JP2018049873A - 基板処理装置及び基板搬送方法 - Google Patents
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- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
- H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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Abstract
Description
10 基板処理装置
13 プロセスモジュール
14 搬送アーム
15a,15b ステージ
27 連通口
29 下方ウエハ検出センサ
29a,30a 発光部
29b,30b 受光部
30 上方ウエハ検出センサ
36 ハイトセンサ
Claims (9)
- 2つの載置台を有する処理室及び搬送室の間において2枚の基板を搬送する搬送アームを備え、前記搬送アームは前記2枚の基板を当該2枚の基板の間に間隔をおいて重なるように保持する基板処理装置において、
下方の前記基板が搬送される際、下方の前記基板の縁部を検出する下方基板検出センサと、
上方の前記基板が搬送される際、上方の前記基板の縁部を検出する上方基板検出センサとを備え、
前記搬送アームは、下方の前記基板を一方の前記載置台及び前記搬送室の間で搬送し、上方の前記基板を他方の前記載置台及び前記搬送室の間で搬送し、
前記下方基板検出センサは発光部及び受光部を有する光学式センサからなり、
前記発光部及び前記受光部の一方は、下方の前記基板が搬送される際に下方の前記基板が通過する領域に配置され且つ下方の前記基板及び上方の前記基板の間に位置するように配置され、
前記発光部及び前記受光部の他方は、下方の前記基板が搬送される際に下方の前記基板を介して前記発光部及び前記受光部の一方と対向するように配置され、
前記上方基板検出センサは、上方の前記基板が搬送される際に上方の前記基板が通過する領域に配置されることを特徴とする基板処理装置。 - 前記発光部及び前記受光部の一方は減圧雰囲気に配置されることを特徴とする請求項1記載の基板処理装置。
- 前記搬送アームの高さを測定するハイトセンサをさらに備えることを特徴とする請求項1又は2記載の基板処理装置。
- 前記搬送アームは、2枚の前記基板を前記処理室及び前記搬送室の間に設けられる間口を介して搬送し、前記間口の幅は2枚の前記基板を水平に並べたときの2枚の前記基板の合計幅よりも小さいことを特徴とする請求項請求項1乃至3のいずれか1項に記載の基板処理装置。
- 前記搬送アームは、2枚の前記基板の各々を曲線軌道に沿って移動させることを特徴とする請求項1乃至4のいずれか1項に記載の基板処理装置。
- 2つの載置台を有する処理室及び搬送室の間において2枚の基板を搬送アームによって搬送する基板搬送方法であって、
前記搬送アームによって前記2枚の基板を当該2枚の基板の間に間隔をおいて重なるように保持する保持ステップと、
前記搬送アームによって下方の前記基板を一方の前記載置台及び前記搬送室の間で搬送する第1の搬送ステップと、
前記搬送アームによって上方の前記基板を他方の前記載置台及び前記搬送室の間で搬送する第2の搬送ステップとを有し、
前記第1の搬送ステップにおいて下方の前記基板の縁部を検出する下方基板検出センサと、前記第2の搬送ステップにおいて上方の前記基板の縁部を検出する上方基板検出センサとが配置され、
前記下方基板検出センサは発光部及び受光部を有する光学式センサからなり、
前記発光部及び前記受光部の一方は、前記第1の搬送ステップにおいて下方の前記基板が通過する領域に配置され且つ下方の前記基板及び上方の前記基板の間に位置するように配置され、
前記発光部及び前記受光部の他方は、前記第1の搬送ステップにおいて下方の前記基板を介して前記発光部及び前記受光部の一方と対向するように配置され、
前記上方基板検出センサは、前記第2の搬送ステップにおいて上方の前記基板が通過する領域に配置されることを特徴とする基板搬送方法。 - 前記上方基板検出センサの前記受光部が受光する光量が閾値を下回ると、警告を発し、又は上方の前記基板の搬送を中断することを特徴とする請求項6記載の基板搬送方法。
- 下方の前記基板に熱処理が施された後、下方の前記基板が下方基板検出センサの発光部及び受光部の間を通過する際、下方の前記基板の搬送速度を低下させることを特徴とする請求項6又は7記載の基板搬送方法。
- 下方の前記基板に熱処理が施された後、下方の前記基板が下方基板検出センサの発光部及び受光部の間を通過する際、下方の前記基板を一旦停止させることを特徴とする請求項8記載の基板搬送方法。
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JP2016183132A JP6670713B2 (ja) | 2016-09-20 | 2016-09-20 | 基板処理装置及び基板搬送方法 |
CN201710828334.1A CN107845588B (zh) | 2016-09-20 | 2017-09-14 | 基板处理装置和基板搬送方法 |
TW106131898A TWI797087B (zh) | 2016-09-20 | 2017-09-18 | 基板處理裝置及基板搬送方法 |
US15/708,351 US10720356B2 (en) | 2016-09-20 | 2017-09-19 | Substrate processing apparatus and method of transferring substrate |
KR1020170120347A KR102101538B1 (ko) | 2016-09-20 | 2017-09-19 | 기판 처리 장치 및 기판 반송 방법 |
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KR20190115864A (ko) * | 2018-04-04 | 2019-10-14 | 세메스 주식회사 | 기판 처리 장치 |
WO2022202626A1 (ja) * | 2021-03-24 | 2022-09-29 | 東京エレクトロン株式会社 | 基板搬送方法 |
JP7511380B2 (ja) | 2020-05-01 | 2024-07-05 | 東京エレクトロン株式会社 | 処理システム |
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KR102498492B1 (ko) * | 2016-10-18 | 2023-02-10 | 매슨 테크놀로지 인크 | 워크피스 처리를 위한 시스템 및 방법 |
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JP2013171871A (ja) * | 2012-02-17 | 2013-09-02 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
KR101947178B1 (ko) * | 2012-03-30 | 2019-02-12 | 현대중공업지주 주식회사 | 기판 반송 로봇 핸드의 성능 테스트 장치 및 방법 |
JP6079200B2 (ja) * | 2012-05-16 | 2017-02-15 | 東京エレクトロン株式会社 | クーリング機構及び処理システム |
JP6063716B2 (ja) | 2012-11-14 | 2017-01-18 | 東京エレクトロン株式会社 | 基板処理装置及び基板搬送方法 |
TWI672760B (zh) * | 2013-03-15 | 2019-09-21 | 美商應用材料股份有限公司 | 用於小批次基板傳送系統的溫度控制系統與方法 |
JP6415220B2 (ja) * | 2014-09-29 | 2018-10-31 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
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KR20190115864A (ko) * | 2018-04-04 | 2019-10-14 | 세메스 주식회사 | 기판 처리 장치 |
KR102081056B1 (ko) | 2018-04-04 | 2020-02-25 | 세메스 주식회사 | 기판 처리 장치 |
JP7511380B2 (ja) | 2020-05-01 | 2024-07-05 | 東京エレクトロン株式会社 | 処理システム |
WO2022202626A1 (ja) * | 2021-03-24 | 2022-09-29 | 東京エレクトロン株式会社 | 基板搬送方法 |
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US20180082881A1 (en) | 2018-03-22 |
TW201826431A (zh) | 2018-07-16 |
KR20180031604A (ko) | 2018-03-28 |
US10720356B2 (en) | 2020-07-21 |
KR102101538B1 (ko) | 2020-04-16 |
CN107845588B (zh) | 2021-09-03 |
JP6670713B2 (ja) | 2020-03-25 |
CN107845588A (zh) | 2018-03-27 |
TWI797087B (zh) | 2023-04-01 |
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