JP2019512160A - Ledデバイス性能及び信頼性の向上のためのコンタクトエッチング及びメタライゼーション - Google Patents
Ledデバイス性能及び信頼性の向上のためのコンタクトエッチング及びメタライゼーション Download PDFInfo
- Publication number
- JP2019512160A JP2019512160A JP2018526211A JP2018526211A JP2019512160A JP 2019512160 A JP2019512160 A JP 2019512160A JP 2018526211 A JP2018526211 A JP 2018526211A JP 2018526211 A JP2018526211 A JP 2018526211A JP 2019512160 A JP2019512160 A JP 2019512160A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- light emitting
- emitting device
- semiconductor layer
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 title claims description 20
- 238000001465 metallisation Methods 0.000 title description 3
- 239000004065 semiconductor Substances 0.000 claims abstract description 63
- 229910052751 metal Inorganic materials 0.000 claims abstract description 37
- 239000002184 metal Substances 0.000 claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 claims description 30
- 230000004888 barrier function Effects 0.000 claims description 8
- 229910052709 silver Inorganic materials 0.000 claims description 8
- 239000004332 silver Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 7
- 229910004205 SiNX Inorganic materials 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 230000005012 migration Effects 0.000 claims description 4
- 238000013508 migration Methods 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 3
- 229910003087 TiOx Inorganic materials 0.000 claims description 2
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical compound CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 claims description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 2
- 230000001154 acute effect Effects 0.000 claims 2
- 238000000034 method Methods 0.000 description 38
- 230000008569 process Effects 0.000 description 35
- 238000002955 isolation Methods 0.000 description 17
- 238000000926 separation method Methods 0.000 description 7
- 238000001020 plasma etching Methods 0.000 description 6
- 230000009467 reduction Effects 0.000 description 6
- 150000002739 metals Chemical class 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 1
- -1 titanium tungsten nitride Chemical class 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
- H01L33/382—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape the electrode extending partially in or entirely through the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/10—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a light reflecting structure, e.g. semiconductor Bragg reflector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/405—Reflective materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
- H01L33/46—Reflective coating, e.g. dielectric Bragg reflector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0016—Processes relating to electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0025—Processes relating to coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
Claims (15)
- 発光デバイスであって:
第1半導体層と第2半導体層との間の活性層を含む半導体構造体;
前記半導体構造体の中に伸び、前記第2半導体層及び前記活性層を通って前記第1半導体層まで達するビアであり、前記活性層の発光表面に垂直である前記半導体構造体の内部の垂直壁を有するビア;
