JP2016162985A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP2016162985A JP2016162985A JP2015043085A JP2015043085A JP2016162985A JP 2016162985 A JP2016162985 A JP 2016162985A JP 2015043085 A JP2015043085 A JP 2015043085A JP 2015043085 A JP2015043085 A JP 2015043085A JP 2016162985 A JP2016162985 A JP 2016162985A
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Abstract
【解決手段】プリント配線基板にSiインターポーザを搭載する工程と、上記Siインターポーザの上面をプラズマ洗浄する工程と、上記Siインターポーザの上面にNCFを配置する工程と、上記Siインターポーザの上記上面に上記NCFを介して半導体チップを搭載する工程と、を有する半導体装置の製造方法である。さらに、リフローによって第2基板の複数の電極のそれぞれと、上記半導体チップの複数の電極パッドのそれぞれとを複数の突起電極を介して電気的に接続する工程を有し、上記Siインターポーザに上記NCFを貼付ける前に上記Siインターポーザの表面をプラズマ洗浄する。
【選択図】図2
Description
図1は実施の形態の半導体装置の構造の一例を示す断面図である。
図14は実施の形態のNCF供給方法における第1変形例を示す断面図と斜視図、図15は実施の形態のNCF供給方法における第2変形例を示す斜視図、図16は実施の形態のNCF供給方法における第3変形例を示す斜視図である。
1a 上面
1b 下面
1c 貫通ビア
1d 配線層
1e アライメントマーク
1f チップ搭載領域
1g Niめっき
1h 端子部(電極)
2 ロジックチップ(半導体チップ)
2a 主面
2b 裏面
2c 電極パッド
3 メモリチップ(半導体チップ)
3a 主面
3b 裏面
3c 貫通ビア
4 Cuピラー(突起電極、柱状電極)
5 BGA(Ball Grid Array 、半導体装置)
6a,6b アンダーフィル
7 リッド
7a 縁部
7b 天井部
8 BGAボール(外部接続用端子、外部電極端子)
9 プリント配線基板(第1基板)
9a 上面
9b 下面
9c ビア
9d 内部配線
10 NCF(絶縁性接着材)
10a ベースフィルム
10b カバーフィルム
11 接着材
12 半田ボール
13 半田
14 Auめっき
15 フラックス
16 フラックス転写板
17 チップトレイ
18 コレット
19 ボンディングツール(ヘッド)
19a 吸着面
20 ステージ
21 フリップチップボンダ
22 ウエハ
23 液状樹脂
24 多数個取り基板
25 スキージ
26 マスク
27 ステージ
28 ペースト状樹脂
29 プリント配線基板(チップ支持基板)
29a 電極
30 シリコンチップ(半導体チップ)
31 多数個取り基板
32 BGA(半導体装置)
Claims (15)
- (a)複数の電極が形成された上面と、前記上面と反対側の下面とを備えたチップ支持基板の前記上面をプラズマ洗浄する工程、
(b)前記(a)工程の後、前記チップ支持基板の前記上面に絶縁性接着材を配置する工程、
(c)前記(b)工程の後、前記チップ支持基板の前記上面に前記絶縁性接着材を介して半導体チップを搭載する工程、
(d)前記(c)工程の後、前記半導体チップが搭載された前記チップ支持基板と前記絶縁性接着材とをリフローによって加熱して、前記チップ支持基板の前記複数の電極のそれぞれと、前記半導体チップの複数の電極パッドのそれぞれとを複数の突起電極を介して電気的に接続する工程、
を有し、
前記(d)工程では、前記複数の突起電極のそれぞれの周囲に前記絶縁性接着材を配置した状態で前記複数の電極のそれぞれと、前記複数の電極パッドのそれぞれとを前記複数の突起電極を介して電気的に接続する、半導体装置の製造方法。 - 請求項1に記載の半導体装置の製造方法において、
前記(a)工程の前に前記チップ支持基板をベークする工程を有し、さらに、
前記(b)工程と前記(c)工程との間に、前記絶縁性接着材のベーク工程を有し、
前記絶縁性接着材の前記ベーク工程では、前記チップ支持基板を前記ベークする工程における前記チップ支持基板のベーク温度より低い温度で前記絶縁性接着材のベークを行う、半導体装置の製造方法。 - 請求項1に記載の半導体装置の製造方法において、
