JP2012176857A - ペロブスカイト型複合酸化物の製造方法 - Google Patents
ペロブスカイト型複合酸化物の製造方法 Download PDFInfo
- Publication number
- JP2012176857A JP2012176857A JP2011039584A JP2011039584A JP2012176857A JP 2012176857 A JP2012176857 A JP 2012176857A JP 2011039584 A JP2011039584 A JP 2011039584A JP 2011039584 A JP2011039584 A JP 2011039584A JP 2012176857 A JP2012176857 A JP 2012176857A
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- Prior art keywords
- perovskite
- complex oxide
- producing
- calcium compound
- ceramic green
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 33
- 239000002131 composite material Substances 0.000 title claims abstract description 18
- 229940043430 calcium compound Drugs 0.000 claims abstract description 28
- 150000001674 calcium compounds Chemical class 0.000 claims abstract description 28
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims abstract description 27
- 239000003985 ceramic capacitor Substances 0.000 claims abstract description 20
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000002002 slurry Substances 0.000 claims abstract description 17
- 238000006243 chemical reaction Methods 0.000 claims abstract description 15
- RQPZNWPYLFFXCP-UHFFFAOYSA-L barium dihydroxide Chemical compound [OH-].[OH-].[Ba+2] RQPZNWPYLFFXCP-UHFFFAOYSA-L 0.000 claims abstract description 13
- 229910001863 barium hydroxide Inorganic materials 0.000 claims abstract description 13
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 claims abstract description 8
- 239000007788 liquid Substances 0.000 claims abstract description 7
- 229910000019 calcium carbonate Inorganic materials 0.000 claims abstract description 4
- 239000011575 calcium Substances 0.000 claims description 79
- 239000000919 ceramic Substances 0.000 claims description 35
- 239000002994 raw material Substances 0.000 claims description 25
- ZCCIPPOKBCJFDN-UHFFFAOYSA-N calcium nitrate Chemical compound [Ca+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ZCCIPPOKBCJFDN-UHFFFAOYSA-N 0.000 claims description 16
- 229910052791 calcium Inorganic materials 0.000 claims description 9
- 229910052788 barium Inorganic materials 0.000 claims description 8
- VSGNNIFQASZAOI-UHFFFAOYSA-L calcium acetate Chemical compound [Ca+2].CC([O-])=O.CC([O-])=O VSGNNIFQASZAOI-UHFFFAOYSA-L 0.000 claims description 8
- 239000001639 calcium acetate Substances 0.000 claims description 8
- 229960005147 calcium acetate Drugs 0.000 claims description 8
- 235000011092 calcium acetate Nutrition 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 238000002156 mixing Methods 0.000 claims description 5