前記ビアまで前記第2半導体層の上に延在する反射層;
ビア内部にあり、前記活性層の前記発光表面と鋭角をなす表面をもたらす誘電構造体;及び
前記誘電構造体の上に位置され、前記第1半導体層に接触する金属層;
を有する発光デバイス。 - 請求項1に記載の発光デバイスであり、
前記誘電構造体が、前記ビア内部に傾斜部をもたらす第1誘電構造体と、前記反射層の上に延在し、前記ビア内部の前記傾斜部の上へと延在する第2誘電構造体とを含む、
発光デバイス。 - 請求項1に記載の発光デバイスであり、
前記金属層が、Al, Ti, Au, 及び Niの1つ以上を含む、
発光デバイス。 - 請求項1に記載の発光デバイスであり、
前記反射層が銀を含む、
発光デバイス。 - 請求項4に記載の発光デバイスであり、
前記銀の移動を制御するバリア層を含む発光デバイス。 - 請求項5に記載の発光デバイスであり、
前記バリア層がTiW, TiWN 及び TiNの1つ以上を含む、
発光デバイス。 - 請求項1に記載の発光デバイスであり、
前記誘電構造体がSiNx, SiOx, 及び Si-オキシ窒化物の1つ以上を含む、
発光デバイス。 - 請求項1に記載の発光デバイスであり、
前記反射層がAg, SiOx, NbOx, ZnO, TiOx 及びインジウムスズ酸化物indium tin oxide (ITO)の2つ以上の組合せを含む、
発光デバイス。 - 発光デバイスを製造する方法であって:
第1半導体層と第2半導体層との間の活性層を含む半導体構造体を提供するステップ;
前記第2半導体層及び前記活性層を通ってエッチングをし、前記半導体構造体に壁を有するビアを形成するステップであり、前記壁は前記活性層の発光表面に対して垂直であり、前記第1半導体層にまで延在する、エッチングステップ;
少なくとも前記第1半導体層に接触するための選択的ギャップを有する誘電構造体を用いて前記ビアの内部に傾斜壁部を創設するステップであり、前記傾斜壁部は前記活性層の前記発光表面と鋭角をなす、ステップ;
前記誘電構造体の上に金属層を適用するステップであり、該金属層を介して前記第1半導体層へのコンタクトを可能にするステップ;
を含む発光デバイス製造方法。 - 請求項9に記載の発光デバイス製造方法であり、
前記金属層を介して前記第2半導体層へのコンタクトをも可能にするように前記金属層を適用する、
発光デバイス製造方法。 - 請求項9に記載の発光デバイス製造方法であり、
前記傾斜壁部を創設するステップが、第1誘電層を適用して該第1誘電層をエッチングして前記傾斜壁部を形成するステップを含む、
発光デバイス製造方法。 - 請求項11に記載の発光デバイス製造方法であり、
第2誘電層を適用して該第2誘電層をエッチングして前記第1半導体層及び前記第2半導体層に接触するための選択的ギャップを形成するステップを含む、発光デバイス製造方法。 - 請求項9に記載の発光デバイス製造方法であり、
前記活性層とは反対側の、前記第2半導体層の表面の上に反射層をもたらすステップであり、前記誘電構造体が少なくとも前記反射層の一部を覆う、
発光デバイス製造方法。 - 請求項13に記載の発光デバイス製造方法であり、
前記反射層が銀と、及び該銀の移動を制御するバリア層とを含む、
発光デバイス製造方法。 - 請求項14に記載の発光デバイス製造方法であり、
前記バリア層がTiW, TiWN 及び TiNの1つ以上を含む、
発光デバイス製造方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562258318P | 2015-11-20 | 2015-11-20 | |
US62/258,318 | 2015-11-20 | ||
EP16159678.8 | 2016-03-10 | ||
EP16159678 | 2016-03-10 | ||
PCT/US2016/061816 WO2017087315A1 (en) | 2015-11-20 | 2016-11-14 | Contact etching and metallization for improved led device performance and reliability |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019512160A true JP2019512160A (ja) | 2019-05-09 |
JP6865751B2 JP6865751B2 (ja) | 2021-04-28 |
Family
ID=55524243
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018526211A Active JP6865751B2 (ja) | 2015-11-20 | 2016-11-14 | Ledデバイス性能及び信頼性の向上のためのコンタクトエッチング及びメタライゼーション |
Country Status (7)
Country | Link |
---|---|
US (2) | US10529894B2 (ja) |
EP (1) | EP3378107B1 (ja) |
JP (1) | JP6865751B2 (ja) |
KR (1) | KR20180087302A (ja) |
CN (1) | CN109478584B (ja) |
TW (1) | TWI701846B (ja) |
WO (1) | WO2017087315A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3068514B1 (fr) * | 2017-06-30 | 2019-08-09 | Aledia | Dispositif optoelectronique |
WO2021203407A1 (en) * | 2020-04-10 | 2021-10-14 | Innoscience (Zhuhai) Technology Co., Ltd. | Semiconductor devices and methods of fabricating the same |
WO2022126611A1 (zh) * | 2020-12-18 | 2022-06-23 | 天津三安光电有限公司 | 一种半导体发光元件 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03151638A (ja) * | 1989-11-08 | 1991-06-27 | Nissan Motor Co Ltd | 半導体集積回路の製造方法 |
JPH04162719A (ja) * | 1990-10-26 | 1992-06-08 | Yamaha Corp | 半導体装置 |
JPH0521615A (ja) * | 1991-07-10 | 1993-01-29 | Ricoh Co Ltd | 半導体装置とその製造方法 |
