JP2011508414A - 光抽出構造体を有する半導体発光装置 - Google Patents
光抽出構造体を有する半導体発光装置 Download PDFInfo
- Publication number
- JP2011508414A JP2011508414A JP2010539028A JP2010539028A JP2011508414A JP 2011508414 A JP2011508414 A JP 2011508414A JP 2010539028 A JP2010539028 A JP 2010539028A JP 2010539028 A JP2010539028 A JP 2010539028A JP 2011508414 A JP2011508414 A JP 2011508414A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor structure
- light
- type region
- refractive index
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/405—Reflective materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0075—Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/10—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a light reflecting structure, e.g. semiconductor Bragg reflector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12041—LED
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0016—Processes relating to electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/24—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate of the light emitting region, e.g. non-planar junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
Abstract
Description
Claims (25)
- n型領域とp型領域との間に配されている発光層を有する半導体構造と、
前記半導体構造の底側に配されていると共に、前記p型領域に電気的に接続されている反射性金属コンタクトと、
前記反射性金属コンタクトの少なくとも一部と前記p型領域との間に配されている材料であって、前記材料の屈折率と前記p型領域の屈折率との間の差が少なくとも0.4である、材料と、
を有する装置において、
前記半導体構造の上側の少なくとも一部は、テクスチャリングされており、前記半導体構造の上側のテクスチャリングされている前記一部と前記反射性金属コンタクトとの間の距離は、5μm未満である、装置。 - 前記材料の屈折率と前記p型領域の屈折率との間の差が少なくとも0.7である、請求項1に記載の装置。
- 前記発光層は、III族窒化物材料を含んでおり、前記反射性金属コンタクトは、銀を含んでいる、請求項1に記載の装置。
- 前記材料は、誘電体、酸化物、半導体、SiO2、SiN、TiO2、Al2O3、ITO、InO、ZnO、CuO、AlInGaN、AlGaN、AlInN、AlxOy、GaxOy及びAlxInyOzのうちの1つである、請求項1に記載の装置。
- 前記半導体構造と前記材料との間の界面は、前記発光層の主平面に対する法線に対して70°よりも大きい角度において、前記界面に入射する光を反射する、請求項1に記載の装置。
- 前記材料と前記p型領域上の前記反射性金属コンタクトとの合成反射率は、前記p型領域と直接的に接触している前記反射性金属コンタクトの反射率より大きい、請求項1に記載の装置。
- 記材料は、前記材料内の往復の損失が、前記p型領域と直接的に接触している前記反射性金属コンタクトから反射される可視スペクトル波の損失よりも少ないように、構成されている、請求項1に記載の装置。
- 前記テクスチャリングされている一部は、フォトニック結晶によってパターニングされている及びランダムに粗くされているものである、請求項1に記載の装置。
- 前記反射性金属コンタクトは、前記材料内に形成される開口によって前記半導体構造と直接的に接触している、請求項1に記載の装置。
- 最近接の開口が、2μm未満の間隔を置かれている、請求項9に記載の装置。
- 前記材料の厚さが500nm未満である、請求項1に記載の装置。
- 前記材料の厚さが40nmよりも大きい、請求項1に記載の装置。
- 前記材料の厚さが前記発光層によって発される光の波長の半分よりも小さい、請求項1に記載の装置。
- 前記材料の厚さは、入射角の範囲において前記材料に入射する光が前記材料内にトラップされるように、前記発光層によって発される光の波長の半分よりも大きく、前記半導体構造は、前記入射角の範囲において発される光の量を最小化するように構成されている、請求項1に記載の装置。
- n型領域とp型領域との間に配されているIII族窒化物発光層を有する半導体構造と、前記半導体構造内に延在している複数のキャビティとを有する装置であって、前記キャビティは、前記発光層の主平面に対する法線に対して70°よりも大きい角度において、前記界面上に入射する光を反射するように構成される、装置。
- 前記半導体構造の底側に配されている反射性金属コンタクトを更に有する請求項15に記載の装置であって、前記複数のキャビティは、前記半導体構造の底側から前記半導体構造の上側に向かって延在している、装置。
- 前記半導体構造の底部に配されている反射性金属コンタクトを更に有する請求項15に記載の装置であって、前記複数のキャビティは、前記半導体構造の上側から前記半導体構造の底側に向かって延在している、装置。
- 前記キャビティは、前記半導体構造内部を進行する光子が、キャビティと相互作用する前に50μmよりも多く進行することができないように、構成されている、請求項15に記載の装置。
- 前記キャビティは、前記発光層の主表面に対して、35°と55°との間にある角度において配向されている側壁を有する、請求項15に記載の装置。
- 前記キャビティの側壁は、誘電材料によって被覆されている、請求項15に記載の装置。
- 最近接キャビティが、10μmと300μmとの間の間隔を置かれている、請求項15に記載の装置。
- 前記キャビティの少なくとも1つは、前記n型領域に電気的コンタクトを作る金属を充填されている、請求項15に記載の装置。
