JP2016528735A - 受動素子用のスーパーポーザ基板を備えるダイパッケージ - Google Patents
受動素子用のスーパーポーザ基板を備えるダイパッケージ Download PDFInfo
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Abstract
Description
Claims (20)
- 半導体ダイ用のパッケージであって、
自身の前面の近くで能動回路を有し、前記前面の反対側に裏面を有する半導体ダイと、
前記ダイの前記裏面の近くに存在するコンポーネント基板と、
前記コンポーネント基板上に存在する電気的な複数の受動素子と、
前記受動素子を前記能動回路に接続する導電性パスと
を備え、
前記ダイは、前記前面と前記裏面との間にシリコン基板を有し、前記導電性パスは、前記裏面から前記能動回路へと前記ダイを貫通するシリコン貫通ビアである、
パッケージ。 - 前記コンポーネント基板は、前記ダイの前記裏面に接続される、
請求項1に記載のパッケージ。 - 前記ダイの前記前面に接続されるパッケージ基板を更に備える、
請求項1または2に記載のパッケージ。 - 前記コンポーネント基板は、ガラス、セラミックまたはシリコンの少なくとも1つから形成される、
請求項1から3のいずれか一項に記載のパッケージ。 - 前記コンポーネント基板はシリコン基板を有し、前記複数の受動素子は前記シリコン基板と統合される、
請求項1から3のいずれか一項に記載のパッケージ。 - 前記能動回路は無線周波数回路を有する、
請求項1から5のいずれか一項に記載のパッケージ。 - 前記複数の受動素子は、複数のインダクタ、複数の変圧器、複数のキャパシタ、及び複数の抵抗器の少なくとも1つを有する、
請求項1から6のいずれか一項に記載のパッケージ。 - 前記複数のキャパシタは複数の金属−絶縁体−金属キャパシタを有し、前記コンポーネント基板は絶縁体として機能する、
請求項7に記載のパッケージ。 - 前記複数のインダクタは、前記コンポーネント基板内に形成される複数の鉛直インダクタを含む、
請求項8に記載のパッケージ。 - 前記ダイの前記前面上に存在するビルドアップ層基板と、
前記コンポーネント基板と前記ビルドアップ層基板との間に存在するモールドコンパウンド、及び、前記モールドコンパウンドを貫通して前記受動素子を前記ビルドアップ層基板に接続するモールド貫通ビアと
を更に備える、請求項1に記載のパッケージ。 - 前記半導体ダイは前記モールドコンパウンドに埋め込まれる、
請求項10に記載のパッケージ。 - 前記半導体ダイの反対側における前記コンポーネント基板の側面上で、前記コンポーネント基板に接続される追加の半導体ダイを更に備える、
請求項1から11のいずれか一項に記載のパッケージ。 - 前記ダイの前記前面に接続されるパッケージ基板と、
前記追加の半導体ダイを前記半導体ダイから独立している前記パッケージ基板に接続すべく、前記コンポーネント基板と前記パッケージ基板との間に存在するビアと
を更に備える、請求項12に記載のパッケージ。 - 前記コンポーネント基板は、前記ダイの上方を横方向に延伸し、前記パッケージは、前記ダイを貫通して進むことなく電力を前記コンポーネント基板から前記追加のダイに伝送するビアを更に備える、
請求項12に記載のパッケージ。 - コンポーネント基板上に複数の受動素子を形成する段階と、
ダイの前面の複数の回路まで前記ダイの裏面を貫通する複数のビアを形成する段階と、
前記複数の受動素子が前記複数のビアを通って前記複数の回路に接続されるように前記コンポーネント基板を前記ダイの前記裏面に取り付ける段階と
を含む、方法。 - 前記ダイをモールドコンパウンドに埋め込む段階と、
前記コンポーネント基板を取り付ける段階の前に、前記ダイの前記前面上にパッケージ基板を形成する段階と
を更に含む、請求項15に記載の方法。 - 前記コンポーネント基板を取り付ける段階の前に前記ダイの前記前面をパッケージ基板に取り付ける段階、及び、前記コンポーネント基板を取り付ける段階の後に前記ダイの上方で前記パッケージ基板にカバーを取り付ける段階を更に含む、
請求項15または16に記載の方法。 - ユーザインターフェースと、
メモリと、
パッケージング半導体ダイと
を備え、
前記パッケージは、前記ダイの裏面の近くに存在するコンポーネント基板と、前記コンポーネント基板上に存在する電気的な複数の受動素子と、前記受動素子を前記ダイの前面上に存在する能動回路に接続する導電性パスと、を有し、
前記ダイは、前記前面と前記裏面との間にシリコン基板を含み、前記導電性パスは、前記裏面から前記能動回路へと前記ダイを貫通するシリコン貫通ビアである、
コンピューティングシステム。 - プロセッサを更に備え、
前記パッケージング半導体ダイは通信ダイであり、前記能動回路はアナログ無線周波数回路である、
請求項18に記載のコンピューティングシステム。 - 前記パッケージング半導体ダイはシステムオンチップダイであり、前記コンピューティングシステムは、タッチスクリーンディスプレイを更に備え、前記ユーザインターフェースは前記タッチスクリーンディスプレイの中へと統合される、
請求項18に記載のコンピューティングシステム。
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020536402A (ja) * | 2018-05-29 | 2020-12-10 | スリーディー グラス ソリューションズ,インク3D Glass Solutions,Inc | 低挿入損失rf伝送線路 |
JP2021509767A (ja) * | 2018-01-04 | 2021-04-01 | スリーディー グラス ソリューションズ,インク3D Glass Solutions,Inc | 高効率rf回路のためのインピーダンス整合伝導構造 |
Families Citing this family (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10665377B2 (en) | 2014-05-05 | 2020-05-26 | 3D Glass Solutions, Inc. | 2D and 3D inductors antenna and transformers fabricating photoactive substrates |
US9613942B2 (en) * | 2015-06-08 | 2017-04-04 | Qualcomm Incorporated | Interposer for a package-on-package structure |
WO2016209200A1 (en) * | 2015-06-22 | 2016-12-29 | Intel Corporation | On-chip through-body-via capacitors and techniques for forming same |