前記(a)工程の前に前記チップ支持基板をベークする工程を有し、さらに、
前記(b)工程と前記(c)工程との間に、前記絶縁性接着材のベーク工程を有し、
前記絶縁性接着材の前記ベーク工程では、前記チップ支持基板を前記ベークする工程における前記チップ支持基板のベーク時間より短い時間で前記絶縁性接着材のベークを行う、半導体装置の製造方法。 - 請求項1に記載の半導体装置の製造方法において、
前記(c)工程では、前記チップ支持基板の前記上面の前記絶縁性接着材の外側に形成されたマークを認識して、前記半導体チップと前記チップ支持基板とを位置合わせする、半導体装置の製造方法。 - 請求項1に記載の半導体装置の製造方法において、
前記(c)工程では、前記半導体チップと前記チップ支持基板とを位置合わせした後、前記複数の突起電極のそれぞれの先端に塗布された半田の溶融温度より低い温度で前記半田のそれぞれを加熱して変形させて、前記半田のそれぞれに前記複数の電極のそれぞれをめり込ませる、半導体装置の製造方法。 - 請求項5に記載の半導体装置の製造方法において、
前記チップ支持基板の前記複数の電極のそれぞれの表面にAuめっきが形成され、前記Auめっきと前記半田とを接続する、半導体装置の製造方法。 - (a)第1基板に、複数の電極が形成された上面および前記上面と反対側の下面を備えた第2基板を搭載する工程、
(b)前記(a)工程の後、前記第1基板をベークする工程、
(c)前記(b)工程の後、前記第2基板の前記上面をプラズマ洗浄する工程、
(d)前記(c)工程の後、前記第2基板の前記上面に絶縁性接着材を配置する工程、
(e)前記(d)工程の後、前記第2基板の前記上面に前記絶縁性接着材を介して半導体チップを搭載する工程、
(f)前記(e)工程の後、前記半導体チップが搭載された前記第2基板と前記絶縁性接着材とをリフローによって加熱して、前記第2基板の前記複数の電極のそれぞれと、前記半導体チップの複数の電極パッドのそれぞれとを複数の突起電極を介して電気的に接続する工程、
を有し、
前記(f)工程では、前記複数の突起電極のそれぞれの周囲に前記絶縁性接着材を配置した状態で前記複数の電極のそれぞれと、前記複数の電極パッドのそれぞれとを前記複数の突起電極を介して電気的に接続する、半導体装置の製造方法。 - 請求項7に記載の半導体装置の製造方法において、
前記(d)工程と前記(e)工程との間に、前記絶縁性接着材のベーク工程を有し、前記絶縁性接着材の前記ベーク工程では、前記(b)工程における前記第1基板のベーク温度より低い温度で前記絶縁性接着材のベークを行う、半導体装置の製造方法。 - 請求項7に記載の半導体装置の製造方法において、
前記(d)工程と前記(e)工程との間に、前記絶縁性接着材のベーク工程を有し、前記絶縁性接着材の前記ベーク工程では、前記(b)工程における前記第1基板のベーク時間より短い時間で前記絶縁性接着材のベークを行う、半導体装置の製造方法。 - 請求項7に記載の半導体装置の製造方法において、
前記(e)工程では、前記第2基板の前記上面の前記絶縁性接着材の外側に形成されたマークを認識して、前記半導体チップと前記第2基板とを位置合わせする、半導体装置の製造方法。 - 請求項7に記載の半導体装置の製造方法において、
前記(e)工程では、前記半導体チップと前記第2基板とを位置合わせした後、前記複数の突起電極のそれぞれの先端に塗布された半田の溶融温度より低い温度で前記半田のそれぞれを加熱して変形させて、前記半田のそれぞれに前記複数の電極のそれぞれをめり込ませる、半導体装置の製造方法。 - 請求項11に記載の半導体装置の製造方法において、
前記第2基板の前記複数の電極のそれぞれの表面にAuめっきが形成され、前記Auめっきと前記半田とを接続する、半導体装置の製造方法。 - 請求項7に記載の半導体装置の製造方法において、
前記(e)工程では、前記半導体チップをフリップチップボンダのヘッドの吸着面によって吸着保持して前記第2基板の前記上面に前記半導体チップを搭載し、
前記ヘッドの前記吸着面の平面サイズは、前記半導体チップの平面サイズと同じ、もしくはそれより小さい、半導体装置の製造方法。 - 請求項7に記載の半導体装置の製造方法において、
前記第2基板は、シリコンからなる基板であり、
前記複数の突起電極のそれぞれは、Cuを主成分とする合金からなる柱状電極である、半導体装置の製造方法。 - 請求項7に記載の半導体装置の製造方法において、
前記(c)工程の前記プラズマ洗浄は、アルゴンガスまたは酸素によってプラズマを発生させて行う、半導体装置の製造方法。
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