediately before the laser processing unit 15 can be changed according to the process fibers 33a and 33b selected by the selection unit (motor 38). . Therefore, the minimum condensing diameter d can be changed in more detail.

  By arranging the focusing lenses 35a and 35b and the collimating lenses 36a and 36b before and after the process fibers 33a and 33b, the process fibers 33a and 33b can efficiently transmit the laser beam LB.

  The focusing lenses 35a and 35b, the process fibers 33a and 33b, and the collimating lenses 36a and 36b form a set. Select that pair. By adjusting the optical axes of the process fibers 33a and 33b and the collimating lenses 36a and 36b in advance, adjustment of the optical system before and after the process fiber at the time of processing becomes unnecessary.

  Specifically, the beam mode conversion unit 14 includes optical tubes 34a and 34b in which a pair of focusing lenses 35a and 35b, process fibers 33a and 33b, and collimator lenses 36a and 36b are fixed, and an optical tube 34a, And a rotatable plate member 37 that supports 34b. Then, the selection unit (motor 38) selects the optical cylinders 34a and 34b on which the laser beam LB enters by rotating the plate member 37. By fixing the focusing lenses 35a and 35b, the process fibers 33a and 33b, and the collimating lenses 36a and 36b in the optical cylinders 34a and 34b in a pre-aligned state, the process fibers can be easily rotated by simply rotating the plate member 37. 33a and 33b can be selected.

  Between the feeding fiber 12 and the beam mode conversion unit 14, a beam shutter 13 for blocking the laser light LB is disposed. There is no need to provide a beam shutter on the fiber laser oscillator 11 side, and transmission can be made to the laser processing unit 15 side with a single feeding fiber 12.

(Second Embodiment)
In the second embodiment, an example will be described in which the process fibers 33a and 33b for transmitting the laser beam LB are selected by providing beam switches before and after the process fibers 33a and 33b, respectively.

  Specifically, as shown in FIG. 8, the beam mode conversion unit transmits the laser beam LB from the two process fibers 33a and 33b and the two process fibers 33a and 33b having different core diameters. And a selection unit that selects one process fiber. As the selection unit, a first beam switch 41 disposed in the front stage of the process fibers 33a and 33b and a second beam switch 42 disposed in the rear stage of the process fibers 33a and 33b are provided.

  The first beam switch 41 includes a movable mirror 44 and a fixed mirror 45. The laser beam LB output from the beam shutter 13 (not shown) is incident on the first beam switch 41, reflected by the movable mirror 44, and the end face of the process fiber 33a via a condensing optical system (not shown). Is incident on. By moving the movable mirror 44, the laser beam LB is reflected by the fixed mirror 45 and is incident on the end face of the process fiber 33b via a condensing optical system (not shown).

  Similar to the first beam switch 41, the second beam switch 42 includes a movable mirror 46 and a fixed mirror 47. The laser light LB transmitted by the process fibers 33a and 33b is converted into parallel light by the collimating lenses 36a and 36b, and enters the second beam switch 42. When the laser beam LB is emitted from the process fiber 33a, the laser beam LB is reflected by the fixed mirror 47 and enters the condenser lens 27. At this time, the movable mirror 46 has moved to a position off the optical path of the laser beam LB. On the other hand, when the laser beam LB is emitted from the process fiber 33b, the movable mirror 46 is moved, and the laser beam LB is reflected by the movable mirror 46 and enters the condenser lens 27.

  As described above, by arranging the beam switches 41 and 42 that change the optical path of the laser beam LB before and after the two process fibers 33a and 33b, one process fiber that transmits the laser beam LB may be selected. .

  However, it is necessary to arrange the beam switches 41 and 42 on the fiber laser oscillator side and the laser processing unit 15 side, respectively. Therefore, the beam mode conversion unit 14 shown in FIG. 2 has a lower manufacturing cost and a simple operation system.

