JP4435799B2 - 開閉バルブ及び該開閉バルブを備えた処理装置 - Google Patents
開閉バルブ及び該開閉バルブを備えた処理装置 Download PDFInfo
- Publication number
- JP4435799B2 JP4435799B2 JP2007070362A JP2007070362A JP4435799B2 JP 4435799 B2 JP4435799 B2 JP 4435799B2 JP 2007070362 A JP2007070362 A JP 2007070362A JP 2007070362 A JP2007070362 A JP 2007070362A JP 4435799 B2 JP4435799 B2 JP 4435799B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- valve body
- opening
- chamber
- seal member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/44—Mechanical actuating means
- F16K31/52—Mechanical actuating means with crank, eccentric, or cam
- F16K31/528—Mechanical actuating means with crank, eccentric, or cam with pin and slot
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/24—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
- Y10T137/0396—Involving pressure control
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Drying Of Semiconductors (AREA)
- Sliding Valves (AREA)
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Details Of Valves (AREA)
- Lift Valve (AREA)
- Mechanically-Actuated Valves (AREA)
Description
53、54 排気装置
100 開閉バルブ
110 弁本体
111 開口
113b 弁退避部
120 弁体
120a 保護シール
120b シール部材
131 板カム(カム機構)
140 直進移動手段
150 回動手段
S 半導体基板
Claims (6)
- 内部を真空に保持可能なチャンバーと、該チャンバー内を真空排気する排気装置との間に設けられる開閉バルブであって、
内部に前記チャンバー側と前記排気装置側とを連通する開口が形成され、内部の空間が円形である弁本体と、
該弁本体内にあって前記開口に接離して開口を開閉する弁体と、
前記弁体に設けられ前記弁体が前記開口を閉じた際に開口をシールするシール部材と、
前記弁体を進退させる直進移動手段と、
前記弁本体内にあって前記開口から離隔した位置に設けられ、前記開口から離反した前記弁体が退避する弁退避部と、
前記弁体を、前記開口に対応する第1の位置と前記弁退避部に対応する第2の位置との間で回動させる回動手段と、
を有し、
前記弁体は、少なくとも前記チャンバーにて処理が行われる際に、前記直進移動手段と回動手段とにより前記第2の位置に位置され、
前記弁退避部が、前記開口から離隔した前記弁本体の内部の空間の円形の内壁に設けられ、前記弁体が前記弁退避部に対応する位置に移動したとき、前記直進移動手段が、前記弁体を前記弁退避部に達するように直進させ、
前記弁体が、前記シール部材の外側に保護シールを有し、前記保護シールが前記弁退避部に密着したとき、前記シール部材が前記内壁に当接することなく、前記保護シール内に気密に封止されることを特徴とする開閉バルブ。 - 前記直進移動手段が、カム機構を有することを特徴とする請求項1に記載の開閉バルブ。
- 前記カム機構が、板状部材の表面に形成された溝を有する板カムであることを特徴とする請求項2に記載の開閉バルブ。
- 前記回動手段が、前記弁体と共にカム機構を回動することを特徴とする請求項1から請求項3のいずれか1項に記載の開閉バルブ。
- 前記開口の周辺に、前記保護シールが収容される凹溝を形成し、前記シール部材が開口を封止したとき前記保護シールが前記凹溝に収容されることを特徴とする請求項4に記載の開閉バルブ。
- 被処理体が収容され、内部を真空に保持可能なチャンバーと、前記チャンバー内で被処理体にプラズマによる処理を施す処理機構と、前記チャンバー内を真空排気する排気装置と、前記チャンバーと前記排気装置との間に設けられる開閉バルブとを有する処理装置であって、
前記開閉バルブが、内部に前記チャンバー側と前記排気装置側とを連通する開口が形成され、内部の空間が円形である弁本体と、該弁本体内にあって前記開口に接離して開口を開閉する弁体と、前記弁体に設けられ前記弁体が前記開口を閉じた際に開口をシールするシール部材と、前記弁体を進退させる直進移動手段と、前記弁本体内にあって前記開口から離隔した位置に設けられ、前記開口から離反した前記弁体が退避する弁退避部と、前記弁体を、前記開口に対応する第1の位置と前記弁退避部に対応する第2の位置との間で回動させる回動手段と、を有し、前記弁体は、少なくとも前記チャンバーにて処理が行われる際に、前記直進移動手段と回動手段とにより前記第2の位置に位置され、前記弁退避部が、前記開口から離隔した前記弁本体の内部の空間の円形の内壁に設けられ、前記弁体が前記弁退避部に対応する位置に移動したとき、前記直進移動手段が、前記弁体を前記弁退避部に達するように直進させ、前記弁体が、前記シール部材の外側に保護シールを有し、前記保護シールが前記弁退避部に密着したとき、前記シール部材が前記内壁に当接することなく、前記保護シール内に気密に封止されることを特徴とする処理装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007070362A JP4435799B2 (ja) | 2007-03-19 | 2007-03-19 | 開閉バルブ及び該開閉バルブを備えた処理装置 |
