JP2011228548A - 強誘電体デバイス - Google Patents
強誘電体デバイス Download PDFInfo
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- JP2011228548A JP2011228548A JP2010098204A JP2010098204A JP2011228548A JP 2011228548 A JP2011228548 A JP 2011228548A JP 2010098204 A JP2010098204 A JP 2010098204A JP 2010098204 A JP2010098204 A JP 2010098204A JP 2011228548 A JP2011228548 A JP 2011228548A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 118
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 118
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- 229910052726 zirconium Inorganic materials 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00642—Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
- B81C1/0065—Mechanical properties
- B81C1/00658—Treatments for improving the stiffness of a vibrating element
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/046—Materials; Selection of thermal materials
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/186—Vibration harvesters
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
- H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/304—Beam type
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
- H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
- H10N30/708—Intermediate layers, e.g. barrier, adhesion or growth control buffer layers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
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- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Micromachines (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
【解決手段】強誘電体デバイスは、シリコン基板10の上記一表面側に形成された下部電極14aと、下部電極14aにおける第1の基板10側とは反対側に形成された強誘電体膜14bと、強誘電体膜14bにおける下部電極14a側とは反対側に形成された上部電極14cとを備え、強誘電体膜14bが、シリコンとは格子定数差のある強誘電体材料により形成されている。下部電極14aの直下に、シリコンに比べて強誘電体膜14bとの格子整合性の良い材料からなる緩衝層14dが設けられ、第1の基板10に、緩衝層14dにおける下部電極14a側とは反対の表面を露出させる空洞10aが形成されている。
【選択図】図1
Description
まず、本実施形態の強誘電体デバイスについて図1〜図3を参照しながら説明する。
本実施形態の強誘電体デバイスの基本構成は実施形態1と略同じであり、図4に示すように、下部電極14a直下の緩衝層(以下、第1の緩衝層と称する)14dとは別に、強誘電体膜14bと下部電極14aとの間に、下部電極14aに比べて強誘電体膜14bとの格子整合性の良い材料からなる第2の緩衝層14eを設けてある点が相違するだけである。なお、実施形態1と同様の構成要素には同一の符号を付して説明を省略する。
以下、本実施形態の強誘電体デバイスについて図5を参照しながら説明する。
10a 空洞
14a 下部電極
14b 強誘電体膜
14c 上部電極
14d 緩衝層(第1の緩衝層)
14e 第2の緩衝層
15 補強層
Claims (5)
- シリコン基板の一表面側に形成された下部電極と、前記下部電極における前記基板側とは反対側に形成された強誘電体膜と、前記強誘電体膜における前記下部電極側とは反対側に形成された上部電極とを備え、前記強誘電体膜が、シリコンとは格子定数差のある強誘電体材料により形成された強誘電体デバイスであって、前記下部電極の直下に、シリコンに比べて前記強誘電体膜との格子整合性の良い材料からなる緩衝層が設けられ、前記基板は、前記緩衝層における前記下部電極側とは反対の表面を露出させる空洞が形成されてなることを特徴とする強誘電体デバイス。
- 前記基板の前記一表面側に、前記緩衝層と前記下部電極と前記強誘電体膜と前記上部電極とを具備する積層構造の少なくとも一部に積層されて前記積層構造を補強する補強層を備えることを特徴とする請求項1記載の強誘電体デバイス。
- 前記緩衝層からなる第1の緩衝層とは別に、前記強誘電体膜と前記下部電極との間に、前記下部電極に比べて前記強誘電体膜との格子整合性の良い材料からなる第2の緩衝層を設けてなることを特徴とする請求項1記載の強誘電体デバイス。
- 前記緩衝層の前記材料が導電性材料であることを特徴とする請求項1ないし請求項3のいずれか1項に記載の強誘電体デバイス。
- 前記強誘電体膜が焦電体膜であり、前記強誘電体膜との格子整合性の良い前記材料の熱伝導率がシリコンの熱伝導率よりも小さいことを特徴とする請求項1ないし請求項4のいずれか1項に記載の強誘電体デバイス。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010098204A JP5632643B2 (ja) | 2010-04-21 | 2010-04-21 | 強誘電体デバイス |
EP11771971.6A EP2562837A4 (en) | 2010-04-21 | 2011-04-18 | FERROELECTRIC DEVICE |
KR1020127027356A KR101382516B1 (ko) | 2010-04-21 | 2011-04-18 | 강유전체 디바이스 |
PCT/JP2011/059521 WO2011132636A1 (ja) | 2010-04-21 | 2011-04-18 | 強誘電体デバイス |
US13/642,208 US20130032906A1 (en) | 2010-04-21 | 2011-04-18 | Ferroelectric device |
