JP2012514349A5 - - Google Patents
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- Publication number
- JP2012514349A5 JP2012514349A5 JP2011544566A JP2011544566A JP2012514349A5 JP 2012514349 A5 JP2012514349 A5 JP 2012514349A5 JP 2011544566 A JP2011544566 A JP 2011544566A JP 2011544566 A JP2011544566 A JP 2011544566A JP 2012514349 A5 JP2012514349 A5 JP 2012514349A5
- Authority
- JP
- Japan
- Prior art keywords
- particles
- silicon
- silicon particles
- solid particulate
- particulate mixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011856 silicon-based particle Substances 0.000 claims 43
- 239000002245 particle Substances 0.000 claims 32
- 238000000034 method Methods 0.000 claims 30
- 239000000203 mixture Substances 0.000 claims 27
- 239000007787 solid Substances 0.000 claims 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 21
- 229910052710 silicon Inorganic materials 0.000 claims 21
- 239000010703 silicon Substances 0.000 claims 21
- 238000000926 separation method Methods 0.000 claims 15
- 239000000243 solution Substances 0.000 claims 11
- 239000012071 phase Substances 0.000 claims 10
- 230000001419 dependent effect Effects 0.000 claims 9
- 239000012530 fluid Substances 0.000 claims 9
- 230000001050 lubricating effect Effects 0.000 claims 9
- 239000002184 metal Substances 0.000 claims 9
- 229910052751 metal Inorganic materials 0.000 claims 9
- 239000002923 metal particle Substances 0.000 claims 8
- 241000628997 Flos Species 0.000 claims 7
- 238000005119 centrifugation Methods 0.000 claims 6
- 244000309466 calf Species 0.000 claims 5
- 239000002738 chelating agent Substances 0.000 claims 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims 4
- 239000002253 acid Substances 0.000 claims 4
- 229910052799 carbon Inorganic materials 0.000 claims 4
- 238000011109 contamination Methods 0.000 claims 4
- 239000010419 fine particle Substances 0.000 claims 4
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims 3
- 238000001914 filtration Methods 0.000 claims 3
- 229910052740 iodine Inorganic materials 0.000 claims 3
- 239000011630 iodine Substances 0.000 claims 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims 2
- 239000003929 acidic solution Substances 0.000 claims 2
- 239000000443 aerosol Substances 0.000 claims 2
- 239000002131 composite material Substances 0.000 claims 2
- 238000005188 flotation Methods 0.000 claims 2
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims 2
- 150000002739 metals Chemical class 0.000 claims 2
- 238000005406 washing Methods 0.000 claims 2
- 230000002378 acidificating effect Effects 0.000 claims 1
- 238000001035 drying Methods 0.000 claims 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002156 mixing Methods 0.000 claims 1
- 239000012074 organic phase Substances 0.000 claims 1
- 239000008188 pellet Substances 0.000 claims 1
- 239000002244 precipitate Substances 0.000 claims 1
- 238000001556 precipitation Methods 0.000 claims 1
- 238000004062 sedimentation Methods 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 239000002002 slurry Substances 0.000 claims 1
- PBYZMCDFOULPGH-UHFFFAOYSA-N tungstate Chemical compound [O-][W]([O-])(=O)=O PBYZMCDFOULPGH-UHFFFAOYSA-N 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14197408P | 2008-12-31 | 2008-12-31 | |
| US61/141,974 | 2008-12-31 | ||
| PCT/US2009/069616 WO2010078274A2 (en) | 2008-12-31 | 2009-12-28 | Methods to recover and purify silicon particles from saw kerf |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012514349A JP2012514349A (ja) | 2012-06-21 |
| JP2012514349A5 true JP2012514349A5 (enExample) | 2013-01-10 |
| JP5539390B2 JP5539390B2 (ja) | 2014-07-02 |
Family