TW97107358A TW200900617A (en) | 2007-03-19 | 2008-03-03 | On-off valve and process apparatus employing the on-off valve |
KR1020080020948A KR100961678B1 (ko) | 2007-03-19 | 2008-03-06 | 개폐 밸브 및 그 개폐 밸브를 구비한 처리 장치 |
US12/076,129 US8123194B2 (en) | 2007-03-19 | 2008-03-14 | On-off valve and process apparatus employing the on-off valve |
CN2008100855818A CN101270831B (zh) | 2007-03-19 | 2008-03-19 | 开关阀及具有该开关阀的处理装置 |
US13/347,812 US8500089B2 (en) | 2007-03-19 | 2012-01-11 | Method of operating on-off valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007070362A JP4435799B2 (ja) | 2007-03-19 | 2007-03-19 | 開閉バルブ及び該開閉バルブを備えた処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008232211A JP2008232211A (ja) | 2008-10-02 |
JP4435799B2 true JP4435799B2 (ja) | 2010-03-24 |
Family
ID=39773769
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007070362A Expired - Fee Related JP4435799B2 (ja) | 2007-03-19 | 2007-03-19 | 開閉バルブ及び該開閉バルブを備えた処理装置 |
Country Status (5)
Country | Link |
---|---|
US (2) | US8123194B2 (ja) |
JP (1) | JP4435799B2 (ja) |
KR (1) | KR100961678B1 (ja) |
CN (1) | CN101270831B (ja) |
TW (1) | TW200900617A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020180103A1 (ko) * | 2019-03-05 | 2020-09-10 | 프리시스 주식회사 | 진공밸브 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202007001123U1 (de) * | 2007-01-25 | 2007-06-06 | KRÜGER, Günter | Anlage zum Trocknen von organischen Massen |
WO2010084618A1 (ja) * | 2009-01-26 | 2010-07-29 | 日本バルカー工業株式会社 | バルブ装置 |
JP4997361B2 (ja) * | 2009-03-05 | 2012-08-08 | Smc株式会社 | 真空バルブ |
JP4873506B2 (ja) * | 2009-03-06 | 2012-02-08 | 東京エレクトロン株式会社 | 基板バッファユニット |
JP5490435B2 (ja) * | 2009-03-31 | 2014-05-14 | 東京エレクトロン株式会社 | ゲートバルブ装置 |
TW201128096A (en) * | 2010-02-01 | 2011-08-16 | Hermes Epitek Corp | Gate valve |
JP5490642B2 (ja) | 2010-07-28 | 2014-05-14 | 株式会社パウレック | 円板状部材の反転機構 |
JP5578382B2 (ja) * | 2013-07-31 | 2014-08-27 | 株式会社村田製作所 | 開閉バルブ |
KR101597818B1 (ko) * | 2015-06-19 | 2016-02-25 | 주식회사 퓨젠 | 사각 게이트 진공밸브 |
WO2023112296A1 (ja) * | 2021-12-17 | 2023-06-22 | 三菱電機株式会社 | バルブ装置 |
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US3033513A (en) * | 1959-01-16 | 1962-05-08 | Vulliez Paul | High-speed universal control system for rotary valves assuming two successive movements |
US3498583A (en) * | 1966-10-07 | 1970-03-03 | Martin Marietta Corp | Compound movement butterfly valve |
