JP2012507141A5 - - Google Patents

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Publication number
JP2012507141A5
JP2012507141A5 JP2011533187A JP2011533187A JP2012507141A5 JP 2012507141 A5 JP2012507141 A5 JP 2012507141A5 JP 2011533187 A JP2011533187 A JP 2011533187A JP 2011533187 A JP2011533187 A JP 2011533187A JP 2012507141 A5 JP2012507141 A5 JP 2012507141A5
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JP
Japan
Prior art keywords
template
substrate
force applied
matching
solidified layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011533187A
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English (en)
Japanese (ja)
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JP2012507141A (ja
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Priority claimed from US12/604,517 external-priority patent/US8652393B2/en
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Publication of JP2012507141A publication Critical patent/JP2012507141A/ja
Publication of JP2012507141A5 publication Critical patent/JP2012507141A5/ja
Pending legal-status Critical Current

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JP2011533187A 2008-10-24 2009-10-26 インプリント・プロセスの分離段階における歪みと動特性の制御 Pending JP2012507141A (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US10813108P 2008-10-24 2008-10-24
US61/108,131 2008-10-24
US10955708P 2008-10-30 2008-10-30
US61/109,557 2008-10-30
US12/604,517 2009-10-23
US12/604,517 US8652393B2 (en) 2008-10-24 2009-10-23 Strain and kinetics control during separation phase of imprint process
PCT/US2009/005803 WO2010047837A2 (en) 2008-10-24 2009-10-26 Strain and kinetics control during separation phase of imprint process

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014080783A Division JP5728602B2 (ja) 2008-10-24 2014-04-10 インプリント・プロセスの分離段階における歪みと動特性の制御

Publications (2)

Publication Number Publication Date
JP2012507141A JP2012507141A (ja) 2012-03-22
JP2012507141A5 true JP2012507141A5 (OSRAM) 2012-12-06

Family

ID=42116691

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2011533187A Pending JP2012507141A (ja) 2008-10-24 2009-10-26 インプリント・プロセスの分離段階における歪みと動特性の制御
JP2014080783A Active JP5728602B2 (ja) 2008-10-24 2014-04-10 インプリント・プロセスの分離段階における歪みと動特性の制御

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2014080783A Active JP5728602B2 (ja) 2008-10-24 2014-04-10 インプリント・プロセスの分離段階における歪みと動特性の制御

Country Status (8)

Country Link
US (3) US8652393B2 (OSRAM)
EP (1) EP2350741B1 (OSRAM)
JP (2) JP2012507141A (OSRAM)
KR (1) KR20110086832A (OSRAM)
CN (1) CN102203671B (OSRAM)
MY (1) MY152446A (OSRAM)
TW (2) TWI405659B (OSRAM)
WO (1) WO2010047837A2 (OSRAM)

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