US10269767B2 (en) | 2015-07-31 | 2019-04-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Multi-chip packages with multi-fan-out scheme and methods of manufacturing the same |
WO2017034589A1 (en) * | 2015-08-27 | 2017-03-02 | Intel Corporation | Multi-die package |
US9935076B1 (en) * | 2015-09-30 | 2018-04-03 | Apple Inc. | Structure and method for fabricating a computing system with an integrated voltage regulator module |
US9870929B2 (en) * | 2015-10-14 | 2018-01-16 | Taiwan Semiconductor Manufacturing Company Ltd. | Package structure, fan-out package structure and method of the same |
WO2017111790A1 (en) | 2015-12-23 | 2017-06-29 | Manusharow Mathew J | Improving size and efficiency of dies |
KR20200010598A (ko) | 2016-02-25 | 2020-01-30 | 3디 글래스 솔루션즈 인코포레이티드 | 3d 커패시터 및 커패시터 어레이 제작용 광활성 기재 |
US11161773B2 (en) | 2016-04-08 | 2021-11-02 | 3D Glass Solutions, Inc. | Methods of fabricating photosensitive substrates suitable for optical coupler |
US10002844B1 (en) | 2016-12-21 | 2018-06-19 | Invensas Bonding Technologies, Inc. | Bonded structures |
TWI708361B (zh) * | 2017-03-15 | 2020-10-21 | 聯華電子股份有限公司 | 半導體封裝結構及其形成方法 |
KR102524712B1 (ko) | 2017-04-28 | 2023-04-25 | 3디 글래스 솔루션즈 인코포레이티드 | Rf 서큘레이터 |
US20190006331A1 (en) * | 2017-06-30 | 2019-01-03 | Intel Corporation | Electronics package devices with through-substrate-vias having pitches independent of substrate thickness |
KR102386799B1 (ko) | 2017-07-07 | 2022-04-18 | 3디 글래스 솔루션즈 인코포레이티드 | 패키지 광활성 유리 기판들에서 rf 시스템을 위한 2d 및 3d 집중 소자 디바이스들 |
US10447274B2 (en) * | 2017-07-11 | 2019-10-15 | iCometrue Company Ltd. | Logic drive based on standard commodity FPGA IC chips using non-volatile memory cells |
TWI632644B (zh) * | 2017-08-30 | 2018-08-11 | 絡達科技股份有限公司 | 積體電路結構 |
US11646288B2 (en) * | 2017-09-29 | 2023-05-09 | Intel Corporation | Integrating and accessing passive components in wafer-level packages |
US10854946B2 (en) | 2017-12-15 | 2020-12-01 | 3D Glass Solutions, Inc. | Coupled transmission line resonate RF filter |
US10957626B2 (en) | 2017-12-19 | 2021-03-23 | Thermo Electron Scientific Instruments Llc | Sensor device with carbon nanotube sensor positioned on first and second substrates |
US10923408B2 (en) * | 2017-12-22 | 2021-02-16 | Invensas Bonding Technologies, Inc. | Cavity packages |
US11380597B2 (en) | 2017-12-22 | 2022-07-05 | Invensas Bonding Technologies, Inc. | Bonded structures |
TWI704848B (zh) * | 2018-03-09 | 2020-09-11 | 鈺橋半導體股份有限公司 | 具有嵌埋式元件及加強層之線路板、其製法及其面朝面半導體組體 |
US11315891B2 (en) | 2018-03-23 | 2022-04-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods of forming semiconductor packages having a die with an encapsulant |
US11735570B2 (en) * | 2018-04-04 | 2023-08-22 | Intel Corporation | Fan out packaging pop mechanical attach method |
US11076489B2 (en) | 2018-04-10 | 2021-07-27 | 3D Glass Solutions, Inc. | RF integrated power condition capacitor |
US11004757B2 (en) | 2018-05-14 | 2021-05-11 | Invensas Bonding Technologies, Inc. | Bonded structures |
