JP2017050535A - 半導体製造機器内の消耗部品の摩耗検出 - Google Patents
半導体製造機器内の消耗部品の摩耗検出 Download PDFInfo
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Abstract
Description
本出願は、2015年8月21日に出願された、発明の名称を「WEAR DETECTION OF CONSUMABLE PART IN SEMICONDUCTOR MANUFACTURING EQUIPMENT」とする米国仮特許出願第62/208,499号に基づく優先権を主張する。この仮出願は、参照によって本明細書に組み込まれる。
1.発明の分野
本明細書の実施形態は、半導体製造機器内の消耗部品の摩耗を検出する方法、システムおよびプログラムに関する。
プラズマは、基板(例えばウェーハまたはフラット・パネル)を処理して、電子製品(例えば集積回路またはフラット・パネル・ディスプレイ)を形成する目的に長く使用されている。通常、半導体ウェーハは、その下の材料のエッチングを誘導するフォトレジスト・マスク層とともにエッチング・チャンバ(etch chamber)内に置かれる。このエッチング・プロセスは、フォトレジストによって覆われてないその下の材料を除去する。
Claims (20)
- 基板を処理するチャンバであって、
前記チャンバ内の基準部品であって、前記チャンバの作動中に摩耗しない基準部品と、
前記チャンバ内の消耗部品であって、前記チャンバの作動中に摩耗する消耗部品と、
前記基板を前記チャンバ内へ移送する移送アームと、
前記移送アーム上のセンサであって、前記移送アームが前記消耗部品の近くを移動するときに、前記センサから前記消耗部品の表面までの第1の距離を測定するように構成され、前記移送アームが前記基準部品の近くを移動するときに、前記センサから前記基準部品の表面までの第2の距離を測定するように構成されているセンサと、
前記第1の距離および前記第2の距離に基づいて前記消耗部品の摩耗量を決定するように構成されているコントローラと
を備えるチャンバ。 - 請求項1に記載のチャンバであって、前記コントローラは、前記消耗部品の前記表面の平面と前記基準部品の前記表面の平面との距離差を計算し、前記距離差は、前記第1の距離から前記第2の距離を減じたものに等しい、チャンバ。
- 請求項2に記載のチャンバであって、前記コントローラは、前記消耗部品が最初に取り付けられた時から開始する、前記距離差の経時変化を追跡する、チャンバ。
- 請求項3に記載のチャンバであって、前記コントローラは、前記距離差が、前記消耗部品が最初に取り付けられた際に測定された距離差から所定の量だけ変化したときに、前記消耗部品は交換されるべきであると判定する、チャンバ。
- 請求項1に記載のチャンバであって、前記消耗部品上の前記摩耗量は、前記チャンバを開く必要なしに決定され、前記センサは、非接触遠方測定デバイスである、チャンバ。
- 請求項1に記載のチャンバであって、前記コントローラは、前記消耗部品の前記表面の平面と前記基準部品の前記表面の平面との距離差を計算し、前記距離差は、前記第1の距離から前記第2の距離を減じたものに等しく、前記コントローラは、前記消耗部品が最初に取り付けられた時から開始する前記距離差の経時変化に基づいて、前記消耗部品の摩耗を補償するためのプロセス・パラメータ変更を決定する、チャンバ。
- 請求項1に記載のチャンバであって、前記センサは、前記移送アームのエンド・エフェクタに結合されている、チャンバ。
- 請求項1に記載のチャンバであって、前記センサは、デプス・カメラ、または共焦点クロマチック測定デバイス、または低コヒーレンス・インターフェロメトリ測定デバイス、または静電容量距離センサ、または変色検出器のうちの1つである、チャンバ。
- 請求項1に記載のチャンバであって、さらに、
前記センサを格納するための前記真空移送チャンバ内のステーションまたはロード・ロック
を含み、前記移送アームは、前記真空移送チャンバ内の前記ステーションまたは前記ロード・ロックから前記センサを載置する、
チャンバ。 - 請求項1に記載のチャンバであって、前記消耗部品はエッジ・リングであり、前記基準部品は前記チャンバの作動中、前記基板を保持するチャックである、チャンバ。
- 請求項1に記載のチャンバであって、前記センサは前記コントローラに無線で接続されており、前記センサは電池を含む、チャンバ。
- 請求項1に記載のチャンバであって、前記センサは前記移送アームのエンド・エフェクタに搭載可能である、チャンバ。
- 請求項1に記載のチャンバであって、前記センサは、前記移送アームが基板を載置しているかのように前記移送アームが前記センサを載置するよう、基板に類視する構造体上に搭載されている、チャンバ。
- 消耗部品の摩耗を決定する方法であって、
半導体製造チャンバ内において移送アーム上に基板を載置し、前記移送アームはセンサを含み、
前記移送アームが消耗部品の近くを移動するときに、前記センサを用いて前記センサから前記消耗部品の表面までの第1の距離を測定し、前記消耗部品は、前記チャンバの作動中に摩耗し、