  When the beam mode conversion unit of FIG. 8 is applied to the fiber laser processing apparatus of FIG. 1, it is necessary to pass two or more process fibers 33a and 33b through a cable duct having a movable part of the laser processing unit 15. In the case of a mobile high-speed / high acceleration / deceleration fiber laser processing apparatus, the risk of durability of the process fibers 33a and 33b increases. On the other hand, in the case of the fiber laser processing apparatus shown in FIG. 1 and FIG. 2, it is only necessary to pass one feeding fiber 12 through the cable duct having the movable part of the laser processing unit 15. The risk for is lower.

(First comparative example)
As shown in FIG. 9, the fiber laser processing apparatus according to Comparative Example 1 includes a beam switch 53 instead of the beam shutter 71 in the fiber laser processing apparatus shown in FIG. The beam switch 53 selects two process fibers 55a and 55b having different core diameters and transmits the laser light LB.

  On the other hand, on the laser processing unit 55 side, two Y-axis carriages 63a and 63b are disposed on the X-axis carriage 64, and a collimator unit and processing heads 66a and 66b are provided for each of the Y-axis carriages 63a and 63b. ing. The two process fibers 55a and 55b are connected to the collimator unit, respectively.

  Since the two types of processing heads 66a and 66b are provided, the area where each processing head 66a and 66b can be processed is limited. Further, the control of the machining heads 66a and 66b becomes complicated. It is necessary to pass the two process fibers 55a and 55b through the cable duct having the movable part of the laser processing unit 55, which increases the risk of durability of the fiber. On the other hand, in the fiber laser processing apparatus according to the first and second embodiments of the present invention, since only one processing head is required, processing area limitations and control complexity can be avoided. It also reduces the risk to fiber durability.

(Second comparative example)
In the second comparative example, an example in which the focal length f of the condensing lens 27 is changed to make the minimum condensing diameter d of the laser light LB equal to that of the CO2 laser.

  Table 5 is a table comparing the optical parameters of a 4 kW CO2 laser and the optical parameters of a fiber laser having a core diameter of 100 μm. FIG. 10 shows a cross-sectional shape in the vicinity of the focal point measured by generating laser light having the optical parameters shown in Table 5.

  The focal length f of the condenser lens used is 150 mm for the CO2 laser and 300 mm for the fiber laser. By using a long focal length lens in the fiber laser, the minimum condensing diameter of the fiber laser (d = 0.241 mm) is substantially equal to the minimum condensing diameter of the CO 2 laser (d = 0.270 mm). However, the Rayleigh length (Zr = 4.65 mm) of the fiber laser is about twice as long as the Rayleigh length (Zr = 2.19 mm) of the CO 2 laser.

  As described above, when the minimum condensing diameter d is adjusted by changing the focal length f, the focal lengths 127 mm, 190.5 mm, and 254 mm of the standard condensing lens 27 may be deviated. Further, the operation of changing the focal length f according to the processing conditions such as the thickness of the workpiece W, that is, replacing the condenser lens 27 is complicated, hinders automation, and reduces the efficiency of processing. . Furthermore, as described in the experimental example, if the ratio of the Rayleigh length Zr to the minimum condensing diameter d is too large, a sufficiently large cut kerf width is not formed on the upper and lower surfaces of the workpiece W, and the molten metal cannot be discharged. Therefore, it becomes difficult to process the thick plate stably.

  According to the first and second embodiments of the present invention, there is no need to replace the condenser lens 27 in accordance with processing conditions such as plate thickness, and the processing efficiency is improved.

(Other embodiments)
As described above, the present invention has been described in terms of two embodiments, but it should not be understood that the discussion and drawings that form part of this disclosure limit the present invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art.

  For example, although a fiber laser oscillator has been exemplified as the solid laser oscillator, a YAG laser oscillator or a Disc laser oscillator may be used. That is, the solid-state laser processing apparatus of the present invention includes a laser processing apparatus equipped with a YAG laser oscillator and a Disc laser oscillator as a light source.

