JP2018173866A - 基準電圧発生装置 - Google Patents
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- 238000009792 diffusion process Methods 0.000 description 9
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- G05F1/10—Regulating voltage or current
- G05F1/46—Regulating voltage or current wherein the variable actually regulated by the final control device is dc
- G05F1/56—Regulating voltage or current wherein the variable actually regulated by the final control device is dc using semiconductor devices in series with the load as final control devices
- G05F1/565—Regulating voltage or current wherein the variable actually regulated by the final control device is dc using semiconductor devices in series with the load as final control devices sensing a condition of the system or its load in addition to means responsive to deviations in the output of the system, e.g. current, voltage, power factor
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- G05F3/08—Regulating voltage or current wherein the variable is dc
- G05F3/10—Regulating voltage or current wherein the variable is dc using uncontrolled devices with non-linear characteristics
- G05F3/16—Regulating voltage or current wherein the variable is dc using uncontrolled devices with non-linear characteristics being semiconductor devices
- G05F3/20—Regulating voltage or current wherein the variable is dc using uncontrolled devices with non-linear characteristics being semiconductor devices using diode- transistor combinations
- G05F3/24—Regulating voltage or current wherein the variable is dc using uncontrolled devices with non-linear characteristics being semiconductor devices using diode- transistor combinations wherein the transistors are of the field-effect type only
- G05F3/242—Regulating voltage or current wherein the variable is dc using uncontrolled devices with non-linear characteristics being semiconductor devices using diode- transistor combinations wherein the transistors are of the field-effect type only with compensation for device parameters, e.g. channel width modulation, threshold voltage, processing, or external variations, e.g. temperature, loading, supply voltage
- G05F3/245—Regulating voltage or current wherein the variable is dc using uncontrolled devices with non-linear characteristics being semiconductor devices using diode- transistor combinations wherein the transistors are of the field-effect type only with compensation for device parameters, e.g. channel width modulation, threshold voltage, processing, or external variations, e.g. temperature, loading, supply voltage producing a voltage or current as a predetermined function of the temperature