- 前記キャビティの側壁は粗くされている、請求項15に記載の装置。
- 前記キャビティの少なくとも1つは、金属を充填されており、金属を充填されている前記キャビティの側壁は、前記半導体構造から前記金属を電気的に絶縁している誘電体によって被覆されている、請求項15に記載の装置。
- 前記複数のキャビティは、当該装置の如何なる部分の電気的な絶縁も作らない、請求項15に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/960,180 US7985979B2 (en) | 2007-12-19 | 2007-12-19 | Semiconductor light emitting device with light extraction structures |
US11/960,180 | 2007-12-19 | ||
PCT/IB2008/055430 WO2009095748A2 (en) | 2007-12-19 | 2008-12-18 | Semiconductor light emitting device with light extraction structures |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011508414A true JP2011508414A (ja) | 2011-03-10 |
JP5555174B2 JP5555174B2 (ja) | 2014-07-23 |
Family
ID=40787530
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010539028A Active JP5555174B2 (ja) | 2007-12-19 | 2008-12-18 | 光抽出構造体を有する半導体発光装置 |
Country Status (9)
Country | Link |
---|---|
US (6) | US7985979B2 (ja) |
EP (1) | EP2225784B1 (ja) |
JP (1) | JP5555174B2 (ja) |
KR (4) | KR20170024064A (ja) |
CN (1) | CN101904019B (ja) |
BR (1) | BRPI0822034A2 (ja) |
RU (1) | RU2491682C2 (ja) |
TW (1) | TWI499075B (ja) |
WO (1) | WO2009095748A2 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015156498A (ja) * | 2015-03-31 | 2015-08-27 | 株式会社東芝 | 半導体発光素子 |
KR20180003350A (ko) * | 2016-06-30 | 2018-01-09 | 엘지이노텍 주식회사 | 반도체 소자 |
JP2018529230A (ja) * | 2015-08-25 | 2018-10-04 | エルジー イノテック カンパニー リミテッド | 発光素子およびこれを含む発光素子パッケージ |
JP2019512160A (ja) * | 2015-11-20 | 2019-05-09 | ルミレッズ ホールディング ベーフェー | Ledデバイス性能及び信頼性の向上のためのコンタクトエッチング及びメタライゼーション |
JP2019522360A (ja) * | 2016-06-10 | 2019-08-08 | エルジー イノテック カンパニー リミテッド | 半導体素子 |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4829190B2 (ja) * | 2007-08-22 | 2011-12-07 | 株式会社東芝 | 発光素子 |
JP5284036B2 (ja) * | 2007-11-14 | 2013-09-11 | キヤノン株式会社 | 発光装置 |
US7985979B2 (en) * | 2007-12-19 | 2011-07-26 | Koninklijke Philips Electronics, N.V. | Semiconductor light emitting device with light extraction structures |
JP5282503B2 (ja) * | 2008-09-19 | 2013-09-04 | 日亜化学工業株式会社 | 半導体発光素子 |
US20100327300A1 (en) * | 2009-06-25 | 2010-12-30 | Koninklijke Philips Electronics N.V. | Contact for a semiconductor light emitting device |
US8476658B2 (en) * | 2009-11-25 | 2013-07-02 | Jing Jie Dai | Semiconductor light-emitting devices |
KR101761385B1 (ko) * | 2010-07-12 | 2017-08-04 | 엘지이노텍 주식회사 | 발광 소자 |
KR20120040448A (ko) * | 2010-10-19 | 2012-04-27 | 삼성엘이디 주식회사 | 수직형 발광 소자 |
US8985799B2 (en) * | 2010-11-30 | 2015-03-24 | Sharp Kabushiki Kaisha | Lighting device, display device and television device |
DE102011003684A1 (de) | 2011-02-07 | 2012-08-09 | Osram Opto Semiconductors Gmbh | Optoelektronischer Halbleiterchip und Verfahren zur Herstellung eines optoelektronischen Halbleiterchip |
JP5050109B2 (ja) * | 2011-03-14 | 2012-10-17 | 株式会社東芝 | 半導体発光素子 |
TWI411136B (zh) * | 2011-05-10 | 2013-10-01 | Lextar Electronics Corp | 半導體發光結構 |
JP6025367B2 (ja) * | 2011-05-12 | 2016-11-16 | キヤノン株式会社 | 有機el素子 |
JP5117596B2 (ja) * | 2011-05-16 | 2013-01-16 | 株式会社東芝 | 半導体発光素子、ウェーハ、および窒化物半導体結晶層の製造方法 |
