JP2010236661A - ゲートバルブ装置 - Google Patents
ゲートバルブ装置 Download PDFInfo
- Publication number
- JP2010236661A JP2010236661A JP2009087140A JP2009087140A JP2010236661A JP 2010236661 A JP2010236661 A JP 2010236661A JP 2009087140 A JP2009087140 A JP 2009087140A JP 2009087140 A JP2009087140 A JP 2009087140A JP 2010236661 A JP2010236661 A JP 2010236661A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- opening
- valve seat
- valve body
- seal member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 7
- 239000011737 fluorine Substances 0.000 claims description 7
- 229910052731 fluorine Inorganic materials 0.000 claims description 7
- 239000011347 resin Substances 0.000 claims description 6
- 229920005989 resin Polymers 0.000 claims description 6
- 230000006866 deterioration Effects 0.000 abstract description 6
- 230000000903 blocking effect Effects 0.000 description 44
- 238000012545 processing Methods 0.000 description 20
- 238000006243 chemical reaction Methods 0.000 description 12
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 10
- 125000006850 spacer group Chemical group 0.000 description 9
- 238000007789 sealing Methods 0.000 description 7
- 229920006169 Perfluoroelastomer Polymers 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 229920001973 fluoroelastomer Polymers 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/24—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/44—Details of seats or valve members of double-seat valves
- F16K1/443—Details of seats or valve members of double-seat valves the seats being in series
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seat
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
- Lift Valve (AREA)
Abstract
【解決手段】第1弁座36と第2弁座38とを有し、開口部28が形成された弁箱26と、開口部28を閉塞したときに、第1弁座36に接触して開口部28をシールするシール部材46を有する弁体30と、を備えたゲートバルブ装置10であって、弁体30に、当該弁体30が開口部28を閉塞したときに、第2弁座38に接触して撓み変形し、開口部28とシール部材46との間の空間を遮断する遮蔽部材58を設け、常温環境下及び高温環境下において、弁体30が開口部を閉塞している状態で遮蔽部材58が撓み変形しており、遮蔽部材58と第2弁座38との接触状態を維持することを特徴とする。
【選択図】 図7
Description
26 弁箱
28 開口部
30 弁体
36 第1弁座
38 第2弁座
46 シール部材
58 遮断部材
Claims (1)
- 第1弁座と第2弁座とを有し、開口部が形成された弁箱と、
前記開口部を閉塞する弁体と、
前記弁体に装着され、当該弁体が前記開口部を閉塞したときに、前記第1弁座に接触して前記開口部をシールするシール部材と、
前記弁体に装着され、当該弁体が前記開口部を閉塞したときに、前記第2弁座に接触して前記開口部と前記シール部材との間の空間を遮断する遮蔽部材と、
を備えたゲートバルブ装置であって、
前記遮蔽部材は、金属製の薄板にフッ素系樹脂が被覆されていることを特徴とするゲートバルブ装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009087140A JP5490435B2 (ja) | 2009-03-31 | 2009-03-31 | ゲートバルブ装置 |
US13/258,519 US8590861B2 (en) | 2009-03-31 | 2010-03-29 | Gate valve and substrate processing apparatus equipped with the same |
CN2010800150899A CN102378873A (zh) | 2009-03-31 | 2010-03-29 | 闸阀装置和具备该闸阀装置的基板处理装置 |
KR1020117025838A KR101313088B1 (ko) | 2009-03-31 | 2010-03-29 | 게이트 밸브 장치 및 이를 구비하는 기판 처리 장치 |
PCT/JP2010/055599 WO2010113891A1 (ja) | 2009-03-31 | 2010-03-29 | ゲートバルブ装置およびこれを備える基板処理装置 |
TW099109969A TW201107638A (en) | 2009-03-31 | 2010-03-31 | Gate valve device and substrate processing device with gate valve device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009087140A JP5490435B2 (ja) | 2009-03-31 | 2009-03-31 | ゲートバルブ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010236661A true JP2010236661A (ja) | 2010-10-21 |
JP5490435B2 JP5490435B2 (ja) | 2014-05-14 |