ID=42062584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011544566A Expired - Fee Related JP5539390B2 (ja) | 2008-12-31 | 2009-12-28 | ソーカーフからシリコン粒子を回収及び浄化する方法 |
Country Status (9)
| Country | Link |
|---|---|
| US (3) | US8231006B2 (enExample) |
| EP (4) | EP2679662A3 (enExample) |
| JP (1) | JP5539390B2 (enExample) |
| KR (1) | KR101538827B1 (enExample) |
| CN (1) | CN102388121B (enExample) |
| MY (1) | MY159778A (enExample) |
| SG (2) | SG172435A1 (enExample) |
| TW (1) | TWI449665B (enExample) |
| WO (1) | WO2010078274A2 (enExample) |
Families Citing this family (59)
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| US7820126B2 (en) * | 2006-08-18 | 2010-10-26 | Iosil Energy Corporation | Method and apparatus for improving the efficiency of purification and deposition of polycrystalline silicon |
| CN102067277B (zh) | 2008-04-11 | 2013-09-18 | 伊奥西尔能源公司 | 从废弃的晶片锯切浆回收硅和碳化硅的方法和设备 |
| WO2010078274A2 (en) * | 2008-12-31 | 2010-07-08 | Memc Electronic Materials, Inc. | Methods to recover and purify silicon particles from saw kerf |
| US20120186572A1 (en) * | 2009-07-28 | 2012-07-26 | Helmuth Treichel | Silicon wafer sawing fluid and process for use thereof |
| WO2011026473A1 (de) * | 2009-09-02 | 2011-03-10 | Guntram Krettek | Verfahren und vorrichtung zur wiederaufbereitung von verbrauchten bearbeitungsslurries |
| TW201144222A (en) * | 2010-06-04 | 2011-12-16 | Hong Jing Environment Company | A method for the silicon recycling |
| DE102010026923A1 (de) * | 2010-07-12 | 2012-01-12 | Centrotherm Sitec Gmbh | Verfahren zur Rückgewinnung von Silizium aus einer Sägesuspension |
| JP5722601B2 (ja) * | 2010-11-30 | 2015-05-20 | サンワバイオテック株式会社 | シリコン切削廃液の処理方法 |
| EP2474390A1 (en) * | 2011-01-06 | 2012-07-11 | Tzer-Huang Guo | Method and Apparatus for Recycling and Treating Waste Liquid that has been used in Cutting Mono Silicon |
| WO2012109459A1 (en) * | 2011-02-09 | 2012-08-16 | Hariharan Alleppey V | Recovery of silicon value from kerf silicon waste |
| CN102351183A (zh) * | 2011-07-11 | 2012-02-15 | 高德耀 | 从硅片切割加工副产物中回收多晶硅的方法 |
| DE102011115081B4 (de) * | 2011-09-19 | 2017-08-31 | Baufeld-Mineralölraffinerie GmbH | Verfahren zur Gewinnung von Solarsilizium aus Sägeabfällen |
| CN102502636B (zh) * | 2011-09-30 | 2013-08-14 | 威海市海王旋流器有限公司 | 一种分离碳化硅废砂浆的装置及工艺 |
| TW201312638A (zh) * | 2012-03-03 | 2013-03-16 | Hong Tung Resource Co Ltd | 矽晶圓切割廢料之處理方法 |
| CN103373731B (zh) * | 2012-04-12 | 2015-07-15 | 江西赛维Ldk太阳能高科技有限公司 | 一种从金刚线切割浆料中回收硅粉的方法 |
| CN102659113B (zh) * | 2012-05-23 | 2014-03-26 | 北京科技大学 | 微孔膜过滤法回收单晶和多晶硅线切割废料中硅粉的方法 |
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| US9499921B2 (en) | 2012-07-30 | 2016-11-22 | Rayton Solar Inc. | Float zone silicon wafer manufacturing system and related process |
| TWI481569B (zh) * | 2012-08-16 | 2015-04-21 | The Total Resource Processing Technology of Waste Cutting Oil | |
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| US9114403B1 (en) * | 2013-06-03 | 2015-08-25 | Douglas Scott de Lange | Gravity recovery system and method for recovery of heavy metals from sands and gravels |
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| CN103599850B (zh) * | 2013-11-28 | 2016-05-04 | 安徽苏源光伏科技有限公司 | 硅片切削废料中碳化硅回收剂及其制备方法 |
| CN103623937B (zh) * | 2013-11-28 | 2016-05-04 | 安徽苏源光伏科技有限公司 | 一种砂浆中硅和碳化硅分离药剂及其制备方法 |
| CN103723678B (zh) * | 2013-12-23 | 2017-02-15 | 北京化工大学 | 对纳米颗粒进行介质切换或按尺寸和/或形貌分离的方法 |
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| DE102014007354B4 (de) | 2014-05-19 | 2019-05-29 | Viridis.iQ GmbH | Verfahren zum Aufbereiten von Rückständen aus der mechanischen Bearbeitung von Siliziumprodukten |
| CN104148166B (zh) * | 2014-08-06 | 2016-06-22 | 昆明理工大学 | 一种复杂碲矿石的选矿方法 |
