KR102239613B1 - 유리 시트의 벌크 어닐링 - Google Patents

유리 시트의 벌크 어닐링 Download PDF

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Publication number
KR102239613B1
KR102239613B1 KR1020157029187A KR20157029187A KR102239613B1 KR 102239613 B1 KR102239613 B1 KR 102239613B1 KR 1020157029187 A KR1020157029187 A KR 1020157029187A KR 20157029187 A KR20157029187 A KR 20157029187A KR 102239613 B1 KR102239613 B1 KR 102239613B1
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KR
South Korea
Prior art keywords
carrier
glass
bonding
thin sheet
surface modification
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Expired - Fee Related
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KR1020157029187A
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English (en)
Korean (ko)
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KR20150127274A (ko
Inventor
로버트 앨런 벨맨
데이나 크레익 북바인더
로버트 조지 맨리
프랜틱 마줌더
테레사 창
제프리 존 도미
2세 앨런 토마스 스티븐
Original Assignee
코닝 인코포레이티드
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Priority claimed from US14/047,251 external-priority patent/US9340443B2/en
Application filed by 코닝 인코포레이티드 filed Critical 코닝 인코포레이티드
Publication of KR20150127274A publication Critical patent/KR20150127274A/ko
Application granted granted Critical
Publication of KR102239613B1 publication Critical patent/KR102239613B1/ko
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06—Joining glass to glass by processes other than fusing
    • C03C27/10—Joining glass to glass by processes other than fusing with the aid of adhesive specially adapted for that purpose
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/06—Interconnection of layers permitting easy separation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/30—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with silicon-containing compounds
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/32—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with synthetic or natural resins
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/355—Temporary coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Laminated Bodies (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
KR1020157029187A 2013-03-15 2014-03-13 유리 시트의 벌크 어닐링 Expired - Fee Related KR102239613B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361791418P 2013-03-15 2013-03-15
US61/791,418 2013-03-15
US14/047,251 2013-10-07
US14/047,251 US9340443B2 (en) 2012-12-13 2013-10-07 Bulk annealing of glass sheets
PCT/US2014/025537 WO2014151353A1 (en) 2013-03-15 2014-03-13 Bulk annealing of glass sheets

Publications (2)

Publication Number Publication Date
KR20150127274A KR20150127274A (ko) 2015-11-16
KR102239613B1 true KR102239613B1 (ko) 2021-04-13

Family

ID=51580938

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020157029187A Expired - Fee Related KR102239613B1 (ko) 2013-03-15 2014-03-13 유리 시트의 벌크 어닐링

Country Status (6)

Country Link
EP (1) EP2969997A1 (enExample)
JP (2) JP6186493B2 (enExample)
KR (1) KR102239613B1 (enExample)
CN (1) CN105658594B (enExample)
TW (2) TWI679175B (enExample)
WO (1) WO2014151353A1 (enExample)

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* Cited by examiner, † Cited by third party
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US10086584B2 (en) 2012-12-13 2018-10-02 Corning Incorporated Glass articles and methods for controlled bonding of glass sheets with carriers
US10014177B2 (en) 2012-12-13 2018-07-03 Corning Incorporated Methods for processing electronic devices
US9340443B2 (en) 2012-12-13 2016-05-17 Corning Incorporated Bulk annealing of glass sheets
TWI617437B (zh) 2012-12-13 2018-03-11 康寧公司 促進控制薄片與載體間接合之處理
WO2014151353A1 (en) * 2013-03-15 2014-09-25 Corning Incorporated Bulk annealing of glass sheets
US10510576B2 (en) 2013-10-14 2019-12-17 Corning Incorporated Carrier-bonding methods and articles for semiconductor and interposer processing
CN106132688B (zh) * 2014-01-27 2020-07-14 康宁股份有限公司 用于薄片与载体的受控粘结的制品和方法
KR20160145062A (ko) 2014-04-09 2016-12-19 코닝 인코포레이티드 디바이스 변경된 기판 물품 및 제조 방법
EP3297824A1 (en) * 2015-05-19 2018-03-28 Corning Incorporated Articles and methods for bonding sheets with carriers
CN107810168A (zh) 2015-06-26 2018-03-16 康宁股份有限公司 包含板材和载体的方法和制品
TW201825623A (zh) 2016-08-30 2018-07-16 美商康寧公司 用於片材接合的矽氧烷電漿聚合物
TWI821867B (zh) 2016-08-31 2023-11-11 美商康寧公司 具以可控制式黏結的薄片之製品及製作其之方法
KR102346393B1 (ko) * 2017-06-19 2022-01-03 동우 화인켐 주식회사 터치센서를 포함하는 플렉시블 표시장치의 제조방법
WO2019036710A1 (en) 2017-08-18 2019-02-21 Corning Incorporated TEMPORARY BINDING USING POLYCATIONIC POLYMERS
CN111615567B (zh) 2017-12-15 2023-04-14 康宁股份有限公司 用于处理基板的方法和用于制备包括粘合片材的制品的方法
CN118091826A (zh) * 2024-04-08 2024-05-28 慕德微纳(杭州)科技有限公司 一种异质键合光波导片