CN201180019864.2A CN102859735B (zh) | 2010-04-21 | 2011-04-18 | 强电介质器件 |
TW100113808A TWI437741B (zh) | 2010-04-21 | 2011-04-20 | 鐵電裝置 |
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JP2010098204A JP5632643B2 (ja) | 2010-04-21 | 2010-04-21 | 強誘電体デバイス |
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JP2011228548A true JP2011228548A (ja) | 2011-11-10 |
JP5632643B2 JP5632643B2 (ja) | 2014-11-26 |
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JP2010098204A Expired - Fee Related JP5632643B2 (ja) | 2010-04-21 | 2010-04-21 | 強誘電体デバイス |
Country Status (7)
Country | Link |
---|---|
US (1) | US20130032906A1 (ja) |
EP (1) | EP2562837A4 (ja) |
JP (1) | JP5632643B2 (ja) |
KR (1) | KR101382516B1 (ja) |
CN (1) | CN102859735B (ja) |
TW (1) | TWI437741B (ja) |
WO (1) | WO2011132636A1 (ja) |
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WO2013077301A1 (ja) * | 2011-11-24 | 2013-05-30 | パナソニック株式会社 | 発電装置 |
JP2013123291A (ja) * | 2011-12-09 | 2013-06-20 | Kohei Hayamizu | 振動力発電装置 |
WO2013145260A1 (ja) * | 2012-03-30 | 2013-10-03 | 富士通株式会社 | 電子装置及びその製造方法 |
JP2018174198A (ja) * | 2017-03-31 | 2018-11-08 | ローム株式会社 | 超音波装置 |
WO2018231210A1 (en) * | 2017-06-14 | 2018-12-20 | Intel Corporation | Thin film ferroelectric materials and methods of fabrication thereof |
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US10726231B2 (en) | 2012-11-28 | 2020-07-28 | Invensense, Inc. | Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing |
US9618405B2 (en) | 2014-08-06 | 2017-04-11 | Invensense, Inc. | Piezoelectric acoustic resonator based sensor |
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US10497747B2 (en) * | 2012-11-28 | 2019-12-03 | Invensense, Inc. | Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing |
TWI621242B (zh) * | 2013-09-19 | 2018-04-11 | 伊凡聖斯股份有限公司 | 具有紅外線吸收結構層的氮化鋁(ain)裝置 |
US9574959B2 (en) * | 2014-09-02 | 2017-02-21 | Apple Inc. | Various stress free sensor packages using wafer level supporting die and air gap technique |
US9862592B2 (en) | 2015-03-13 | 2018-01-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | MEMS transducer and method for manufacturing the same |
JP7090249B2 (ja) * | 2019-06-06 | 2022-06-24 | 国立大学法人 東京大学 | 静電型デバイスを製造する製造方法 |
CN113156230B (zh) * | 2021-01-13 | 2022-10-14 | 西安理工大学 | 一种摩擦电能量采集器测试装置及测试方法 |
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- 2011-04-18 CN CN201180019864.2A patent/CN102859735B/zh not_active Expired - Fee Related
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WO2013077301A1 (ja) * | 2011-11-24 | 2013-05-30 | パナソニック株式会社 | 発電装置 |
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JP2018174198A (ja) * | 2017-03-31 | 2018-11-08 | ローム株式会社 | 超音波装置 |
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Also Published As
Publication number | Publication date |
---|---|
CN102859735B (zh) | 2015-04-15 |
KR20120139825A (ko) | 2012-12-27 |
EP2562837A1 (en) | 2013-02-27 |
JP5632643B2 (ja) | 2014-11-26 |
CN102859735A (zh) | 2013-01-02 |
WO2011132636A1 (ja) | 2011-10-27 |
US20130032906A1 (en) | 2013-02-07 |
EP2562837A4 (en) | 2014-03-19 |
KR101382516B1 (ko) | 2014-04-07 |
TWI437741B (zh) | 2014-05-11 |
TW201203638A (en) | 2012-01-16 |
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