JP2013533508A - ポジティブ型感光性樹脂組成物およびこれを含む有機発光素子ブラックバンク - Google Patents
ポジティブ型感光性樹脂組成物およびこれを含む有機発光素子ブラックバンク Download PDFInfo
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- JP2013533508A JP2013533508A JP2013518286A JP2013518286A JP2013533508A JP 2013533508 A JP2013533508 A JP 2013533508A JP 2013518286 A JP2013518286 A JP 2013518286A JP 2013518286 A JP2013518286 A JP 2013518286A JP 2013533508 A JP2013533508 A JP 2013533508A
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- photosensitive resin
- positive photosensitive
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- organic light
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- 125000000962 organic group Chemical group 0.000 claims description 16
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- 239000000126 substance Substances 0.000 claims description 14
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- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
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- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 2
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- 239000004115 Sodium Silicate Substances 0.000 description 2
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- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 2
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
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- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
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Abstract
Description
1)下記の化学式1で表示されるポリイミド系樹脂、
2)光活性化合物(photoactive compound、PAC)または光酸発生剤(photoacid generator、PAG)、
3)顔料または染料、および
4)有機溶媒
を含むポジティブ型感光性樹脂組成物を提供する。
Zは、それぞれ独立に、酸無水物またはその誘導体から誘導される4価の有機基であり、
Y1およびY2は、それぞれ独立に、ジアミンまたはその誘導体から誘導される2価の有機基であり、
aおよびbは、それぞれ独立に、2〜500である。
また、本発明は前記感光性樹脂組成物を含む有機発光素子ブラックバンクを提供する。
1)前記感光性樹脂組成物を基板上に塗布する段階、
2)前記塗布された感光性樹脂組成物を露光および現像してパターニングする段階、および
3)前記パターニングされた感光性樹脂組成物を硬化させる段階
を含む有機発光素子ブラックバンクの製造方法を提供する。
また、本発明は前記感光性樹脂組成物を含む有機発光素子を提供する。
本発明によるポジティブ型(positive type)感光性樹脂組成物は、1)前記化学式1で表示されるポリイミド系樹脂、2)光活性化合物(photoactive compound、PAC)または光酸発生剤(photoacid generator、PAG)、3)顔料または染料、および4)有機溶媒を含む。
Zは、それぞれ独立に、酸無水物またはその誘導体から誘導される4価の有機基であり、
Y1およびY2は、それぞれ独立に、ジアミンまたはその誘導体から誘導される2価の有機基であり、
aおよびbは、それぞれ独立に、2〜500である。
本発明による感光性樹脂組成物において、1)のポリイミド系樹脂の含有量は感光性樹脂組成物の総重量を基準として、1〜30重量%であることが好ましい。
100mLの丸底フラスコに2、2−ビス(3−アミノ−4−ヒドロキシフェニル)ヘキサフルオロプロパン11.0gとγ−ブチロラクトン40gとを順次投入し、ゆっくり攪拌して完全に溶解させた後、前記フラスコを水重湯して室温に維持しながら、ブタン−1、2、3、4−テトラカルボン酸二無水物5.9gをゆっくり添加した。前記混合溶液を16時間室温で攪拌した後、7gのトルエンを入れ、ディーン−スターク蒸留装置(dean−stark distillation)を装着することにより水を除去できるようにした後、140℃で3時間還流させた。この溶液を室温に冷却し、メタノール:水=1:4混合液にゆっくり注いで固形化した後、40℃の真空乾燥オーブンで1日間乾燥させて、14gのポリイミド樹脂を得た。
前記合成例1で合成した溶解性ポリイミド1.6gに、光活性化合物としてジアゾナフトキノンエステル化合物(TPPA 320:OD/(OD+OH)=2/3の比率によりOHおよびODのうち選択的に与えられる。)0.5g、アゾ系黒色染料0.4g、溶媒γ−ブチロラクトン(GBL)7gを加えて室温で1時間攪拌した後、これを細孔の大きさ1μmのフィルターでろ過して感光性樹脂組成物を製造した。
前記合成例1で合成した溶解性ポリイミド1.6gに、光活性化合物としてジアゾナフトキノンエステル化合物(TPPA 320:OD/(OD+OH)=2/3の比率によりOHおよびODのうち選択的に与えられる。)0.5g、カーボンブラック顔料0.5g、溶媒γ−ブチロラクトン(GBL)7gを加えて室温で1時間攪拌した後、これを細孔の大きさ1μmのフィルターでろ過して感光性樹脂組成物を製造した。