CN102299243A (zh) * | 2011-09-14 | 2011-12-28 | 青岛理工大学 | 一种薄膜倒装光子晶体led芯片及其制造方法 |
JP2013073887A (ja) * | 2011-09-29 | 2013-04-22 | Canon Inc | 表示装置 |
CN104040735B (zh) | 2011-10-06 | 2017-08-25 | 皇家飞利浦有限公司 | 半导体发光器件的表面处理 |
US9818912B2 (en) | 2011-12-12 | 2017-11-14 | Sensor Electronic Technology, Inc. | Ultraviolet reflective contact |
WO2013090310A1 (en) | 2011-12-12 | 2013-06-20 | Sensor Electronic Technology, Inc. | Ultraviolet reflective contact |
EP2823515A4 (en) * | 2012-03-06 | 2015-08-19 | Soraa Inc | LIGHT-EMITTING DIODES WITH MATERIAL LAYERS WITH LOW BREAKING INDEX TO REDUCE LIGHT PIPE EFFECTS |
JP5462333B1 (ja) * | 2012-09-21 | 2014-04-02 | 株式会社東芝 | 半導体発光素子及びその製造方法 |
DE102012111573A1 (de) * | 2012-11-29 | 2014-03-13 | Osram Opto Semiconductors Gmbh | Optoelektronisches Halbleiterbauelement und Verfahren zum Herstellen eines optoelektronischen Halbleiterbauelements |
US10276749B2 (en) | 2013-01-09 | 2019-04-30 | Sensor Electronic Technology, Inc. | Ultraviolet reflective rough adhesive contact |
US9768357B2 (en) | 2013-01-09 | 2017-09-19 | Sensor Electronic Technology, Inc. | Ultraviolet reflective rough adhesive contact |
US9287449B2 (en) | 2013-01-09 | 2016-03-15 | Sensor Electronic Technology, Inc. | Ultraviolet reflective rough adhesive contact |
US9425359B2 (en) | 2013-02-04 | 2016-08-23 | Industrial Technology Research Institute | Light emitting diode |
US9548424B2 (en) | 2013-02-04 | 2017-01-17 | Industrial Technology Research Institute | Light emitting diode |
TWI557942B (zh) | 2013-02-04 | 2016-11-11 | 財團法人工業技術研究院 | 發光二極體 |
WO2014141028A1 (en) | 2013-03-13 | 2014-09-18 | Koninklijke Philips N.V. | Method and apparatus for creating a porous reflective contact |
TWI611602B (zh) * | 2013-05-24 | 2018-01-11 | 晶元光電股份有限公司 | 具有高效率反射結構之發光元件 |
TWI575776B (zh) | 2013-05-24 | 2017-03-21 | 晶元光電股份有限公司 | 具有高效率反射結構之發光元件 |
TWI550909B (zh) | 2014-03-21 | 2016-09-21 | A flip chip type light emitting diode and a method for manufacturing the same, and a flip chip type structure thereof | |
KR102125822B1 (ko) * | 2014-07-22 | 2020-06-23 | 가부시키가이샤 플로스피아 | 결정성 반도체막 및 판상체 및 반도체장치 |
JP6156402B2 (ja) | 2015-02-13 | 2017-07-05 | 日亜化学工業株式会社 | 発光装置 |
KR20170091334A (ko) * | 2016-02-01 | 2017-08-09 | 엘지전자 주식회사 | 백라이트 유닛 및 이를 포함하는 디스플레이 장치 |
US11348908B2 (en) | 2016-08-17 | 2022-05-31 | The Regents Of The University Of California | Contact architectures for tunnel junction devices |
US11211525B2 (en) | 2017-05-01 | 2021-12-28 | Ohio State Innovation Foundation | Tunnel junction ultraviolet light emitting diodes with enhanced light extraction efficiency |
US11112652B2 (en) * | 2018-12-11 | 2021-09-07 | Lg Display Co., Ltd. | Backlight unit and display device including the same technical field |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07254732A (ja) * | 1994-03-15 | 1995-10-03 | Toshiba Corp | 半導体発光装置 |
JPH10163536A (ja) * | 1996-11-27 | 1998-06-19 | Sharp Corp | Led表示装置およびその製造方法 |
JP2004095959A (ja) * | 2002-09-02 | 2004-03-25 | Nichia Chem Ind Ltd | 窒化物半導体発光素子 |
JP2004530289A (ja) * | 2001-02-23 | 2004-09-30 | ニトロネックス・コーポレーション | バックサイドビアを含む窒化ガリウム材料デバイスおよび方法 |
