JP5527019B2 - 物理量センサーおよび電子機器 - Google Patents

物理量センサーおよび電子機器 Download PDF

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Publication number
JP5527019B2
JP5527019B2 JP2010122959A JP2010122959A JP5527019B2 JP 5527019 B2 JP5527019 B2 JP 5527019B2 JP 2010122959 A JP2010122959 A JP 2010122959A JP 2010122959 A JP2010122959 A JP 2010122959A JP 5527019 B2 JP5527019 B2 JP 5527019B2
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JP
Japan
Prior art keywords
region
physical quantity
quantity sensor
oscillator
acceleration
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Expired - Fee Related
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JP2010122959A
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English (en)
Japanese (ja)
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JP2011247812A (ja
JP2011247812A5 (enExample
Inventor
啓 金本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2010122959A priority Critical patent/JP5527019B2/ja
Priority to KR1020110048430A priority patent/KR101300576B1/ko
Priority to TW104101215A priority patent/TWI524071B/zh
Priority to TW100118352A priority patent/TWI471567B/zh
Priority to US13/116,455 priority patent/US8736254B2/en
Priority to EP11167631A priority patent/EP2390671A3/en
Priority to CN2011101410029A priority patent/CN102313821B/zh
Publication of JP2011247812A publication Critical patent/JP2011247812A/ja
Publication of JP2011247812A5 publication Critical patent/JP2011247812A5/ja
Priority to US14/252,023 priority patent/US9157927B2/en
Application granted granted Critical
Publication of JP5527019B2 publication Critical patent/JP5527019B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
JP2010122959A 2010-05-28 2010-05-28 物理量センサーおよび電子機器 Expired - Fee Related JP5527019B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2010122959A JP5527019B2 (ja) 2010-05-28 2010-05-28 物理量センサーおよび電子機器
KR1020110048430A KR101300576B1 (ko) 2010-05-28 2011-05-23 물리량 센서 및 전자 기기
TW100118352A TWI471567B (zh) 2010-05-28 2011-05-25 Inertial sensors and electronic machines
TW104101215A TWI524071B (zh) 2010-05-28 2011-05-25 Physical quantity sensor and electronic machine
US13/116,455 US8736254B2 (en) 2010-05-28 2011-05-26 Physical quantity sensor and electronic apparatus
EP11167631A EP2390671A3 (en) 2010-05-28 2011-05-26 Physical quantity sensor and electronic apparatus
CN2011101410029A CN102313821B (zh) 2010-05-28 2011-05-27 物理量传感器以及电子设备
US14/252,023 US9157927B2 (en) 2010-05-28 2014-04-14 Physical quantity sensor and electronic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010122959A JP5527019B2 (ja) 2010-05-28 2010-05-28 物理量センサーおよび電子機器

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014085256A Division JP5831582B2 (ja) 2014-04-17 2014-04-17 物理量センサーおよび電子機器

Publications (3)

Publication Number Publication Date
JP2011247812A JP2011247812A (ja) 2011-12-08
JP2011247812A5 JP2011247812A5 (enExample) 2013-06-27
JP5527019B2 true JP5527019B2 (ja) 2014-06-18

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JP2010122959A Expired - Fee Related JP5527019B2 (ja) 2010-05-28 2010-05-28 物理量センサーおよび電子機器

Country Status (6)

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US (2) US8736254B2 (enExample)
EP (1) EP2390671A3 (enExample)
JP (1) JP5527019B2 (enExample)
KR (1) KR101300576B1 (enExample)
CN (1) CN102313821B (enExample)
TW (2) TWI471567B (enExample)

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JP5527019B2 (ja) * 2010-05-28 2014-06-18 セイコーエプソン株式会社 物理量センサーおよび電子機器
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TWI616395B (zh) * 2012-01-12 2018-03-01 村田電子公司 加速度感測器結構和其之使用
JP5999302B2 (ja) 2012-02-09 2016-09-28 セイコーエプソン株式会社 電子デバイスおよびその製造方法、並びに電子機器
JP5983912B2 (ja) 2012-02-09 2016-09-06 セイコーエプソン株式会社 電子デバイスおよびその製造方法、並びに電子機器
JP2013181855A (ja) * 2012-03-02 2013-09-12 Seiko Epson Corp 物理量センサーおよび電子機器
TWI547808B (zh) 2012-04-20 2016-09-01 緯創資通股份有限公司 資訊交換方法及資訊交換系統
JP6002481B2 (ja) * 2012-07-06 2016-10-05 日立オートモティブシステムズ株式会社 慣性センサ
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JP5799929B2 (ja) * 2012-10-02 2015-10-28 株式会社村田製作所 加速度センサ
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US10046964B2 (en) 2013-03-07 2018-08-14 MCube Inc. MEMS structure with improved shielding and method
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JP6146566B2 (ja) * 2013-08-06 2017-06-14 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
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JP2016176834A (ja) * 2015-03-20 2016-10-06 セイコーエプソン株式会社 ジャイロセンサー、電子機器、および移動体
US10234476B2 (en) 2015-05-20 2019-03-19 Google Llc Extracting inertial information from nonlinear periodic signals
US9797921B2 (en) * 2015-09-03 2017-10-24 Nxp Usa, Inc. Compensation and calibration of multiple mass MEMS sensor
CN108450010B (zh) * 2015-09-25 2021-01-05 株式会社村田制作所 改进的微机电加速计装置
JP6468167B2 (ja) * 2015-11-03 2019-02-13 株式会社デンソー 力学量センサ
JP6705168B2 (ja) * 2015-12-28 2020-06-03 セイコーエプソン株式会社 センサー用基板、物理量検出センサー、加速度センサー、電子機器、および移動体
DE102016207866B4 (de) * 2016-05-09 2025-02-27 Robert Bosch Gmbh Mikromechanischer Sensor und Verfahren zum Herstellen eines mikromechanischen Sensors
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Also Published As

Publication number Publication date
US20140224017A1 (en) 2014-08-14
US8736254B2 (en) 2014-05-27
CN102313821B (zh) 2013-03-20
KR101300576B1 (ko) 2013-08-27
TW201514498A (zh) 2015-04-16
US20110291644A1 (en) 2011-12-01
TWI524071B (zh) 2016-03-01
US9157927B2 (en) 2015-10-13
JP2011247812A (ja) 2011-12-08
TW201200876A (en) 2012-01-01
EP2390671A2 (en) 2011-11-30
KR20110131106A (ko) 2011-12-06
CN102313821A (zh) 2012-01-11
EP2390671A3 (en) 2011-12-28
TWI471567B (zh) 2015-02-01

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