- 239000000654 additive Substances 0.000 claims description 4
- 229910052796 boron Inorganic materials 0.000 claims description 4
- 238000010304 firing Methods 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 230000000996 additive effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 16
- 239000000843 powder Substances 0.000 description 22
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 239000006104 solid solution Substances 0.000 description 9
- 229910002113 barium titanate Inorganic materials 0.000 description 8
- 239000002245 particle Substances 0.000 description 5
- 230000036571 hydration Effects 0.000 description 4
- 238000006703 hydration reaction Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000006467 substitution reaction Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 101100513612 Microdochium nivale MnCO gene Proteins 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 150000001553 barium compounds Chemical class 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- -1 calcium nitrate Chemical class 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
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- C01F11/00—Compounds of calcium, strontium, or barium
-
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- H01G4/1218—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates
- H01G4/1227—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates based on alkaline earth titanates
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- C04B2237/34—Oxidic
- C04B2237/345—Refractory metal oxides
- C04B2237/346—Titania or titanates
Abstract
【解決手段】少なくとも酸化チタン、カルシウム化合物、および水酸化バリウムを、スラリー液中で反応させることにより、ペロブスカイト型複合酸化物を生成させる反応工程を含み、かつ、カルシウム化合物として、炭酸カルシウムを用い、ペロブスカイト型複合酸化物を(Ba1-xCax)mTiO3で表したときに、xが0<x≦0.125の範囲にあるペロブスカイト型複合酸化物を得る。
また、カルシウム化合物として、水溶性のカルシウム化合物を用い、ペロブスカイト型複合酸化物を(Ba1-xCax)mTiO3で表したとき、xが0<x≦0.20の範囲にあるペロブスカイト型複合酸化物を得る。
【選択図】なし
Description
また、特許文献1には、得られた複合酸化物を仮焼することが開示されている(特許文献1の請求項7)。
ABO3(Aは少なくともBaおよびCaを含み、Bは少なくともTiを含む)で表されるペロブスカイト型複合酸化物の製造方法であって、
少なくとも酸化チタン、カルシウム化合物、および水酸化バリウムを、スラリー液中で反応させることによりペロブスカイト型複合酸化物を生成させる反応工程を含み、
前記カルシウム化合物が炭酸カルシウムであり、
前記ペロブスカイト型複合酸化物を(Ba1-xCax)mTiO3で表した場合に、xが0<x≦0.125の範囲にあること
を特徴としている。
ABO3(Aは少なくともBaおよびCaを含み、Bは少なくともTiを含む)で表されるペロブスカイト型複合酸化物の製造方法であって、
少なくとも酸化チタン、カルシウム化合物、および水酸化バリウムを、スラリー液中で反応させる反応工程を含み、
前記カルシウム化合物が水溶性のカルシウム化合物であり、
前記ペロブスカイト型複合酸化物を(Ba1-xCax)mTiO3で表した場合に、xが0<x≦0.20の範囲にあること
を特徴としている。
請求項4記載の製造方法により製造したペロブスカイト型複合酸化物と、添加成分を配合して、セラミックグリーンシート原料を調製する工程と、
前記セラミックグリーンシート原料を成形してセラミックグリーンシートを作製するシート作製工程と、
前記シート作製工程で作製された前記セラミックグリーンシートに、内部電極形成用の導電性ペーストを塗布して内部電極パターンを形成する工程と、