US3675894A (en) * | 1969-12-03 | 1972-07-11 | Martin Marietta Corp | Eyelid hybrid butterfly type poppet valve |
US3857545A (en) * | 1973-06-14 | 1974-12-31 | Briggs & Stratton Corp | Valve for deep vacuum chambers |
JPS51126524A (en) | 1975-03-26 | 1976-11-04 | Sumitomo Heavy Industries | Sluice valve |
US4013264A (en) * | 1975-08-14 | 1977-03-22 | Martin Marietta Corporation | Flow control valve with isolated sequence control mechanism |
NL7612097A (nl) * | 1976-11-01 | 1978-05-03 | Cupedos Octrooi | Vlinderklep. |
IT1125762B (it) * | 1977-03-10 | 1986-05-14 | Nuovo Pignone Spa | Valvola di isolamento a sfera perfezionata |
JPS63106468A (ja) | 1986-10-24 | 1988-05-11 | Oki Electric Ind Co Ltd | 流体経路遮断弁 |
US5074525A (en) * | 1990-11-13 | 1991-12-24 | Koltek Oy | Hygienic stop valve |
JP3032708B2 (ja) | 1995-09-25 | 2000-04-17 | シーケーディ株式会社 | 真空用開閉弁 |
JPH10132141A (ja) | 1996-10-28 | 1998-05-22 | Hitachi Ltd | コンダクタンス調整弁および半導体製造装置 |
US5961269A (en) * | 1996-11-18 | 1999-10-05 | Applied Materials, Inc. | Three chamber load lock apparatus |
JP3323459B2 (ja) | 1999-07-14 | 2002-09-09 | エスエムシー株式会社 | ゲートバルブ |
US6602346B1 (en) * | 2000-08-22 | 2003-08-05 | Novellus Systems, Inc. | Gas-purged vacuum valve |
JP3837391B2 (ja) * | 2003-03-24 | 2006-10-25 | Smc株式会社 | ゲートバルブ |
JP4451076B2 (ja) * | 2003-04-16 | 2010-04-14 | 東京エレクトロン株式会社 | 真空処理装置 |
JP4010314B2 (ja) | 2004-12-17 | 2007-11-21 | 東京エレクトロン株式会社 | ゲートバルブ装置、処理システム及びシール部材の交換方法 |
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JP4079157B2 (ja) * | 2005-04-12 | 2008-04-23 | 東京エレクトロン株式会社 | ゲートバルブ装置及び処理システム |
-
2007
- 2007-03-19 JP JP2007070362A patent/JP4435799B2/ja not_active Expired - Fee Related
-
2008
- 2008-03-03 TW TW97107358A patent/TW200900617A/zh not_active IP Right Cessation
- 2008-03-06 KR KR1020080020948A patent/KR100961678B1/ko active IP Right Grant
- 2008-03-14 US US12/076,129 patent/US8123194B2/en not_active Expired - Fee Related
- 2008-03-19 CN CN2008100855818A patent/CN101270831B/zh not_active Expired - Fee Related
-
2012
- 2012-01-11 US US13/347,812 patent/US8500089B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020180103A1 (ko) * | 2019-03-05 | 2020-09-10 | 프리시스 주식회사 | 진공밸브 |
Also Published As
Publication number | Publication date |
---|---|
CN101270831A (zh) | 2008-09-24 |
US20080230734A1 (en) | 2008-09-25 |
KR100961678B1 (ko) | 2010-06-09 |
JP2008232211A (ja) | 2008-10-02 |
TW200900617A (en) | 2009-01-01 |
US8500089B2 (en) | 2013-08-06 |
US8123194B2 (en) | 2012-02-28 |
US20120174986A1 (en) | 2012-07-12 |
CN101270831B (zh) | 2012-10-17 |
TWI358501B (ja) | 2012-02-21 |
KR20080085692A (ko) | 2008-09-24 |
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