JP2005252253A (ja) * | 2004-03-01 | 2005-09-15 | Shogen Koden Kofun Yugenkoshi | 小型反射器を有するフリップチップ発光装置 |
US6958498B2 (en) * | 2002-09-27 | 2005-10-25 | Emcore Corporation | Optimized contact design for flip-chip LED |
JP2005317959A (ja) * | 2004-03-19 | 2005-11-10 | Lumileds Lighting Us Llc | 光結晶発光装置 |
JP2005347728A (ja) * | 2004-06-03 | 2005-12-15 | Samsung Electro Mech Co Ltd | フリップチップ用窒化物半導体発光素子 |
JP2006245058A (ja) * | 2005-02-28 | 2006-09-14 | Mitsubishi Cable Ind Ltd | GaN系発光ダイオードおよび発光装置 |
JP2007173579A (ja) * | 2005-12-22 | 2007-07-05 | Matsushita Electric Works Ltd | 半導体発光素子およびその製造方法 |
JP2007273975A (ja) * | 2006-03-10 | 2007-10-18 | Matsushita Electric Works Ltd | 発光素子 |
JP2007529879A (ja) * | 2004-03-18 | 2007-10-25 | 松下電器産業株式会社 | 半導体発光装置、照明モジュール、照明装置、表面実装部品、および表示装置 |
Family Cites Families (72)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5376580A (en) | 1993-03-19 | 1994-12-27 | Hewlett-Packard Company | Wafer bonding of light emitting diode layers |
US5400354A (en) | 1994-02-08 | 1995-03-21 | Ludowise; Michael | Laminated upper cladding structure for a light-emitting device |
DE19629920B4 (de) | 1995-08-10 | 2006-02-02 | LumiLeds Lighting, U.S., LLC, San Jose | Licht-emittierende Diode mit einem nicht-absorbierenden verteilten Braggreflektor |
US5917202A (en) | 1995-12-21 | 1999-06-29 | Hewlett-Packard Company | Highly reflective contacts for light emitting semiconductor devices |
US5779924A (en) | 1996-03-22 | 1998-07-14 | Hewlett-Packard Company | Ordered interface texturing for a light emitting device |
US6091085A (en) | 1998-02-19 | 2000-07-18 | Agilent Technologies, Inc. | GaN LEDs with improved output coupling efficiency |
US6903376B2 (en) | 1999-12-22 | 2005-06-07 | Lumileds Lighting U.S., Llc | Selective placement of quantum wells in flipchip light emitting diodes for improved light extraction |
US6573537B1 (en) | 1999-12-22 | 2003-06-03 | Lumileds Lighting, U.S., Llc | Highly reflective ohmic contacts to III-nitride flip-chip LEDs |
US6277665B1 (en) * | 2000-01-10 | 2001-08-21 | United Epitaxy Company, Ltd. | Fabrication process of semiconductor light-emitting device with enhanced external quantum efficiency |
TW465123B (en) * | 2000-02-02 | 2001-11-21 | Ind Tech Res Inst | High power white light LED |
TWI292227B (en) | 2000-05-26 | 2008-01-01 | Osram Opto Semiconductors Gmbh | Light-emitting-dioed-chip with a light-emitting-epitaxy-layer-series based on gan |
KR100632760B1 (ko) * | 2001-03-21 | 2006-10-11 | 미츠비시 덴센 고교 가부시키가이샤 | 반도체 발광 소자 |
US6630689B2 (en) | 2001-05-09 | 2003-10-07 | Lumileds Lighting, U.S. Llc | Semiconductor LED flip-chip with high reflectivity dielectric coating on the mesa |
US6455878B1 (en) | 2001-05-15 | 2002-09-24 | Lumileds Lighting U.S., Llc | Semiconductor LED flip-chip having low refractive index underfill |
US6946788B2 (en) | 2001-05-29 | 2005-09-20 | Toyoda Gosei Co., Ltd. | Light-emitting element |
JP3767420B2 (ja) * | 2001-05-29 | 2006-04-19 | 豊田合成株式会社 | 発光素子 |
TW564584B (en) * | 2001-06-25 | 2003-12-01 | Toshiba Corp | Semiconductor light emitting device |
