JP2016516657A5 - - Google Patents
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- Publication number
- JP2016516657A5 JP2016516657A5 JP2016501874A JP2016501874A JP2016516657A5 JP 2016516657 A5 JP2016516657 A5 JP 2016516657A5 JP 2016501874 A JP2016501874 A JP 2016501874A JP 2016501874 A JP2016501874 A JP 2016501874A JP 2016516657 A5 JP2016516657 A5 JP 2016516657A5
- Authority
- JP
- Japan
- Prior art keywords
- glass
- glass sheet
- glass sheets
- interfaces
- modified layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 claims description 43
- 238000000034 method Methods 0.000 claims description 24
- 229920002313 fluoropolymer Polymers 0.000 claims description 6
- 239000004811 fluoropolymer Substances 0.000 claims description 6
- 238000012986 modification Methods 0.000 claims description 4
- 230000004048 modification Effects 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 2
- 125000003118 aryl group Chemical group 0.000 claims 9
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 8
- 229910000077 silane Inorganic materials 0.000 claims 8
- 238000000137 annealing Methods 0.000 claims 6
- 230000005484 gravity Effects 0.000 claims 3
- ZZNQQQWFKKTOSD-UHFFFAOYSA-N diethoxy(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](OCC)(OCC)C1=CC=CC=C1 ZZNQQQWFKKTOSD-UHFFFAOYSA-N 0.000 claims 2
- 238000010030 laminating Methods 0.000 claims 2
- PARWUHTVGZSQPD-UHFFFAOYSA-N phenylsilane Chemical compound [SiH3]C1=CC=CC=C1 PARWUHTVGZSQPD-UHFFFAOYSA-N 0.000 claims 2
- 238000006116 polymerization reaction Methods 0.000 claims 2
- 230000000717 retained effect Effects 0.000 claims 2
- JCVQKRGIASEUKR-UHFFFAOYSA-N triethoxy(phenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=CC=C1 JCVQKRGIASEUKR-UHFFFAOYSA-N 0.000 claims 2
- 230000001351 cycling effect Effects 0.000 claims 1
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 claims 1
- -1 polytetrafluoroethylene Polymers 0.000 claims 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims 1
- 239000004810 polytetrafluoroethylene Substances 0.000 claims 1
- 150000004756 silanes Chemical class 0.000 claims 1
- 238000012545 processing Methods 0.000 description 6
- 230000032798 delamination Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000527 sonication Methods 0.000 description 1
- 238000000391 spectroscopic ellipsometry Methods 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361791418P | 2013-03-15 | 2013-03-15 | |
| US61/791,418 | 2013-03-15 | ||
| US14/047,251 | 2013-10-07 | ||
| US14/047,251 US9340443B2 (en) | 2012-12-13 | 2013-10-07 | Bulk annealing of glass sheets |
| PCT/US2014/025537 WO2014151353A1 (en) | 2013-03-15 | 2014-03-13 | Bulk annealing of glass sheets |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017147681A Division JP6434096B2 (ja) | 2013-03-15 | 2017-07-31 | ガラスシートのバルクアニール |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016516657A JP2016516657A (ja) | 2016-06-09 |
| JP2016516657A5 true JP2016516657A5 (enExample) | 2017-03-16 |
| JP6186493B2 JP6186493B2 (ja) | 2017-08-23 |
Family
ID=51580938
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016501874A Expired - Fee Related JP6186493B2 (ja) | 2013-03-15 | 2014-03-13 | ガラスシートのバルクアニール |
| JP2017147681A Expired - Fee Related JP6434096B2 (ja) | 2013-03-15 | 2017-07-31 | ガラスシートのバルクアニール |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017147681A Expired - Fee Related JP6434096B2 (ja) | 2013-03-15 | 2017-07-31 | ガラスシートのバルクアニール |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP2969997A1 (enExample) |
| JP (2) | JP6186493B2 (enExample) |
| KR (1) | KR102239613B1 (enExample) |
| CN (1) | CN105658594B (enExample) |
| TW (2) | TWI594960B (enExample) |
| WO (1) | WO2014151353A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9340443B2 (en) | 2012-12-13 | 2016-05-17 | Corning Incorporated | Bulk annealing of glass sheets |
| US10086584B2 (en) | 2012-12-13 | 2018-10-02 | Corning Incorporated | Glass articles and methods for controlled bonding of glass sheets with carriers |
| TWI617437B (zh) | 2012-12-13 | 2018-03-11 | 康寧公司 | 促進控制薄片與載體間接合之處理 |
