JP2017507247A5 - - Google Patents

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Publication number
JP2017507247A5
JP2017507247A5 JP2016552515A JP2016552515A JP2017507247A5 JP 2017507247 A5 JP2017507247 A5 JP 2017507247A5 JP 2016552515 A JP2016552515 A JP 2016552515A JP 2016552515 A JP2016552515 A JP 2016552515A JP 2017507247 A5 JP2017507247 A5 JP 2017507247A5
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JP
Japan
Prior art keywords
flexible substrate
adhesive roll
coating
unit
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016552515A
Other languages
English (en)
Japanese (ja)
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JP2017507247A (ja
JP6546930B2 (ja
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Publication date
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Priority claimed from PCT/EP2014/053460 external-priority patent/WO2015124207A1/en
Publication of JP2017507247A publication Critical patent/JP2017507247A/ja
Publication of JP2017507247A5 publication Critical patent/JP2017507247A5/ja
Application granted granted Critical
Publication of JP6546930B2 publication Critical patent/JP6546930B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2016552515A 2014-02-21 2014-02-21 薄膜処理用途のための装置及び方法 Active JP6546930B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/053460 WO2015124207A1 (en) 2014-02-21 2014-02-21 Apparatus and method for thin-film processing applications

Publications (3)

Publication Number Publication Date
JP2017507247A JP2017507247A (ja) 2017-03-16
JP2017507247A5 true JP2017507247A5 (enExample) 2017-04-20
JP6546930B2 JP6546930B2 (ja) 2019-07-17

Family

ID=50239590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016552515A Active JP6546930B2 (ja) 2014-02-21 2014-02-21 薄膜処理用途のための装置及び方法

Country Status (6)

Country Link
US (1) US10066291B2 (enExample)
EP (1) EP3108031A1 (enExample)
JP (1) JP6546930B2 (enExample)
KR (1) KR20160124846A (enExample)
CN (1) CN106029944A (enExample)
WO (1) WO2015124207A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109477203A (zh) * 2016-07-01 2019-03-15 应用材料公司 用于涂布柔性基板的沉积设备和涂布柔性基板的方法
JP7117332B2 (ja) * 2017-06-14 2022-08-12 アプライド マテリアルズ インコーポレイテッド フレキシブル基板をコーティングするための堆積装置、及びフレキシブル基板をコーティングする方法
US20210222288A1 (en) * 2017-11-28 2021-07-22 Applied Materials, Inc. Deposition apparatus for coating a flexible substrate, method of coating a flexible substrate and flexible substrate having a coating
EP3807445A1 (en) * 2018-06-14 2021-04-21 Applied Materials, Inc. Roller device for guiding a flexible substrate, use of a roller device for transporting a flexible substrate, vacuum processing apparatus, and method of processing a flexible substrate
JP7285430B2 (ja) * 2019-05-30 2023-06-02 住友金属鉱山株式会社 真空成膜装置と真空成膜方法
US20210126247A1 (en) * 2019-10-28 2021-04-29 Applied Materials, Inc. Dielectric coated lithium metal anode
WO2022242879A1 (en) * 2021-05-21 2022-11-24 Applied Materials, Inc. Apparatus and method for manufacturing a composite film
WO2023018600A1 (en) 2021-08-12 2023-02-16 Applied Materials, Inc. Evaporator for effective surface area evaporation
CN114381695A (zh) * 2021-12-31 2022-04-22 重庆金美新材料科技有限公司 一种薄膜生产线和薄膜生产方法
JP2023177986A (ja) * 2022-06-03 2023-12-14 住友金属鉱山株式会社 金属張積層板の製造方法
CN115893068B (zh) * 2022-08-09 2023-11-10 安徽鼎宏橡塑科技股份有限公司 一种防止飞絮堵塞的纺织加工用传输辊

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000293847A (ja) * 1999-04-09 2000-10-20 Victor Co Of Japan Ltd 磁気記録媒体の製造装置
JP2002020863A (ja) * 2000-05-01 2002-01-23 Canon Inc 堆積膜の形成方法及び形成装置、及び基板処理方法
JP4103368B2 (ja) * 2001-10-23 2008-06-18 東レ株式会社 金属酸化物膜つきフィルムの製造方法および製造装置
JP2003132737A (ja) * 2001-10-30 2003-05-09 Mitsui Chemicals Inc 保護フィルム付き透明導電性フィルム、及びそれを用いたディスプレイ用光学フィルター、及びその製造方法
US20050145326A1 (en) * 2004-01-05 2005-07-07 Eastman Kodak Company Method of making an OLED device
JP4339137B2 (ja) * 2004-01-22 2009-10-07 積水化成品工業株式会社 シート状物用除塵装置
JPWO2007026545A1 (ja) * 2005-08-31 2009-03-05 コニカミノルタホールディングス株式会社 プラズマ放電処理装置及びガスバリア性フィルムの製造方法
CN101501237B (zh) * 2006-11-28 2011-04-13 株式会社爱发科 卷绕式真空成膜方法及卷绕式真空成膜装置
JP2011127188A (ja) 2009-12-18 2011-06-30 Fuji Electric Co Ltd Ｃｖｄ成膜装置
EP2508646A1 (en) * 2011-04-05 2012-10-10 Bayer Material Science AG A process for multi-layer continuous roll-to-roll coating

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