JP2014194980A - 積層型電子部品及びその製造方法 - Google Patents
積層型電子部品及びその製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 239000004020 conductor Substances 0.000 claims abstract description 45
- 238000007747 plating Methods 0.000 claims abstract description 25
- 239000012212 insulator Substances 0.000 claims abstract description 10
- 238000000206 photolithography Methods 0.000 claims abstract description 6
- 238000010030 laminating Methods 0.000 claims abstract description 3
- 239000002243 precursor Substances 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 238000005245 sintering Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 239000002585 base Substances 0.000 description 27
- 238000000034 method Methods 0.000 description 18
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 238000010304 firing Methods 0.000 description 4
- 238000003475 lamination Methods 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 229910000859 α-Fe Inorganic materials 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910018605 Ni—Zn Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 235000001674 Agaricus brunnescens Nutrition 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F17/0013—Printed inductances with stacked layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/042—Printed circuit coils by thin film techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/043—Printed circuit coils by thick film techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/12—Insulating of windings
- H01F41/122—Insulating between turns or between winding layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/12—Insulating of windings
- H01F41/125—Other insulating structures; Insulating between coil and core, between different winding sections, around the coil
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1283—After-treatment of the printed patterns, e.g. sintering or curing methods
- H05K3/1291—Firing or sintering at relative high temperatures for patterns on inorganic boards, e.g. co-firing of circuits on green ceramic sheets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F2017/0093—Common mode choke coil
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1002—Methods of surface bonding and/or assembly therefor with permanent bending or reshaping or surface deformation of self sustaining lamina
- Y10T156/1039—Surface deformation only of sandwich or lamina [e.g., embossed panels]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/4906—Providing winding
- Y10T29/49064—Providing winding by coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
- Coils Or Transformers For Communication (AREA)
- Coils Of Transformers For General Uses (AREA)
Abstract
【解決手段】導電性のベース板51上にレジスト膜61を形成し、フォトリソグラフィによりレジスト膜61に所定パターンの開口を形成し、レジスト膜61の高さよりも低くめっきにより開口内に導体を充填して導体パターン71を形成し、レジスト膜61を除去し、導体パターン71をベース板51から絶縁シートへと転写し、転写後の絶縁シートを積層して加熱することにより絶縁シートから絶縁体層を得て導体パターン71から内部電極を得る、積層型電子部品の製造方法。
【選択図】図1
Description
本発明は、複数の絶縁体層からなる積層体とその層間に形成された内部電極とを有する積層型電子部品の製造方法に係る。本発明の製造方法は、導電性のベース板上にレジスト膜を形成する工程、フォトリソグラフィにより前記レジスト膜に所定パターンの開口を形成する工程、前記開口内に前記開口を形作るレジスト膜の高さよりも低くめっきにより導体を充填して導体パターンを形成する工程、前記レジスト膜を除去する工程、前記絶縁体層の前駆体である絶縁シートと前記導体パターンとを押し当てることにより前記導体パターンを前記絶縁シートに転写する工程、および、転写後の絶縁シートを積層することにより絶縁シートから絶縁体層を得て導体パターンから内部電極を得る工程、を有する。
好適には、前記所定パターンの開口の幅がベース板から遠ざかるにつれて連続的又は段階的に広くなるように開口が形成され、別途好ましくは、所定パターンの開口の長さ方向の断面が前記ベース板から遠ざかるにつれて幅広になる略台形状になるように前記開口を形成される。
内部電極の形状は特に限定は無く、例えばコイルを構成してもよい。上述の積層の工程により得られる積層体を加熱して絶縁シートから焼結体を得ることにより絶縁体層を構成してもよい。
さらに、上述の製造方法により製造された積層型電子部品もまた本発明に属する。
1a、1b、2a、2b:内部電極
3a、2b:スルーホール
2、3:磁性層
51、56:ベース板
61、66:レジスト膜
71、72、73、76:導体パターン
Claims (6)
- 複数の絶縁体層からなる積層体とその層間に形成された内部電極とを有する積層型電子部品の製造方法であって、