US11894322B2 (en) | 2018-05-29 | 2024-02-06 | Analog Devices, Inc. | Launch structures for radio frequency integrated device packages |
US11424196B2 (en) | 2018-06-01 | 2022-08-23 | Analog Devices, Inc. | Matching circuit for integrated circuit die |
AU2019344542B2 (en) | 2018-09-17 | 2022-02-24 | 3D Glass Solutions, Inc. | High efficiency compact slotted antenna with a ground plane |
US11417615B2 (en) | 2018-11-27 | 2022-08-16 | Analog Devices, Inc. | Transition circuitry for integrated circuit die |
US11721677B2 (en) * | 2018-12-27 | 2023-08-08 | Intel Corporation | Microelectronic assemblies having an integrated capacitor |
WO2020139951A1 (en) | 2018-12-28 | 2020-07-02 | 3D Glass Solutions, Inc. | Heterogenous integration for rf, microwave and mm wave systems in photoactive glass substrates |
WO2020139955A1 (en) | 2018-12-28 | 2020-07-02 | 3D Glass Solutions, Inc. | Annular capacitor rf, microwave and mm wave systems |
WO2020206323A1 (en) | 2019-04-05 | 2020-10-08 | 3D Glass Solutions, Inc. | Glass based empty substrate integrated waveguide devices |
CA3136642C (en) | 2019-04-18 | 2023-01-03 | 3D Glass Solutions, Inc. | High efficiency die dicing and release |
CN111952268A (zh) | 2019-05-15 | 2020-11-17 | 西部数据技术公司 | 多模块集成内插器和由此形成的半导体器件 |
US11350537B2 (en) | 2019-05-21 | 2022-05-31 | Analog Devices, Inc. | Electrical feedthrough assembly |
US11004783B2 (en) | 2019-05-29 | 2021-05-11 | Microsoft Technology Licensing, Llc | Integrated circuit chip design for symmetric power delivery |
US11264358B2 (en) | 2019-09-11 | 2022-03-01 | Google Llc | ASIC package with photonics and vertical power delivery |
US11101211B2 (en) | 2019-09-26 | 2021-08-24 | International Business Machines Corporation | Semiconductor device with backside inductor using through silicon vias |
US10978419B1 (en) * | 2019-10-14 | 2021-04-13 | Nanya Technology Corporation | Semiconductor package and manufacturing method thereof |
KR20210079005A (ko) | 2019-12-19 | 2021-06-29 | 삼성전자주식회사 | 반도체 패키지 및 그 제조방법 |
US11276668B2 (en) * | 2020-02-12 | 2022-03-15 | Google Llc | Backside integrated voltage regulator for integrated circuits |
CA3177603C (en) | 2020-04-17 | 2024-01-09 | 3D Glass Solutions, Inc. | Broadband induction |
US11769768B2 (en) | 2020-06-01 | 2023-09-26 | Wolfspeed, Inc. | Methods for pillar connection on frontside and passive device integration on backside of die |
US11348884B1 (en) * | 2020-11-13 | 2022-05-31 | Taiwan Semiconductor Manufacturing Company Limited | Organic interposer including a dual-layer inductor structure and methods of forming the same |
CN115516587A (zh) * | 2021-04-23 | 2022-12-23 | 京东方科技集团股份有限公司 | 集成有无源器件的基板及其制备方法 |
WO2022222133A1 (zh) * | 2021-04-23 | 2022-10-27 | 京东方科技集团股份有限公司 | 集成有无源器件的基板及其制备方法 |
US20230050400A1 (en) * | 2021-08-13 | 2023-02-16 | Mediatek Inc. | Semiconductor package with reduced connection length |
US20230082743A1 (en) * | 2021-09-13 | 2023-03-16 | RF360 Europe GmbH | Integrated passive devices |
