CN105658594B - 玻璃片的整体退火 - Google Patents

玻璃片的整体退火 Download PDF

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Publication number
CN105658594B
CN105658594B CN201480027673.4A CN201480027673A CN105658594B CN 105658594 B CN105658594 B CN 105658594B CN 201480027673 A CN201480027673 A CN 201480027673A CN 105658594 B CN105658594 B CN 105658594B
Authority
CN
China
Prior art keywords
carrier
glass
bonding
thin slice
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201480027673.4A
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English (en)
Chinese (zh)
Other versions
CN105658594A (zh
Inventor
R·A·贝尔曼
D·C·布克宾德
R·G·曼利
P·马宗达
T·常
J·J·多梅
A·T·史蒂芬二世
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/047,251 external-priority patent/US9340443B2/en
Application filed by Corning Inc filed Critical Corning Inc
Publication of CN105658594A publication Critical patent/CN105658594A/zh
Application granted granted Critical
Publication of CN105658594B publication Critical patent/CN105658594B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/06—Interconnection of layers permitting easy separation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Laminated Bodies (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
CN201480027673.4A 2013-03-15 2014-03-13 玻璃片的整体退火 Expired - Fee Related CN105658594B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361791418P 2013-03-15 2013-03-15
US61/791,418 2013-03-15
US14/047,251 2013-10-07
US14/047,251 US9340443B2 (en) 2012-12-13 2013-10-07 Bulk annealing of glass sheets
PCT/US2014/025537 WO2014151353A1 (en) 2013-03-15 2014-03-13 Bulk annealing of glass sheets

Publications (2)

Publication Number Publication Date
CN105658594A CN105658594A (zh) 2016-06-08
CN105658594B true CN105658594B (zh) 2019-01-04

Family

ID=51580938

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480027673.4A Expired - Fee Related CN105658594B (zh) 2013-03-15 2014-03-13 玻璃片的整体退火

Country Status (6)

Country Link
EP (1) EP2969997A1 (enExample)
JP (2) JP6186493B2 (enExample)
KR (1) KR102239613B1 (enExample)
CN (1) CN105658594B (enExample)
TW (2) TWI679175B (enExample)
WO (1) WO2014151353A1 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10086584B2 (en) 2012-12-13 2018-10-02 Corning Incorporated Glass articles and methods for controlled bonding of glass sheets with carriers
US10014177B2 (en) 2012-12-13 2018-07-03 Corning Incorporated Methods for processing electronic devices
US9340443B2 (en) 2012-12-13 2016-05-17 Corning Incorporated Bulk annealing of glass sheets
TWI617437B (zh) 2012-12-13 2018-03-11 康寧公司 促進控制薄片與載體間接合之處理
WO2014151353A1 (en) * 2013-03-15 2014-09-25 Corning Incorporated Bulk annealing of glass sheets
US10510576B2 (en) 2013-10-14 2019-12-17 Corning Incorporated Carrier-bonding methods and articles for semiconductor and interposer processing
CN106132688B (zh) * 2014-01-27 2020-07-14 康宁股份有限公司 用于薄片与载体的受控粘结的制品和方法
KR20160145062A (ko) 2014-04-09 2016-12-19 코닝 인코포레이티드 디바이스 변경된 기판 물품 및 제조 방법
EP3297824A1 (en) * 2015-05-19 2018-03-28 Corning Incorporated Articles and methods for bonding sheets with carriers
CN107810168A (zh) 2015-06-26 2018-03-16 康宁股份有限公司 包含板材和载体的方法和制品
TW201825623A (zh) 2016-08-30 2018-07-16 美商康寧公司 用於片材接合的矽氧烷電漿聚合物
TWI821867B (zh) 2016-08-31 2023-11-11 美商康寧公司 具以可控制式黏結的薄片之製品及製作其之方法
KR102346393B1 (ko) * 2017-06-19 2022-01-03 동우 화인켐 주식회사 터치센서를 포함하는 플렉시블 표시장치의 제조방법
WO2019036710A1 (en) 2017-08-18 2019-02-21 Corning Incorporated TEMPORARY BINDING USING POLYCATIONIC POLYMERS
CN111615567B (zh) 2017-12-15 2023-04-14 康宁股份有限公司 用于处理基板的方法和用于制备包括粘合片材的制品的方法
CN118091826A (zh) * 2024-04-08 2024-05-28 慕德微纳(杭州)科技有限公司 一种异质键合光波导片

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1816768A (zh) * 2003-07-03 2006-08-09 康宁股份有限公司 用在超薄玻璃显示应用中的玻璃产品
CN101437772A (zh) * 2006-05-08 2009-05-20 旭硝子株式会社 薄板玻璃叠层体、使用了薄板玻璃叠层体的显示装置的制造方法及支持用玻璃基板
CN101925996A (zh) * 2008-01-24 2010-12-22 布鲁尔科技公司 将器件晶片可逆地安装在载体基片上的方法
CN102007524A (zh) * 2008-04-17 2011-04-06 旭硝子株式会社 玻璃层叠体、带支撑体的显示装置用面板及它们的制造方法
CN102271908A (zh) * 2009-01-09 2011-12-07 旭硝子株式会社 玻璃层叠体及其制造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4397722A (en) * 1981-12-31 1983-08-09 International Business Machines Corporation Polymers from aromatic silanes and process for their preparation
US6124154A (en) * 1996-10-22 2000-09-26 Seiko Epson Corporation Fabrication process for thin film transistors in a display or electronic device
US20050069713A1 (en) * 2003-09-30 2005-03-31 Rahul Gupta Capillary coating method
JP5029523B2 (ja) * 2008-07-14 2012-09-19 旭硝子株式会社 ガラス積層体、支持体付き表示装置用パネル、表示装置用パネル、表示装置およびこれらの製造方法
CN102422406B (zh) * 2009-05-06 2014-07-09 康宁股份有限公司 用于玻璃基片的支承件
US9847243B2 (en) * 2009-08-27 2017-12-19 Corning Incorporated Debonding a glass substrate from carrier using ultrasonic wave
KR20120098640A (ko) * 2009-10-20 2012-09-05 아사히 가라스 가부시키가이샤 유리 적층체 및 그의 제조 방법, 및 표시 패널의 제조 방법 및 그 제조 방법에 의해 얻어지는 표시 패널
JP5641254B2 (ja) * 2010-02-03 2014-12-17 旭硝子株式会社 ガラス板の徐冷方法及びその装置
US20110250346A1 (en) * 2010-04-07 2011-10-13 Remington Jr Michael P Adhesion of organic coatings on glass
TW201309611A (zh) * 2011-07-12 2013-03-01 Asahi Glass Co Ltd 附積層膜之玻璃基板之製造方法
WO2014151353A1 (en) * 2013-03-15 2014-09-25 Corning Incorporated Bulk annealing of glass sheets

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1816768A (zh) * 2003-07-03 2006-08-09 康宁股份有限公司 用在超薄玻璃显示应用中的玻璃产品
CN101437772A (zh) * 2006-05-08 2009-05-20 旭硝子株式会社 薄板玻璃叠层体、使用了薄板玻璃叠层体的显示装置的制造方法及支持用玻璃基板
CN101925996A (zh) * 2008-01-24 2010-12-22 布鲁尔科技公司 将器件晶片可逆地安装在载体基片上的方法
CN102007524A (zh) * 2008-04-17 2011-04-06 旭硝子株式会社 玻璃层叠体、带支撑体的显示装置用面板及它们的制造方法
CN102271908A (zh) * 2009-01-09 2011-12-07 旭硝子株式会社 玻璃层叠体及其制造方法

Also Published As

Publication number Publication date
KR102239613B1 (ko) 2021-04-13
JP6434096B2 (ja) 2018-12-05
TWI679175B (zh) 2019-12-11
KR20150127274A (ko) 2015-11-16
CN105658594A (zh) 2016-06-08
WO2014151353A1 (en) 2014-09-25
TW201442968A (zh) 2014-11-16
TW201736292A (zh) 2017-10-16
JP2016516657A (ja) 2016-06-09
EP2969997A1 (en) 2016-01-20
TWI594960B (zh) 2017-08-11
JP6186493B2 (ja) 2017-08-23
JP2017214281A (ja) 2017-12-07

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Granted publication date: 20190104