JP2018515720A - バルブ - Google Patents
バルブ Download PDFInfo
- Publication number
- JP2018515720A JP2018515720A JP2017545752A JP2017545752A JP2018515720A JP 2018515720 A JP2018515720 A JP 2018515720A JP 2017545752 A JP2017545752 A JP 2017545752A JP 2017545752 A JP2017545752 A JP 2017545752A JP 2018515720 A JP2018515720 A JP 2018515720A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- closing element
- pressed against
- opening
- open position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 230000007246 mechanism Effects 0.000 claims abstract description 22
- 230000003746 surface roughness Effects 0.000 claims abstract description 15
- 238000007789 sealing Methods 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 23
- 230000008569 process Effects 0.000 claims description 20
- 229910000838 Al alloy Inorganic materials 0.000 claims description 6
- 239000012530 fluid Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 239000010935 stainless steel Substances 0.000 claims description 5
- 229910001220 stainless steel Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 230000005670 electromagnetic radiation Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims description 4
- 238000002310 reflectometry Methods 0.000 claims description 3
- 239000002245 particle Substances 0.000 description 16
- 238000012545 processing Methods 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 230000003068 static effect Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0227—Packings
- F16K3/0236—Packings the packing being of a non-resilient material, e.g. ceramic, metal
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/12—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with streamlined valve member around which the fluid flows when the valve is opened
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
- F16K25/005—Particular materials for seats or closure elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0263—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor using particular material or covering means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/029—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with two or more gates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
- F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/12—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with wedge-shaped arrangements of sealing faces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Ceramic Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
- Valve Housings (AREA)
- Lift Valve (AREA)
Abstract
Description
Claims (10)
- 少なくとも1つのバルブハウジング(2)と、少なくとも1つの閉塞要素(3)と、少なくとも1つのバルブシート(4)と、を有する真空バルブまたはバルブ(1)であって、
前記バルブシート(4)は、前記バルブ(1)の少なくとも1つのバルブ開口部(5)を取り囲み、前記閉塞要素(3)は、少なくとも1つの閉塞要素駆動機構(6)(7)により、前記閉塞要素(3)が前記バルブ開口部を少なくとも部分的に開放している少なくとも1つの開位置と、前記バルブ開口部(5)を閉塞するため、前記閉塞要素(3)が前記バルブシート(4)に対して押し付けられる閉位置との間で進退可能であり、
前記バルブ(1)の少なくとも一部の表面(9)が、0.40μm以下または0.25μm以下の平均表面粗さRZを有することを特徴とするバルブ。 - 請求項1記載のバルブ(1)において、前記表面(9)が研磨面、光沢面および光反射面のうち少なくとも1つであることを特徴とするバルブ。
- 請求項1または2記載のバルブ(1)において、前記表面(9)が電磁放射に対して0.8以上または0.9以上の反射率を有することを特徴とするバルブ。
- 請求項1〜3のうちいずれか1つに記載のバルブ(1)において、前記表面(9)がアルミニウム、アルミニウム合金もしくはステンレス鋼またはこれらの同等材料を含むことを特徴とするバルブ。
- 請求項4記載のバルブ(1)において、前記表面(9)が5000シリーズもしくは6000シリーズのアルミニウム合金またはこれらの同等材料を含むことを特徴とするバルブ。
- 請求項1〜5のうちいずれか1つに記載のバルブ(1)において、前記表面(9)が前記バルブシート(4)および前記閉塞要素(3)の前記シール面(8)のうち少なくとも一方を構成していることを特徴とするバルブ。
- 請求項6記載のバルブ(1)において、閉位置において前記バルブ(1)のシール部材(10)が前記表面(9)に対して押し付けられ、開位置において前記シール部材(10)が前記表面(9)から離間していることを特徴とするバルブ。
- 請求項1〜7のうちいずれか1つに記載のバルブ(1)において、前記表面(9)が、前記バルブ(1)の動作期間において前記シール部材(10)が恒久的に押し付けられる、前記バルブ(1)のシールシート(11)を構成することを特徴とするバルブ。
- 請求項1〜8のうちいずれか1つに記載のバルブ(1)において、前記表面(9)が、前記バルブ(1)の動作期間においてプロセス流体に接触する、前記バルブハウジング(2)および前記閉塞要素(3)のうち一方または両方の少なくとも一部の領域を構成することを特徴とするバルブ。
- 請求項1〜9のうちいずれか1つに記載のバルブ(1)を製造する方法であって、前記表面(9)が研磨加工および鏡面加工のうち少なくとも一方が施されることを特徴とする方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ATA182/2015 | 2015-03-27 | ||
AT1822015 | 2015-03-27 | ||
