KR102239613B1 - 유리 시트의 벌크 어닐링 - Google Patents

유리 시트의 벌크 어닐링 Download PDF

Info

Publication number
KR102239613B1
KR102239613B1 KR1020157029187A KR20157029187A KR102239613B1 KR 102239613 B1 KR102239613 B1 KR 102239613B1 KR 1020157029187 A KR1020157029187 A KR 1020157029187A KR 20157029187 A KR20157029187 A KR 20157029187A KR 102239613 B1 KR102239613 B1 KR 102239613B1
Authority
KR
South Korea
Prior art keywords
carrier
glass
bonding
thin sheet
surface modification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020157029187A
Other languages
English (en)
Korean (ko)
Other versions
KR20150127274A (ko
Inventor
로버트 앨런 벨맨
데이나 크레익 북바인더
로버트 조지 맨리
프랜틱 마줌더
테레사 창
제프리 존 도미
2세 앨런 토마스 스티븐
Original Assignee
코닝 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/047,251 external-priority patent/US9340443B2/en
Application filed by 코닝 인코포레이티드 filed Critical 코닝 인코포레이티드
Publication of KR20150127274A publication Critical patent/KR20150127274A/ko
Application granted granted Critical
Publication of KR102239613B1 publication Critical patent/KR102239613B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06Joining glass to glass by processes other than fusing
    • C03C27/10Joining glass to glass by processes other than fusing with the aid of adhesive specially adapted for that purpose
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/06Interconnection of layers permitting easy separation
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/30Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with silicon-containing compounds
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/32Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with synthetic or natural resins
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/30Aspects of methods for coating glass not covered above
    • C03C2218/355Temporary coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Laminated Bodies (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
KR1020157029187A 2013-03-15 2014-03-13 유리 시트의 벌크 어닐링 Expired - Fee Related KR102239613B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361791418P 2013-03-15 2013-03-15
US61/791,418 2013-03-15
US14/047,251 US9340443B2 (en) 2012-12-13 2013-10-07 Bulk annealing of glass sheets
US14/047,251 2013-10-07
PCT/US2014/025537 WO2014151353A1 (en) 2013-03-15 2014-03-13 Bulk annealing of glass sheets

Publications (2)

Publication Number Publication Date
KR20150127274A KR20150127274A (ko) 2015-11-16
KR102239613B1 true KR102239613B1 (ko) 2021-04-13

Family

ID=51580938

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020157029187A Expired - Fee Related KR102239613B1 (ko) 2013-03-15 2014-03-13 유리 시트의 벌크 어닐링

Country Status (6)

Country Link
EP (1) EP2969997A1 (enExample)
JP (2) JP6186493B2 (enExample)
KR (1) KR102239613B1 (enExample)
CN (1) CN105658594B (enExample)
TW (2) TWI679175B (enExample)
WO (1) WO2014151353A1 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015157202A1 (en) 2014-04-09 2015-10-15 Corning Incorporated Device modified substrate article and methods for making
US9340443B2 (en) 2012-12-13 2016-05-17 Corning Incorporated Bulk annealing of glass sheets
US10086584B2 (en) 2012-12-13 2018-10-02 Corning Incorporated Glass articles and methods for controlled bonding of glass sheets with carriers
US10014177B2 (en) 2012-12-13 2018-07-03 Corning Incorporated Methods for processing electronic devices
TWI617437B (zh) 2012-12-13 2018-03-11 康寧公司 促進控制薄片與載體間接合之處理
KR102239613B1 (ko) * 2013-03-15 2021-04-13 코닝 인코포레이티드 유리 시트의 벌크 어닐링
US10510576B2 (en) 2013-10-14 2019-12-17 Corning Incorporated Carrier-bonding methods and articles for semiconductor and interposer processing
WO2015112958A1 (en) * 2014-01-27 2015-07-30 Corning Incorporated Articles and methods for controlled bonding of thin sheets with carriers
CN107635769B (zh) 2015-05-19 2020-09-15 康宁股份有限公司 使片材与载体粘结的制品和方法
EP3313799B1 (en) 2015-06-26 2022-09-07 Corning Incorporated Methods and articles including a sheet and a carrier
TW202216444A (zh) 2016-08-30 2022-05-01 美商康寧公司 用於片材接合的矽氧烷電漿聚合物
TWI810161B (zh) 2016-08-31 2023-08-01 美商康寧公司 具以可控制式黏結的薄片之製品及製作其之方法
KR102346393B1 (ko) * 2017-06-19 2022-01-03 동우 화인켐 주식회사 터치센서를 포함하는 플렉시블 표시장치의 제조방법
KR102659516B1 (ko) 2017-08-18 2024-04-23 코닝 인코포레이티드 유리 적층체
US11331692B2 (en) 2017-12-15 2022-05-17 Corning Incorporated Methods for treating a substrate and method for making articles comprising bonded sheets
CN118091826A (zh) * 2024-04-08 2024-05-28 慕德微纳(杭州)科技有限公司 一种异质键合光波导片

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6124154A (en) 1996-10-22 2000-09-26 Seiko Epson Corporation Fabrication process for thin film transistors in a display or electronic device
US20050069713A1 (en) 2003-09-30 2005-03-31 Rahul Gupta Capillary coating method

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4397722A (en) * 1981-12-31 1983-08-09 International Business Machines Corporation Polymers from aromatic silanes and process for their preparation
US20050001201A1 (en) * 2003-07-03 2005-01-06 Bocko Peter L. Glass product for use in ultra-thin glass display applications
EP2025650A1 (en) * 2006-05-08 2009-02-18 Asahi Glass Company, Limited Thin-sheet glass laminate, process for manufacturing display apparatus using the laminate, and supporting glass substrate
WO2009094558A2 (en) * 2008-01-24 2009-07-30 Brewer Science Inc. Method for reversibly mounting a device wafer to a carrier substrate
EP2273475A1 (en) * 2008-04-17 2011-01-12 Asahi Glass Company, Limited Glass laminate, display panel with support, method for producing glass laminate and method for manufacturing display panel with support
JP5029523B2 (ja) * 2008-07-14 2012-09-19 旭硝子株式会社 ガラス積層体、支持体付き表示装置用パネル、表示装置用パネル、表示装置およびこれらの製造方法
TW201033000A (en) * 2009-01-09 2010-09-16 Asahi Glass Co Ltd Glass laminate and manufacturing method therefor
KR101561729B1 (ko) * 2009-05-06 2015-10-19 코닝 인코포레이티드 유리 기판의 캐리어
US9847243B2 (en) * 2009-08-27 2017-12-19 Corning Incorporated Debonding a glass substrate from carrier using ultrasonic wave
KR20120098640A (ko) * 2009-10-20 2012-09-05 아사히 가라스 가부시키가이샤 유리 적층체 및 그의 제조 방법, 및 표시 패널의 제조 방법 및 그 제조 방법에 의해 얻어지는 표시 패널
BR112012019405A2 (pt) * 2010-02-03 2018-03-20 Asahi Glass Company, Limited metodo e aparelho para recozimento de folha de vidro
US20110250346A1 (en) * 2010-04-07 2011-10-13 Remington Jr Michael P Adhesion of organic coatings on glass
JPWO2013008895A1 (ja) * 2011-07-12 2015-02-23 旭硝子株式会社 積層膜付きガラス基板の製造方法
KR102239613B1 (ko) * 2013-03-15 2021-04-13 코닝 인코포레이티드 유리 시트의 벌크 어닐링

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6124154A (en) 1996-10-22 2000-09-26 Seiko Epson Corporation Fabrication process for thin film transistors in a display or electronic device
US20050069713A1 (en) 2003-09-30 2005-03-31 Rahul Gupta Capillary coating method

Also Published As

Publication number Publication date
JP2017214281A (ja) 2017-12-07
CN105658594A (zh) 2016-06-08
JP6434096B2 (ja) 2018-12-05
CN105658594B (zh) 2019-01-04
JP2016516657A (ja) 2016-06-09
TWI679175B (zh) 2019-12-11
TWI594960B (zh) 2017-08-11
WO2014151353A1 (en) 2014-09-25
TW201736292A (zh) 2017-10-16
JP6186493B2 (ja) 2017-08-23
TW201442968A (zh) 2014-11-16
KR20150127274A (ko) 2015-11-16
EP2969997A1 (en) 2016-01-20

Similar Documents

Publication Publication Date Title
KR102239613B1 (ko) 유리 시트의 벌크 어닐링
KR102237812B1 (ko) 캐리어와 유리 시트의 결합을 제어하기 위한 유리 물품 및 방법
KR102132637B1 (ko) Oled 장치의 가공 방법
US9340443B2 (en) Bulk annealing of glass sheets
US20150099110A1 (en) Glass articles and methods for controlled bonding of glass sheets with carriers
US20150329415A1 (en) Glass and methods of making glass articles

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20240408

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20240408