JP2015115420A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2015115420A5 JP2015115420A5 JP2013255423A JP2013255423A JP2015115420A5 JP 2015115420 A5 JP2015115420 A5 JP 2015115420A5 JP 2013255423 A JP2013255423 A JP 2013255423A JP 2013255423 A JP2013255423 A JP 2013255423A JP 2015115420 A5 JP2015115420 A5 JP 2015115420A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- wiring layer
- substrates
- semiconductor layer
- imaging device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 69
- 239000004065 semiconductor Substances 0.000 claims description 26
- 238000003384 imaging method Methods 0.000 claims description 13
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013255423A JP6177117B2 (ja) | 2013-12-10 | 2013-12-10 | 固体撮像装置、撮像装置、固体撮像装置の製造方法 |
| PCT/JP2014/082696 WO2015087918A1 (ja) | 2013-12-10 | 2014-12-10 | 固体撮像装置、撮像装置、固体撮像装置の製造方法 |
| US15/149,955 US20160254299A1 (en) | 2013-12-10 | 2016-05-09 | Solid-state imaging device, imaging device, solid-state imaging device manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013255423A JP6177117B2 (ja) | 2013-12-10 | 2013-12-10 | 固体撮像装置、撮像装置、固体撮像装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015115420A JP2015115420A (ja) | 2015-06-22 |
| JP2015115420A5 true JP2015115420A5 (enExample) | 2017-01-12 |
| JP6177117B2 JP6177117B2 (ja) | 2017-08-09 |
Family
ID=53371219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013255423A Expired - Fee Related JP6177117B2 (ja) | 2013-12-10 | 2013-12-10 | 固体撮像装置、撮像装置、固体撮像装置の製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20160254299A1 (enExample) |
| JP (1) | JP6177117B2 (enExample) |
| WO (1) | WO2015087918A1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112017002162T5 (de) * | 2016-04-25 | 2019-01-10 | Olympus Corporation | Bildgebungselement, endoskop und endoskopsystem |
| JP2018081946A (ja) * | 2016-11-14 | 2018-05-24 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像装置およびその製造方法、並びに電子機器 |
| WO2018154644A1 (ja) * | 2017-02-22 | 2018-08-30 | オリンパス株式会社 | 固体撮像装置、蛍光観察内視鏡装置、および固体撮像装置の製造方法 |
| JP6779825B2 (ja) | 2017-03-30 | 2020-11-04 | キヤノン株式会社 | 半導体装置および機器 |
| WO2018180576A1 (ja) * | 2017-03-31 | 2018-10-04 | ソニーセミコンダクタソリューションズ株式会社 | 半導体装置、固体撮像装置、および電子機器 |
| US11101313B2 (en) * | 2017-04-04 | 2021-08-24 | Sony Semiconductor Solutions Corporation | Solid-state imaging device and electronic apparatus |
| WO2018186196A1 (ja) * | 2017-04-04 | 2018-10-11 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像装置、及び電子機器 |
| CN110494962B (zh) * | 2017-04-04 | 2024-01-12 | 索尼半导体解决方案公司 | 半导体器件、制造半导体器件的方法和电子设备 |
| US11031431B2 (en) * | 2017-04-04 | 2021-06-08 | Sony Semiconductor Solutions Corporation | Semiconductor device, method of manufacturing semiconductor device, and electronic apparatus |
| US11276676B2 (en) * | 2018-05-15 | 2022-03-15 | Invensas Bonding Technologies, Inc. | Stacked devices and methods of fabrication |
| WO2020010265A1 (en) | 2018-07-06 | 2020-01-09 | Invensas Bonding Technologies, Inc. | Microelectronic assemblies |
| US12027557B2 (en) * | 2018-10-16 | 2024-07-02 | Sony Semiconductor Solutions Corporation | Semiconductor element and method of manufacturing the same |
| JP2022040579A (ja) * | 2020-08-31 | 2022-03-11 | ソニーセミコンダクタソリューションズ株式会社 | 半導体装置、および、半導体装置の製造方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05267394A (ja) * | 1992-03-19 | 1993-10-15 | Sumitomo Electric Ind Ltd | 半導体素子の実装方法 |
| JP3713418B2 (ja) * | 2000-05-30 | 2005-11-09 | 光正 小柳 | 3次元画像処理装置の製造方法 |
| US7214999B2 (en) * | 2003-10-31 | 2007-05-08 | Motorola, Inc. | Integrated photoserver for CMOS imagers |
| JP2007228460A (ja) * | 2006-02-27 | 2007-09-06 | Mitsumasa Koyanagi | 集積センサを搭載した積層型半導体装置 |
| US8471939B2 (en) * | 2008-08-01 | 2013-06-25 | Omnivision Technologies, Inc. | Image sensor having multiple sensing layers |
| JP2011249562A (ja) * | 2010-05-27 | 2011-12-08 | Panasonic Corp | 半導体装置及びその製造方法 |
| JP2012033894A (ja) * | 2010-06-30 | 2012-02-16 | Canon Inc | 固体撮像装置 |
| JP5561190B2 (ja) * | 2011-01-31 | 2014-07-30 | 富士通株式会社 | 半導体装置、半導体装置の製造方法及び電子装置 |
| US20130075607A1 (en) * | 2011-09-22 | 2013-03-28 | Manoj Bikumandla | Image sensors having stacked photodetector arrays |
| TWI577001B (zh) * | 2011-10-04 | 2017-04-01 | Sony Corp | 固體攝像裝置、固體攝像裝置之製造方法及電子機器 |
| JP2013187475A (ja) * | 2012-03-09 | 2013-09-19 | Olympus Corp | 固体撮像装置およびカメラシステム |
-
2013
- 2013-12-10 JP JP2013255423A patent/JP6177117B2/ja not_active Expired - Fee Related
-
2014
- 2014-12-10 WO PCT/JP2014/082696 patent/WO2015087918A1/ja not_active Ceased
-
2016
- 2016-05-09 US US15/149,955 patent/US20160254299A1/en not_active Abandoned
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2015115420A5 (enExample) | ||
| JP2013033786A5 (ja) | 半導体装置、半導体装置の製造方法、および電子機器 | |
| JP2014022561A5 (enExample) | ||
| JP2013080838A5 (enExample) | ||
| JP2015135938A5 (enExample) | ||
| JP2014099582A5 (enExample) | ||
| JP2017076683A5 (enExample) | ||
| JP2013175494A5 (enExample) | ||
| JP2011171739A5 (enExample) | ||
| JP2011091400A5 (ja) | イメージセンサ | |
| TWI456746B (zh) | 固態成像器件,其製造方法,電子裝置以及半導體器件 | |
| JP2012209542A5 (enExample) | ||
| JP2013089880A5 (enExample) | ||
| JP2009176777A5 (enExample) | ||
| JP2018088488A5 (enExample) | ||
| JP2015029047A5 (enExample) | ||
| JP2014060203A5 (ja) | 固体撮像装置及び電子機器 | |
| JP2012238610A5 (enExample) | ||
| TW200943542A (en) | Solid-state imaging device and method for manufacturing the same | |
| JP2014515560A5 (enExample) | ||
| JP2009206504A5 (enExample) | ||
| JP2014107448A5 (enExample) | ||
| JP2013182941A5 (enExample) | ||
| JP2009283902A5 (enExample) | ||
| JP2017028078A5 (enExample) |