PCT/EP2016/055136 WO2016156001A1 (de) | 2015-03-27 | 2016-03-10 | Ventil, insbesondere vakuumventil |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018515720A true JP2018515720A (ja) | 2018-06-14 |
JP6843058B2 JP6843058B2 (ja) | 2021-03-17 |
Family
ID=55521727
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017545752A Active JP6843058B2 (ja) | 2015-03-27 | 2016-03-10 | バルブ |
Country Status (6)
Country | Link |
---|---|
US (1) | US10364899B2 (ja) |
JP (1) | JP6843058B2 (ja) |
KR (1) | KR102504116B1 (ja) |
CN (1) | CN107407427B (ja) |
MY (1) | MY184862A (ja) |
WO (1) | WO2016156001A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6392479B1 (ja) * | 2018-04-27 | 2018-09-19 | 株式会社ブイテックス | 真空バルブ駆動制御方法 |
WO2020035219A1 (de) * | 2018-08-17 | 2020-02-20 | Vat Holding Ag | Anordnung mit zumindest zwei kammern und zumindest einem transferventil |
DE102019133555A1 (de) * | 2019-12-09 | 2021-06-10 | Vat Holding Ag | Vakuumventil oder Vakuumtür |
KR102574233B1 (ko) * | 2023-03-14 | 2023-09-04 | 주식회사 에스알티 | U motion 게이트밸브 |
Citations (13)
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JPH0544086A (ja) * | 1991-08-08 | 1993-02-23 | Showa Alum Corp | アルミニウム製バルブスプールの製造方法 |
JPH0657354A (ja) * | 1992-04-17 | 1994-03-01 | Hoechst Ceram Tec Ag | ケイ素溶浸した炭化ケイ素の弁体 |
JPH08105370A (ja) * | 1994-10-06 | 1996-04-23 | Nippondenso Co Ltd | 燃料噴射弁およびその弁部の加工方法 |
JP2001289333A (ja) * | 2000-03-23 | 2001-10-19 | Vat Holding Ag | 2つの真空室を分離するための真空バルブ |
JP2003532842A (ja) * | 1999-11-30 | 2003-11-05 | ウエファーマスターズ, インコーポレイテッド | 小型ゲートバルブ |
JP2005133899A (ja) * | 2003-10-31 | 2005-05-26 | Hisaka Works Ltd | バルブ装置 |
JP2005265149A (ja) * | 2004-03-22 | 2005-09-29 | Toshiba Ceramics Co Ltd | セラミックゲートバルブ |
JP2005325960A (ja) * | 2004-05-17 | 2005-11-24 | Eagle Ind Co Ltd | ゲートバルブ |
JP2010236661A (ja) * | 2009-03-31 | 2010-10-21 | Tokyo Electron Ltd | ゲートバルブ装置 |
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-
2016
- 2016-03-10 CN CN201680015682.0A patent/CN107407427B/zh active Active
- 2016-03-10 US US15/557,959 patent/US10364899B2/en active Active
- 2016-03-10 MY MYPI2017702948A patent/MY184862A/en unknown
- 2016-03-10 KR KR1020177024483A patent/KR102504116B1/ko active IP Right Grant
- 2016-03-10 JP JP2017545752A patent/JP6843058B2/ja active Active
- 2016-03-10 WO PCT/EP2016/055136 patent/WO2016156001A1/de active Application Filing
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0544086A (ja) * | 1991-08-08 | 1993-02-23 | Showa Alum Corp | アルミニウム製バルブスプールの製造方法 |
JPH0657354A (ja) * | 1992-04-17 | 1994-03-01 | Hoechst Ceram Tec Ag | ケイ素溶浸した炭化ケイ素の弁体 |
JPH08105370A (ja) * | 1994-10-06 | 1996-04-23 | Nippondenso Co Ltd | 燃料噴射弁およびその弁部の加工方法 |
JP2003532842A (ja) * | 1999-11-30 | 2003-11-05 | ウエファーマスターズ, インコーポレイテッド | 小型ゲートバルブ |
JP2001289333A (ja) * | 2000-03-23 | 2001-10-19 | Vat Holding Ag | 2つの真空室を分離するための真空バルブ |
JP2005133899A (ja) * | 2003-10-31 | 2005-05-26 | Hisaka Works Ltd | バルブ装置 |
JP2005265149A (ja) * | 2004-03-22 | 2005-09-29 | Toshiba Ceramics Co Ltd | セラミックゲートバルブ |
JP2005325960A (ja) * | 2004-05-17 | 2005-11-24 | Eagle Ind Co Ltd | ゲートバルブ |
JP2010236661A (ja) * | 2009-03-31 | 2010-10-21 | Tokyo Electron Ltd | ゲートバルブ装置 |
JP2010276088A (ja) * | 2009-05-27 | 2010-12-09 | Mizuno Tekkosho:Kk | スプールバルブ |
JP2013231461A (ja) * | 2012-04-27 | 2013-11-14 | V Tex:Kk | シール材のつぶし量が制御可能なゲートバルブ |
JP2014066279A (ja) * | 2012-09-25 | 2014-04-17 | Renesas Electronics Corp | 半導体製造装置および半導体装置の製造方法 |
JP2015021618A (ja) * | 2013-07-23 | 2015-02-02 | バット ホールディング アーゲー | バルブ |
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US10364899B2 (en) | 2019-07-30 |
KR102504116B1 (ko) | 2023-02-24 |
JP6843058B2 (ja) | 2021-03-17 |
WO2016156001A1 (de) | 2016-10-06 |
CN107407427A (zh) | 2017-11-28 |
US20180051813A1 (en) | 2018-02-22 |
CN107407427B (zh) | 2019-11-08 |
MY184862A (en) | 2021-04-28 |
KR20170129714A (ko) | 2017-11-27 |
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