JP2011247812A5 - - Google Patents

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Publication number
JP2011247812A5
JP2011247812A5 JP2010122959A JP2010122959A JP2011247812A5 JP 2011247812 A5 JP2011247812 A5 JP 2011247812A5 JP 2010122959 A JP2010122959 A JP 2010122959A JP 2010122959 A JP2010122959 A JP 2010122959A JP 2011247812 A5 JP2011247812 A5 JP 2011247812A5
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JP
Japan
Prior art keywords
region
physical quantity
quantity sensor
detection signal
axis
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Application number
JP2010122959A
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English (en)
Japanese (ja)
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JP5527019B2 (ja
JP2011247812A (ja
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Application filed filed Critical
Priority claimed from JP2010122959A external-priority patent/JP5527019B2/ja
Priority to JP2010122959A priority Critical patent/JP5527019B2/ja
Priority to KR1020110048430A priority patent/KR101300576B1/ko
Priority to TW104101215A priority patent/TWI524071B/zh
Priority to TW100118352A priority patent/TWI471567B/zh
Priority to US13/116,455 priority patent/US8736254B2/en
Priority to EP11167631A priority patent/EP2390671A3/en
Priority to CN2011101410029A priority patent/CN102313821B/zh
Publication of JP2011247812A publication Critical patent/JP2011247812A/ja
Publication of JP2011247812A5 publication Critical patent/JP2011247812A5/ja
Priority to US14/252,023 priority patent/US9157927B2/en
Publication of JP5527019B2 publication Critical patent/JP5527019B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010122959A 2010-05-28 2010-05-28 物理量センサーおよび電子機器 Expired - Fee Related JP5527019B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2010122959A JP5527019B2 (ja) 2010-05-28 2010-05-28 物理量センサーおよび電子機器
KR1020110048430A KR101300576B1 (ko) 2010-05-28 2011-05-23 물리량 센서 및 전자 기기
TW104101215A TWI524071B (zh) 2010-05-28 2011-05-25 Physical quantity sensor and electronic machine
TW100118352A TWI471567B (zh) 2010-05-28 2011-05-25 Inertial sensors and electronic machines
US13/116,455 US8736254B2 (en) 2010-05-28 2011-05-26 Physical quantity sensor and electronic apparatus
EP11167631A EP2390671A3 (en) 2010-05-28 2011-05-26 Physical quantity sensor and electronic apparatus
CN2011101410029A CN102313821B (zh) 2010-05-28 2011-05-27 物理量传感器以及电子设备
US14/252,023 US9157927B2 (en) 2010-05-28 2014-04-14 Physical quantity sensor and electronic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010122959A JP5527019B2 (ja) 2010-05-28 2010-05-28 物理量センサーおよび電子機器

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014085256A Division JP5831582B2 (ja) 2014-04-17 2014-04-17 物理量センサーおよび電子機器

Publications (3)

Publication Number Publication Date
JP2011247812A JP2011247812A (ja) 2011-12-08
JP2011247812A5 true JP2011247812A5 (enExample) 2013-06-27
JP5527019B2 JP5527019B2 (ja) 2014-06-18

Family

ID=44117957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010122959A Expired - Fee Related JP5527019B2 (ja) 2010-05-28 2010-05-28 物理量センサーおよび電子機器

Country Status (6)

Country Link
US (2) US8736254B2 (enExample)
EP (1) EP2390671A3 (enExample)
JP (1) JP5527019B2 (enExample)
KR (1) KR101300576B1 (enExample)
CN (1) CN102313821B (enExample)
TW (2) TWI471567B (enExample)

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US9075079B2 (en) * 2013-03-07 2015-07-07 MCube Inc. Method and structure of an integrated MEMS inertial sensor device using electrostatic quadrature-cancellation
US10046964B2 (en) 2013-03-07 2018-08-14 MCube Inc. MEMS structure with improved shielding and method
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JP6150056B2 (ja) * 2013-07-24 2017-06-21 セイコーエプソン株式会社 機能素子、電子機器、および移動体
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JP2016176834A (ja) * 2015-03-20 2016-10-06 セイコーエプソン株式会社 ジャイロセンサー、電子機器、および移動体
TWI676029B (zh) * 2015-05-20 2019-11-01 美商路梅戴尼科技公司 用於決定慣性參數之方法及系統
US9797921B2 (en) * 2015-09-03 2017-10-24 Nxp Usa, Inc. Compensation and calibration of multiple mass MEMS sensor
WO2017051243A1 (en) * 2015-09-25 2017-03-30 Murata Manufacturing Co., Ltd. Improved microelectromechanical accelerometer device
JP6468167B2 (ja) * 2015-11-03 2019-02-13 株式会社デンソー 力学量センサ
JP6705168B2 (ja) * 2015-12-28 2020-06-03 セイコーエプソン株式会社 センサー用基板、物理量検出センサー、加速度センサー、電子機器、および移動体
DE102016207866B4 (de) 2016-05-09 2025-02-27 Robert Bosch Gmbh Mikromechanischer Sensor und Verfahren zum Herstellen eines mikromechanischen Sensors
US10234477B2 (en) 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer
US10239746B2 (en) * 2016-11-11 2019-03-26 Analog Devices, Inc. Vertical stopper for capping MEMS devices
JP6897224B2 (ja) * 2017-03-27 2021-06-30 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
CN107421526B (zh) * 2017-07-04 2020-05-05 东南大学 一种仿生双轴毛发传感器装置
US11820648B2 (en) * 2018-05-15 2023-11-21 Murata Manufacturing Co., Ltd. Vibration damping in MEMS acceleration sensors
RU204922U1 (ru) * 2019-03-19 2021-06-17 Российская Федерация, От Имени Которой Выступает Министерство Промышленности И Торговли Российской Федерации Чувствительный элемент трехосевого микромеханического акселерометра
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JP2023146375A (ja) 2022-03-29 2023-10-12 セイコーエプソン株式会社 物理量センサー及び慣性計測装置

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