前記内部電極パターンが形成された前記セラミックグリーンシートを所定枚数積層する工程を経て、前記セラミックグリーンシートを介して内部に所定枚数の前記内部電極パターンが積層された構造を有する積層体を作製する工程と、
前記積層体を焼成する工程と
を備えていることを特徴としている。
すなわち、本発明の方法によれば、微細で、結晶性の高い、信頼性に優れたペロブスカイト型複合酸化物を効率よく製造することができる。
すなわち、本発明の方法によれば、微細で、結晶性の高い、信頼性に優れたペロブスカイト型複合酸化物を効率よく製造することができる。
まず、ペロブスカイト型複合酸化物の原料として、下記の(a)〜(e)を用意した。
(a)比表面積が300m2/gの酸化チタン(TiO2)粉末、
(b)比表面積が30m2/gの、水和水を含まない水酸化バリウム(Ba(OH)2)粉末、
(c)CaCO3粉末、
(d)水溶性のカルシウム化合物である酢酸カルシウム((CH3COO)2Ca)、
(e)水溶性のカルシウム化合物である硝酸カルシウム(Ca(NO3)2)
なお、カルシウム原料としては、上記(c),(d),(e)の各原料を択一的に使用した。
それから、スラリーを加熱し、スラリー温度が70℃に達した時点で水酸化バリウム(Ba(OH)2)粉末を投入し、85℃以上で1時間撹拌をしながら反応させた。
得られたチタン酸バリウム粉末について、X線回折法(XRD)を用いて格子定数を測定し、格子容量を算出した。その結果を図1に示す。
すなわち、ペロブスカイト型複合酸化物を(Ba1-xCax)mTiO3で表した場合に、xが0<x≦0.125となるような範囲で、CaがBaTiO3に固溶していることが確認された。
すなわち、ペロブスカイト型複合酸化物を(Ba1-xCax)mTiO3で表した場合に、xが0<x≦0.20となるような範囲で、CaがBaTiO3に固溶していることが確認された。
上述のようにして作製したペロブスカイト型複合酸化物(Ca変性されたチタン酸バリウム)を誘電体層(セラミック層)の原料として用い、積層セラミックコンデンサを作製した。
MgO :1.0モル
Dy2O3 :0.8モル
SiO2 :1.3モル
MnCO3 :0.05モル
となるように秤量し、添加した。
上述のようにして作製した積層セラミックコンデンサについて、周囲温度175℃で、24Vの直流電圧を印加し、加速寿命試験(HALT)を行った。絶縁抵抗(LogIR)が100kΩまで低下した時間を故障時間とし、平均故障発生時間(MTTF)を求めた。その結果を表1および図3に示す。
また、表1において、Ca原料として水溶性Caを用いた場合とは、Ca原料として、上記(d)の水溶性のカルシウム化合物である酢酸カルシウム((CH3COO)2Ca)、および、上記(e)の水溶性のカルシウム化合物である硝酸カルシウム(Ca(NO3)2)を用いた場合を示しており、上記(d),(e)のいずれを用いた場合も、平均故障発生時間(MTTF)に関し、同じ結果が得られたことから、「Ca原料として水溶性Caを用いた場合」として、まとめて表1に示している。
したがって、Ba源としては、水和水を含まない水酸化バリウムを用いることが好ましい。ただし、水和水を含む水酸化バリウムを用いることも可能であることはいうまでもない。
12 セラミック層(誘電体層)
13a,13b 内部電極
14a,14b 積層セラミック素子の端面
15a,15b 外部電極
20 積層セラミックコンデンサ
Claims (5)
- ABO3(Aは少なくともBaおよびCaを含み、Bは少なくともTiを含む)で表されるペロブスカイト型複合酸化物の製造方法であって、
少なくとも酸化チタン、カルシウム化合物、および水酸化バリウムを、スラリー液中で反応させることによりペロブスカイト型複合酸化物を生成させる反応工程を含み、
前記カルシウム化合物が炭酸カルシウムであり、
前記ペロブスカイト型複合酸化物を(Ba1-xCax)mTiO3で表した場合に、xが0<x≦0.125の範囲にあること
を特徴とするペロブスカイト型複合酸化物の製造方法。 - ABO3(Aは少なくともBaおよびCaを含み、Bは少なくともTiを含む)で表されるペロブスカイト型複合酸化物の製造方法であって、
少なくとも酸化チタン、カルシウム化合物、および水酸化バリウムを、スラリー液中で反応させる反応工程を含み、
前記カルシウム化合物が水溶性のカルシウム化合物であり、
前記ペロブスカイト型複合酸化物を(Ba1-xCax)mTiO3で表した場合に、xが0<x≦0.20の範囲にあること
を特徴とするペロブスカイト型複合酸化物の製造方法。 - 前記水溶性のカルシウム化合物が、酢酸カルシウムまたは硝酸カルシウムであることを特徴とする請求項2のペロブスカイト型複合酸化物の製造方法。
- 前記反応工程で生成したペロブスカイト型複合酸化物を熱処理する工程をさらに備えていることを特徴とする請求項1〜3のいずれかに記載のペロブスカイト型複合酸化物の製造方法。
- 請求項4記載の製造方法により製造したペロブスカイト型複合酸化物と、添加成分を配合して、セラミックグリーンシート原料を調製する工程と、
前記セラミックグリーンシート原料を成形してセラミックグリーンシートを作製するシート作製工程と、
前記シート作製工程で作製された前記セラミックグリーンシートに、内部電極形成用の導電性ペーストを塗布して内部電極パターンを形成する工程と、
前記内部電極パターンが形成された前記セラミックグリーンシートを所定枚数積層する工程を経て、前記セラミックグリーンシートを介して内部に所定枚数の前記内部電極パターンが積層された構造を有する積層体を作製する工程と、
前記積層体を焼成する工程と
を備えていることを特徴とする積層セラミックコンデンサの製造方法。
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