JP2013507003A - 平坦化後の高密度化 - Google Patents
平坦化後の高密度化 Download PDFInfo
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- JP2013507003A JP2013507003A JP2012532201A JP2012532201A JP2013507003A JP 2013507003 A JP2013507003 A JP 2013507003A JP 2012532201 A JP2012532201 A JP 2012532201A JP 2012532201 A JP2012532201 A JP 2012532201A JP 2013507003 A JP2013507003 A JP 2013507003A
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- Mechanical Engineering (AREA)
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- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Formation Of Insulating Films (AREA)
- Element Separation (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
本願は、Jingmei Liangらによる「POST−PLANARIZATION ANNEAL」という名称の2009年10月5日出願の米国仮特許出願第61/248,693号の非仮出願であり、同願の出願日の利益を主張する。同願の開示全体を、あらゆる目的で参照により本明細書に組み込む。
堆積システムの実施形態は、集積回路チップを生産するための、より大型の製造システム内に組み込むことができる。図4は、開示する実施形態による堆積チャンバ、焼成チャンバ、および硬化チャンバからなる1つのそのようなシステム400を示す。この図では、1対のFOUP(前方開口型統一ポッド)402が基板(例えば、直径300mmのウェーハ)を供給し、基板はロボットアーム404によって受け取られ、低圧保持領域406内に配置されてから、ウェーハ処理チャンバ408a〜fの1つに配置される。第2のロボットアーム410を使用して、基板ウェーハを保持領域406から処理チャンバ408a〜fへ輸送し、また戻すことができる。
Claims (17)
- 狭いトレンチおよび凹んだ開放領域を有するパターン付き基板上でケイ素および酸素含有層を処理する方法であって、
前記狭いトレンチ内および前記凹んだ開放領域内を含む前記パターン付き基板上にケイ素および酸素含有層を形成するステップと、
前記ケイ素および酸素含有層を平坦化して、前記狭いトレンチ内に狭い間隙充填部分を残し、前記凹んだ開放領域内に広い間隙充填部分を残すステップであり、前記狭いトレンチの上の前記ケイ素および酸素含有層の一部分を除去して、対応する平坦化前の誘電体インターフェースよりも前記狭いトレンチの近くに配置された平坦化後の誘電体インターフェースを露出させることを含むステップと、
前記平坦化工程の後に前記基板を処理して前記狭い間隙充填部分の密度を増大させるステップであり、前記平坦化後の誘電体インターフェースを前記狭いトレンチにより近く配置することで、前記狭い間隙充填部分では、前記平坦化工程前に前記基板が処理された場合より密度を高くすることができるステップと
を含む方法。 - 前記ケイ素および酸素含有層を形成するステップが、
プラズマ前駆体を遠隔プラズマ領域内へ流してプラズマ流出物を形成することと、
基板処理領域内で前記プラズマ流出物とケイ素含有前駆体の流れを組み合わせることであり、前記ケイ素含有前駆体の前記流れがプラズマによって励起されていないことと、
オゾン含有大気中で前記ケイ素および窒素含有層を硬化させて、前記層をケイ素および酸素含有層に変換することと
を含む、請求項1に記載の方法。 - 前記開放領域が、50nm、100nm、200nm、500nm、および1000nmの1つより大きい幅を有する広いトレンチである、請求項1に記載の方法。
- 前記狭いトレンチが、100nm、70nm、50nm、35nm、25nm、および20nmの1つより小さい幅を有する、請求項1に記載の方法。
- 前記基板を処理して密度を増大させた後の前記広い間隙充填部分のエッチング速度が、前記狭い間隙充填部分のエッチング速度の20%、15%、10%、7%、5%、および3%の1つの範囲内である、請求項1に記載の方法。
- 前記基板を処理して密度を増大させる前記工程が、不活性ガスを含む大気中で前記基板をプラズマに露出させることを含む、請求項1に記載の方法。
- 前記大気が酸素をさらに含む、請求項6に記載の方法。
- 前記大気が水素をさらに含む、請求項7に記載の方法。
- 前記基板を処理して密度を増大させる前記工程が、前記基板を約400℃、500℃、600℃、700℃、または800℃以上でアニールして前記狭い間隙充填部分の密度を増大させることを含む、請求項1に記載の方法。
- 前記ケイ素および酸素含有層を平坦化する前記工程が、前記基板を化学機械研磨することを含む、請求項1に記載の方法。
- 前記ケイ素および酸素含有層を平坦化する前記工程が、前記基板上で平坦化エッチングを実行することを含む、請求項1に記載の方法。
- 前記基板を処理して密度を増大させる前記工程が、前記広い間隙充填部分の密度も増大させる、請求項1に記載の方法。
- 前記基板を処理して密度を増大させる前記工程が、前記基板をプラズマに順次露出させ、次いで前記基板をアニールすることを含む、請求項1に記載の方法。
- 前記基板を処理して密度を増大させる前記工程が、前記基板を順次アニールし、次いで前記基板をプラズマに露出させることを含む、請求項1に記載の方法。
- 500℃、600℃、700℃、および800℃の1つを上回る基板温度で酸素含有大気中の前記ケイ素および酸素含有層をアニールした後で前記ケイ素および酸素含有層を平坦化するステップをさらに含む、請求項1に記載の方法。
- 前記ケイ素および酸素含有層を処理する前記工程後、前記ケイ素および酸素含有層が本質的にケイ素および酸素からなる、請求項1に記載の方法。
- 前記ケイ素および酸素含有層が、スピンオンガラス(SOG)、プラズマ強化CVD(PECVD)酸化ケイ素、流動性の高いCVD(FCVD)酸化ケイ素、減圧CVD(SACVD)酸化ケイ素、TEOSオゾン酸化ケイ素、TEOSオゾンH2O酸化ケイ素、非ドープシリケートガラス(USG)、およびリン酸ホウ素シリケートガラス(BPSG)の少なくとも1つを含む、請求項1に記載の方法。
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US24869309P | 2009-10-05 | 2009-10-05 | |
US61/248,693 | 2009-10-05 | ||
US12/787,791 | 2010-05-26 | ||
US12/787,791 US8329587B2 (en) | 2009-10-05 | 2010-05-26 | Post-planarization densification |
PCT/US2010/050060 WO2011043933A2 (en) | 2009-10-05 | 2010-09-23 | Post-planarization densification |
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Also Published As
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CN102668061A (zh) | 2012-09-12 |
US8329587B2 (en) | 2012-12-11 |
TW201133623A (en) | 2011-10-01 |
WO2011043933A3 (en) | 2011-06-30 |
US20110081782A1 (en) | 2011-04-07 |
KR20120084758A (ko) | 2012-07-30 |
TWI505361B (zh) | 2015-10-21 |
WO2011043933A2 (en) | 2011-04-14 |
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