JP2017173505A - 表示装置及びその製造方法 - Google Patents
表示装置及びその製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 239000010409 thin film Substances 0.000 claims abstract description 118
- 230000002093 peripheral effect Effects 0.000 claims abstract description 27
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 17
- 229920005591 polysilicon Polymers 0.000 claims abstract description 17
- 239000004065 semiconductor Substances 0.000 claims abstract description 12
- 239000003990 capacitor Substances 0.000 claims description 32
- 239000002184 metal Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- 150000002500 ions Chemical class 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 101100489584 Solanum lycopersicum TFT1 gene Proteins 0.000 abstract description 25
- 101100214488 Solanum lycopersicum TFT2 gene Proteins 0.000 abstract description 24
- 239000000758 substrate Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 230000003071 parasitic effect Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000005401 electroluminescence Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000013256 coordination polymer Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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Abstract
Description
図1は、本発明の第1の実施形態に係る表示装置の斜視図である。表示装置として、有機エレクトロルミネッセンス表示装置を例に挙げる。表示装置は、例えば、赤、緑及び青からなる複数色の単位画素(サブピクセル)を組み合わせて、フルカラーの画素(ピクセル)を形成し、フルカラーの画像を表示するようになっている。表示装置は、例えば樹脂からなることで柔軟性を有する第1基板10を有する。第1基板10には、画像を表示するための素子を駆動するための集積回路チップ12が搭載され、外部との電気的接続のためのフレキシブルプリント基板14が接続されている。
図5は、第1の実施形態の変形例を示す図である。この変形例では、表示領域DRに設けられる複数の薄膜トランジスタは、周辺領域PRの第1薄膜トランジスタTFT1と同じ層位置に、第1薄膜トランジスタTFT1を含む。つまり、図3に示す第1スイッチング素子SW1が、第1薄膜トランジスタTFT1である。回路層116の第1薄膜トランジスタTFT1よりも上の絶縁層を貫通して、第1チャネル層CH1に接続する第1コンタクトプラグCP1が設けられている。
図6は、本発明の第2の実施形態に係る表示装置の回路図である。本実施形態では、第1スイッチング素子SW1によって映像信号をキャパシタCに書き込み、第2スイッチング素子SW2によって表示素子DEを流れる電流が制御され、第3スイッチング素子SW3によって電流供給をオンオフする。
Claims (13)
- 画像を表示するための表示領域に設けられた複数の画素電極と、
前記複数の画素電極の上方に配置された共通電極と、
前記複数の画素電極と前記共通電極の間に介在する自発光素子層と、
前記表示領域から前記表示領域の外側にある周辺領域に至る複数層からなる回路層と、
を有し、
前記回路層は、前記表示領域及び前記周辺領域のそれぞれに、複数の薄膜トランジスタを有し、
前記周辺領域に設けられる前記複数の薄膜トランジスタは、低温ポリシリコンからなる第1チャネル層を有して第1ソース電極及び第1ドレイン電極のそれぞれと第1ゲート電極との間に前記第1チャネル層が介在しないスタガ型の第1薄膜トランジスタであり、
前記表示領域に設けられる前記複数の薄膜トランジスタは、酸化物半導体からなる第2チャネル層を有して第2ソース電極及び第2ドレイン電極のそれぞれと第2ゲート電極との間に前記第2チャネル層が介在しないスタガ型の第2薄膜トランジスタを含み、
前記第2薄膜トランジスタは、前記第1薄膜トランジスタよりも上の層位置にあることを特徴とする表示装置。 - 請求項1に記載された表示装置において、
前記表示領域に設けられる前記第2薄膜トランジスタは、前記複数の画素電極のそれぞれへの電流の供給量を制御するように接続されていることを特徴とする表示装置。 - 請求項1又は2に記載された表示装置において、
前記回路層を構成する前記複数層は、前記表示領域に、前記低温ポリシリコンの層にイオンが注入されてなる導電層を含み、
