JP2016063209A - 3次元垂直チャネルメモリのためのワード線補修 - Google Patents
3次元垂直チャネルメモリのためのワード線補修 Download PDFInfo
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- 230000008439 repair process Effects 0.000 title abstract description 5
- 230000007547 defect Effects 0.000 claims abstract description 13
- 230000008878 coupling Effects 0.000 claims abstract description 9
- 238000010168 coupling process Methods 0.000 claims abstract description 9
- 238000005859 coupling reaction Methods 0.000 claims abstract description 9
- 239000011229 interlayer Substances 0.000 claims description 78
- 239000010410 layer Substances 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 230000002950 deficient Effects 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 2
- 238000009413 insulation Methods 0.000 abstract 1
- 239000000543 intermediate Substances 0.000 description 93
- 239000004020 conductor Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 102100031885 General transcription and DNA repair factor IIH helicase subunit XPB Human genes 0.000 description 2
- 101000920748 Homo sapiens General transcription and DNA repair factor IIH helicase subunit XPB Proteins 0.000 description 2
- 101100049574 Human herpesvirus 6A (strain Uganda-1102) U5 gene Proteins 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 101150064834 ssl1 gene Proteins 0.000 description 2
- 101150062870 ssl3 gene Proteins 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
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- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C8/00—Arrangements for selecting an address in a digital store
- G11C8/14—Word line organisation; Word line lay-out
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0466—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells with charge storage in an insulating layer, e.g. metal-nitride-oxide-silicon [MNOS], silicon-oxide-nitride-oxide-silicon [SONOS]
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/08—Address circuits; Decoders; Word-line control circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
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- G11C16/10—Programming or data input circuits
-
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- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/26—Sensing or reading circuits; Data output circuits
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
- G11C29/12—Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details
- G11C29/44—Indication or identification of errors, e.g. for repair
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/70—Masking faults in memories by using spares or by reconfiguring
- G11C29/76—Masking faults in memories by using spares or by reconfiguring using address translation or modifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/70—Masking faults in memories by using spares or by reconfiguring
- G11C29/78—Masking faults in memories by using spares or by reconfiguring using programmable devices
- G11C29/80—Masking faults in memories by using spares or by reconfiguring using programmable devices with improved layout
- G11C29/816—Masking faults in memories by using spares or by reconfiguring using programmable devices with improved layout for an application-specific layout
- G11C29/82—Masking faults in memories by using spares or by reconfiguring using programmable devices with improved layout for an application-specific layout for EEPROMs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76895—Local interconnects; Local pads, as exemplified by patent document EP0896365
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- H10B—ELECTRONIC MEMORY DEVICES
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- H10B43/10—EEPROM devices comprising charge-trapping gate insulators characterised by the top-view layout
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- H10B—ELECTRONIC MEMORY DEVICES
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-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
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- G11C11/413—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing, timing or power reduction
- G11C11/417—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing, timing or power reduction for memory cells of the field-effect type
- G11C11/418—Address circuits
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
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- G11C13/0021—Auxiliary circuits
- G11C13/0023—Address circuits or decoders
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
- G11C29/12—Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details
- G11C2029/1202—Word line control
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/70—Resistive array aspects
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- G—PHYSICS
- G11—INFORMATION STORAGE