US11744021B2 (en) | 2022-01-21 | 2023-08-29 | Analog Devices, Inc. | Electronic assembly |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000349225A (ja) * | 1999-03-30 | 2000-12-15 | Ngk Spark Plug Co Ltd | コンデンサ付属配線基板、配線基板、及びコンデンサ |
JP2004273938A (ja) * | 2003-03-11 | 2004-09-30 | Fujitsu Ltd | 積層型半導体装置 |
JP2004304159A (ja) * | 2003-03-19 | 2004-10-28 | Ngk Spark Plug Co Ltd | 中継基板、半導体素子付き中継基板、中継基板付き基板、半導体素子と中継基板と基板とからなる構造体 |
JP2005217225A (ja) * | 2004-01-30 | 2005-08-11 | Shinko Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2010103475A (ja) * | 2008-10-23 | 2010-05-06 | Samsung Electro-Mechanics Co Ltd | 半導体マルチチップパッケージ |
WO2010101163A1 (ja) * | 2009-03-04 | 2010-09-10 | 日本電気株式会社 | 機能素子内蔵基板及びそれを用いた電子デバイス |
US20110068433A1 (en) * | 2009-09-24 | 2011-03-24 | Qualcomm Incorporated | Forming radio frequency integrated circuits |
JP2012015554A (ja) * | 2011-10-17 | 2012-01-19 | Renesas Electronics Corp | 半導体装置の製造方法、および積層型半導体装置の製造方法 |
JP2012119688A (ja) * | 2010-12-02 | 2012-06-21 | Samsung Electronics Co Ltd | 積層パッケージ構造物、パッケージオンパッケージ素子、およびパッケージオンパッケージ素子製造方法 |
JP2012204631A (ja) * | 2011-03-25 | 2012-10-22 | Fujitsu Semiconductor Ltd | 半導体装置、半導体装置の製造方法及び電子装置 |
US20120280860A1 (en) * | 2011-05-05 | 2012-11-08 | Telesphor Kamgaing | Chip packages including through-silicon via dice with vertically inegrated phased-array antennas and low-frequency and power delivery substrates |
WO2013104712A1 (en) * | 2012-01-10 | 2013-07-18 | Intel Mobile Communications GmbH | Semiconductor devices |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09219468A (ja) | 1996-12-09 | 1997-08-19 | Shinko Electric Ind Co Ltd | 電子部品用基体 |
US6218729B1 (en) | 1999-03-11 | 2001-04-17 | Atmel Corporation | Apparatus and method for an integrated circuit having high Q reactive components |
US6711029B2 (en) * | 2002-05-21 | 2004-03-23 | Cts Corporation | Low temperature co-fired ceramic with improved shrinkage control |
JP4057921B2 (ja) | 2003-01-07 | 2008-03-05 | 株式会社東芝 | 半導体装置およびそのアセンブリ方法 |
US20050094465A1 (en) * | 2003-11-03 | 2005-05-05 | Netlist Inc. | Printed circuit board memory module with embedded passive components |
US7307331B2 (en) * | 2004-03-31 | 2007-12-11 | Intel Corporation | Integrated radio front-end module with embedded circuit elements |
US20060071650A1 (en) | 2004-09-30 | 2006-04-06 | Narendra Siva G | CPU power delivery system |
US20070013080A1 (en) | 2005-06-29 | 2007-01-18 | Intel Corporation | Voltage regulators and systems containing same |
KR100723032B1 (ko) * | 2005-10-19 | 2007-05-30 | 삼성전자주식회사 | 고효율 인덕터, 인덕터의 제조방법 및 인덕터를 이용한패키징 구조 |
US7390700B2 (en) | 2006-04-07 | 2008-06-24 | Texas Instruments Incorporated | Packaged system of semiconductor chips having a semiconductor interposer |
JP2008166373A (ja) | 2006-12-27 | 2008-07-17 | Nec Electronics Corp | 半導体装置およびその製造方法 |
US8310051B2 (en) * | 2008-05-27 | 2012-11-13 | Mediatek Inc. | Package-on-package with fan-out WLCSP |
US7969009B2 (en) | 2008-06-30 | 2011-06-28 | Qualcomm Incorporated | Through silicon via bridge interconnect |
US8344503B2 (en) * | 2008-11-25 | 2013-01-01 | Freescale Semiconductor, Inc. | 3-D circuits with integrated passive devices |