前記合成例1で合成した溶解性ポリイミド1.6gに、光活性化合物としてジアゾナフトキノンエステル化合物(TPPA 320:OD/(OD+OH)=2/3の比率によりOHおよびODのうち選択的に与えられる。)0.5g、溶媒γ−ブチロラクトン(GBL)5gを加えて室温で1時間攪拌した後、これを細孔の大きさ1μmのフィルターでろ過して感光性樹脂組成物を製造した。
1)感光性の評価
4インチシリコンウエハーに、前記実施例1〜2および比較例1で製造された感光性樹脂組成物をスピンコーティングし、ホットプレート上で120℃にて2分間加熱して、1.3μm厚さの感光性フィルムを形成させた。フォトマスクに前記前熱処理が完了したシリコンウエハーを真空密着させた後、G−lineステッパーNikon NSR1505 G4によって20mJ/cm2から5mJ/cm2の間隔で700mJ/cm2まで順に露光させた。2.38wt%水酸化テトラメチルアンモニウム水溶液中で23℃にて80秒間現像した後、超純水で60秒間洗浄および乾燥して非露光部が鮮明に残っているパターンを得た。このようにパターン化されたシリコンウエハーを、窒素雰囲気下、ホットプレート上で室温から始まって250℃になるまで約60分間徐々に加熱し、次いで250℃で30分間維持して熱処理した。
20 発光層
30 アノード
40 パッシベーション層(平坦化層)
50 SiO2バリア(barrier)
60 ポリシリコン
70 ゲート(gate)
80 GI(SiO2)
90 ILD(SiO2)
100 ソース/ドレイン
110 無機オーバーコート層
120 ブラックマトリックス
130 有機絶縁層(バンク層)
Claims (19)
- 前記化学式1のY1は、水酸基、フェノール性水酸基またはカルボキシル基を含む2価の有機基であり、Y2は、2価の脂肪族または芳香族有機基であることを特徴とする、請求項1に記載のポジティブ型感光性樹脂組成物。
- 前記化学式1のZは、それぞれ独立に、テトラカルボン酸二無水物またはその誘導体から誘導される4価の有機基であることを特徴とする、請求項1〜3のいずれか1項に記載のポジティブ型感光性樹脂組成物。
- 前記1)ポリイミド系樹脂のi−線透過度は70%以上であることを特徴とする、請求項1〜4のいずれか1項に記載のポジティブ型感光性樹脂組成物。
- 前記1)ポリイミド系樹脂の重量平均分子量は1、000〜100、000であり、ガラス転移温度は150〜400℃であることを特徴とする、請求項1〜5のいずれか1項に記載のポジティブ型感光性樹脂組成物。
- 前記光活性化合物はジアゾナフトキノン(diazonaphthoquinone、DNQ)系の化合物を含むことを特徴とする、請求項1〜6のいずれか1項に記載のポジティブ型感光性樹脂組成物。
- 前記光酸発生剤(photoacid generator、PAG)は、トリアリールスルホニウム塩(triarylsulfonium salts)、ジアリールヨードニウム塩(diaryliodonium salts)、スルホネート(sulfonates)、スルホニウム塩およびヨードニウム塩からなる群から選択される1種以上を含むことを特徴とする、請求項1〜8のいずれか1項に記載のポジティブ型感光性樹脂組成物。
- 前記顔料は、カーボンブラック単独、または、カーボンブラックおよび着色顔料の2種類以上の混合物を含むことを特徴とする、請求項1〜9のいずれか1項に記載のポジティブ型感光性樹脂組成物。
- 前記染料は、黒色染料単独、または2種以上の互いに異なる色の染料の混合物を含むことを特徴とする、請求項1〜10のいずれか1項に記載のポジティブ型感光性樹脂組成物。
- 前記感光性樹脂組成物の総重量を基準として、1)のポリイミド系樹脂の含有量は1〜30重量%であり、2)の光活性化合物(photoactive compound、PAC)または光酸発生剤(photoacid generator、PAG)の含有量は0.5〜30重量%であり、3)の顔料または染料の含有量は2〜30重量%であり、かつ、4)の有機溶媒の含有量は50〜97重量%であることを特徴とする、請求項1〜11のいずれか1項に記載のポジティブ型感光性樹脂組成物。
- 前記感光性樹脂組成物は、溶解速度調節剤、増感剤、接着力増強剤および界面活性剤からなる群から選択される添加剤を1種以上さらに含むことを特徴とする、請求項1〜12のいずれか1項に記載のポジティブ型感光性樹脂組成物。
- 前記添加剤の含有量は、感光性樹脂組成物の総重量を基準として0.1〜10重量%であることを特徴とする、請求項13に記載のポジティブ型感光性樹脂組成物。
- 前記感光性樹脂組成物は、有機発光素子ブラックバンク製造用であることを特徴とする、請求項1〜14のいずれか1項に記載のポジティブ型感光性樹脂組成物。
- 1)請求項1〜15のいずれか1項に記載の感光性樹脂組成物を基板上に塗布する段階、
2)前記塗布された感光性樹脂組成物を露光および現像してパターニングする段階、および
3)パターニングされた感光性樹脂組成物を硬化させる段階
を含むことを特徴とする、有機発光素子ブラックバンクの製造方法。 - 請求項1〜15のいずれか1項に記載のポジティブ型感光性樹脂組成物を含むことを特徴とする、有機発光素子ブラックバンク。
- 前記有機発光素子ブラックバンクのテーパーアングル(taper angle)は、50度以下であることを特徴とする、請求項17に記載の有機発光素子ブラックバンク。
- 請求項1〜15のいずれか1項に記載のポジティブ型感光性樹脂組成物を含むことを特徴とする、有機発光素子。
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JP7171845B2 (ja) | 2017-04-07 | 2022-11-15 | 昭和電工株式会社 | 樹脂組成物 |
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Also Published As
Publication number | Publication date |
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KR101295464B1 (ko) | 2013-08-09 |
US8993209B2 (en) | 2015-03-31 |
KR20120007453A (ko) | 2012-01-20 |
TW201217908A (en) | 2012-05-01 |
US20130189623A1 (en) | 2013-07-25 |
WO2012008736A2 (ko) | 2012-01-19 |
CN102985876A (zh) | 2013-03-20 |
WO2012008736A3 (ko) | 2012-05-03 |
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