JP3659201B2 (ja) * | 2001-07-11 | 2005-06-15 | ソニー株式会社 | 半導体発光素子、画像表示装置、照明装置及び半導体発光素子の製造方法 |
JP4055503B2 (ja) * | 2001-07-24 | 2008-03-05 | 日亜化学工業株式会社 | 半導体発光素子 |
JP4173445B2 (ja) * | 2001-09-13 | 2008-10-29 | 学校法人 名城大学 | 窒化物半導体基板、その製造方法、およびそれを用いた半導体発光素子 |
US6784462B2 (en) | 2001-12-13 | 2004-08-31 | Rensselaer Polytechnic Institute | Light-emitting diode with planar omni-directional reflector |
TW516248B (en) | 2001-12-21 | 2003-01-01 | Epitech Technology Corp | Nitride light emitting diode with spiral-shaped metal electrode |
US6869820B2 (en) | 2002-01-30 | 2005-03-22 | United Epitaxy Co., Ltd. | High efficiency light emitting diode and method of making the same |
RU2286618C2 (ru) * | 2002-07-16 | 2006-10-27 | Борис Анатольевич Матвеев | Полупроводниковый диод для инфракрасного диапазона спектра |
US6995032B2 (en) | 2002-07-19 | 2006-02-07 | Cree, Inc. | Trench cut light emitting diodes and methods of fabricating same |
US6878969B2 (en) | 2002-07-29 | 2005-04-12 | Matsushita Electric Works, Ltd. | Light emitting device |
WO2004013916A1 (ja) | 2002-08-01 | 2004-02-12 | Nichia Corporation | 半導体発光素子及びその製造方法並びにそれを用いた発光装置 |
US7071494B2 (en) | 2002-12-11 | 2006-07-04 | Lumileds Lighting U.S. Llc | Light emitting device with enhanced optical scattering |
DE10304852B4 (de) | 2003-02-06 | 2007-10-11 | Siemens Ag | Röntgen-Monochromator für eine Röntgeneinrichtung |
US7102175B2 (en) | 2003-04-15 | 2006-09-05 | Matsushita Electric Industrial Co., Ltd. | Semiconductor light-emitting device and method for fabricating the same |
US6969874B1 (en) | 2003-06-12 | 2005-11-29 | Sandia Corporation | Flip-chip light emitting diode with resonant optical microcavity |
TWI312582B (en) | 2003-07-24 | 2009-07-21 | Epistar Corporatio | Led device, flip-chip led package and light reflecting structure |
EP1667241B1 (en) * | 2003-08-19 | 2016-12-07 | Nichia Corporation | Semiconductor light emitting diode and method of manufacturing the same |
CN100459189C (zh) | 2003-11-19 | 2009-02-04 | 日亚化学工业株式会社 | 半导体元件 |
JP2005191099A (ja) * | 2003-12-24 | 2005-07-14 | ▲さん▼圓光電股▲ふん▼有限公司 | 発光ダイオード装置 |
KR100568297B1 (ko) * | 2004-03-30 | 2006-04-05 | 삼성전기주식회사 | 질화물 반도체 발광 소자 및 그 제조 방법 |
US7582910B2 (en) * | 2005-02-28 | 2009-09-01 | The Regents Of The University Of California | High efficiency light emitting diode (LED) with optimized photonic crystal extractor |
KR100896564B1 (ko) | 2004-08-31 | 2009-05-07 | 삼성전기주식회사 | 반사전극 및 이를 구비하는 화합물 반도체 발광소자 |
US7633097B2 (en) * | 2004-09-23 | 2009-12-15 | Philips Lumileds Lighting Company, Llc | Growth of III-nitride light emitting devices on textured substrates |
US7352006B2 (en) | 2004-09-28 | 2008-04-01 | Goldeneye, Inc. | Light emitting diodes exhibiting both high reflectivity and high light extraction |
KR100601138B1 (ko) * | 2004-10-06 | 2006-07-19 | 에피밸리 주식회사 | Ⅲ-질화물 반도체 발광소자 및 그 제조 방법 |
US7274040B2 (en) | 2004-10-06 | 2007-09-25 | Philips Lumileds Lighting Company, Llc | Contact and omnidirectional reflective mirror for flip chipped light emitting devices |