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- G11C29/78—Masking faults in memories by using spares or by reconfiguring using programmable devices
- G11C29/785—Masking faults in memories by using spares or by reconfiguring using programmable devices with redundancy programming schemes
- G11C29/789—Masking faults in memories by using spares or by reconfiguring using programmable devices with redundancy programming schemes using non-volatile cells or latches
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/02—Disposition of storage elements, e.g. in the form of a matrix array
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/02—Disposition of storage elements, e.g. in the form of a matrix array
- G11C5/025—Geometric lay-out considerations of storage- and peripheral-blocks in a semiconductor storage device
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/06—Arrangements for interconnecting storage elements electrically, e.g. by wiring
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C8/00—Arrangements for selecting an address in a digital store
- G11C8/10—Decoders
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Abstract
【解決手段】メモリ装置は、導電ストリップ210aからなる底部面と、導電ストリップ220a〜223aからなる複数の中間面と、導電ストリップ240からなる上部面と、導電ストリップ230a,231aからなる補助中間面とを含み、絶縁ストリップと交互に積み重なった導電ストリップからなる複数の積層体を備える。複数の垂直構造体は、複数の積層体に直交するように配置される。メモリ素子は、複数の積層体の側面と複数の垂直構造体との交差点の界面領域に配置される。連結部210b〜230bからなる積層体は、各中間面における導電ストリップと補助中間面とに接続されている。デコード回路は、複数の中間面および補助中間面に結合され、欠陥の兆候を示した中間面を補助中間面に切り替えるように構成される。
【選択図】図2A
Description
Claims (18)
- 導電ストリップからなる底部面と、導電ストリップからなる複数の中間面と、導電ストリップからなる上部面と、導電ストリップからなる補助中間面と、を少なくとも含む、絶縁ストリップと交互に積み重なった導電ストリップからなる複数の積層体と、
前記複数の積層体に直交するように配置された複数の垂直構造体と、
前記複数の積層体の側面と前記複数の垂直構造体との交差点における界面領域に形成されたメモリ素子と、
前記複数の中間面の各中間面における導電ストリップと前記補助中間面とに接続される、絶縁層で分離された連結部からなる積層体と、
前記複数の中間面および前記補助中間面に結合され、欠陥の兆候を示した中間面を前記補助中間面に切り替えるように構成されたデコード回路と、
を含むメモリ装置。 - 前記デコード回路は、特定の中間面に欠陥があるか否かを示すデータを格納するメモリと、前記データに応じて前記補助中間面を選択する論理回路と、を含む、
請求項1に記載のメモリ装置。 - 複数の補助中間面を含む、請求項1に記載のメモリ装置。
- 前記複数の補助中間面は、導電ストリップからなる前記上部面と前記複数の中間面との間、または前記複数の中間面と導電ストリップからなる前記底部面との間に配置される、
請求項3に記載のメモリ装置。 - コネクタ表面から延びる複数対の層間コネクタを含み、
前記層間コネクタの各対は、複数の連結部からなる積層体における1つの連結部に接続された冗長な第1および第2の層間コネクタを含む、
請求項1に記載のメモリ装置。 - 前記層間コネクタの各対に接続されるとともに前記デコード回路に結合された前記コネクタ表面の上部に、パターニングされた導電線を含む、
請求項5に記載のメモリ装置。 - 第2コネクタ表面から前記底部面における導電ストリップに接続された連結部まで延びる1対の層間コネクタを含む、
請求項1に記載のメモリ装置。 - 前記1対の層間コネクタに接続されるとともに前記底部面に結合された第2デコード回路に結合された前記第2コネクタ表面の上部に、パターニングされた導電線を含む、
請求項7に記載のメモリ装置。 - 導電ストリップからなる積層体のブロックを複数含み、
各ブロックは、導電ストリップからなる底部面と、導電ストリップからなる複数の中間面と、導電ストリップからなる上部面と、導電ストリップからなる補助中間面と、を少なくとも含み、
前記デコード回路は、特定のブロックにおいて欠陥の兆候を示した中間面を該特定のブロックにおける前記補助中間面に切り替えるように構成される、
請求項1に記載のメモリ装置。 - 絶縁層と交互に積み重なった複数の導電層を基板上に形成し、
前記複数の導電層を貫通して延びる垂直構造体アレイを形成し、
導電ストリップからなる底部面と、導電ストリップからなる複数の中間面と、導電ストリップからなる上部面と、導電ストリップからなる補助中間面と、を少なくとも含む、絶縁ストリップと交互に積み重なった導電ストリップからなる複数の積層体が形成されるように、前記複数の導電層をエッチングし、
前記複数の積層体の側面と前記複数の垂直構造体との交差点における界面領域にメモリ素子を形成し、
前記複数の中間面の各中間面における導電ストリップと前記補助中間面とに接続される、絶縁層で分離された連結部からなる積層体を形成し、
ビット線および構造体を形成して、前記垂直構造体アレイを該ビット線に接続し、
前記複数の中間面および前記補助中間面に結合され、欠陥の兆候を示した中間面を前記補助中間面に切り替えるように構成されたデコード回路を設ける、
メモリ装置の製造方法。 - 前記デコード回路は、特定の中間面に欠陥があるか否かを示すデータを格納するメモリと、前記データに応じて前記補助中間面を選択する論理回路と、を含む、
請求項10に記載の製造方法。 - 導電ストリップからなる前記複数の積層体は、複数の補助中間面を含む、
請求項10に記載の製造方法。 - 前記複数の補助中間面は、導電ストリップからなる前記上部面と前記複数の中間面との間、または前記複数の中間面と導電ストリップからなる前記底部面との間に配置される、
請求項12に記載の製造方法。 - コネクタ表面から延びる複数対の層間コネクタを形成し、
前記層間コネクタの各対は、複数の連結部からなる積層体における1つの連結部に接続された冗長な第1および第2の層間コネクタを含む、
請求項10に記載の製造方法。 - 前記層間コネクタの各対に接続されるとともに前記デコード回路に結合された前記コネクタ表面の上部に、パターニングされた導電線を形成する、
請求項14に記載の製造方法。 - 第2コネクタ表面から前記底部面における導電ストリップに接続された連結部まで延びる1対の層間コネクタを形成する、
請求項10に記載の製造方法。 - 前記1対の層間コネクタに接続されるとともに前記底部面に結合された第2デコード回路に結合された前記第2コネクタ表面の上部に、パターニングされた導電線を形成する、
請求項16に記載の製造方法。 - 導電ストリップからなる積層体のブロックを複数含み、
各ブロックは、導電ストリップからなる底部面と、導電ストリップからなる複数の中間面と、導電ストリップからなる上部面と、導電ストリップからなる補助中間面と、を少なくとも含み、
前記デコード回路は、特定のブロックにおいて欠陥の兆候を示した中間面を該特定のブロックにおける前記補助中間面に切り替えるように構成される、
請求項10に記載の製造方法。
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US14/486,988 US9224473B1 (en) | 2014-09-15 | 2014-09-15 | Word line repair for 3D vertical channel memory |
US14/486,988 | 2014-09-15 |
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US9224473B1 (en) * | 2014-09-15 | 2015-12-29 | Macronix International Co., Ltd. | Word line repair for 3D vertical channel memory |
US10186519B2 (en) * | 2015-03-31 | 2019-01-22 | Samsung Electronics Co., Ltd. | Semiconductor memory devices |
US9401371B1 (en) * | 2015-09-24 | 2016-07-26 | Macronix International Co., Ltd. | Sacrificial spin-on glass for air gap formation after bl isolation process in single gate vertical channel 3D NAND flash |
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JP6306233B1 (ja) | 2017-02-28 | 2018-04-04 | ウィンボンド エレクトロニクス コーポレーション | フラッシュメモリおよびその製造方法 |
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US20160078944A1 (en) | 2016-03-17 |
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