JP2010278334A (ja) | 2009-05-29 | 2010-12-09 | Elpida Memory Inc | 半導体装置 |
US20110050334A1 (en) | 2009-09-02 | 2011-03-03 | Qualcomm Incorporated | Integrated Voltage Regulator with Embedded Passive Device(s) |
KR101134635B1 (ko) | 2009-10-12 | 2012-04-09 | 금호석유화학 주식회사 | 액정 표시 소자용 실란트 조성물 |
KR101139699B1 (ko) * | 2010-04-26 | 2012-05-02 | 한국과학기술원 | 수동소자가 적층된 반도체 칩, 이를 포함하는 3차원 멀티 칩 및 이를 포함하는 3차원 멀티 칩 패키지 |
US8558392B2 (en) * | 2010-05-14 | 2013-10-15 | Stats Chippac, Ltd. | Semiconductor device and method of forming interconnect structure and mounting semiconductor die in recessed encapsulant |
KR20110137059A (ko) * | 2010-06-16 | 2011-12-22 | 주식회사 하이닉스반도체 | 적층 반도체 패키지 |
US9048112B2 (en) | 2010-06-29 | 2015-06-02 | Qualcomm Incorporated | Integrated voltage regulator with embedded passive device(s) for a stacked IC |
US9224647B2 (en) * | 2010-09-24 | 2015-12-29 | Stats Chippac, Ltd. | Semiconductor device and method of forming TSV interposer with semiconductor die and build-up interconnect structure on opposing surfaces of the interposer |
US8232173B2 (en) * | 2010-11-01 | 2012-07-31 | International Business Machines Corporation | Structure and design structure for high-Q value inductor and method of manufacturing the same |
US9177944B2 (en) * | 2010-12-03 | 2015-11-03 | Xilinx, Inc. | Semiconductor device with stacked power converter |
US8773866B2 (en) * | 2010-12-10 | 2014-07-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Radio-frequency packaging with reduced RF loss |
EP2656385B1 (en) | 2010-12-20 | 2021-05-26 | Intel Corporation | Integrated digital- and radio-frequency system-on-chip devices with integral passive devices in package substrates |
JP5536707B2 (ja) | 2011-04-04 | 2014-07-02 | 日本電信電話株式会社 | 半導体装置およびその製造方法 |
US8883561B2 (en) * | 2011-04-30 | 2014-11-11 | Stats Chippac, Ltd. | Semiconductor device and method of embedding TSV semiconductor die within encapsulant with TMV for vertical interconnect in POP |
US8759950B2 (en) | 2011-05-05 | 2014-06-24 | Intel Corporation | Radio- and electromagnetic interference through-silicon vias for stacked-die packages, and methods of making same |
US8901688B2 (en) * | 2011-05-05 | 2014-12-02 | Intel Corporation | High performance glass-based 60 ghz / mm-wave phased array antennas and methods of making same |
US8288209B1 (en) * | 2011-06-03 | 2012-10-16 | Stats Chippac, Ltd. | Semiconductor device and method of using leadframe bodies to form openings through encapsulant for vertical interconnect of semiconductor die |
KR20130023104A (ko) | 2011-08-26 | 2013-03-07 | 한국전자통신연구원 | 밀리미터파용 레이더 패키지 |
KR101274460B1 (ko) | 2011-11-22 | 2013-06-18 | 삼성전기주식회사 | 반도체 패키지 및 그 제조 방법 |
US9162867B2 (en) | 2011-12-13 | 2015-10-20 | Intel Corporation | Through-silicon via resonators in chip packages and methods of assembling same |
US9548251B2 (en) * | 2012-01-12 | 2017-01-17 | Broadcom Corporation | Semiconductor interposer having a cavity for intra-interposer die |
