JP2017152489A5 - - Google Patents

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Publication number
JP2017152489A5
JP2017152489A5 JP2016032292A JP2016032292A JP2017152489A5 JP 2017152489 A5 JP2017152489 A5 JP 2017152489A5 JP 2016032292 A JP2016032292 A JP 2016032292A JP 2016032292 A JP2016032292 A JP 2016032292A JP 2017152489 A5 JP2017152489 A5 JP 2017152489A5
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JP
Japan
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conductivity type
compound semiconductor
type region
dopant
forming
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JP2016032292A
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English (en)
Japanese (ja)
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JP6651894B2 (ja
JP2017152489A (ja
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Priority to JP2016032292A priority Critical patent/JP6651894B2/ja
Priority claimed from JP2016032292A external-priority patent/JP6651894B2/ja
Priority to PCT/JP2017/000799 priority patent/WO2017145548A1/ja
Priority to DE112017000947.2T priority patent/DE112017000947T5/de
Priority to US16/070,061 priority patent/US10643851B2/en
Publication of JP2017152489A publication Critical patent/JP2017152489A/ja
Publication of JP2017152489A5 publication Critical patent/JP2017152489A5/ja
Application granted granted Critical
Publication of JP6651894B2 publication Critical patent/JP6651894B2/ja
Expired - Fee Related legal-status Critical Current
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JP2016032292A 2016-02-23 2016-02-23 化合物半導体装置およびその製造方法 Expired - Fee Related JP6651894B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2016032292A JP6651894B2 (ja) 2016-02-23 2016-02-23 化合物半導体装置およびその製造方法
PCT/JP2017/000799 WO2017145548A1 (ja) 2016-02-23 2017-01-12 化合物半導体装置およびその製造方法
DE112017000947.2T DE112017000947T5 (de) 2016-02-23 2017-01-12 Verbindungshalbleitervorrichtung und herstellungsverfahren für dieverbindungshalbleitervorrichtung
US16/070,061 US10643851B2 (en) 2016-02-23 2017-01-12 Compound semiconductor device and production method for the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016032292A JP6651894B2 (ja) 2016-02-23 2016-02-23 化合物半導体装置およびその製造方法

Publications (3)

Publication Number Publication Date
JP2017152489A JP2017152489A (ja) 2017-08-31
JP2017152489A5 true JP2017152489A5 (enExample) 2018-06-21
JP6651894B2 JP6651894B2 (ja) 2020-02-19

Family

ID=59685318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016032292A Expired - Fee Related JP6651894B2 (ja) 2016-02-23 2016-02-23 化合物半導体装置およびその製造方法

Country Status (4)

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US (1) US10643851B2 (enExample)
JP (1) JP6651894B2 (enExample)
DE (1) DE112017000947T5 (enExample)
WO (1) WO2017145548A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2705761C1 (ru) * 2016-08-10 2019-11-11 Ниссан Мотор Ко., Лтд. Полупроводниковое устройство
JP6673232B2 (ja) * 2017-01-17 2020-03-25 株式会社デンソー 炭化珪素半導体装置
JP7379880B2 (ja) * 2019-06-21 2023-11-15 富士電機株式会社 半導体装置
JP7354029B2 (ja) * 2020-03-13 2023-10-02 株式会社東芝 半導体装置、半導体装置の製造方法、電源回路、及び、コンピュータ
CN113921394A (zh) * 2020-07-08 2022-01-11 上海贝岭股份有限公司 超级势垒整流器的制备方法以及超级势垒整流器
WO2023199570A1 (ja) * 2022-04-14 2023-10-19 株式会社デンソー 半導体装置とその製造方法
EP4391065A1 (en) * 2022-12-22 2024-06-26 Imec VZW Shielding structure for a vertical iii-nitride semiconductor device
JP2025129940A (ja) * 2024-02-26 2025-09-05 ミネベアパワーデバイス株式会社 半導体装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4453671B2 (ja) * 2006-03-08 2010-04-21 トヨタ自動車株式会社 絶縁ゲート型半導体装置およびその製造方法
JP4683075B2 (ja) * 2008-06-10 2011-05-11 株式会社デンソー 炭化珪素半導体装置およびその製造方法
JP5482745B2 (ja) * 2011-08-10 2014-05-07 株式会社デンソー 炭化珪素半導体装置およびその製造方法
JP5582112B2 (ja) * 2011-08-24 2014-09-03 株式会社デンソー 炭化珪素半導体装置およびその製造方法
JP2013145770A (ja) * 2012-01-13 2013-07-25 Sumitomo Electric Ind Ltd 半導体装置およびその製造方法
JP5884617B2 (ja) * 2012-04-19 2016-03-15 株式会社デンソー 炭化珪素半導体装置およびその製造方法
JP5751213B2 (ja) * 2012-06-14 2015-07-22 株式会社デンソー 炭化珪素半導体装置およびその製造方法
US9318600B2 (en) * 2013-04-16 2016-04-19 Panasonic Intellectual Property Management Co., Ltd. Silicon carbide semiconductor device and method for manufacturing same
JP6048317B2 (ja) * 2013-06-05 2016-12-21 株式会社デンソー 炭化珪素半導体装置
JP6341074B2 (ja) * 2014-01-24 2018-06-13 株式会社デンソー 半導体装置の製造方法
EP2977989B1 (en) 2014-07-25 2019-05-08 IMEC vzw Sample-and-hold circuit for an interleaved analog-to-digital converter
US9768284B2 (en) * 2015-03-05 2017-09-19 Infineon Technologies Americas Corp. Bipolar semiconductor device having a charge-balanced inter-trench structure

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