導電性のベース板上にレジスト膜を形成する工程、フォトリソグラフィにより前記レジスト膜に所定パターンの開口を形成する工程、前記開口内に前記開口を形作るレジスト膜の高さよりも低くめっきにより導体を充填して導体パターンを形成する工程、前記レジスト膜を除去する工程、前記絶縁体層の前駆体である絶縁シートと前記導体パターンとを押し当てることにより前記導体パターンを前記絶縁シートに転写する工程、および、転写後の絶縁シートを積層する工程、を有する前記製造方法。 - 前記所定パターンの開口の幅が前記ベース板から遠ざかるにつれて連続的又は段階的に広くなるように前記開口を形成する請求項1記載の製造方法。
- 前記所定パターンの開口の長さ方向の断面が前記ベース板から遠ざかるにつれて幅広になる略台形状になるように前記開口を形成する請求項1記載の製造方法。
- 前記内部電極がコイルを構成する請求項1〜3のいずれか1項記載の製造方法。
- 前記絶縁体層が前記絶縁シートを焼結させてなる焼結体で構成される請求項1〜4のいずれか1項記載の製造方法。
- 請求項1〜5のいずれか1項記載の製造方法により製造された積層型電子部品。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2013070217A JP2014194980A (ja) | 2013-03-28 | 2013-03-28 | 積層型電子部品及びその製造方法 |
US14/159,239 US9466422B2 (en) | 2013-03-28 | 2014-01-20 | Method of manufacturing a laminated electronic component |
PH12014000075A PH12014000075B1 (en) | 2013-03-28 | 2014-02-26 | Laminated electronic component and manufacturing method for the same |
Applications Claiming Priority (1)
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JP2013070217A JP2014194980A (ja) | 2013-03-28 | 2013-03-28 | 積層型電子部品及びその製造方法 |
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JP2014194980A true JP2014194980A (ja) | 2014-10-09 |
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JP2013070217A Pending JP2014194980A (ja) | 2013-03-28 | 2013-03-28 | 積層型電子部品及びその製造方法 |
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US (1) | US9466422B2 (ja) |
JP (1) | JP2014194980A (ja) |
PH (1) | PH12014000075B1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2016139784A (ja) * | 2015-01-27 | 2016-08-04 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | コイル部品 |
JP2016225463A (ja) * | 2015-05-29 | 2016-12-28 | Tdk株式会社 | コイル部品 |
JP2017017139A (ja) * | 2015-06-30 | 2017-01-19 | Tdk株式会社 | コイル部品 |
CN109243760A (zh) * | 2017-07-10 | 2019-01-18 | 株式会社村田制作所 | 线圈部件 |
JP2019057581A (ja) * | 2017-09-20 | 2019-04-11 | 株式会社村田製作所 | インダクタ部品およびその製造方法 |
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JP6405742B2 (ja) * | 2014-06-26 | 2018-10-17 | 富士通株式会社 | コイル部品、及びコイル部品の製造方法 |
JP6515353B2 (ja) * | 2014-11-18 | 2019-05-22 | パナソニックIpマネジメント株式会社 | コモンモードノイズフィルタ |
JP6500635B2 (ja) * | 2015-06-24 | 2019-04-17 | 株式会社村田製作所 | コイル部品の製造方法およびコイル部品 |
KR102163415B1 (ko) * | 2015-08-24 | 2020-10-08 | 삼성전기주식회사 | 코일 부품 및 그 제조방법 |
CN209168856U (zh) * | 2016-07-15 | 2019-07-26 | 株式会社村田制作所 | 高频变压器以及移相器 |
CN107872098A (zh) * | 2016-09-23 | 2018-04-03 | 苹果公司 | 无线充电垫中的多层发射器线圈布置的互连 |
US20180090999A1 (en) | 2016-09-23 | 2018-03-29 | Apple Inc. | Wireless charging mat with multiple coil arrangements optimized for different devices |
US10755847B2 (en) * | 2017-03-07 | 2020-08-25 | Samsung Electro-Mechanics Co., Ltd. | Coil electronic component |
EP3385964B1 (en) * | 2017-04-03 | 2019-10-02 | Ningbo Geely Automobile Research & Development Co. Ltd. | A device for a wireless power transfer system |
JP2019029626A (ja) * | 2017-08-03 | 2019-02-21 | 太陽誘電株式会社 | コイル部品及びコイル部品の製造方法 |
KR101983192B1 (ko) | 2017-09-15 | 2019-05-28 | 삼성전기주식회사 | 코일 전자부품 |
JP7223525B2 (ja) * | 2018-08-09 | 2023-02-16 | 新光電気工業株式会社 | インダクタ及びインダクタの製造方法 |
JP7449660B2 (ja) * | 2019-09-06 | 2024-03-14 | 株式会社村田製作所 | インダクタ部品 |
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JP2016139784A (ja) * | 2015-01-27 | 2016-08-04 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | コイル部品 |
JP2016225463A (ja) * | 2015-05-29 | 2016-12-28 | Tdk株式会社 | コイル部品 |
JP2017017139A (ja) * | 2015-06-30 | 2017-01-19 | Tdk株式会社 | コイル部品 |
CN109243760A (zh) * | 2017-07-10 | 2019-01-18 | 株式会社村田制作所 | 线圈部件 |
JP2019016726A (ja) * | 2017-07-10 | 2019-01-31 | 株式会社村田製作所 | コイル部品 |
JP2019057581A (ja) * | 2017-09-20 | 2019-04-11 | 株式会社村田製作所 | インダクタ部品およびその製造方法 |
Also Published As
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US20140292468A1 (en) | 2014-10-02 |
PH12014000075A1 (en) | 2015-10-12 |
US9466422B2 (en) | 2016-10-11 |
PH12014000075B1 (en) | 2015-10-12 |
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