Family
ID=42828180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009087140A Expired - Fee Related JP5490435B2 (ja) | 2009-03-31 | 2009-03-31 | ゲートバルブ装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8590861B2 (ja) |
JP (1) | JP5490435B2 (ja) |
KR (1) | KR101313088B1 (ja) |
CN (1) | CN102378873A (ja) |
TW (1) | TW201107638A (ja) |
WO (1) | WO2010113891A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012169425A1 (ja) * | 2011-06-10 | 2012-12-13 | 株式会社フジキン | 逆止弁 |
JP2018515720A (ja) * | 2015-03-27 | 2018-06-14 | バット ホールディング アーゲー | バルブ |
CN114439957A (zh) * | 2020-11-06 | 2022-05-06 | 新奥科技发展有限公司 | 插板阀、具有该插板阀的微波传输装置和微波加热系统 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2551565A1 (de) * | 2011-07-28 | 2013-01-30 | VAT Holding AG | Vakuumventil und Verschlussglied zum gasdichten Schliessen eines Fliesswegs mittels einer Linearbewegung |
CN103379791A (zh) * | 2012-04-26 | 2013-10-30 | 鸿富锦精密工业(深圳)有限公司 | 电子装置 |
ITBS20120153A1 (it) * | 2012-10-29 | 2014-04-30 | Ind Saleri Italo Spa | Gruppo valvola estraibile con otturatore migliorato |
CN103807454B (zh) * | 2012-11-14 | 2016-04-27 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 阀板连接组件、门阀装置及等离子体加工设备 |
JP5908857B2 (ja) * | 2013-03-25 | 2016-04-26 | 住友重機械工業株式会社 | 成膜装置 |
JP6160926B2 (ja) * | 2014-06-05 | 2017-07-12 | Smc株式会社 | ゲートバルブ |
TWI551798B (zh) * | 2015-02-06 | 2016-10-01 | 新萊應材科技有限公司 | 具有鎖定功能之閘閥 |
US10317003B2 (en) * | 2015-07-22 | 2019-06-11 | Daniel Measurement And Control, Inc. | Double block and bleed system for an orifice fitting |
EP3348885B1 (de) * | 2017-01-16 | 2019-12-11 | VAT Holding AG | Dichtung eines vakuumventils und diesbezügliches herstellungsverfahren |
CN107676493A (zh) * | 2017-10-24 | 2018-02-09 | 北京聚源恒达科技有限公司 | 一种安全密闭阀 |
US11174958B2 (en) | 2019-01-24 | 2021-11-16 | Jet Oilfield Services, LLC | Gate valve and method of repairing same |
CN114286906A (zh) * | 2019-07-31 | 2022-04-05 | 应用材料公司 | 隔离阀 |
CA3159547A1 (en) * | 2019-11-21 | 2021-05-27 | Itt Manufacturing Enterprises Llc | Dual motion shutoff valve |
CN112268141A (zh) * | 2020-10-23 | 2021-01-26 | 中国科学院上海高等研究院 | 用于真空封合之密封碟盘 |
JP7296083B1 (ja) | 2023-01-30 | 2023-06-22 | 入江工研株式会社 | 回転駆動式ゲートバルブ |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6013960U (ja) * | 1983-07-07 | 1985-01-30 | 富士通株式会社 | プラズマ処理装置 |
JP2001004039A (ja) * | 1999-02-09 | 2001-01-09 | Applied Materials Inc | バルブ用シール |
JP2002228043A (ja) * | 2001-01-11 | 2002-08-14 | Vat Holding Ag | 真空バルブ |
US20050279956A1 (en) * | 2004-06-16 | 2005-12-22 | Siegfried Berger | Valve with reliable opening indication |
JP2006170373A (ja) * | 2004-12-17 | 2006-06-29 | Tokyo Electron Ltd | ゲートバルブ装置、処理システム及びシール部材の交換方法 |
JP2008045640A (ja) * | 2006-08-11 | 2008-02-28 | Nippon Valqua Ind Ltd | ゲートバルブ装置 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6013960A (ja) | 1983-07-01 | 1985-01-24 | Misawa Homes Co Ltd | 内燃機関駆動蓄熱システム |
US5172722A (en) * | 1990-09-17 | 1992-12-22 | Motoyama Eng. Works, Ltd. | Stop valve for a vacuum apparatus |
JP2677536B2 (ja) * | 1995-09-01 | 1997-11-17 | シーケーディ株式会社 | 真空圧力制御システム |
JP2001148378A (ja) * | 1999-11-22 | 2001-05-29 | Tokyo Electron Ltd | プラズマ処理装置、クラスターツールおよびプラズマ制御方法 |
JP3442714B2 (ja) * | 2000-03-21 | 2003-09-02 | Smc株式会社 | パイロット式2ポート真空バルブ |