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
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Abstract
Description
本発明は、このような状況に鑑み、全動作温度範囲において基準電圧の変動が抑制された、基準電圧発生装置を提供することを目的とする。
すなわち、入力電圧に対し第1の定電流を出力する第1の定電流回路と、前記入力電圧に対し第2の定電流を出力する第2の定電流回路と、入力電流に基づいた電圧を生成する電圧生成回路とを備え、前記第1の定電流と前記第2の定電流に基づいた電流を前記電圧生成回路の前記入力電流とし、前記電圧生成回路から基準電圧を出力することを特徴とする基準電圧発生装置とする。
これによって、全動作温度範囲において、基準電圧発生装置の出力する基準電圧の変動を抑制することを可能とする。
図1は、本発明の第1の実施形態の基準電圧発生装置100を示す回路図である。
第1の実施形態の基準電圧発生装置100は、第1の定電流回路101と、第2の定電流回路102と、電圧生成回路103を備える。基準電圧発生装置100は、後に説明するようにこれらの回路をP型半導体基板に形成した装置である。
ID=1/2・gmD・(VG−VTD)2
=1/2・gmD・(|VTD|)2 ・・・(1)
Vf=kT/q・ln(Na・Nd/ni 2) ・・・(2)
IS≒Dn・np/Ln+Dp・pn/Lp ・・・(3)
IE=1/2・gmE・(VG−VTE)2
=1/2・gmE・(Vref−VTE) ・・・(4)
Vref≒VTE+(gmD/gmE)1/2・|VTD| ・・・(5)
Vref≒VTE+{2・(IS−ISp)/gmE}1/2 ・・・(6)
図8に示す第1の定電流回路601と電圧生成回路603のみで構成される従来の基準電圧発生装置600が出力する基準電圧は、(5)式のみに基づき、図2の点線に示すVref1の特性となる。このとき−40℃から180℃の間の温度に対するVref1の近似1次温度係数(近似式において、温度に対し1次の式で示される項)は、ゼロとなるようにgmD/gmEが調整される。すなわち、−40℃のときのVref1と180℃のときのVref1がほぼ同じ値になり、この間を結ぶ直線の傾きがほぼゼロとなる。しかし、Vref1は、回路素子の温度に対する非線形特性の影響で、完全に直線の特性とはならない。また、特許文献1の技術は、高温時に寄生ダイオードのPN接合リーク電流の影響で、図2の一点鎖線で示すようなVref2の急激な低下を防止するためにダミー拡散層で構成されるダイオードを設け、寄生ダイオードの影響を排除する。しかし、前述の、回路素子の温度に対する微小な非線形特性はそのまま残されるため、−40℃から1180℃におけるその分の基準電圧Vref1の温度変動ΔVref1を抑制することが出来ない。
Vref≒a×T2+b×T+c ・・・(6)
gmD/gmE<x ・・・(7)
gm=μ・Cox・W/L ・・・(8)
S=ln10・kT/q・(1+Cd/Cox) ・・・(9)
また、MOSトランジスタのサブスレッショルド電流を電流調整用に使用する場合は、チャネル長を短くする他に、閾値電圧を低くしたりW長を大きくしたりしてもよいことは言うまでもない。
Vref≒VTE+{2・(ISp−IS)/gmE}1/2 ・・・(10)
図11(b)は、デプレッション型NMOSトランジスタ71とエンハンス型NMOSトランジスタ72が同じN型半導体基板69の第1のP型ウェル領域75と第2のP型ウェル領域76中に作製され、それぞれのバックゲートがそれぞれのP型ウェル領域に接続された場合の模式断面図である。各素子の端子の結線については省いている部分があるが、図8のような従来の基準電圧発生装置を構成するよう結線しているとする。
また、これまで基準電圧発生装置の回路素子としてNMOSを用いて説明しているが、PMOSの場合でも、各領域の導電型を反対にすることで、本発明が同様に適用できる。
2 接地端子
3 基準電圧端子
11、21、31、41、61、71 デプレッション型NMOSトランジスタ
12、22、32、42、62、72 エンハンス型NMOSトランジスタ
13、33、43 電流調整用ダイオード
14、24、64 N型ドレイン領域
15、25、65 N型ソース領域
16 N型ウェル領域
17 P型低濃度領域
18、68 P型半導体基板
19、69 N型半導体基板
23 電流調整用エンハンス型NMOSトランジスタ
34 第1のPMOSトランジスタ
35 第2のPMOSトランジスタ
45、75 第1のP型ウェル領域
46、76 第2のP型ウェル領域
48 N型低濃度領域
101、201、301、401、601 第1の定電流回路
102、202、302、402 第2の定電流回路
103、203、303、403、603 電圧生成回路
Claims (8)
- 入力電圧に対し第1の定電流を出力する第1の定電流回路と、
前記入力電圧に対し第2の定電流を出力する第2の定電流回路と、
入力電流に基づいた電圧を生成する電圧生成回路と、
を備え、
前記第1の定電流と前記第2の定電流に基づいた電流を前記電圧生成回路の前記入力電流とし、前記電圧生成回路から基準電圧を出力することを特徴とする基準電圧発生装置。 - 前記第1の定電流回路は、温度の上昇に対し値が低下する第1の閾値電圧を有し、