TWI257714B (en) | 2004-10-20 | 2006-07-01 | Arima Optoelectronics Corp | Light-emitting device using multilayer composite metal plated layer as flip-chip electrode |
US7256483B2 (en) | 2004-10-28 | 2007-08-14 | Philips Lumileds Lighting Company, Llc | Package-integrated thin film LED |
KR100862453B1 (ko) | 2004-11-23 | 2008-10-08 | 삼성전기주식회사 | GaN 계 화합물 반도체 발광소자 |
DE102004057802B4 (de) * | 2004-11-30 | 2011-03-24 | Osram Opto Semiconductors Gmbh | Strahlungemittierendes Halbleiterbauelement mit Zwischenschicht |
US20070145386A1 (en) * | 2004-12-08 | 2007-06-28 | Samsung Electro-Mechanics Co., Ltd. | Semiconductor light emitting device and method of manufacturing the same |
KR100631976B1 (ko) | 2005-03-30 | 2006-10-11 | 삼성전기주식회사 | 3족 질화물 발광 소자 |
KR100631981B1 (ko) | 2005-04-07 | 2006-10-11 | 삼성전기주식회사 | 수직구조 3족 질화물 발광 소자 및 그 제조 방법 |
US20070108459A1 (en) | 2005-04-15 | 2007-05-17 | Enfocus Engineering Corp | Methods of Manufacturing Light Emitting Devices |
JP4244953B2 (ja) * | 2005-04-26 | 2009-03-25 | 住友電気工業株式会社 | 発光装置およびその製造方法 |
DE102005048408B4 (de) | 2005-06-10 | 2015-03-19 | Osram Opto Semiconductors Gmbh | Dünnfilm-Halbleiterkörper |
US7592637B2 (en) | 2005-06-17 | 2009-09-22 | Goldeneye, Inc. | Light emitting diodes with reflective electrode and side electrode |
US7384808B2 (en) | 2005-07-12 | 2008-06-10 | Visual Photonics Epitaxy Co., Ltd. | Fabrication method of high-brightness light emitting diode having reflective layer |
US20070018182A1 (en) | 2005-07-20 | 2007-01-25 | Goldeneye, Inc. | Light emitting diodes with improved light extraction and reflectivity |
KR100721150B1 (ko) | 2005-11-24 | 2007-05-22 | 삼성전기주식회사 | 수직 구조 질화갈륨계 발광다이오드 소자 |
EP1995794A4 (en) | 2006-03-10 | 2011-08-31 | Panasonic Elec Works Co Ltd | LIGHT EMITTING DEVICE |
US7573074B2 (en) | 2006-05-19 | 2009-08-11 | Bridgelux, Inc. | LED electrode |
US8110838B2 (en) * | 2006-12-08 | 2012-02-07 | Luminus Devices, Inc. | Spatial localization of light-generating portions in LEDs |
US20090046479A1 (en) * | 2007-08-16 | 2009-02-19 | Philips Lumileds Lighting Company, Llc | Thin Backlight Using Low Profile Side Emitting LED |
KR100921466B1 (ko) * | 2007-08-30 | 2009-10-13 | 엘지전자 주식회사 | 질화물계 발광 소자 및 그 제조방법 |
US20090086508A1 (en) * | 2007-09-27 | 2009-04-02 | Philips Lumileds Lighting Company, Llc | Thin Backlight Using Low Profile Side Emitting LEDs |
KR100900288B1 (ko) * | 2007-10-29 | 2009-05-29 | 엘지전자 주식회사 | 발광 소자 |
TWI381547B (zh) * | 2007-11-14 | 2013-01-01 | Advanced Optoelectronic Tech | 三族氮化合物半導體發光二極體及其製造方法 |
US7985979B2 (en) * | 2007-12-19 | 2011-07-26 | Koninklijke Philips Electronics, N.V. | Semiconductor light emitting device with light extraction structures |
WO2009111790A1 (en) * | 2008-03-07 | 2009-09-11 | Trustees Of Boston University | Optical devices featuring nonpolar textured semiconductor layers |
KR100882240B1 (ko) * | 2008-09-11 | 2009-02-25 | (주)플러스텍 | 질화물 반도체 발광소자 및 제조방법 |
US8008683B2 (en) * | 2008-10-22 | 2011-08-30 | Samsung Led Co., Ltd. | Semiconductor light emitting device |