  Moreover, the beam mode conversion unit 14 showed the case where the option which allows the laser beam LB to pass through without being transmitted to any of the process fibers 33a and 33b can be selected. However, the present invention is not limited to this. When the beam mode conversion unit has two or more process fibers having different core diameters, the selection unit selects one process fiber for transmitting the laser beam LB from the two or more process fibers. You may make it do. That is, the laser beam LB may not be transmitted to any of the process fibers 33a and 33b, and may not have an option to pass through as it is. This is because if there are two or more process fibers having different core diameters, the beam quality constant BPP can be adjusted by selecting one of the process fibers.

  Furthermore, in the beam mode conversion unit 14 shown in FIG. 2, the focusing lenses 35a and 35b, the process fibers 33a and 33b, and the collimating lenses 36a and 36b form a set, and the motor 38 is connected to the focusing lenses 35a and 35b and the process fiber 33a. 33b and the collimating lenses 36a and 36b have been described as being selected, but the present invention is not limited to this. For example, the beam mode conversion unit 14 may select only the collimating lenses 36a and 36b, and the focusing lens and the collimating lens arranged in the front and back may be common to the two or more process fibers 33a and 33b.

11 Fiber laser oscillator (solid-state laser oscillator)
12 Feeding fiber 13 Beam shutter 14 Beam mode conversion unit 15 Laser processing unit 33a, 33b Process fiber 38 Motor (selection unit)
34a, 34b Optical cylinder (tubular member)
35a, 35b Focusing lens 36a, 36b Collimating lens 37 Plate member LB Laser beam W Work material

Claims (5)

A solid state laser oscillator for generating laser light;
A feeding fiber for transmitting laser light generated by the solid-state laser oscillator;
A beam mode conversion unit through which the laser beam transmitted by the feeding fiber passes;
A laser processing unit that condenses the laser light that has passed through the beam mode conversion unit and irradiates the workpiece ;
With
The beam mode conversion unit includes:
One or more process fibers having a core diameter different from the core diameter of the feeding fiber;
A selection unit for selecting whether to transmit the laser light to the processing fibers,
A focusing lens that is arranged in front of the process fiber and condenses the laser light on the incident end face of the process fiber;
A collimating lens that is arranged at the rear stage of the process fiber and converts the laser light emitted from the exit end face of the process fiber into parallel light;
Have
The focusing lens, the process fiber, and the collimating lens form a set,
The beam mode conversion unit includes:
A cylindrical member for fixing the set inside;
A rotatable plate member that supports the tubular member;
Further comprising
The selection unit selects the cylindrical member on which laser light is incident by rotating the plate member . The beam mode conversion unit comprises two or more process fibers having different core diameters from each other,
Prior Symbol selection unit, in the case where chose to transmit the laser light to the processing fibers, from among the two or more process fibers, select the first process fiber to transmit the laser beam
Solid-state laser processing apparatus according to claim 1, wherein the this. A solid state laser oscillator for generating laser light;
A feeding fiber for transmitting laser light generated by the solid-state laser oscillator;
A beam mode conversion unit through which the laser beam transmitted by the feeding fiber passes;
A laser processing unit that condenses the laser light that has passed through the beam mode conversion unit and irradiates the workpiece ;
With
The beam mode conversion unit includes:
Two or more process fibers having different core diameters;
A selection unit for selecting one process fiber for transmitting laser light from the two or more process fibers ;
A focusing lens that is arranged in front of the process fiber and collects the laser light on the incident end face of the process fiber;
A collimating lens that is arranged at the rear stage of the process fiber and converts the laser light emitted from the exit end face of the process fiber into parallel light, respectively;
Have
The focusing lens, the process fiber, and the collimating lens form a set,
The beam mode conversion unit includes:
A cylindrical member for fixing the set inside;
A rotatable plate member that supports the tubular member;
Further comprising
The selection unit selects the cylindrical member on which laser light is incident by rotating the plate member . Wherein disposed between the feeding fiber and the beam mode conversion unit, the solid-state laser processing apparatus according to any one of claims 1 to 3, further comprising a beam shutter for blocking the laser beam. The solid laser processing apparatus according to claim 1, wherein the solid laser processing apparatus is a fiber laser processing apparatus.

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