US20150262902A1 (en) * | 2014-03-12 | 2015-09-17 | Invensas Corporation | Integrated circuits protected by substrates with cavities, and methods of manufacture |
-
2013
- 2013-09-27 KR KR1020167005077A patent/KR20160036666A/ko active Application Filing
- 2013-09-27 JP JP2016534570A patent/JP6464435B2/ja active Active
- 2013-09-27 KR KR1020187031416A patent/KR102052294B1/ko active IP Right Grant
- 2013-09-27 EP EP13894760.1A patent/EP3050098B1/en active Active
- 2013-09-27 US US14/910,606 patent/US10615133B2/en active Active
- 2013-09-27 WO PCT/US2013/062388 patent/WO2015047330A1/en active Application Filing
-
2014
- 2014-09-16 GB GB1416330.7A patent/GB2520149B/en active Active
- 2014-09-22 TW TW105143413A patent/TWI671866B/zh active
- 2014-09-22 TW TW103132645A patent/TWI575675B/zh active
- 2014-09-24 DE DE202014104574.0U patent/DE202014104574U1/de active Active
- 2014-09-26 CN CN201410502983.9A patent/CN104517953B/zh active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000349225A (ja) * | 1999-03-30 | 2000-12-15 | Ngk Spark Plug Co Ltd | コンデンサ付属配線基板、配線基板、及びコンデンサ |
JP2004273938A (ja) * | 2003-03-11 | 2004-09-30 | Fujitsu Ltd | 積層型半導体装置 |
JP2004304159A (ja) * | 2003-03-19 | 2004-10-28 | Ngk Spark Plug Co Ltd | 中継基板、半導体素子付き中継基板、中継基板付き基板、半導体素子と中継基板と基板とからなる構造体 |
JP2005217225A (ja) * | 2004-01-30 | 2005-08-11 | Shinko Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2010103475A (ja) * | 2008-10-23 | 2010-05-06 | Samsung Electro-Mechanics Co Ltd | 半導体マルチチップパッケージ |
WO2010101163A1 (ja) * | 2009-03-04 | 2010-09-10 | 日本電気株式会社 | 機能素子内蔵基板及びそれを用いた電子デバイス |
US20110068433A1 (en) * | 2009-09-24 | 2011-03-24 | Qualcomm Incorporated | Forming radio frequency integrated circuits |
JP2012119688A (ja) * | 2010-12-02 | 2012-06-21 | Samsung Electronics Co Ltd | 積層パッケージ構造物、パッケージオンパッケージ素子、およびパッケージオンパッケージ素子製造方法 |
JP2012204631A (ja) * | 2011-03-25 | 2012-10-22 | Fujitsu Semiconductor Ltd | 半導体装置、半導体装置の製造方法及び電子装置 |
US20120280860A1 (en) * | 2011-05-05 | 2012-11-08 | Telesphor Kamgaing | Chip packages including through-silicon via dice with vertically inegrated phased-array antennas and low-frequency and power delivery substrates |
JP2012015554A (ja) * | 2011-10-17 | 2012-01-19 | Renesas Electronics Corp | 半導体装置の製造方法、および積層型半導体装置の製造方法 |
WO2013104712A1 (en) * | 2012-01-10 | 2013-07-18 | Intel Mobile Communications GmbH | Semiconductor devices |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021509767A (ja) * | 2018-01-04 | 2021-04-01 | スリーディー グラス ソリューションズ,インク3D Glass Solutions,Inc | 高効率rf回路のためのインピーダンス整合伝導構造 |
JP7226832B2 (ja) | 2018-01-04 | 2023-02-21 | スリーディー グラス ソリューションズ,インク | 高効率rf回路のためのインピーダンス整合伝導構造 |
JP2020536402A (ja) * | 2018-05-29 | 2020-12-10 | スリーディー グラス ソリューションズ,インク3D Glass Solutions,Inc | 低挿入損失rf伝送線路 |
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GB2520149A (en) | 2015-05-13 |
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EP3050098A4 (en) | 2017-05-10 |
US20160181211A1 (en) | 2016-06-23 |
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US10615133B2 (en) | 2020-04-07 |
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