US9640728B2 (en) * | 2010-02-09 | 2017-05-02 | Epistar Corporation | Optoelectronic device and the manufacturing method thereof |
TWI762930B (zh) * | 2010-02-09 | 2022-05-01 | 晶元光電股份有限公司 | 光電元件 |
KR101692410B1 (ko) * | 2010-07-26 | 2017-01-03 | 삼성전자 주식회사 | 발광소자 및 그 제조방법 |
US9196763B2 (en) * | 2013-10-30 | 2015-11-24 | Terahertz Device Corporation | Efficient light extraction from weakly-coupled dielectric buttes |
-
2007
- 2007-12-19 US US11/960,180 patent/US7985979B2/en active Active
-
2008
- 2008-12-18 EP EP08871746.7A patent/EP2225784B1/en active Active
- 2008-12-18 KR KR1020177002539A patent/KR20170024064A/ko not_active Application Discontinuation
- 2008-12-18 TW TW097149448A patent/TWI499075B/zh active
- 2008-12-18 BR BRPI0822034-4A patent/BRPI0822034A2/pt not_active Application Discontinuation
- 2008-12-18 CN CN2008801213563A patent/CN101904019B/zh active Active
- 2008-12-18 JP JP2010539028A patent/JP5555174B2/ja active Active
- 2008-12-18 KR KR1020187005990A patent/KR20180027622A/ko not_active Application Discontinuation
- 2008-12-18 KR KR1020107015938A patent/KR101600384B1/ko active Application Filing
- 2008-12-18 KR KR1020167005175A patent/KR101702500B1/ko active IP Right Grant
- 2008-12-18 RU RU2010129431/28A patent/RU2491682C2/ru active
- 2008-12-18 WO PCT/IB2008/055430 patent/WO2009095748A2/en active Application Filing
-
2011
- 2011-06-16 US US13/161,541 patent/US8242521B2/en active Active
-
2012
- 2012-07-03 US US13/540,913 patent/US9142726B2/en active Active
-
2015
- 2015-08-27 US US14/837,339 patent/US9935242B2/en active Active
-
2017
- 2017-10-31 US US15/799,406 patent/US10164155B2/en active Active
-
2018
- 2018-12-14 US US16/220,864 patent/US10734553B2/en active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07254732A (ja) * | 1994-03-15 | 1995-10-03 | Toshiba Corp | 半導体発光装置 |
JPH10163536A (ja) * | 1996-11-27 | 1998-06-19 | Sharp Corp | Led表示装置およびその製造方法 |
JP2004530289A (ja) * | 2001-02-23 | 2004-09-30 | ニトロネックス・コーポレーション | バックサイドビアを含む窒化ガリウム材料デバイスおよび方法 |
JP2004095959A (ja) * | 2002-09-02 | 2004-03-25 | Nichia Chem Ind Ltd | 窒化物半導体発光素子 |
US6958498B2 (en) * | 2002-09-27 | 2005-10-25 | Emcore Corporation | Optimized contact design for flip-chip LED |
JP2005252253A (ja) * | 2004-03-01 | 2005-09-15 | Shogen Koden Kofun Yugenkoshi | 小型反射器を有するフリップチップ発光装置 |
JP2007529879A (ja) * | 2004-03-18 | 2007-10-25 | 松下電器産業株式会社 | 半導体発光装置、照明モジュール、照明装置、表面実装部品、および表示装置 |
JP2005317959A (ja) * | 2004-03-19 | 2005-11-10 | Lumileds Lighting Us Llc | 光結晶発光装置 |
JP2005347728A (ja) * | 2004-06-03 | 2005-12-15 | Samsung Electro Mech Co Ltd | フリップチップ用窒化物半導体発光素子 |
JP2006245058A (ja) * | 2005-02-28 | 2006-09-14 | Mitsubishi Cable Ind Ltd | GaN系発光ダイオードおよび発光装置 |
JP2007173579A (ja) * | 2005-12-22 | 2007-07-05 | Matsushita Electric Works Ltd | 半導体発光素子およびその製造方法 |
JP2007273975A (ja) * | 2006-03-10 | 2007-10-18 | Matsushita Electric Works Ltd | 発光素子 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015156498A (ja) * | 2015-03-31 | 2015-08-27 | 株式会社東芝 | 半導体発光素子 |
JP2018529230A (ja) * | 2015-08-25 | 2018-10-04 | エルジー イノテック カンパニー リミテッド | 発光素子およびこれを含む発光素子パッケージ |