前記移送アームが基準部品の近くを移動するときに、前記センサを用いて前記センサから前記基準部品の表面までの第2の距離を測定し、前記基準部品は前記チャンバの作動中に摩耗せず、
前記第1の距離および前記第2の距離に基づいて前記消耗部品の摩耗量を決定すること
を備える方法。 - 請求項14に記載の方法であって、前記摩耗量を決定することは、
前記消耗部品の前記表面の平面と前記基準部品の前記表面の平面との間の距離差を計算し、前記距離差は、前記第1の距離から前記第2の距離を減じたものに等しい、ことを、含む
方法。 - 請求項15に記載の方法であって、さらに、
前記消耗部品が最初に取り付けられた時から開始する、前記距離差の経時変化を追跡し、前記消耗部品は、前記距離差が、前記消耗部品が最初に取り付けられた時に測定された前記距離差から所定の量だけ変化したときに、交換される、
方法。 - 請求項14に記載の方法であって、前記消耗部品上の前記摩耗量は前記チャンバを開く必要なしに決定され、前記センサは非接触遠方測定デバイスである、方法。
- 請求項14に記載の方法であって、前記センサは、デプス・カメラ、または共焦点クロマチック測定デバイス、または低コヒーレンス・インターフェロメトリ測定デバイス、または静電容量距離センサ、または変色検出器のうちの1つである、方法。
- 基板を処理するチャンバであって、
前記チャンバ内の基準部品と、
前記チャンバ内の消耗部品であって、前記チャンバの作動中に堆積物を蓄積する消耗部品と、
前記基板を前記チャンバ内へ移送する移送アームと、
前記移送アーム上のセンサであって、前記移送アームが前記消耗部品の近くを移動するときに、前記センサから前記消耗部品の表面までの第1の距離を測定するように構成され、前記移送アームが前記基準部品の近くを移動するときに、前記センサから前記基準部品の表面までの第2の距離を測定するように構成されているセンサと、
前記第1の距離および前記第2の距離に基づいて前記消耗部品上の堆積物の量を決定するように構成されているコントローラと
を備えるチャンバ。 - 請求項19に記載のチャンバであって、前記コントローラは、前記消耗部品の前記表面の平面と前記基準部品の前記表面の平面との距離差を計算し、前記距離差は、前記第1の距離から前記第2の距離を減じたものに等しく、
前記コントローラが、前記消耗部品が最初に取り付けられた時から開始する、前記距離差の経時変化を追跡し、
前記コントローラは、前記距離差が、前記消耗部品が最初に取り付けられた時に測定された距離差から所定の量だけ変化したときに、前記消耗部品を交換されるべきであると判定する、
チャンバ。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562208499P | 2015-08-21 | 2015-08-21 | |
US62/208,499 | 2015-08-21 | ||
US14/846,635 | 2015-09-04 | ||
US14/846,635 US10014198B2 (en) | 2015-08-21 | 2015-09-04 | Wear detection of consumable part in semiconductor manufacturing equipment |
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JP2017050535A true JP2017050535A (ja) | 2017-03-09 |
JP2017050535A5 JP2017050535A5 (ja) | 2019-09-26 |
JP6598745B2 JP6598745B2 (ja) | 2019-10-30 |
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JP2016160065A Active JP6598745B2 (ja) | 2015-08-21 | 2016-08-17 | 半導体製造機器内の消耗部品の摩耗検出 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006196716A (ja) * | 2005-01-14 | 2006-07-27 | Matsushita Electric Ind Co Ltd | 半導体製造装置および半導体装置の製造方法 |
JP2011210853A (ja) * | 2010-03-29 | 2011-10-20 | Tokyo Electron Ltd | 消耗量測定方法 |
JP2015115591A (ja) * | 2013-12-16 | 2015-06-22 | 東京エレクトロン株式会社 | 消耗量測定装置、温度測定装置、消耗量測定方法、温度測定方法及び基板処理システム |
JP2016100407A (ja) * | 2014-11-19 | 2016-05-30 | 東京エレクトロン株式会社 | 測定システムおよび測定方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009245988A (ja) * | 2008-03-28 | 2009-10-22 | Tokyo Electron Ltd | プラズマ処理装置、チャンバ内部品及びチャンバ内部品の寿命検出方法 |
US10269615B2 (en) * | 2011-09-09 | 2019-04-23 | Lam Research Ag | Apparatus for treating surfaces of wafer-shaped articles |
CN104813462B (zh) * | 2012-11-30 | 2017-04-26 | 应用材料公司 | 振动控制的基板传送机械手、系统及方法 |
US9245761B2 (en) * | 2013-04-05 | 2016-01-26 | Lam Research Corporation | Internal plasma grid for semiconductor fabrication |
US10937634B2 (en) * | 2013-10-04 | 2021-03-02 | Lam Research Corporation | Tunable upper plasma-exclusion-zone ring for a bevel etcher |
-
2015
- 2015-09-04 US US14/846,635 patent/US10014198B2/en active Active
-
2016
- 2016-08-17 JP JP2016160065A patent/JP6598745B2/ja active Active
- 2016-08-17 KR KR1020160104086A patent/KR102546407B1/ko active IP Right Grant
- 2016-08-18 TW TW105126314A patent/TWI709173B/zh active
- 2016-08-22 CN CN201610701950.6A patent/CN106468541B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006196716A (ja) * | 2005-01-14 | 2006-07-27 | Matsushita Electric Ind Co Ltd | 半導体製造装置および半導体装置の製造方法 |
JP2011210853A (ja) * | 2010-03-29 | 2011-10-20 | Tokyo Electron Ltd | 消耗量測定方法 |
JP2015115591A (ja) * | 2013-12-16 | 2015-06-22 | 東京エレクトロン株式会社 | 消耗量測定装置、温度測定装置、消耗量測定方法、温度測定方法及び基板処理システム |
JP2016100407A (ja) * | 2014-11-19 | 2016-05-30 | 東京エレクトロン株式会社 | 測定システムおよび測定方法 |
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JP7153362B2 (ja) | 2020-12-08 | 2022-10-14 | アダプティブ プラズマ テクノロジー コーポレーション | 半導体部品の交換監視装置及びこれによる部品交換監視方法 |
KR20220153503A (ko) | 2021-05-11 | 2022-11-18 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 시스템 및 환상 부재의 높이 추정 방법 |
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WO2024047835A1 (ja) * | 2022-09-01 | 2024-03-07 | 三菱電機株式会社 | データ収集分析システム、測定データ収集ユニット、および、データ収集分析方法 |
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US20170053819A1 (en) | 2017-02-23 |
JP6598745B2 (ja) | 2019-10-30 |
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US10014198B2 (en) | 2018-07-03 |
KR102546407B1 (ko) | 2023-06-21 |
TWI709173B (zh) | 2020-11-01 |
KR20170022907A (ko) | 2017-03-02 |
CN106468541A (zh) | 2017-03-01 |
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