JP3445569B2 (ja) * | 2000-09-18 | 2003-09-08 | Smc株式会社 | パイロット式2ポート真空バルブ |
US7143834B2 (en) * | 2001-11-01 | 2006-12-05 | Kevin Michael Dolan | Sprinkler assembly |
JP2005030459A (ja) * | 2003-07-09 | 2005-02-03 | Smc Corp | 真空排気弁 |
US7575220B2 (en) | 2004-06-14 | 2009-08-18 | Applied Materials, Inc. | Curved slit valve door |
US7637477B2 (en) | 2004-12-17 | 2009-12-29 | Tokyo Electron Limited | Gate valve apparatus of vacuum processing system |
JP4079157B2 (ja) * | 2005-04-12 | 2008-04-23 | 東京エレクトロン株式会社 | ゲートバルブ装置及び処理システム |
JP4878029B2 (ja) * | 2005-07-29 | 2012-02-15 | 株式会社キッツエスシーティー | スライドバルブ |
DE112006003294B4 (de) * | 2005-12-05 | 2019-02-21 | Ulvac, Inc. | Dampfabscheidungsvorrichtung |
US7699957B2 (en) * | 2006-03-03 | 2010-04-20 | Advanced Display Process Engineering Co., Ltd. | Plasma processing apparatus |
JP5519099B2 (ja) * | 2006-06-28 | 2014-06-11 | アプライド マテリアルズ インコーポレイテッド | ボール継手を有するバルブドア |
JPWO2008018405A1 (ja) * | 2006-08-11 | 2009-12-24 | 日本バルカー工業株式会社 | バルブ装置 |
JP4435799B2 (ja) * | 2007-03-19 | 2010-03-24 | 東京エレクトロン株式会社 | 開閉バルブ及び該開閉バルブを備えた処理装置 |
US7988815B2 (en) * | 2007-07-26 | 2011-08-02 | Applied Materials, Inc. | Plasma reactor with reduced electrical skew using electrical bypass elements |
CN101842514B (zh) * | 2007-11-01 | 2013-01-23 | 应用材料公司 | 用以密封处理腔室的开口的方法与装置 |
-
2009
- 2009-03-31 JP JP2009087140A patent/JP5490435B2/ja not_active Expired - Fee Related
-
2010
- 2010-03-29 KR KR1020117025838A patent/KR101313088B1/ko active IP Right Grant
- 2010-03-29 CN CN2010800150899A patent/CN102378873A/zh active Pending
- 2010-03-29 WO PCT/JP2010/055599 patent/WO2010113891A1/ja active Application Filing
- 2010-03-29 US US13/258,519 patent/US8590861B2/en not_active Expired - Fee Related
- 2010-03-31 TW TW099109969A patent/TW201107638A/zh unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6013960U (ja) * | 1983-07-07 | 1985-01-30 | 富士通株式会社 | プラズマ処理装置 |
JP2001004039A (ja) * | 1999-02-09 | 2001-01-09 | Applied Materials Inc | バルブ用シール |
JP2002228043A (ja) * | 2001-01-11 | 2002-08-14 | Vat Holding Ag | 真空バルブ |
US20050279956A1 (en) * | 2004-06-16 | 2005-12-22 | Siegfried Berger | Valve with reliable opening indication |
JP2006170373A (ja) * | 2004-12-17 | 2006-06-29 | Tokyo Electron Ltd | ゲートバルブ装置、処理システム及びシール部材の交換方法 |
JP2008045640A (ja) * | 2006-08-11 | 2008-02-28 | Nippon Valqua Ind Ltd | ゲートバルブ装置 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012169425A1 (ja) * | 2011-06-10 | 2012-12-13 | 株式会社フジキン | 逆止弁 |
US9395006B2 (en) | 2011-06-10 | 2016-07-19 | Fujikin Incorporated | Check valve |
JP2018515720A (ja) * | 2015-03-27 | 2018-06-14 | バット ホールディング アーゲー | バルブ |
CN114439957A (zh) * | 2020-11-06 | 2022-05-06 | 新奥科技发展有限公司 | 插板阀、具有该插板阀的微波传输装置和微波加热系统 |
CN114439957B (zh) * | 2020-11-06 | 2024-04-09 | 新奥科技发展有限公司 | 插板阀、具有该插板阀的微波传输装置和微波加热系统 |
Also Published As
Publication number | Publication date |
---|---|
US8590861B2 (en) | 2013-11-26 |
JP5490435B2 (ja) | 2014-05-14 |
US20120055400A1 (en) | 2012-03-08 |
KR20120010250A (ko) | 2012-02-02 |
KR101313088B1 (ko) | 2013-09-30 |
TW201107638A (en) | 2011-03-01 |
CN102378873A (zh) | 2012-03-14 |
WO2010113891A1 (ja) | 2010-10-07 |
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