JP7148131B2 (ja) | 2015-08-25 | 2022-10-05 | スージョウ レキン セミコンダクター カンパニー リミテッド | 発光素子およびこれを含む発光素子パッケージ |
JP2019512160A (ja) * | 2015-11-20 | 2019-05-09 | ルミレッズ ホールディング ベーフェー | Ledデバイス性能及び信頼性の向上のためのコンタクトエッチング及びメタライゼーション |
JP2019522360A (ja) * | 2016-06-10 | 2019-08-08 | エルジー イノテック カンパニー リミテッド | 半導体素子 |
JP7209339B2 (ja) | 2016-06-10 | 2023-01-20 | スージョウ レキン セミコンダクター カンパニー リミテッド | 半導体素子 |
KR20180003350A (ko) * | 2016-06-30 | 2018-01-09 | 엘지이노텍 주식회사 | 반도체 소자 |
KR102521625B1 (ko) | 2016-06-30 | 2023-04-13 | 쑤저우 레킨 세미컨덕터 컴퍼니 리미티드 | 반도체 소자 |
Also Published As
Publication number | Publication date |
---|---|
US20180053880A1 (en) | 2018-02-22 |
US20190280161A1 (en) | 2019-09-12 |
US9142726B2 (en) | 2015-09-22 |
WO2009095748A2 (en) | 2009-08-06 |
EP2225784A2 (en) | 2010-09-08 |
KR101702500B1 (ko) | 2017-02-06 |
WO2009095748A9 (en) | 2009-11-19 |
TWI499075B (zh) | 2015-09-01 |
TW200937688A (en) | 2009-09-01 |
WO2009095748A3 (en) | 2010-01-07 |
BRPI0822034A2 (pt) | 2015-07-21 |
US7985979B2 (en) | 2011-07-26 |
KR20110085875A (ko) | 2011-07-27 |
US20090159908A1 (en) | 2009-06-25 |
US20150364654A1 (en) | 2015-12-17 |
US20120267668A1 (en) | 2012-10-25 |
US8242521B2 (en) | 2012-08-14 |
KR20180027622A (ko) | 2018-03-14 |
KR101600384B1 (ko) | 2016-03-08 |
JP5555174B2 (ja) | 2014-07-23 |
US10734553B2 (en) | 2020-08-04 |
CN101904019A (zh) | 2010-12-01 |
RU2491682C2 (ru) | 2013-08-27 |
RU2010129431A (ru) | 2012-01-27 |
US9935242B2 (en) | 2018-04-03 |
EP2225784B1 (en) | 2019-09-25 |
US10164155B2 (en) | 2018-12-25 |
US20110241056A1 (en) | 2011-10-06 |
KR20170024064A (ko) | 2017-03-06 |
KR20160030325A (ko) | 2016-03-16 |
CN101904019B (zh) | 2013-08-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5555174B2 (ja) | 光抽出構造体を有する半導体発光装置 | |
US10403796B2 (en) | Light emitting device and method of fabricating the same | |
JP4907842B2 (ja) | 平面全方位リフレクタを有する発光ダイオード | |
US7294862B2 (en) | Photonic crystal light emitting device | |
CN102804417B (zh) | 用于半导体发光器件的接触 | |
JP2002353504A (ja) | メサ上に高反射誘電被覆が施された半導体ledフリップチップ | |
JP2013526051A (ja) | トレンチ及び頂部接点を備えた発光ダイオード | |
KR20110069157A (ko) | 반도체 발광 소자 및 그 제조 방법, 발광장치 | |
TW201505211A (zh) | 發光元件 | |
US9306120B2 (en) | High efficiency light emitting diode | |
JP2011517084A (ja) | 半導体発光装置に関する反射的コンタクト部 | |
JP5123221B2 (ja) | 発光装置 | |
Zhou et al. | High-Efficiency Top-Emitting III-Nitride LEDs | |
CN111971806A (zh) | 用于将贵金属连接到氧化物的光学透明粘合层 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101125 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20111212 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130213 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130314 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130614 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130924 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131217 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140501 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140530 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5555174 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |