JP2013529368A - 透過型電子顕微鏡用二軸傾斜のインサイチュ強度、電気的特性の総合試験試料ホルダー - Google Patents
透過型電子顕微鏡用二軸傾斜のインサイチュ強度、電気的特性の総合試験試料ホルダー Download PDFInfo
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
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- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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Abstract
Description
2 試料ホルダー
3 試料ホルダーの先端
4 センサー載台
5 支持軸
6 導線
7 一列の電極I
8 電極継ぎ口
9 Y軸回転ドライブ
10 凹み
11 センサー
12 試料
13 スルーホールI
14 一列の電極II
15 シート
16 一列の電極III
17 スルーホールII
18 応力かけ部品
19 応力測定部品
20 テスト電極
Claims (4)
- 透過型電子顕微鏡用の二軸傾斜インサイチュー強度・電気特性の総合試験試料ホルダーであって、
前記試料ホルダーは、グリップ(1)、試料ホルダー(2)、試料ホルダーの先端部(3)を備え、センサー載台(4)が前記試料ホルダーの先端部(3)の両内側にある二つの支持軸(5)で前記試料ホルダー先端部(3)上に固定され、導線I(6)が電子顕微鏡の外部から前記試料ホルダー(2)を通って入り、前記試料ホルダーの先端(3)の両側の壁に対称的に分布し、そこにある一列の電極I(7)と繋がっており、前記導線I(6)のもう一方の端は前記グリップ(1)の上の電極継ぎ口(8)に繋がり、該電極継ぎ口(8)を通して電子顕微鏡の外部の設備と繋がっており、前記一列の電極I(7)は支持軸(5)を中心線として前記試料ホルダーの先端(3)の両側の壁に対称的に分布しており、前記センサー載台(4)の回転がその後部にあるY軸の回転ドライブ(9)で駆動され、前記センサー載台(4)の上に前記支持軸(5)を中心線として凹み(10)が一つ形成されており、前記凹み(10)は一つのスルーホールであり、センサー(11)がその下から支持へりで支えられており、前記センサー(11)には厚みがあるため、前記凹み(10)に入れると、上の表面がTEM電子ビーム集束の中心と同じ平面の中にあるようになり、
前記センサー(11)を前記センサー載台(4)の前記凹み(10)に入れてから、シート(15)を前記センサー(11)に乗せると、一列の電極III(16)の中で、シート(15)の下の表面にある電極は前記センサー(11)の上にある一列の電極II(14)と一対一対応で繋がることが、正確な設計で確保され、前記シート(15)を前記センサー載台(4)上に固定すると、一列の電極III(16)の中の、シート(15)の上の表面にある電極は試料ホルダーの先端(3)の両側にある一列の電極I(7)とが導線で一対一対応で繋がり、
前記シート(15)の上にスルーホールII(17)があるため、電子ビームはシートを通して前記センサー(11)の試料(12)の上に集束し、前記センサー(11)の上に一列の前記電極II(14)、応力かけ部品(18)、応力測定部品(19)、テスト電極(20)および研究対象となる試料(12)があり、前記応力かけ部品(18)と前記応力測定部品(19)は前記センサー(11)の上に並列に並び、一列の前記電極II(14)と平行し、二列の前記電極II(14)に挟まれており、前記応力かけ部品(18)と前記応力測定部品(19)の間に電子ビームの通り道としての隙間があり、前記応力かけ部品(18)と前記応力測定部品(19)の上にテスト電極(20)が二つ取り付けられており、前記試料(12)の両端はそれぞれ前記応力かけ部品(18)と前記応力測定部品(19)の上にある前記テスト電極(20)に乗せられ、及び、前記電子ビームの通り道に横たわっており、前記応力かけ部品(18)、前記応力測定部品(19)、前記テスト電極(20)の電気回路のいずれもセンサー(11)の上にある一列の電極III(14)と対応して導線で繋がっており、前記応力測定部品(19)は商業的に成熟しているカンチレバーの技術を用い、カンチレバーの構造は正確に設計されており、さらにカンチレバーの上に精密な応力の信号の測定ができる構造と装置を備えている、
ことを特徴とする、試料ホルダー。 - 前記電極導線(4)はいずれも外部に絶縁層を有する伝導性材料であることを特徴とする、請求項1に記載の試料ホルダー。
- 前記試料ホルダーの先端部(3)、センサー載台(4)及びプレート(15)の表面のいずれにも絶縁体層が分布され、該絶縁体層の材料は二酸化ケイ素、炭化ケイ素、窒化ケイ素または酸化ハフニウムによって構成されていることを特徴とする、請求項1に記載の試料ホルダー。
- 前記電極列I(7)、電極列II(14)、電極列III(16)はRh、Pd、Rh/Au、Ti/Au、W/Pt、Cr/Pt、Ni/Pt、AgまたはCuを含むことを特徴とする、請求項1に記載の試料ホルダー。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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CN201110145305.8 | 2011-05-31 | ||
CN2011101453058A CN102262996B (zh) | 2011-05-31 | 2011-05-31 | 透射电镜用双轴倾转的原位力、电性能综合测试样品杆 |
PCT/CN2011/077033 WO2012162929A1 (zh) | 2011-05-31 | 2011-07-11 | 透射电镜用双轴倾转的原位力、电性能综合测试样品杆 |
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JP2013529368A true JP2013529368A (ja) | 2013-07-18 |
JP5394596B2 JP5394596B2 (ja) | 2014-01-22 |
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JP2013516990A Active JP5394596B2 (ja) | 2011-05-31 | 2011-07-11 | 透過型電子顕微鏡用二軸傾斜のインサイチュ強度、電気的特性の総合試験試料ホルダー |
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US (1) | US8569714B2 (ja) |
JP (1) | JP5394596B2 (ja) |
CN (1) | CN102262996B (ja) |
WO (1) | WO2012162929A1 (ja) |
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