Citations (2)

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US6124154A (en) 1996-10-22 2000-09-26 Seiko Epson Corporation Fabrication process for thin film transistors in a display or electronic device
US20050069713A1 (en) 2003-09-30 2005-03-31 Rahul Gupta Capillary coating method

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US4397722A (en) * 1981-12-31 1983-08-09 International Business Machines Corporation Polymers from aromatic silanes and process for their preparation
US20050001201A1 (en) * 2003-07-03 2005-01-06 Bocko Peter L. Glass product for use in ultra-thin glass display applications
EP2025650A1 (en) * 2006-05-08 2009-02-18 Asahi Glass Company, Limited Thin-sheet glass laminate, process for manufacturing display apparatus using the laminate, and supporting glass substrate
DE112009000140B4 (de) * 2008-01-24 2022-06-15 Brewer Science, Inc. Verfahren zum reversiblen Anbringen eines Vorrichtungswafers an einem Trägersubstrat und ein daraus erhaltener Gegenstand
WO2009128359A1 (ja) * 2008-04-17 2009-10-22 旭硝子株式会社 ガラス積層体、支持体付き表示装置用パネルおよびこれらの製造方法
JP5029523B2 (ja) * 2008-07-14 2012-09-19 旭硝子株式会社 ガラス積層体、支持体付き表示装置用パネル、表示装置用パネル、表示装置およびこれらの製造方法
TW201033000A (en) * 2009-01-09 2010-09-16 Asahi Glass Co Ltd Glass laminate and manufacturing method therefor
CN102422406B (zh) * 2009-05-06 2014-07-09 康宁股份有限公司 用于玻璃基片的支承件
US9847243B2 (en) * 2009-08-27 2017-12-19 Corning Incorporated Debonding a glass substrate from carrier using ultrasonic wave
KR20120098640A (ko) * 2009-10-20 2012-09-05 아사히 가라스 가부시키가이샤 유리 적층체 및 그의 제조 방법, 및 표시 패널의 제조 방법 및 그 제조 방법에 의해 얻어지는 표시 패널
JP5641254B2 (ja) * 2010-02-03 2014-12-17 旭硝子株式会社 ガラス板の徐冷方法及びその装置
US20110250346A1 (en) * 2010-04-07 2011-10-13 Remington Jr Michael P Adhesion of organic coatings on glass
TW201309611A (zh) * 2011-07-12 2013-03-01 Asahi Glass Co Ltd 附積層膜之玻璃基板之製造方法
WO2014151353A1 (en) * 2013-03-15 2014-09-25 Corning Incorporated Bulk annealing of glass sheets

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6124154A (en) 1996-10-22 2000-09-26 Seiko Epson Corporation Fabrication process for thin film transistors in a display or electronic device
US20050069713A1 (en) 2003-09-30 2005-03-31 Rahul Gupta Capillary coating method

Also Published As

Publication number Publication date
JP6434096B2 (ja) 2018-12-05
TWI679175B (zh) 2019-12-11
KR20150127274A (ko) 2015-11-16
CN105658594A (zh) 2016-06-08
WO2014151353A1 (en) 2014-09-25
CN105658594B (zh) 2019-01-04
TW201442968A (zh) 2014-11-16
TW201736292A (zh) 2017-10-16
JP2016516657A (ja) 2016-06-09
EP2969997A1 (en) 2016-01-20
TWI594960B (zh) 2017-08-11
JP6186493B2 (ja) 2017-08-23
JP2017214281A (ja) 2017-12-07

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KR102237812B1 (ko) 캐리어와 유리 시트의 결합을 제어하기 위한 유리 물품 및 방법
KR102132637B1 (ko) Oled 장치의 가공 방법
US9340443B2 (en) Bulk annealing of glass sheets
US20150099110A1 (en) Glass articles and methods for controlled bonding of glass sheets with carriers
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