前記導電層は、前記第1薄膜トランジスタの前記第1チャネル層と同じ層位置にあって前記第2薄膜トランジスタよりも下の層位置にあることを特徴とする表示装置。 - 請求項3に記載された表示装置において、
前記導電層は、前記第2薄膜トランジスタの全体に重畳する大きさを有することを特徴とする表示装置。 - 請求項3又は4に記載された表示装置において、
前記回路層を構成する前記複数層は、前記表示領域に、前記導電層をキャパシタの一方の電極とし、前記導電層と対向する位置に他方の電極となる第2導電層をさらに含み、
前記第2導電層は、前記第1薄膜トランジスタの前記第1ゲート電極と同じ層位置にあって前記第2薄膜トランジスタよりも下の層位置にあることを特徴とする表示装置。 - 請求項1から5のいずれか1項に記載された表示装置において、
前記表示領域に設けられる前記複数の薄膜トランジスタは、前記周辺領域の前記第1薄膜トランジスタと同じ層位置に、前記第1薄膜トランジスタをさらに含むことを特徴とする表示装置。 - 請求項1から6のいずれか1項に記載された表示装置において、
前記回路層の前記第1薄膜トランジスタよりも上の層を貫通して、前記第1チャネル層に接続するコンタクトプラグをさらに有し、
前記回路層を構成する前記複数層は、前記第1薄膜トランジスタの前記第1チャネル層の少なくとも端部と重畳するように、前記第2薄膜トランジスタの前記第2ゲート電極と同じ層位置で同じ材料からなる金属層をさらに含み、
前記金属層は、前記コンタクトプラグと一体的になるように形成されていることを特徴とする表示装置。 - 画像を表示するための表示領域及び前記表示領域の外側にある周辺領域を有する表示装置の製造方法であって、
前記周辺領域に、低温ポリシリコンからなる第1チャネル層を有して第1ソース電極及び第1ドレイン電極のそれぞれと第1ゲート電極との間に前記第1チャネル層が介在しないスタガ型の第1薄膜トランジスタを形成する工程と、
前記第1薄膜トランジスタを形成した後に、前記表示領域に、酸化物半導体からなる第2チャネル層を有して第2ソース電極及び第2ドレイン電極のそれぞれと第2ゲート電極との間に前記第2チャネル層が介在しないスタガ型の第2薄膜トランジスタを形成する工程と、
前記第2薄膜トランジスタを形成した後に、前記表示領域に複数の画素電極を形成する工程と、
前記複数の画素電極の上に自発光素子層を形成する工程と、
前記自発光素子層の上に共通電極を形成する工程と、
を含むことを特徴とする表示装置の製造方法。 - 請求項8に記載された表示装置の製造方法において、
前記周辺領域に前記第1薄膜トランジスタを形成する工程で、前記表示領域に、前記低温ポリシリコンの層を形成してイオンを注入することで導電層を形成することを特徴とする表示装置の製造方法。 - 請求項9に記載された表示装置の製造方法において、
前記導電層は、前記第2薄膜トランジスタの全体と重畳する大きさを有するように形成することを特徴とする表示装置の製造方法。 - 請求項9又は10に記載された表示装置の製造方法において、
前記周辺領域に前記第1薄膜トランジスタを形成する工程で、前記第1ゲート電極の形成と同時に、前記導電層とともにキャパシタを形成するための電極となる第2導電層を形成することを特徴とする表示装置の製造方法。 - 請求項8から11のいずれか1項に記載された表示装置の製造方法において、
前記周辺領域に前記第1薄膜トランジスタを形成する工程で、前記表示領域にも、前記第1薄膜トランジスタを形成することを特徴とする表示装置の製造方法。 - 請求項8から12のいずれか1項に記載された表示装置の製造方法において、
前記表示領域に前記第2薄膜トランジスタを形成する工程で、
前記第2ゲート電極を形成する前に、前記第2ゲート電極よりも下にある絶縁層に前記第1チャネル層の上面に至るスルーホールを形成し、
前記第2ゲート電極の形成と同時に、前記スルーホール内にコンタクトプラグを形成し、さらに、前記コンタクトプラグと一体化して前記第1薄膜トランジスタの前記第1チャネル層の少なくとも端部と重畳するように、金属層を形成することを特徴とする表示装置の製造方法。
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Also Published As
Publication number | Publication date |
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US10236330B2 (en) | 2019-03-19 |
CN107230690B (zh) | 2020-09-22 |
CN107230690A (zh) | 2017-10-03 |
US10886351B2 (en) | 2021-01-05 |
US11404516B2 (en) | 2022-08-02 |
US20220310735A1 (en) | 2022-09-29 |
US11744111B2 (en) | 2023-08-29 |
CN112038376A (zh) | 2020-12-04 |
US20170278916A1 (en) | 2017-09-28 |
KR102013488B1 (ko) | 2019-08-22 |
TW201735373A (zh) | 2017-10-01 |
JP6673731B2 (ja) | 2020-03-25 |
TWI649881B (zh) | 2019-02-01 |
US20230354647A1 (en) | 2023-11-02 |
KR20170110503A (ko) | 2017-10-11 |
US20210083029A1 (en) | 2021-03-18 |
US20190165071A1 (en) | 2019-05-30 |
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