| TWI686239B (zh) * | 2014-09-23 | 2020-03-01 | 德商巴斯夫歐洲公司 | 使用聚鎢酸鹽分離半導性與金屬性單層壁奈米碳管 |
| JP5850192B1 (ja) * | 2015-03-19 | 2016-02-03 | コニカミノルタ株式会社 | 研磨材の回収方法 |
| CN105013595B (zh) * | 2015-08-07 | 2017-05-24 | 华北理工大学 | 一种低品位蓝晶石生产高纯蓝晶石的选矿方法 |
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| CN105798053B (zh) * | 2016-04-27 | 2018-01-23 | 浙江工业大学 | 一种污染砂石处理装置 |
| CN106010764A (zh) * | 2016-05-19 | 2016-10-12 | 苏州晶樱光电科技有限公司 | 一种硅片切割砂浆回收方法 |
| JP7168288B2 (ja) * | 2017-04-19 | 2022-11-09 | サンパワー コーポレイション | シリコン切粉を電子級ポリシリコンまたは冶金級シリコンにリサイクルする方法 |
| EP3434646A1 (en) * | 2017-07-25 | 2019-01-30 | Total Solar International | Method for recycling sub-micron si-particles from a si wafer production process |
| CN107638956A (zh) * | 2017-09-30 | 2018-01-30 | 江苏闽江矿业有限公司 | 一种双液浮选法除去硅砂中铁的方法 |
| GB201807952D0 (en) * | 2018-05-16 | 2018-07-04 | Norwegian Univ Sci & Tech Ntnu | Silicon and silica production process |
| FR3082512B1 (fr) * | 2018-06-14 | 2022-05-06 | Rosi | Procede de traitement pour le recyclage des dechets de decoupe de lingots de silicium |
| CN108993764A (zh) * | 2018-06-28 | 2018-12-14 | 马钢集团设计研究院有限责任公司 | 一种贫磁铁矿提质降杂的工艺方法 |
| CN108970800B (zh) * | 2018-06-28 | 2021-05-04 | 马钢集团设计研究院有限责任公司 | 一种降低铁精矿中二氧化硅含量的选矿工艺 |
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| CN109759248B (zh) * | 2019-02-28 | 2021-06-01 | 玉溪大红山矿业有限公司 | 一种井下低品位铁矿磁重联合提质降尾的选矿工艺 |
| CN111822154B (zh) * | 2020-07-30 | 2023-10-13 | 济南大学 | 一种从硅渣中浮选硅的方法 |
| KR102647640B1 (ko) * | 2020-10-30 | 2024-03-14 | 하나머티리얼즈(주) | 실리콘 슬러지로부터 고순도 실리콘 분말 회수 및 정제 방법 |
| KR102672043B1 (ko) * | 2021-01-21 | 2024-06-05 | 하나머티리얼즈(주) | 탄화규소 재생 방법 및 이를 이용한 단결정 탄화규소의 제조 방법 |
| CN115193101B (zh) * | 2021-04-09 | 2024-02-13 | 中国矿业大学 | 一种线切冷却液回收方法 |
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| JP2024043122A (ja) * | 2022-09-16 | 2024-03-29 | キオクシア株式会社 | 端材回収装置 |
| CN116177552B (zh) * | 2023-02-22 | 2023-11-17 | 江苏秉盛环保工程有限公司 | 硅片切割液硅粉回收系统及其工艺 |
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| CN100528488C (zh) * | 2007-09-11 | 2009-08-19 | 西安交通大学 | 一种从切割废砂浆中回收硅粉和碳化硅粉的方法 |
| WO2009056153A1 (en) * | 2007-10-30 | 2009-05-07 | Pall Corporation | Method and system for manufacturing wafer-like slices from a substrate material |
| CN102067277B (zh) * | 2008-04-11 | 2013-09-18 | 伊奥西尔能源公司 | 从废弃的晶片锯切浆回收硅和碳化硅的方法和设备 |
| WO2010078274A2 (en) * | 2008-12-31 | 2010-07-08 | Memc Electronic Materials, Inc. | Methods to recover and purify silicon particles from saw kerf |
-
2009
- 2009-12-28 WO PCT/US2009/069616 patent/WO2010078274A2/en not_active Ceased
- 2009-12-28 US US12/647,991 patent/US8231006B2/en not_active Expired - Fee Related
- 2009-12-28 EP EP13174613.3A patent/EP2679662A3/en not_active Withdrawn
- 2009-12-28 EP EP13174612.5A patent/EP2662432A1/en not_active Withdrawn
- 2009-12-28 MY MYPI2011003084A patent/MY159778A/en unknown
- 2009-12-28 JP JP2011544566A patent/JP5539390B2/ja not_active Expired - Fee Related
- 2009-12-28 EP EP09796277A patent/EP2382291A2/en not_active Withdrawn
- 2009-12-28 SG SG2011047933A patent/SG172435A1/en unknown
- 2009-12-28 KR KR1020117017816A patent/KR101538827B1/ko not_active Expired - Fee Related
- 2009-12-28 CN CN2009801575910A patent/CN102388121B/zh not_active Expired - Fee Related
- 2009-12-28 EP EP14158888.9A patent/EP2743335A1/en not_active Withdrawn
- 2009-12-28 SG SG2013022934A patent/SG188935A1/en unknown
- 2009-12-30 TW TW098146020A patent/TWI449665B/zh not_active IP Right Cessation
-
2011
- 2011-10-13 US US13/272,885 patent/US8505733B2/en not_active Expired - Fee Related
- 2011-10-13 US US13/272,847 patent/US8528740B2/en not_active Expired - Fee Related
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