JP2014086514A5 - - Google Patents
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- Publication number
- JP2014086514A5 JP2014086514A5 JP2012233300A JP2012233300A JP2014086514A5 JP 2014086514 A5 JP2014086514 A5 JP 2014086514A5 JP 2012233300 A JP2012233300 A JP 2012233300A JP 2012233300 A JP2012233300 A JP 2012233300A JP 2014086514 A5 JP2014086514 A5 JP 2014086514A5
- Authority
- JP
- Japan
- Prior art keywords
- opening
- manufacturing
- interlayer insulating
- insulating layer
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims 14
- 238000004519 manufacturing process Methods 0.000 claims 13
- 230000000903 blocking effect Effects 0.000 claims 12
- 239000011229 interlayer Substances 0.000 claims 10
- 239000004065 semiconductor Substances 0.000 claims 8
- 239000000758 substrate Substances 0.000 claims 8
- 238000005530 etching Methods 0.000 claims 7
- 238000003384 imaging method Methods 0.000 claims 6
- 238000006243 chemical reaction Methods 0.000 claims 5
- 238000000034 method Methods 0.000 claims 3
- 238000002955 isolation Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012233300A JP2014086514A (ja) | 2012-10-22 | 2012-10-22 | 撮像装置、その製造方法及びカメラ |
| US14/049,409 US9659991B2 (en) | 2012-10-22 | 2013-10-09 | Image capturing apparatus, manufacturing method thereof, and camera |
| CN201310496053.2A CN103779369B (zh) | 2012-10-22 | 2013-10-22 | 摄像装置、其制造方法和照相机 |
| US15/442,940 US10361231B2 (en) | 2012-10-22 | 2017-02-27 | Image capturing apparatus, manufacturing method thereof, and camera |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012233300A JP2014086514A (ja) | 2012-10-22 | 2012-10-22 | 撮像装置、その製造方法及びカメラ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014086514A JP2014086514A (ja) | 2014-05-12 |
| JP2014086514A5 true JP2014086514A5 (enExample) | 2015-12-03 |
Family
ID=50789315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012233300A Pending JP2014086514A (ja) | 2012-10-22 | 2012-10-22 | 撮像装置、その製造方法及びカメラ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2014086514A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6789653B2 (ja) * | 2016-03-31 | 2020-11-25 | キヤノン株式会社 | 光電変換装置およびカメラ |
| US11127772B2 (en) * | 2017-03-24 | 2021-09-21 | Sony Semiconductor Solutions Corporation | Sensor chip and electronic apparatus |
| WO2021085172A1 (ja) * | 2019-10-30 | 2021-05-06 | ソニーセミコンダクタソリューションズ株式会社 | 受光素子、測距モジュール、および、電子機器 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02264473A (ja) * | 1989-04-04 | 1990-10-29 | Mitsubishi Electric Corp | 固体撮像素子 |
| JPH03257868A (ja) * | 1990-03-07 | 1991-11-18 | Mitsubishi Electric Corp | 赤外線イメージセンサ |
| JPH0766178A (ja) * | 1993-08-27 | 1995-03-10 | Fujitsu Ltd | 半導体装置の製造方法 |
| US6989602B1 (en) * | 2000-09-21 | 2006-01-24 | Agere Systems Inc. | Dual damascene process with no passing metal features |
| KR100649013B1 (ko) * | 2004-12-30 | 2006-11-27 | 동부일렉트로닉스 주식회사 | 베리어를 이용한 집광장치 및 그 제조방법 |
| US7265328B2 (en) * | 2005-08-22 | 2007-09-04 | Micron Technology, Inc. | Method and apparatus providing an optical guide for an imager pixel having a ring of air-filled spaced slots around a photosensor |
| JP4525671B2 (ja) * | 2006-12-08 | 2010-08-18 | ソニー株式会社 | 固体撮像装置 |
| JP2008235689A (ja) * | 2007-03-22 | 2008-10-02 | Sharp Corp | 固体撮像素子およびその製造方法、電子情報機器 |
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2012
- 2012-10-22 JP JP2012233300A patent/JP2014086514A/ja active Pending