前記電圧生成回路は、温度の上昇に対し値が低下する第2の閾値電圧を有し、
前記第1の閾値電圧と前記第2の閾値電圧に基づき発生する第1の基準電圧成分は、全動作温度範囲において、負の近似1次係数を有し、
前記第2の定電流と前記第2の閾値電圧に基づき発生する第2の基準電圧成分は、前記全動作温度範囲に含まれる高温の領域である第2の温度範囲において、正の近似1次係数を有し、
前記基準電圧は、前記第1の基準電圧成分と、前記第2の基準電圧成分との和に基づく電圧であることを特徴とする請求項1に記載の基準電圧発生装置。 - 前記第1の定電流回路は、ゲートとソースを電気的に接続し、ドレインから入力された電圧に基づいて、ソースから前記第1の定電流を出力するデプレッション型MOSトランジスタを備えることを特徴とする請求項1または2に記載の基準電圧発生装置。
- 前記電圧生成回路は、ゲートとドレインを電気的に接続し、前記ドレインから入力された電流を入力とし、前記ドレインにおいて電圧を生成する第1のエンハンス型MOSトランジスタを備えることを特徴とする請求項1乃至3のいずれか一項に記載の基準電圧発生装置。
- 前記第2の定電流回路は、カソードから入力された電圧に基づいて、アノードから前記第2の定電流を出力するPN接合ダイオードであることを特徴とする請求項1乃至4のいずれか一項に記載の基準電圧発生装置。
- 前記第2の定電流回路は、ゲートとソースを接続し、ドレインから入力された電圧に基づいて、ソースから前記第2の定電流を出力する第2のエンハンス型MOSトランジスタであることを特徴とする請求項1乃至4のいずれか一項に記載の基準電圧発生装置。
- P型半導体基板に形成されており、
前記第2の定電流は、前記第1のエンハンス型MOSトランジスタのドレインと前記P型半導体基板とで構成される寄生ダイオードが生成するリーク電流よりも多い電流であることを特徴とする請求項4に記載の基準電圧発生装置。 - N型半導体基板に形成されており、
前記第1の定電流回路は、前記N型半導体基板内の第1のP型ウェル領域内に形成され、
前記第2の定電流回路と前記電圧生成回路は、前記N型半導体基板内の第2のP型ウェル領域内に形成され、
前記第2の定電流は、前記第1のP型ウェル領域と前記N型半導体基板とで構成される寄生ダイオードが生成するリーク電流よりも少ない電流であることを特徴とする請求項2乃至6のいずれか一項に記載の基準電圧発生装置。
Priority Applications (5)
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JP2017072217A JP6805049B2 (ja) | 2017-03-31 | 2017-03-31 | 基準電圧発生装置 |
TW107109354A TWI746823B (zh) | 2017-03-31 | 2018-03-20 | 參考電壓產生裝置 |
US15/940,010 US10198023B2 (en) | 2017-03-31 | 2018-03-29 | Reference voltage generator |
CN201810270949.1A CN108693911B (zh) | 2017-03-31 | 2018-03-29 | 基准电压发生装置 |
KR1020180037310A KR102380616B1 (ko) | 2017-03-31 | 2018-03-30 | 기준 전압 발생 장치 |
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JP2020095426A (ja) * | 2018-12-12 | 2020-06-18 | エイブリック株式会社 | 基準電圧発生装置 |
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US20220085155A1 (en) * | 2018-12-31 | 2022-03-17 | Unist(Ulsan National Institute Of Science And Technology) | Transistor device, ternary inverter device including same, and manufacturing method therefor |
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WO2021137433A1 (ko) * | 2019-12-30 | 2021-07-08 | 울산과학기술원 | 터널 전계효과트랜지스터 및 이를 포함하는 삼진 인버터 |
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JP2020095426A (ja) * | 2018-12-12 | 2020-06-18 | エイブリック株式会社 | 基準電圧発生装置 |
JP7175172B2 (ja) | 2018-12-12 | 2022-11-18 | エイブリック株式会社 | 基準電圧発生装置 |
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KR102380616B1 (ko) | 2022-03-30 |
TWI746823B (zh) | 2021-11-21 |
CN108693911B (zh) | 2021-01-12 |
KR20180111690A (ko) | 2018-10-11 |
US20180284833A1 (en) | 2018-10-04 |
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