JP2014086515A5 - - Google Patents
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- Publication number
- JP2014086515A5 JP2014086515A5 JP2012233301A JP2012233301A JP2014086515A5 JP 2014086515 A5 JP2014086515 A5 JP 2014086515A5 JP 2012233301 A JP2012233301 A JP 2012233301A JP 2012233301 A JP2012233301 A JP 2012233301A JP 2014086515 A5 JP2014086515 A5 JP 2014086515A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- manufacturing
- forming
- etching
- contact plug
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims 45
- 230000000903 blocking effect Effects 0.000 claims 21
- 238000004519 manufacturing process Methods 0.000 claims 16
- 238000005530 etching Methods 0.000 claims 15
- 239000011229 interlayer Substances 0.000 claims 12
- 238000003384 imaging method Methods 0.000 claims 11
- 239000004065 semiconductor Substances 0.000 claims 11
- 239000000758 substrate Substances 0.000 claims 11
- 238000006243 chemical reaction Methods 0.000 claims 8
- 238000000034 method Methods 0.000 claims 4
- 238000002955 isolation Methods 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical class O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012233301A JP2014086515A (ja) | 2012-10-22 | 2012-10-22 | 撮像装置、その製造方法及びカメラ |
| US14/049,409 US9659991B2 (en) | 2012-10-22 | 2013-10-09 | Image capturing apparatus, manufacturing method thereof, and camera |
| CN201310496053.2A CN103779369B (zh) | 2012-10-22 | 2013-10-22 | 摄像装置、其制造方法和照相机 |
| US15/442,940 US10361231B2 (en) | 2012-10-22 | 2017-02-27 | Image capturing apparatus, manufacturing method thereof, and camera |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012233301A JP2014086515A (ja) | 2012-10-22 | 2012-10-22 | 撮像装置、その製造方法及びカメラ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014086515A JP2014086515A (ja) | 2014-05-12 |
| JP2014086515A5 true JP2014086515A5 (enExample) | 2015-12-03 |
Family
ID=50789316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012233301A Pending JP2014086515A (ja) | 2012-10-22 | 2012-10-22 | 撮像装置、その製造方法及びカメラ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2014086515A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020031074A (ja) * | 2016-12-20 | 2020-02-27 | パナソニックＩｐマネジメント株式会社 | 固体撮像装置およびその製造方法 |
| EP3905330A4 (en) * | 2018-12-27 | 2022-03-30 | Sony Semiconductor Solutions Corporation | IMAGING ELEMENT AND METHOD OF MAKING AN IMAGING ELEMENT |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09129730A (ja) * | 1995-11-02 | 1997-05-16 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
| US6989602B1 (en) * | 2000-09-21 | 2006-01-24 | Agere Systems Inc. | Dual damascene process with no passing metal features |
| JP2006190766A (ja) * | 2005-01-05 | 2006-07-20 | Sony Corp | 固体撮像素子 |
| JP4972924B2 (ja) * | 2005-12-19 | 2012-07-11 | ソニー株式会社 | 固体撮像装置およびその製造方法、並びにカメラ |
| JP5110820B2 (ja) * | 2006-08-02 | 2012-12-26 | キヤノン株式会社 | 光電変換装置、光電変換装置の製造方法及び撮像システム |
| JP4525671B2 (ja) * | 2006-12-08 | 2010-08-18 | ソニー株式会社 | 固体撮像装置 |
| JP2008235689A (ja) * | 2007-03-22 | 2008-10-02 | Sharp Corp | 固体撮像素子およびその製造方法、電子情報機器 |
| JP5305623B2 (ja) * | 2007-07-20 | 2013-10-02 | キヤノン株式会社 | 光電変換装置及び光電変換装置を用いた撮像システム |
| KR101550866B1 (ko) * | 2009-02-09 | 2015-09-08 | 삼성전자주식회사 | 광학적 크로스토크를 개선하기 위하여, 절연막의 트렌치 상부만을 갭필하여 에어 갭을 형성하는 이미지 센서의 제조방법 |
| JP2011124501A (ja) * | 2009-12-14 | 2011-06-23 | Sharp Corp | 固体撮像装置およびその製造方法 |
| JP2012182426A (ja) * | 2011-02-09 | 2012-09-20 | Canon Inc | 固体撮像装置、固体撮像装置を用いた撮像システム及び固体撮像装置の製造方法 |
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2012
- 2012-10-22 JP JP2012233301A patent/JP2014086515A/ja active Pending