US20070096130A1 (en) * | 2005-06-09 | 2007-05-03 | Philips Lumileds Lighting Company, Llc | LED Assembly Having Maximum Metal Support for Laser Lift-Off of Growth Substrate |
DE102007062046A1 (de) * | 2007-12-21 | 2009-06-25 | Osram Opto Semiconductors Gmbh | Lichtemittierende Bauelementeanordnung, lichtemittierendes Bauelementes sowie Verfahren zum Herstellen einer Bauelementeanordnung |
JP2009238932A (ja) * | 2008-03-26 | 2009-10-15 | Panasonic Electric Works Co Ltd | 半導体発光素子およびそれを用いる照明装置 |
JP2011508414A (ja) * | 2007-12-19 | 2011-03-10 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 光抽出構造体を有する半導体発光装置 |
CN104134734A (zh) * | 2014-08-01 | 2014-11-05 | 晶科电子(广州)有限公司 | 一种出光效率高的倒装led芯片、及其led器件和制备方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6958498B2 (en) | 2002-09-27 | 2005-10-25 | Emcore Corporation | Optimized contact design for flip-chip LED |
US7064353B2 (en) | 2004-05-26 | 2006-06-20 | Philips Lumileds Lighting Company, Llc | LED chip with integrated fast switching diode for ESD protection |
JP4470819B2 (ja) * | 2005-06-17 | 2010-06-02 | セイコーエプソン株式会社 | 光素子 |
JP4353232B2 (ja) * | 2006-10-24 | 2009-10-28 | ソニー株式会社 | 発光素子 |
JP2010512662A (ja) * | 2006-12-11 | 2010-04-22 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア | 透明発光ダイオード |
US20120004923A2 (en) | 2009-09-03 | 2012-01-05 | Gaines Crystal | Elecronic image display flag |
KR20110035783A (ko) * | 2009-09-30 | 2011-04-06 | 주식회사 하이닉스반도체 | 상변화 메모리 소자 제조 방법 |
TWI433357B (zh) * | 2010-08-26 | 2014-04-01 | Huga Optotech Inc | 高亮度發光二極體結構 |
US9231074B2 (en) | 2013-07-19 | 2016-01-05 | Globalfoundries Inc. | Bipolar junction transistors with an air gap in the shallow trench isolation |
DE102014102029A1 (de) | 2014-02-18 | 2015-08-20 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung von Halbleiterbauelementen und Halbleiterbauelement |
KR102323686B1 (ko) * | 2014-10-21 | 2021-11-11 | 서울바이오시스 주식회사 | 발광 소자 및 그 제조 방법 |
WO2016076637A1 (en) * | 2014-11-12 | 2016-05-19 | Seoul Viosys Co., Ltd. | Light emitting device |
-
2016
- 2016-11-14 WO PCT/US2016/061816 patent/WO2017087315A1/en active Application Filing
- 2016-11-14 KR KR1020187017329A patent/KR20180087302A/ko active IP Right Grant
- 2016-11-14 EP EP16813257.9A patent/EP3378107B1/en active Active
- 2016-11-14 JP JP2018526211A patent/JP6865751B2/ja active Active
- 2016-11-14 CN CN201680079661.5A patent/CN109478584B/zh active Active
- 2016-11-14 US US15/777,255 patent/US10529894B2/en active Active
- 2016-11-18 TW TW105137822A patent/TWI701846B/zh active
-
2020
- 2020-01-07 US US16/736,424 patent/US10916683B2/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03151638A (ja) * | 1989-11-08 | 1991-06-27 | Nissan Motor Co Ltd | 半導体集積回路の製造方法 |
JPH04162719A (ja) * | 1990-10-26 | 1992-06-08 | Yamaha Corp | 半導体装置 |
JPH0521615A (ja) * | 1991-07-10 | 1993-01-29 | Ricoh Co Ltd | 半導体装置とその製造方法 |
US20070096130A1 (en) * | 2005-06-09 | 2007-05-03 | Philips Lumileds Lighting Company, Llc | LED Assembly Having Maximum Metal Support for Laser Lift-Off of Growth Substrate |
JP2011508414A (ja) * | 2007-12-19 | 2011-03-10 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 光抽出構造体を有する半導体発光装置 |
