JP2015170746A - 半導体製造装置及び半導体製造方法 - Google Patents
半導体製造装置及び半導体製造方法 Download PDFInfo
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Abstract
Description
図1は、第1の実施形態にかかる半導体製造装置の構成を模式的に示す図である。半導体製造装置は、ピックアップ装置1、ダイボンディング装置2、プリサイサ3、制御装置4及び表示装置5を備える。なお、「チップ」および「ダイ」は、一般には、ウェハから完全に分離されているものを指すが、実施形態では、便宜上、分離の前後に関わらず、「チップ」、「ダイ」および「ウェハ」の文言を包括的に使用している。例えば、チップ領域ごとへの分割がなされているものを指してウェハと表現する場合や、完全に分離される前のチップ領域を指してチップあるいはダイと表現する場合がある。
図4は、第2の実施形態にかかる半導体製造装置の構成を模式的に示す図である。上記の第1の実施形態と同一の部分には同一の符号を付し、重複する説明を適宜省略する。
Claims (5)
- 半導体チップが載置され、前記半導体チップの位置を補正する第1のステージと、
前記半導体チップを実装する対象物を支持する第2のステージと、
前記第1のステージから取り上げられた前記半導体チップを前記第2のステージへ移送し、前記対象物に前記半導体チップを載置する移送手段と、
前記第1のステージ及び前記第2のステージの少なくとも一方に取り付けられており、前記半導体チップからの弾性波を検出する検出器と、を有することを特徴とする半導体製造装置。 - 前記検出器での前記弾性波の検出結果に応じて、前記半導体チップにおけるクラックの発生を判定する判定手段を有することを特徴とする請求項1に記載の半導体製造装置。
- 前記第2のステージは、
前記対象物を加熱する加熱手段と、
前記加熱手段から離れた位置へ前記弾性波を伝搬する伝搬部材と、を備え、
前記検出器は、前記伝搬部材に取り付けられていることを特徴とする請求項1又は2に記載の半導体製造装置。 - 前記判定手段は、検出された前記弾性波のエネルギーが、あらかじめ設定された閾値を超えた場合に、前記クラックが発生したものと判定することを特徴とする請求項2に記載の半導体製造装置。
- 第1のステージに載置された半導体チップの位置を補正し、
前記第1のステージから前記半導体チップを取り上げ、前記半導体チップを実装する対象物を支持する第2のステージへ、前記半導体チップを移送し、
前記対象物に前記半導体チップを載置することを含み、
前記第1のステージ及び前記第2のステージの少なくとも一方において、前記半導体チップからの弾性波を検出し、
前記弾性波の検出結果に応じて、前記半導体チップにおけるクラックの発生を判定することを特徴とする半導体製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2014045032A JP6211955B2 (ja) | 2014-03-07 | 2014-03-07 | 半導体製造装置及び半導体製造方法 |
CN201410409333.XA CN104900562B (zh) | 2014-03-07 | 2014-08-19 | 半导体制造装置及半导体制造方法 |
TW103129077A TWI596684B (zh) | 2014-03-07 | 2014-08-22 | 半導體製造裝置及半導體製造方法 |
US14/475,726 US9240388B2 (en) | 2014-03-07 | 2014-09-03 | Semiconductor manufacturing device and semiconductor manufacturing method |
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JP2014045032A JP6211955B2 (ja) | 2014-03-07 | 2014-03-07 | 半導体製造装置及び半導体製造方法 |
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JP2015170746A true JP2015170746A (ja) | 2015-09-28 |
JP6211955B2 JP6211955B2 (ja) | 2017-10-11 |
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US (1) | US9240388B2 (ja) |
JP (1) | JP6211955B2 (ja) |
CN (1) | CN104900562B (ja) |
TW (1) | TWI596684B (ja) |
Cited By (1)
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US10157760B2 (en) | 2016-05-23 | 2018-12-18 | J-Devices Corporation | Semiconductor manufacturing apparatus having a pickup unit simultaneously picking up a plurality of semiconductor chips |
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US9136243B2 (en) * | 2013-12-03 | 2015-09-15 | Kulicke And Soffa Industries, Inc. | Systems and methods for determining and adjusting a level of parallelism related to bonding of semiconductor elements |
CN105945481B (zh) * | 2016-06-08 | 2017-11-21 | 广东科杰机械自动化有限公司 | 一种半导体的自动生产方法 |
JP6653273B2 (ja) * | 2017-01-26 | 2020-02-26 | ファスフォードテクノロジ株式会社 | 半導体製造装置および半導体装置の製造方法 |
JP7326861B2 (ja) * | 2019-05-17 | 2023-08-16 | 三菱電機株式会社 | 半導体製造装置及び半導体装置の製造方法 |
KR102635493B1 (ko) * | 2020-11-04 | 2024-02-07 | 세메스 주식회사 | 본딩 설비에서 다이를 이송하기 위한 장치 및 방법 |
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TW201535554A (zh) | 2015-09-16 |
CN104900562A (zh) | 2015-09-09 |
CN104900562B (zh) | 2018-02-06 |
US20150255421A1 (en) | 2015-09-10 |
TWI596684B (zh) | 2017-08-21 |
JP6211955B2 (ja) | 2017-10-11 |
US9240388B2 (en) | 2016-01-19 |
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