| US10014177B2 (en) | 2012-12-13 | 2018-07-03 | Corning Incorporated | Methods for processing electronic devices |
| JP6186493B2 (ja) * | 2013-03-15 | 2017-08-23 | コーニング インコーポレイテッド | ガラスシートのバルクアニール |
| US10510576B2 (en) | 2013-10-14 | 2019-12-17 | Corning Incorporated | Carrier-bonding methods and articles for semiconductor and interposer processing |
| JP6770432B2 (ja) * | 2014-01-27 | 2020-10-14 | コーニング インコーポレイテッド | 薄いシートの担体との制御された結合のための物品および方法 |
| SG11201608442TA (en) | 2014-04-09 | 2016-11-29 | Corning Inc | Device modified substrate article and methods for making |
| WO2016187186A1 (en) * | 2015-05-19 | 2016-11-24 | Corning Incorporated | Articles and methods for bonding sheets with carriers |
| US11905201B2 (en) | 2015-06-26 | 2024-02-20 | Corning Incorporated | Methods and articles including a sheet and a carrier |
| TWI892429B (zh) | 2016-08-30 | 2025-08-01 | 美商康寧公司 | 用於片材接合的矽氧烷電漿聚合物 |
| TWI821867B (zh) | 2016-08-31 | 2023-11-11 | 美商康寧公司 | 具以可控制式黏結的薄片之製品及製作其之方法 |
| KR102346393B1 (ko) * | 2017-06-19 | 2022-01-03 | 동우 화인켐 주식회사 | 터치센서를 포함하는 플렉시블 표시장치의 제조방법 |
| US11999135B2 (en) | 2017-08-18 | 2024-06-04 | Corning Incorporated | Temporary bonding using polycationic polymers |
| WO2019118660A1 (en) | 2017-12-15 | 2019-06-20 | Corning Incorporated | Method for treating a substrate and method for making articles comprising bonded sheets |
| CN118091826A (zh) * | 2024-04-08 | 2024-05-28 | 慕德微纳(杭州)科技有限公司 | 一种异质键合光波导片 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4397722A (en) * | 1981-12-31 | 1983-08-09 | International Business Machines Corporation | Polymers from aromatic silanes and process for their preparation |
| WO2004079826A1 (ja) * | 1996-10-22 | 2004-09-16 | Mitsutoshi Miyasaka | 薄膜トランジスタの製造方法、及び表示装置と電子機器 |
| US20050001201A1 (en) * | 2003-07-03 | 2005-01-06 | Bocko Peter L. | Glass product for use in ultra-thin glass display applications |
| US20050069713A1 (en) * | 2003-09-30 | 2005-03-31 | Rahul Gupta | Capillary coating method |
| KR20090006824A (ko) * | 2006-05-08 | 2009-01-15 | 아사히 가라스 가부시키가이샤 | 박판 유리 적층체, 박판 유리 적층체를 이용한 표시 장치의제조 방법 및 지지 유리 기판 |
| AT508318B1 (de) * | 2008-01-24 | 2022-07-15 | Brewer Science Inc | Verfahren für eine vorübergehende montage eines bausteinwafers auf einem trägersubstrat |
| KR20110007134A (ko) * | 2008-04-17 | 2011-01-21 | 아사히 가라스 가부시키가이샤 | 유리 적층체, 지지체를 부착한 표시 장치용 패널 및 이들의 제조 방법 |
| JP5029523B2 (ja) * | 2008-07-14 | 2012-09-19 | 旭硝子株式会社 | ガラス積層体、支持体付き表示装置用パネル、表示装置用パネル、表示装置およびこれらの製造方法 |
| TW201033000A (en) * | 2009-01-09 | 2010-09-16 | Asahi Glass Co Ltd | Glass laminate and manufacturing method therefor |
| JP5514302B2 (ja) * | 2009-05-06 | 2014-06-04 | コーニング インコーポレイテッド | ガラス基板用の担体 |
| US9847243B2 (en) * | 2009-08-27 | 2017-12-19 | Corning Incorporated | Debonding a glass substrate from carrier using ultrasonic wave |
| WO2011048979A1 (ja) * | 2009-10-20 | 2011-04-28 | 旭硝子株式会社 | ガラス積層体及びその製造方法、並びに表示パネルの製造方法及びその製造方法により得られる表示パネル |
| WO2011096446A1 (ja) * | 2010-02-03 | 2011-08-11 | 旭硝子株式会社 | ガラス板の徐冷方法及びその装置 |
| US20110250346A1 (en) * | 2010-04-07 | 2011-10-13 | Remington Jr Michael P | Adhesion of organic coatings on glass |
| EP2733127A4 (en) * | 2011-07-12 | 2015-09-09 | Asahi Glass Co Ltd | METHOD FOR PRODUCING A MULTILAYER FILM GLASS SUBSTRATE |
| JP6186493B2 (ja) * | 2013-03-15 | 2017-08-23 | コーニング インコーポレイテッド | ガラスシートのバルクアニール |
-
2014
- 2014-03-13 JP JP2016501874A patent/JP6186493B2/ja not_active Expired - Fee Related
- 2014-03-13 TW TW103109136A patent/TWI594960B/zh not_active IP Right Cessation
- 2014-03-13 WO PCT/US2014/025537 patent/WO2014151353A1/en not_active Ceased
- 2014-03-13 KR KR1020157029187A patent/KR102239613B1/ko not_active Expired - Fee Related
- 2014-03-13 TW TW106121917A patent/TWI679175B/zh not_active IP Right Cessation
- 2014-03-13 EP EP14728700.7A patent/EP2969997A1/en not_active Withdrawn
- 2014-03-13 CN CN201480027673.4A patent/CN105658594B/zh not_active Expired - Fee Related
-
2017
- 2017-07-31 JP JP2017147681A patent/JP6434096B2/ja not_active Expired - Fee Related
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