DE102007062046A1 (de) * | 2007-12-21 | 2009-06-25 | Osram Opto Semiconductors Gmbh | Lichtemittierende Bauelementeanordnung, lichtemittierendes Bauelementes sowie Verfahren zum Herstellen einer Bauelementeanordnung |
JP2009238932A (ja) * | 2008-03-26 | 2009-10-15 | Panasonic Electric Works Co Ltd | 半導体発光素子およびそれを用いる照明装置 |
CN104134734A (zh) * | 2014-08-01 | 2014-11-05 | 晶科电子(广州)有限公司 | 一种出光效率高的倒装led芯片、及其led器件和制备方法 |
Also Published As
Publication number | Publication date |
---|---|
EP3378107A1 (en) | 2018-09-26 |
JP6865751B2 (ja) | 2021-04-28 |
US10916683B2 (en) | 2021-02-09 |
TWI701846B (zh) | 2020-08-11 |
US10529894B2 (en) | 2020-01-07 |
EP3378107B1 (en) | 2021-02-24 |
WO2017087315A1 (en) | 2017-05-26 |
TW201725757A (zh) | 2017-07-16 |
US20200144454A1 (en) | 2020-05-07 |
KR20180087302A (ko) | 2018-08-01 |
CN109478584B (zh) | 2021-07-20 |
US20180337308A1 (en) | 2018-11-22 |
CN109478584A (zh) | 2019-03-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102668132B (zh) | 发光二极管(led)晶圆的前端划线以及结果器件 | |
US9685591B2 (en) | Method for producing an optoelectronic semiconductor component and optoelectronic semiconductor component | |
TWI524550B (zh) | 用於製造光電半導體晶片之方法及光電半導體晶片 | |
CN102057505B (zh) | 光电子器件及其制造的方法 | |
KR101806227B1 (ko) | 광전자 반도체 칩 | |
US10916683B2 (en) | Contact etching and metallization for improved LED device performance and reliability | |
TWI478391B (zh) | 發光二極體晶片及製造發光二極體晶片之方法 | |
JP2018533220A (ja) | オプトエレクトロニクス半導体部品およびオプトエレクトロニクス半導体部品の製造方法 | |
CN106062976B (zh) | 用于制造半导体器件的方法和半导体器件 | |
CN103098242A (zh) | 发光二极管芯片 | |
EP2426741B1 (en) | Method of fabricating a semiconductor light emitting device | |
KR20140121608A (ko) | 발광 다이오드의 반사전극, 이를 포함하는 발광 다이오드 칩, 및 이들의 제조방법들 | |
KR20140147137A (ko) | W-메사 스트리트를 형성하기 위한 방법 및 장치 | |
JP2018147940A (ja) | 受光素子の製造方法 | |
US9159871B2 (en) | Light-emitting device having a reflective structure and a metal mesa and the manufacturing method thereof | |
US10153400B2 (en) | Optoelectronic semiconductor device, method of producing an electrical contact and method of producing a semiconductor device | |
US10224457B2 (en) | Light emitting device with trench beneath a top contact | |
US10573787B2 (en) | Light-emitting semiconductor chip and method for producing a light-emitting semiconductor chip | |
KR101127712B1 (ko) | 자기 정렬 오믹 콘택을 가지는 발광 소자들 및 그 제조방법 | |
TW201327914A (zh) | 晶圓級發光二極體結構之製造方法 | |
JP2020123609A (ja) | 発光素子の製造方法 | |
KR20120040446A (ko) | 수직형 발광소자 및 그 제조방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180719 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190712 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200722 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200811 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201110 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210209 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20210310 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210406 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6865751 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |