JP6186493B2 - ガラスシートのバルクアニール - Google Patents
ガラスシートのバルクアニール Download PDFInfo
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- JP6186493B2 JP6186493B2 JP2016501874A JP2016501874A JP6186493B2 JP 6186493 B2 JP6186493 B2 JP 6186493B2 JP 2016501874 A JP2016501874 A JP 2016501874A JP 2016501874 A JP2016501874 A JP 2016501874A JP 6186493 B2 JP6186493 B2 JP 6186493B2
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- JP
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- Prior art keywords
- glass
- carrier
- bonding
- sheet
- sheets
- Prior art date
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000004447 silicone coating Substances 0.000 description 1
- KFZUDNZQQCWGKF-UHFFFAOYSA-M sodium;4-methylbenzenesulfinate Chemical compound [Na+].CC1=CC=C(S([O-])=O)C=C1 KFZUDNZQQCWGKF-UHFFFAOYSA-M 0.000 description 1
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 1
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- QALDFNLNVLQDSP-UHFFFAOYSA-N triethoxy-(2,3,4,5,6-pentafluorophenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=C(F)C(F)=C(F)C(F)=C1F QALDFNLNVLQDSP-UHFFFAOYSA-N 0.000 description 1
- JXUKBNICSRJFAP-UHFFFAOYSA-N triethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCC1CO1 JXUKBNICSRJFAP-UHFFFAOYSA-N 0.000 description 1
- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/06—Interconnection of layers permitting easy separation
Landscapes
- Chemical & Material Sciences (AREA)
- Joining Of Glass To Other Materials (AREA)
- Laminated Bodies (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
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| US201361791418P | 2013-03-15 | 2013-03-15 | |
| US61/791,418 | 2013-03-15 | ||
| US14/047,251 | 2013-10-07 | ||
| US14/047,251 US9340443B2 (en) | 2012-12-13 | 2013-10-07 | Bulk annealing of glass sheets |
| PCT/US2014/025537 WO2014151353A1 (en) | 2013-03-15 | 2014-03-13 | Bulk annealing of glass sheets |
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| JP2017147681A Division JP6434096B2 (ja) | 2013-03-15 | 2017-07-31 | ガラスシートのバルクアニール |
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| JP2016516657A JP2016516657A (ja) | 2016-06-09 |
| JP2016516657A5 JP2016516657A5 (enExample) | 2017-03-16 |
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| JP2017147681A Expired - Fee Related JP6434096B2 (ja) | 2013-03-15 | 2017-07-31 | ガラスシートのバルクアニール |
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| JP (2) | JP6186493B2 (enExample) |
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| CN (1) | CN105658594B (enExample) |
| TW (2) | TWI679175B (enExample) |
| WO (1) | WO2014151353A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017214281A (ja) * | 2013-03-15 | 2017-12-07 | コーニング インコーポレイテッド | ガラスシートのバルクアニール |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10086584B2 (en) | 2012-12-13 | 2018-10-02 | Corning Incorporated | Glass articles and methods for controlled bonding of glass sheets with carriers |
| US10014177B2 (en) | 2012-12-13 | 2018-07-03 | Corning Incorporated | Methods for processing electronic devices |
| US9340443B2 (en) | 2012-12-13 | 2016-05-17 | Corning Incorporated | Bulk annealing of glass sheets |
| TWI617437B (zh) | 2012-12-13 | 2018-03-11 | 康寧公司 | 促進控制薄片與載體間接合之處理 |
| US10510576B2 (en) | 2013-10-14 | 2019-12-17 | Corning Incorporated | Carrier-bonding methods and articles for semiconductor and interposer processing |
| CN106132688B (zh) * | 2014-01-27 | 2020-07-14 | 康宁股份有限公司 | 用于薄片与载体的受控粘结的制品和方法 |
| KR20160145062A (ko) | 2014-04-09 | 2016-12-19 | 코닝 인코포레이티드 | 디바이스 변경된 기판 물품 및 제조 방법 |
| EP3297824A1 (en) * | 2015-05-19 | 2018-03-28 | Corning Incorporated | Articles and methods for bonding sheets with carriers |
| CN107810168A (zh) | 2015-06-26 | 2018-03-16 | 康宁股份有限公司 | 包含板材和载体的方法和制品 |
| TW201825623A (zh) | 2016-08-30 | 2018-07-16 | 美商康寧公司 | 用於片材接合的矽氧烷電漿聚合物 |
| TWI821867B (zh) | 2016-08-31 | 2023-11-11 | 美商康寧公司 | 具以可控制式黏結的薄片之製品及製作其之方法 |
| KR102346393B1 (ko) * | 2017-06-19 | 2022-01-03 | 동우 화인켐 주식회사 | 터치센서를 포함하는 플렉시블 표시장치의 제조방법 |
| WO2019036710A1 (en) | 2017-08-18 | 2019-02-21 | Corning Incorporated | TEMPORARY BINDING USING POLYCATIONIC POLYMERS |
| CN111615567B (zh) | 2017-12-15 | 2023-04-14 | 康宁股份有限公司 | 用于处理基板的方法和用于制备包括粘合片材的制品的方法 |
| CN118091826A (zh) * | 2024-04-08 | 2024-05-28 | 慕德微纳(杭州)科技有限公司 | 一种异质键合光波导片 |
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| US4397722A (en) * | 1981-12-31 | 1983-08-09 | International Business Machines Corporation | Polymers from aromatic silanes and process for their preparation |
| US6124154A (en) * | 1996-10-22 | 2000-09-26 | Seiko Epson Corporation | Fabrication process for thin film transistors in a display or electronic device |
| US20050001201A1 (en) * | 2003-07-03 | 2005-01-06 | Bocko Peter L. | Glass product for use in ultra-thin glass display applications |
| US20050069713A1 (en) * | 2003-09-30 | 2005-03-31 | Rahul Gupta | Capillary coating method |
| EP2025650A1 (en) * | 2006-05-08 | 2009-02-18 | Asahi Glass Company, Limited | Thin-sheet glass laminate, process for manufacturing display apparatus using the laminate, and supporting glass substrate |
| DE112009000140B4 (de) * | 2008-01-24 | 2022-06-15 | Brewer Science, Inc. | Verfahren zum reversiblen Anbringen eines Vorrichtungswafers an einem Trägersubstrat und ein daraus erhaltener Gegenstand |
| WO2009128359A1 (ja) * | 2008-04-17 | 2009-10-22 | 旭硝子株式会社 | ガラス積層体、支持体付き表示装置用パネルおよびこれらの製造方法 |
| JP5029523B2 (ja) * | 2008-07-14 | 2012-09-19 | 旭硝子株式会社 | ガラス積層体、支持体付き表示装置用パネル、表示装置用パネル、表示装置およびこれらの製造方法 |
| TW201033000A (en) * | 2009-01-09 | 2010-09-16 | Asahi Glass Co Ltd | Glass laminate and manufacturing method therefor |
| CN102422406B (zh) * | 2009-05-06 | 2014-07-09 | 康宁股份有限公司 | 用于玻璃基片的支承件 |
| US9847243B2 (en) * | 2009-08-27 | 2017-12-19 | Corning Incorporated | Debonding a glass substrate from carrier using ultrasonic wave |
| KR20120098640A (ko) * | 2009-10-20 | 2012-09-05 | 아사히 가라스 가부시키가이샤 | 유리 적층체 및 그의 제조 방법, 및 표시 패널의 제조 방법 및 그 제조 방법에 의해 얻어지는 표시 패널 |
| JP5641254B2 (ja) * | 2010-02-03 | 2014-12-17 | 旭硝子株式会社 | ガラス板の徐冷方法及びその装置 |
| US20110250346A1 (en) * | 2010-04-07 | 2011-10-13 | Remington Jr Michael P | Adhesion of organic coatings on glass |
| TW201309611A (zh) * | 2011-07-12 | 2013-03-01 | Asahi Glass Co Ltd | 附積層膜之玻璃基板之製造方法 |
| WO2014151353A1 (en) * | 2013-03-15 | 2014-09-25 | Corning Incorporated | Bulk annealing of glass sheets |
-
2014
- 2014-03-13 WO PCT/US2014/025537 patent/WO2014151353A1/en not_active Ceased
- 2014-03-13 EP EP14728700.7A patent/EP2969997A1/en not_active Withdrawn
- 2014-03-13 JP JP2016501874A patent/JP6186493B2/ja not_active Expired - Fee Related
- 2014-03-13 TW TW106121917A patent/TWI679175B/zh not_active IP Right Cessation
- 2014-03-13 CN CN201480027673.4A patent/CN105658594B/zh not_active Expired - Fee Related
- 2014-03-13 KR KR1020157029187A patent/KR102239613B1/ko not_active Expired - Fee Related
- 2014-03-13 TW TW103109136A patent/TWI594960B/zh not_active IP Right Cessation
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- 2017-07-31 JP JP2017147681A patent/JP6434096B2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017214281A (ja) * | 2013-03-15 | 2017-12-07 | コーニング インコーポレイテッド | ガラスシートのバルクアニール |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102239613B1 (ko) | 2021-04-13 |
| JP6434096B2 (ja) | 2018-12-05 |
| TWI679175B (zh) | 2019-12-11 |
| KR20150127274A (ko) | 2015-11-16 |
| CN105658594A (zh) | 2016-06-08 |
| WO2014151353A1 (en) | 2014-09-25 |
| CN105658594B (zh) | 2019-01-04 |
| TW201442968A (zh) | 2014-11-16 |
| TW201736292A (zh) | 2017-10-16 |
| JP2016516657A (ja) | 2016-06-09 |
| EP2969997A1 (en) | 2016-01-20 |
| TWI594960B (zh) | 2017-08-11 |
| JP2017214281A (ja) | 2017-12-07 |
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